JPS60198720A - 液相エピタキシヤル結晶成長装置 - Google Patents
液相エピタキシヤル結晶成長装置Info
- Publication number
- JPS60198720A JPS60198720A JP5670984A JP5670984A JPS60198720A JP S60198720 A JPS60198720 A JP S60198720A JP 5670984 A JP5670984 A JP 5670984A JP 5670984 A JP5670984 A JP 5670984A JP S60198720 A JPS60198720 A JP S60198720A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- chamber
- epitaxial growth
- boat body
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02623—Liquid deposition
- H01L21/02625—Liquid deposition using melted materials
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5670984A JPS60198720A (ja) | 1984-03-22 | 1984-03-22 | 液相エピタキシヤル結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5670984A JPS60198720A (ja) | 1984-03-22 | 1984-03-22 | 液相エピタキシヤル結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60198720A true JPS60198720A (ja) | 1985-10-08 |
| JPH0260052B2 JPH0260052B2 (cs) | 1990-12-14 |
Family
ID=13035002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5670984A Granted JPS60198720A (ja) | 1984-03-22 | 1984-03-22 | 液相エピタキシヤル結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60198720A (cs) |
-
1984
- 1984-03-22 JP JP5670984A patent/JPS60198720A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260052B2 (cs) | 1990-12-14 |
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