JPS60193247A - 点状ガスイオン源 - Google Patents

点状ガスイオン源

Info

Publication number
JPS60193247A
JPS60193247A JP60026239A JP2623985A JPS60193247A JP S60193247 A JPS60193247 A JP S60193247A JP 60026239 A JP60026239 A JP 60026239A JP 2623985 A JP2623985 A JP 2623985A JP S60193247 A JPS60193247 A JP S60193247A
Authority
JP
Japan
Prior art keywords
gas
pipe
ion source
chip
needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60026239A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366022B2 (enrdf_load_stackoverflow
Inventor
Masaaki Futamoto
二本　正昭
Shigeyuki Hosoki
茂行 細木
Isamu Yuhito
勇 由比藤
Ushio Kawabe
川辺　潮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60026239A priority Critical patent/JPS60193247A/ja
Publication of JPS60193247A publication Critical patent/JPS60193247A/ja
Publication of JPS6366022B2 publication Critical patent/JPS6366022B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP60026239A 1985-02-15 1985-02-15 点状ガスイオン源 Granted JPS60193247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60026239A JPS60193247A (ja) 1985-02-15 1985-02-15 点状ガスイオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60026239A JPS60193247A (ja) 1985-02-15 1985-02-15 点状ガスイオン源

Publications (2)

Publication Number Publication Date
JPS60193247A true JPS60193247A (ja) 1985-10-01
JPS6366022B2 JPS6366022B2 (enrdf_load_stackoverflow) 1988-12-19

Family

ID=12187756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60026239A Granted JPS60193247A (ja) 1985-02-15 1985-02-15 点状ガスイオン源

Country Status (1)

Country Link
JP (1) JPS60193247A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6310449A (ja) * 1986-06-27 1988-01-18 Sony Corp イオンビ−ム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6310449A (ja) * 1986-06-27 1988-01-18 Sony Corp イオンビ−ム装置

Also Published As

Publication number Publication date
JPS6366022B2 (enrdf_load_stackoverflow) 1988-12-19

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