JPS60191417A - Manufacture of thin film magnetic head - Google Patents

Abstract

PURPOSE:To improve the quantity of polishing and the precision of parallelism by setting the size and shape of marking and intervals of steps by detecting numbers of markings provided in polishing margins of a substrate digitally and then polishing the substrate. CONSTITUTION:Numbers of markings 8 are embedded stepwise in polishing margins 7 at both side end parts of the substrate 1 at specific step intervals P. When the polishing margins 7 are polished, markings 8 exposed in polished surfaces 9 are counted respectively to decide whether the polishing reaches a target polishing line 10 or not and whether specific parallelism is obtained or not. Namely, the numbers of markings of both end parts attains to a set quantity at the same time, it is decided that the desired quantity of polishing and parallelism are obtained, and corrective polishing operation is performed. Consequently, a multitrack thin-film magnetic head which has the target polishing line 10 having specific parallelism, i.e. contact sliding surface is manufactured.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Summary The present invention relates to the formation of a contact tank trend with a recording medium in the case of manufacturing all thin film magnetic heads used for recording and reproducing (σ) such as DATs (U).

BACKGROUND OF THE INVENTION Recently, with the increasing recording density of magnetic recording media such as magnetic tapes, thin film magnetic heads have been used as means for recording, reproducing, and erasing all information on magnetic recording media. This thin film magnetic head can be used for both horizontal and perpendicular magnetic recording, and is used in a wide range of applications including digital audio equipment.

Figures 1 to 3 show general examples of the thin-film magnetic head described in Section 2.
Show and explain. In the figure, (1) is a flat substrate made of a hard material such as non-magnetic ferrite or ceramic;
(2) is a core pattern made of Fe-Ni composite material with high magnetic permeability, (3) is a conductive coil pattern formed in a substantially ring shape, and (4) is the core pattern (2) and coil pattern shown in -.・This is an insulating layer made of a non-magnetic material such as 810° for complete insulation from (3). This thin film magnetic head is manufactured by VC as follows. That is, a thin film-like core pattern (circular, approximately ring-shaped) is formed on the substrate (1) by sputtering or photoetching, and a coil pattern (3) is formed so as to interlink with the core pattern (2). A layer is formed by a sputtering method or the like.Then, the magnetic gap g is set by completely forming the insulating layer (4) which also serves as insulation and protection between the magnetic gap spacer, the Hicore pattern and the coil pattern (3). When all the above steps are completed, a 4Q substrate (not shown) made of glass or the like is used to form a 4-touch contact with the magnetic tape.
It is bonded to the insulating layer (4) by low melting point glass bonding at about 0°C.

By the way, for example, a thin film magnetic head used for PCM recording has a multi-track configuration in which a large number of unit magnetic heads are arranged in parallel on one substrate (1), as shown in No. 51. In order to completely form the contact tank movement with the magnetic tape of the head (51 (5)...), the substrate (1
)? We must work hard to improve our skills.

This is because the above-mentioned contact sliding movement is not a nearly perfect plane, and if there is a spacing loss between the contact sliding movement and the magnetic tape, recording/reproduction loss may occur, or it may cause noise.
''This is to make the contact sliding surface almost flat. In addition, as shown in Figure 4, this contact sliding surface (m+ is the wear due to the sliding of the magnetic tape (6) = 3-), so that until the core pattern (2) is exposed (r)
[If the contact tank trend is completely formed by abrasion, the wear will damage the core batter (2) and cause the gear to collapse.
) and the contact sliding movement (m1) should be provided on the gear g' between
Full formation is preferable. As a result, the gap g1
This is because the lung portion is made of a hard material, so gears are less likely to collapse due to wear.

However, as shown in FIG. Polishing amount (7) until the core pattern (2) is completely exposed.
) It had been fully polished. According to this σ) method, the core pattern (2) is exposed to the contact sliding movement (m), so the above-mentioned σ]
The disadvantage was that the gears were prone to collapse.

1) During the polishing process) - It is difficult to check the remainder of the polishing allowance (7) and the parallelism +W' of polishing, so even if you try to create the entire gap g' and the contact sliding movement (m + complete formation) Parallel IM of polishing, i.e., the contact noted in - 4- Since the parallelism between the sliding surface (m+ and the core pattern (2) cannot be guaranteed), the polishing accuracy is low, and the characteristics of the Iri thin film magnetic head are also deteriorated. There was a drawback to that.

This invention has been proposed to eliminate all the drawbacks of the above-mentioned prior art, and is aimed at eliminating the contact sliding motion with the recording medium.
'a=The total weight of a thin film magnetic head that can be easily measured for the parallelism of the polished surface and the remaining amount during the polishing process.

Structure of the Invention The present invention is directed to contact sliding of a magnetic head with a recording medium [fl
When polishing the entire polishing area provided on the substrate of the magnetic head in order to form a magnetic head, a large number of markings are buried in the polishing area in advance in a step-like manner, so that the number of markings appearing on the polished surface is a predetermined number. The main feature is that the entire sliding surface is formed by polishing until the number of cylinders is reached. Therefore, the present invention can be described as a sliding surface setting technique that digitally detects the entire amount of polishing.

Embodiment of the Invention FIGS. 6 to 8 are front views or plane views of essential parts of an embodiment of the method for manufacturing a thin film magnetic head according to the present invention.
It's rice. First, this invention differs from conventional manufacturing methods in terms of the polishing allowances (7) at both ends of the substrate (1).
Many markings (8) in a stair-like manner.

(8), . . . are buried at a predetermined step interval P, respectively. These markings (8), (
811... are, for example, rectangular, and are formed by metal etching, sputter link method, or photo-etching method. The steps of the markings (81, (8), etc.) are set along the moving direction of the polishing surface that moves as it is polished, and their sizes are determined according to the amount of polishing along with the step interval P. Although related to detection resolution, various settings are possible.0 and markings ("+, ('J+...
... is Fθ-Nj at the same time as the core pattern (2) is formed.
All alloys can be formed. In addition, marking (
Here, 81, (81, . . . ) are formed in a - column, or of course, they may be formed in multiple columns.

In the past, the polishing allowance (7) was 6 when performing the complete polishing process.
- As shown in Fig. 8, the polishing target line (
It is possible to determine whether the parallelism has reached 19 and whether a predetermined degree of parallelism has been obtained. In other words, if the number of cylinders at both ends matches the set quantity, the desired amount of polishing and parallelism can be obtained, and if the number of cylinders is less than the set quantity, there is insufficient polishing, and the number of surfaces of both ηM R1 ( If there is a discrepancy, it is determined that parallelism has not been obtained >ν, and the entire polishing operation is performed in the same manner.Therefore, polishing with an appropriate maintenance gap (112 and Fli constant σ) that maintains full parallelism is performed. A multi-track thin film magnetic head with a target line (1 (9), that is, one contact bracket and one moving surface 'kJ') can be formed.

The male side shown in = is for an induction type (accumulating tank) head, but this 'tt light can of course be used individually for other MR heads, 70 Sopie disk heads, and computer memory heads. Similar results can be obtained.

Effects of the Invention This invention performs polishing by detecting a large number of markings provided in the polishing allowance of the substrate completely digitally. Therefore, the precision of the polishing amount and parallelism can be adjusted by setting the size and shape of the markings and the step interval. , 1-same-1- can be made. Moreover, according to this stamp, the polishing force is 1. However, if the marking count limit is set to the marking count limit, there is a risk of excessive polishing. It disappears.

[Brief explanation of drawings]

Fig. 1 is a partial schematic sectional view showing a part of a general thin-film magnetic head, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a perspective view of Fig. 1, and Fig. 4 is a diagram showing the structure of a magnetic tape. FIG. 5 is a schematic cross-sectional view showing an example of a conventional manufacturing method. Section 61 to FIG. 8 are main parts of a thin-film magnetic head showing Embodiment 7 of the present invention. FIG. (1)... Substrate, (7)... Polishing allowance, (81, (8
1,... Marking, (9)... Polished surface, (1q... Contact sliding surface. 9 (10)

Claims (1)

[Claims] In order to fully form the contact side of the magnetic head with the magnetic recording medium, the polishing distance provided on the magnetic head σ) substrate is polished in advance. σ] By burying all the markings and grinding until the number of markings appearing on the polished surface or the number of marks to be used is reached, ``2a[l! A thin film magnetic head characterized by a sliding sound! II! ! How to send.