JPS60190820A - Laser energy measuring device - Google Patents
Laser energy measuring deviceInfo
- Publication number
- JPS60190820A JPS60190820A JP4690384A JP4690384A JPS60190820A JP S60190820 A JPS60190820 A JP S60190820A JP 4690384 A JP4690384 A JP 4690384A JP 4690384 A JP4690384 A JP 4690384A JP S60190820 A JPS60190820 A JP S60190820A
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- signal
- gate
- measuring device
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 18
- 230000003287 optical effect Effects 0.000 abstract description 14
- 238000012545 processing Methods 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 244000111306 Torreya nucifera Species 0.000 description 2
- 235000006732 Torreya nucifera Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Abstract
Description
【発明の詳細な説明】
（技術分野）
本発明はレーデエネルギー計測装置に関し、特にレーデ
元金用いたプラズマ発生装置におけるレーザエネルギー
剖測装いに四１する。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a Rede energy measuring device, and particularly to a laser energy measuring device in a plasma generator using a Rede element.
（従来の技術）
レーデ光を用いた従来のプラズマ発生装置は、第１図の
ように、レーザ発振器」で発生させたレーザ光全反射ミ
ラー２ケ介してレーザ増幅器列３で増幅し、反射ミラー
４．非線形光学結晶５を介して最終的にレンズ６で集光
させ、輿空チャンバーγ中のターゲット８に照射してこ
の真草チャンバー７中にプラズマを発生させている。こ
の装置に２いて、集光レンズ６の手前に非線形光学結晶
５をおき、レーザ光音波長ｆ侯し、ターゲット８に照射
することがある。この場合実験パラメータとして波長変
換したレーデ光のエネルギー全測定する必要が住じてき
た。(Prior Art) As shown in Fig. 1, in a conventional plasma generation device using Rade light, a laser beam generated by a laser oscillator is amplified by a laser amplifier array 3 via two total reflection mirrors, and then amplified by a laser amplifier array 3. 4. The light is finally condensed by a lens 6 through a nonlinear optical crystal 5, and is irradiated onto a target 8 in the empty chamber γ to generate plasma in the true grass chamber 7. In this apparatus, a nonlinear optical crystal 5 is placed in front of a condenser lens 6, and a laser beam having an acoustic wave length f is irradiated onto a target 8. In this case, it has become necessary to measure the total energy of wavelength-converted Rede light as an experimental parameter.
この測定装置としては、例えば非線形光学結晶５からの
反射光？モニターし、その値と照射エネルギーとを対応
づけておく構成が考えられる。この測定で一番問題にな
ることは、モニターすべき非線形光学結晶５の出方向か
らの反射光と、プラズマ８からの反射光が時間的にすぐ
近くあるということである。つまり、非線形光学結晶５
の出方向からの反射率は一定なので、この反射光を？量
定す【Ｌは照射エネルギー全測定として使用できる。As this measuring device, for example, reflected light from the nonlinear optical crystal 5? A conceivable configuration is to monitor and associate the value with the irradiation energy. The biggest problem with this measurement is that the reflected light from the output direction of the nonlinear optical crystal 5 to be monitored and the reflected light from the plasma 8 are very close in time. In other words, the nonlinear optical crystal 5
Since the reflectance from the direction of emission is constant, what about this reflected light? [L can be used as a total measurement of irradiation energy.
しかし、プラズマからの反射率はプラズマにより異なり
一定ではないため、この反帽光螢測定しても意味がない
。However, since the reflectance from the plasma varies depending on the plasma and is not constant, it is meaningless to measure the reflected light.
通常のカロリーメータ等で反射光エネルギーを測定する
と、反射率の一定な非線形結晶５の出力面からの反射光
と反射率が一定でないプラズマ８からの反射光とをいっ
しょに測定することになり、しかもプラズマ８からの反
射光の方が数倍以上大きいため、なに全測定しているの
かわからなくなる。このように、従来のカロリーメータ
は、照射エネルギーモニタ一つ′！ｌ：ｂｈ調波モニタ
ーとして使用できないという欠点があった。When measuring reflected light energy with a normal calorimeter or the like, the reflected light from the output surface of the nonlinear crystal 5, which has a constant reflectance, and the reflected light from the plasma 8, which does not have a constant reflectance, are measured together. Moreover, since the reflected light from the plasma 8 is several times larger, it becomes difficult to understand what is being measured entirely. In this way, conventional calorimeters only have one irradiation energy monitor! The drawback was that it could not be used as a l:bh harmonic monitor.
（＠明の目的）
本発明の目的は、Ｍｕ記欠点を除去し、ノイズ成分とし
てのプラズマからの反則光があっても非線形光学結晶か
らの反射光のみ全測定し、もってターゲットに照射され
たレーザエネルギーを測定できるようにしたレーザエネ
ルギー計測装置ｒ提供することにある。(@Akira's purpose) The purpose of the present invention is to eliminate the defects mentioned above, and even if there is foul light from the plasma as a noise component, only the reflected light from the nonlinear optical crystal is fully measured. An object of the present invention is to provide a laser energy measuring device r capable of measuring laser energy.
（発明の構成）
本発明は、非線形結晶からの第１の反射光とプラズマか
らの第２の反射光とのうち第１の反射光のみに関係する
信号を通過させるゲート手段金膜けたことｔ−待機とす
るレーデエネルギー計測装置にるる。(Structure of the Invention) The present invention provides a gate means for passing a signal related only to the first reflected light of the first reflected light from the nonlinear crystal and the second reflected light from the plasma. - The radar energy measuring device is on standby.
（実施例）
次に本発明の実施例について図面を参照して詳細に説明
する。(Example) Next, an example of the present invention will be described in detail with reference to the drawings.
第２図は本発明の実施例のレーザエネルギー計測装置金
示すブロック図、第３図は第２図のレーザエネルギー計
測装置の光信号波形とゲート信号との関係を示すタイミ
ングチャートでるる。本実施例のレーザエネルギー計測
装置（高調波モニター装置）は、弗２図に示すように、
非線形結晶５からの反射光及びプラズマ８からの反射光
をモニターするために、反射ミラー４の後に受信光学系
９が設けられ、そのＶ−ザ光を測定しやすい場所に転送
するだめの光フアイバーグープルｌＯと、光検出器１１
と、その検出器信号により有効な信号のみ全測定するだ
めのゲートパルス１［生させるゲートパルス発生器１２
と、このゲートパルス発生器１２のゲートパルスによっ
て作動するゲート付積分型Ａ／Ｄｉ換器１３と、その測
定値？表示するための処理表示器１４とが設けられてい
る。FIG. 2 is a block diagram showing a laser energy measuring device according to an embodiment of the present invention, and FIG. 3 is a timing chart showing the relationship between the optical signal waveform and the gate signal of the laser energy measuring device of FIG. The laser energy measuring device (harmonic monitoring device) of this example is as shown in Figure 2.
In order to monitor the reflected light from the nonlinear crystal 5 and the reflected light from the plasma 8, a receiving optical system 9 is provided after the reflecting mirror 4, and an optical fiber is used to transfer the V-the light to a place where it can be easily measured. Google IO and photodetector 11
, and a gate pulse generator 12 that generates a gate pulse 1 [generating a gate pulse 1] which is used to measure all valid signals using the detector signal.
and the gated integral type A/Di converter 13 operated by the gate pulse of the gate pulse generator 12, and its measured value? A processing display 14 for display is provided.
次に本装置の動作原理について、第３図を用いて説明す
る。同図において、波形１５は、第２図の光検出器１１
の出力信号波形を不すものでろり、この９ち信号１６は
第２図の非線形結晶５からの反射光で必り、また信号１
７はプラズマ８からの反射光の信号である。グートノ（
ルス＠庄器１２では、信号１６とタイミング會合せて信
号１８を発生させ、ゲート材積分子ｉＡ／Ｄコンノ（−
夕１３に印加し、信号１６のみのエネルギーを測定し、
さらに処理表示器１４でその測定１的を換算して表示す
る。この回路は、時間分離方式といえるが、ゲート信号
を加えることにより非線形結晶５からの反射光４６号１
６のみ全測定することができるから、プラズマ８からの
反射光による１８号１７はあっても問題にならない。Next, the operating principle of this device will be explained using FIG. 3. In the same figure, the waveform 15 corresponds to the photodetector 11 of FIG.
This signal 16 is necessarily reflected light from the nonlinear crystal 5 in FIG.
7 is a signal of reflected light from the plasma 8. Gutono (
In the Rus@Sho device 12, the signal 18 is generated in timing with the signal 16, and the gate material stack iA/D controller (-
13 and measure the energy of only signal 16,
Furthermore, the measurement target is converted and displayed on the processing display 14. This circuit can be said to be a time separation method, but by adding a gate signal, the reflected light from the nonlinear crystal 5 is
Since only 6 can be completely measured, even if 18 and 17 are caused by the reflected light from the plasma 8, it is not a problem.
（発明の効果）
以上説明したように、本発明によれば、ゲート信号ｔ−
＝当なタイミングで加えて、時間的に信号成分とノイズ
成分とｔ分離することができるから、有効なデータのみ
をモニターできるという効果が得られる。(Effects of the Invention) As explained above, according to the present invention, the gate signal t-
= Since the signal component and the noise component can be temporally separated by t in addition to being added at the appropriate timing, it is possible to obtain the effect that only valid data can be monitored.
第１図は従来のレーザエネルギー計測装置を示すブロッ
ク図、第２図は本発明の実施例のレーザエネルギー計測
装置全説明するブロック図、１４４３図は第２図のレー
ザエネルギー１測装置の光信号波形及びゲート信号波形
を示すタイミングチャートである。
同図において、１・・・・・・レーザ発振器、２，４・
・・・・・反射ミラー、３・・・・・・レーザ増幅器列
、５・・・・・・非線形光学結晶、６・・・・・・集光
レンズ、７・・・・・・真空チャンバー、８・・・・・
・ターゲット又はプラズマ、９・°。
・・・受信光字系、１０・・・・・・光ファイバーゲー
ブル、１１・・・・・・光検出器、１２・・・・・・ゲ
ートパルス発生器、１３・・・・・・ゲート付積分型Ａ
／Ｄ変換器、１４パ・・パ処理表示器、１５・・・・・
・光信号波形、１６・・・・・・結晶からの反射光、１
７・・・・・・プラズマからの反射光、１８・・・・・
・ゲート山号。
峯１図 茅３Ｖ
茅２図Fig. 1 is a block diagram showing a conventional laser energy measuring device, Fig. 2 is a block diagram fully explaining the laser energy measuring device according to the embodiment of the present invention, and Fig. 1443 is an optical signal of the laser energy measuring device shown in Fig. 2. 5 is a timing chart showing waveforms and gate signal waveforms. In the same figure, 1... laser oscillator, 2, 4...
... Reflection mirror, 3 ... Laser amplifier array, 5 ... Nonlinear optical crystal, 6 ... Condensing lens, 7 ... Vacuum chamber , 8...
- Target or plasma, 9°. ...Receiving optical system, 10...Optical fiber cable, 11...Photodetector, 12...Gate pulse generator, 13...With gate Integral type A
/D converter, 14 PA processing display, 15...
・Optical signal waveform, 16...Reflected light from crystal, 1
7...Reflected light from plasma, 18...
・Gate mountain number. Mine 1 figure Kaya 3V Kaya 2 figure
Claims (1)
反射光とのうち第１の反射光のみに関係する信号ヶ通過
させるゲート手段を設けたことを特徴とするレーザエネ
ルギー計測装置。1. A laser energy measuring device comprising a gate means that allows a signal related to only the first reflected light of the first reflected light from the nonlinear crystal and the second reflected light from the plasma to pass through.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4690384A JPS60190820A (en) | 1984-03-12 | 1984-03-12 | Laser energy measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4690384A JPS60190820A (en) | 1984-03-12 | 1984-03-12 | Laser energy measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60190820A true JPS60190820A (en) | 1985-09-28 |
Family
ID=12760315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4690384A Pending JPS60190820A (en) | 1984-03-12 | 1984-03-12 | Laser energy measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60190820A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109506775A (en) * | 2018-11-12 | 2019-03-22 | 深圳市光科全息技术有限公司 | A kind of measuring method of the blue light rejection rate of anti-blue light product |
-
1984
- 1984-03-12 JP JP4690384A patent/JPS60190820A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109506775A (en) * | 2018-11-12 | 2019-03-22 | 深圳市光科全息技术有限公司 | A kind of measuring method of the blue light rejection rate of anti-blue light product |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0124224A3 (en) | Method and apparatus for thin film thickness measurement | |
| JPH0137682B2 (en) | ||
| JP3500216B2 (en) | Voltage measuring device | |
| US5048969A (en) | Piezoelectric measurement of laser power | |
| JPS60190820A (en) | Laser energy measuring device | |
| JPH05256768A (en) | Method and apparatus for measuring gas concentration | |
| JP2518064B2 (en) | Laser distance measuring device | |
| JP2587732B2 (en) | Laser beam position detection method | |
| US5184189A (en) | Non-intrusive beam power monitor for high power pulsed or continuous wave lasers | |
| JP3236941B2 (en) | Distance measurement method for lightwave distance meter | |
| JPS6275363A (en) | Laser distance measuring apparatus | |
| JPH028732A (en) | Cyclic signal recording method and apparatus | |
| US3397607A (en) | Single faraday cell polarimeter | |
| RU2208803C1 (en) | Radio signal frequency meter | |
| KR950019660A (en) | Non-contact internal defect flaw detection method and device | |
| JPH04191652A (en) | Generating method for ultrasonic wave in thin film and detecting device therefor | |
| JPS62127034A (en) | Apparatus for measuring living body | |
| RU1793347C (en) | System for examination of thermal-physical properties of solid materials | |
| JP2556912B2 (en) | Voltage detector | |
| SU757090A1 (en) | Device for measuring laser wavelength | |
| JPS62299728A (en) | Optical element | |
| JPS6154430A (en) | Instrument for measuring optically surface physical properties | |
| JPH0113527B2 (en) | ||
| SU1392366A1 (en) | Device for measuring linear dimensions of specimen | |
| JP2627600B2 (en) | Laser beam propagation characteristics measurement device |