JPS60190201A - Evaporation material having metal dripping preventing function - Google Patents

Abstract

PURPOSE:To prevent melt dripping, in applying coating to the surface of a material by vapor deposition in order to enhance anti-wear property of said material, by using a carrier material having a m.p. higher than that of an evaporation material. CONSTITUTION:When an evaporation material is heated and the temp. thereof reaches the m.p. of titanium 1, said titanium 1 is melted to wet the surface of carbon 2 being a carrier material, and dispersed and adhered to said carbon 2 to be prevented from melt dripping to a gravity direction. As far as molten titanium 1 is present, because the evaporation material holds the same temp. as the m.p. of titanium, the carbon 2 being the carrier material holds a solid state.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an evaporator having a function of preventing melt dripping. More specifically, the present invention comprises an evaporate and a support material;
The present invention relates to an evaporation material having a function of preventing molten evaporated material from hanging down in the direction of gravity during heating and evaporation.

Generally, the surface of a material is coated with a film of various substances in order to harden the surface or improve wear resistance. As a coating method, a vacuum evaporation method, a sputtering method, etc. are used depending on the characteristics of the coating material and the shape of the material to be coated. Among these, the vacuum evaporation method is the most frequently used because it allows a coating film to be formed relatively easily by simply heating and evaporating the evaporated material (coating material; that is, the raw material for the coating film). however,
When making a coating film using a vacuum deposition method, it is natural that the evaporated material must be directly or indirectly heated to generate vapor of the evaporated material. In this process, solid evaporates always go through a molten state, that is, a liquid state, except in the case of sublimable substances. By the way, when the evaporated material becomes liquid, it hangs down in the direction of gravity due to its own weight, and eventually falls when the amount of its own weight exceeds its own surface tension. Significantly reduces utilization yield.

Therefore, conventionally, in order to prevent the falling loss due to melting of the evaporated material and to improve the utilization yield of the evaporated material, it has been common to use a crucible as a holding container for the evaporated material to perform evaporation.

However, when evaporation is performed using a crucible, () not only the evaporated material is heated, but the crucible is also heated at the same time, so the efficiency of heating the evaporated material decreases, and the cost increases accordingly. It gets expensive.

In principle, evaporated particles do not fly in the direction shaded by the crucible, so there are restrictions on the coating direction.

(3) Since a crucible is used, the structure of the evaporation section becomes complicated.

It has the following disadvantages.

SUMMARY OF THE INVENTION In order to overcome the drawbacks of the prior art due to the use of crucibles, the inventors have investigated evaporators that can be evaporated without the use of crucibles.

As a result, in order to prevent the molten evaporated material from dripping, the molten evaporated material is solid at that temperature and has the property of being wetted by the evaporated material. We have discovered that it is sufficient to attach and disperse the liquid onto the surface of the surface. The present invention has been made based on this knowledge.

Therefore, the main object of the present invention is to provide an evaporator comprising an evaporator and a support material having a higher melting point than the evaporator.

Furthermore, an incidental object of the present invention is to use the evaporator of the present invention (・
The object of the present invention is to provide a method for preventing molten evaporated material from hanging down in the direction of gravity during heating and evaporation.

Other objects and advantages of the present invention will be successively revealed below. 3. Detailed Description of the Invention The evaporative material having the function of preventing melt dripping of the present invention includes an evaporated material,
It consists of a support material with a higher melting point.

Evaporates that can be used in the present invention include non-sublimable ones,
In other words, any type of material may be used as long as it is meltable and has a melting point lower than that of the supporting material. The shape of the supporting material is preferably granular with a diameter in the range of 0.05 to 1 mm.The mixed volume ratio of the evaporated material and the supporting material is 10 to 10 mm. A range of 50 inches is preferred.

Examples of heating methods for the evaporation material in the present invention include electron beam heating method, direct current heating method, indirect heating method, high frequency heating method,
Or a laser beam.

Either one or both methods, such as arc image spot irradiation, may be used.

Next, an example of an integrated evaporation material of the present invention will be explained with reference to the drawings. In the figure, 1 is titanium and 2 is carbon. The illustrated example is
FIG. 2 is an example (cross-sectional view) of a titanium evaporator material that has a function of preventing titanium from melting and dripping by using titanium 1 as an evaporator and carbon 2 as a supporting material. This evaporative material is heated by an appropriate heating method to 1670, which is the melting point of titanium 1.
When the temperature reaches .degree. C., titanium 1 melts and becomes liquid, and wets the surface of carbon 2 (melting point: 3650.degree. C.), which is a supporting material, that is, disperses and adheres to it. As a result, the molten titanium 1 is held by the supporting material carbon 2, and the titanium 10 is prevented from dripping in the direction of gravity. Note that as long as the molten titanium 1 exists, the temperature of the evaporating material remains the same as the melting point of titanium, so the carbon 2, which is the support material, can maintain its solid state.

The structure and effects of the present invention will be specifically explained below with reference to Examples.

〔Example〕

The titanium evaporation rate when a titanium evaporation material composed of titanium metal and carbon powder with a particle size of 0.05 to 0.1 mm as the evaporator and support material, respectively, is heated by an electron beam with a heating energy of about 1 kW is: 20c from evaporation material
It was 6 Asec-1 at a position 1 rL away. This evaporation rate is almost comparable to the titanium evaporation rate when using a crucible under the same conditions.

Further, as a result of analyzing the chemical composition of this vapor deposited titanium film using an Auger electron spectrometer, the composition of the vapor deposited film was found to be 100% titanium. This indicates that only titanium, which is an evaporator, is evaporated from this titanium evaporator, and carbon, which is a support material, is not evaporated.

[Brief explanation of the drawing]

The figure is a cross-sectional view of an example of the evaporation material having the function of preventing melt dripping according to the present invention. Patent applicant: Japan Atomic Energy Research Institute (4 others)

Claims (5)

[Claims] (1) An evaporation material having a function of preventing melt dripping, which is mainly composed of an evaporated material and one or more types of supporting material. (2) The evaporative material having a function of preventing melt dripping according to claim 1, wherein the melting point of the supporting material is always higher than that of the evaporated material. (3) The mixed volume ratio of evaporated matter and supporting material is 10 to 5.
The evaporation material having a function of preventing melt dripping according to claim 1, wherein the evaporation material is 0%; (4) The evaporation material having a function of preventing melt dripping according to claim 1, wherein the supporting material is in the form of particles or powder. (5) Claim 1, characterized in that the shape of the evaporator is a solid formed by integrally molding the evaporator and the supporting material.
An evaporative material having a function of preventing melt dripping as described in Section 1.