Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone CorpfiledCriticalJeol Ltd
Priority to JP59045774ApriorityCriticalpatent/JPS60189858A/ja
Publication of JPS60189858ApublicationCriticalpatent/JPS60189858A/ja
Publication of JPH0524614B2publicationCriticalpatent/JPH0524614B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams