JPS6018822A - Thin film type magnetic recording medium - Google Patents

Thin film type magnetic recording medium

Info

Publication number
JPS6018822A
JPS6018822A JP58126205A JP12620583A JPS6018822A JP S6018822 A JPS6018822 A JP S6018822A JP 58126205 A JP58126205 A JP 58126205A JP 12620583 A JP12620583 A JP 12620583A JP S6018822 A JPS6018822 A JP S6018822A
Authority
JP
Japan
Prior art keywords
film
recording medium
magnetic recording
thin film
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58126205A
Other languages
Japanese (ja)
Inventor
Takashi Tomie
崇 冨江
Junichi Tamura
順一 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teijin Ltd filed Critical Teijin Ltd
Priority to JP58126205A priority Critical patent/JPS6018822A/en
Publication of JPS6018822A publication Critical patent/JPS6018822A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/739Magnetic recording media substrates
    • G11B5/73923Organic polymer substrates
    • G11B5/73937Substrates having an organic polymer comprising a ring structure

Abstract

PURPOSE:To obtain a recording medium which can be formed at a high speed, has high productivity and is suitable for a floppy disc having excellent dimensional accuracy by constituting a flexible base plate of an arom. polyamide film having a specified initial Young's modulus and coefft. of linear thermal expansion. CONSTITUTION:A film consists of an arom. polyamide polymer contg. the repetitive structural unit expressed by the general formula independently or in the form of a copolymer in which at least 75mol% of the repetitive unit is a poly- m-phenylene isophthalic amide polymer film. Said film has 1.35-1.41 density and the main refractive index thereof is specified. The polymer is extruded onto a casting roller to obtain an unoriented hydrous film which is successively stretched. The stretched film is dried and heat-set, by which the film is obtd. Said film has >=150kg/mm<2> initial Young's modulus at 200 deg.C an <=2.5X10<-5>cm/cm/ deg.C coefft. of linear thermal expansion. The magnetic recording medium is formed of, for example, a single-layered double-sided medium having the vertically magnetized film consiting of a CoCr alloy film 2 on both sides of a base plate 1 and a two- layered double-sided medium laminated with a soft magnetic material consisting of an NiFe alloy film 3 and a CoCr alloy film 2.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気記録媒体、すなわち可撓性を有する磁気テ
ープやフレキシブル・ディスクに関するものであり、詳
しくはスパッタや蒸着で形成されるγ−Fe203薄膜
、CoNi斜め蒸着膜、 CoCr垂直異方性膜等の強
磁性連続薄膜を記録層とする磁気記録媒体に関するもの
である。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to magnetic recording media, that is, flexible magnetic tapes and flexible disks. The present invention relates to a magnetic recording medium whose recording layer is a ferromagnetic continuous thin film such as a thin film, a CoNi obliquely deposited film, or a CoCr perpendicularly anisotropic film.

〔従来技術〕[Prior art]

従来の強磁性微粉末をバインダー樹脂中に分散せしめた
記録層を有する塗布型磁気記録媒体Kかわり、近年高密
度記録への要望にともない、スパッタや反応蒸着で形成
されるγ−FelO1薄膜、斜め蒸着で形成されるCo
Ni合金膜、スパッタ又は蒸着で形成される膜面に垂直
方向に磁化容易軸を有するCoCr合金の垂直異方性膜
、等の0.02〜2.0/f111厚の強磁性薄膜を記
録層ヒして可撓性基板上に形成した薄膜型磁気記録媒体
が提案されている。特に可撓性基板の両面に垂直磁気異
方性膜を形成したフレキシブル・ディスクは次世代の磁
気記録媒体とj−て注目され、さかんに研究されている
。かかる薄膜型磁気記録媒体の可撓性基板としても通常
塗布型磁気記録媒体と同様にポリエチレンテレフタレー
ト(PET )フィルム等の高分子フィルムが使用され
るが、以下の問題がある。
In place of the conventional coated magnetic recording media K, which has a recording layer in which fine ferromagnetic powder is dispersed in a binder resin, in recent years, with the demand for high-density recording, γ-FelO thin films formed by sputtering or reactive vapor deposition, diagonal Co formed by vapor deposition
The recording layer is a ferromagnetic thin film with a thickness of 0.02 to 2.0/f111, such as a Ni alloy film or a perpendicularly anisotropic CoCr alloy film having an axis of easy magnetization perpendicular to the film surface formed by sputtering or vapor deposition. A thin film magnetic recording medium formed on a flexible substrate has been proposed. In particular, flexible disks in which perpendicular magnetic anisotropic films are formed on both sides of a flexible substrate are attracting attention as the next generation magnetic recording medium and are being actively researched. A polymer film such as a polyethylene terephthalate (PET) film is usually used as a flexible substrate for such a thin-film magnetic recording medium, as in the case of a coating-type magnetic recording medium, but there are the following problems.

すなわち、前述の薄膜型磁気記録媒体は通常PVD法と
言われる蒸着やスパッタで作製されるが、かかる方法に
おいては膜作製時に基板に多量の熱が加わること、形成
された薄膜に内部応力が残留すること及び良好な磁気特
性を得る為に基板の加熱が必要なこと等により種々のト
ラブルが発生する。例えば、PETフィルムを基板とし
た場合は耐熱性に劣り、膜作製時にフィルムが溶断した
り変形したりする問題、製造後のフィルム物性が劣化す
る問題、媒体がカールする問題、又は膜にクラックが発
生する問題等積々の問題がある。更に、膜作製に成功【
7たわずかの事例においても後処理でカールを矯正する
等の繁雑な製造工程の為に歩留りがきわめて悪い。一方
、PETフィルムと異なり耐熱性に優れたポリイミドフ
ィルムを基板とした場合においても媒体がカールするこ
と、及びビデオ用の磁気テープとした場合低ヤング率の
為に画像が歪む、等の問題がある。さらにポリイミドフ
ィルムを基板とした両面フレキシブル・ディスクにおい
ては表裏の再生出力レベルが大幅に異ることが判明した
。以上のように、従来より多用されているPETフィル
ム、ポリイミドフィルムは、基板としての耐熱性、熱時
の寸法安定性、ヤング車、及び表面形状がまだ十分でな
い。又、ポリイミドフィルムは高価であり、実用上の問
題もある。
In other words, the aforementioned thin film magnetic recording media are usually manufactured by vapor deposition or sputtering known as the PVD method, but in such methods, a large amount of heat is applied to the substrate during film formation, and internal stress remains in the formed thin film. Various troubles occur due to the fact that the substrate needs to be heated in order to obtain good magnetic properties. For example, when PET film is used as a substrate, it has poor heat resistance, and there are problems such as melting or deformation of the film during film production, deterioration of film properties after production, curling of the medium, or cracks in the film. There are many problems that arise. Furthermore, we succeeded in producing a membrane [
Even in those few cases, the yield is extremely low due to complicated manufacturing processes such as straightening curls in post-processing. On the other hand, even when the substrate is made of polyimide film, which has excellent heat resistance unlike PET film, there are problems such as curling of the medium and distortion of images due to the low Young's modulus when using magnetic tape for video. . Furthermore, it was found that in a double-sided flexible disk using a polyimide film as a substrate, the playback output level on the front and back sides was significantly different. As described above, PET films and polyimide films, which have been widely used in the past, still lack sufficient heat resistance, dimensional stability under heat, Young's wheel, and surface shape as substrates. Furthermore, polyimide films are expensive and have practical problems.

〔発明の目的〕[Purpose of the invention]

本発明は以上の現状に鑑み、実用に供し得る廉価で良好
な配置再生特性を有する薄膜型磁気記録媒体を提供する
ものであり、特に高速で製膜でき生産性が高く、且つ寸
法安定性に優れたフロッピーディスクに好適な薄膜型磁
気配録媒体を提供することを主目的とするものである。
In view of the above-mentioned current situation, the present invention provides a thin film magnetic recording medium that is practically usable, inexpensive, and has good placement and reproduction characteristics.In particular, it can be formed at high speed, has high productivity, and has excellent dimensional stability. The main purpose of this invention is to provide a thin film type magnetic recording medium suitable for excellent floppy disks.

〔発明の構成及び作用効果〕[Structure and effects of the invention]

本発明者らは、新規なフィルムを開発し、もって肢フィ
ルムをベースとした薄膜型磁気記録媒体を作製したとこ
ろ極めて良好な特性を有することを見い出した。
The present inventors developed a new film and produced a thin-film magnetic recording medium based on the limb film, and found that it had extremely good characteristics.

−5= すなわち本発明は、可撓性基板上に記録層として強磁性
薄膜を有する薄膜型磁気記録媒体において、前記可撓性
基板が200℃における初期ヤング高が1sokg/m
nP以上で熱線膨張係数2.5X1叶’ rs/cm、
7℃以下の芳香族ポリ了ミドフィルムであることを特徴
とする薄膜型磁気記録媒体である。
−5= That is, the present invention provides a thin film magnetic recording medium having a ferromagnetic thin film as a recording layer on a flexible substrate, in which the flexible substrate has an initial Young's height of 1 sokg/m at 200°C.
Coefficient of linear thermal expansion 2.5 x 1'rs/cm above nP,
This is a thin film type magnetic recording medium characterized by being an aromatic polyamide film at a temperature of 7° C. or lower.

上述の本発明は、従来の基板でのカールの発生原因を種
々検討の結果、それが基板の高温寸法安定性の欠如に起
因すること見出しなされたものであり、上記構成により
膜形成時のカールが抑えられ安定した高速膜形成が可卯
となると共に媒体としてもカールが実用上支障ないとこ
ろまで低減された。その上本発明のものは従来のポリイ
ミドフィルムに見られるような基板の表と裏で電磁変換
特性が異なるという問題もなく、又、価格もポリイミド
フィルムに比較し安く、実用上大きな利点を有する。
The present invention described above is based on various studies on the causes of curling in conventional substrates, and it has been found that the curling is caused by the lack of high-temperature dimensional stability of the substrate, and the above-mentioned structure reduces curling during film formation. As a result, stable and high-speed film formation is possible, and curling as a medium is also reduced to the point where it does not pose a practical problem. Moreover, the material of the present invention does not have the problem of electromagnetic conversion characteristics differing between the front and back sides of the substrate as seen in conventional polyimide films, and is also cheaper than polyimide films, which has a great practical advantage.

ここにいう芳香族ポリアミドフィルムとは 6 − 一般式 で示された繰返し構造単位な皐独、又は共重合の形で含
む芳香族ポリアミド系重合体からなるフィルムであり、
好ましくは該構造単位を75モル係以上含む芳香族ポリ
アミド系重合体フィルムである。
The aromatic polyamide film referred to herein is a film consisting of an aromatic polyamide-based polymer containing repeating structural units represented by the general formula in the form of monopoly or copolymerization,
Preferably, it is an aromatic polyamide polymer film containing 75 or more moles of the structural unit.

ここにArl 、 Art 、 Ar、は同一であって
も異っていてもよく、その代表的なものとしては次の構
造式を有する。
Here, Arl, Art, and Ar may be the same or different, and a typical one has the following structural formula.

Rn Rn Rn Rn ここにおいてRは低級アルキル、借級アルコギシ、ハロ
ゲンあるいはニトロ基であり、nは0および4を含むθ
〜4の整数であり、の内から選ばれた1種であって、こ
こKYは水素あるいは低級アルキル基を示す。
Rn Rn Rn Rn Here, R is lower alkyl, borrowed alkoxy, halogen, or nitro group, and n is θ including 0 and 4.
is an integer of ~4, and is one selected from the following, where KY represents hydrogen or a lower alkyl group.

芳香族ポリアミド系フィルムの内、繰り返し単位の少く
とも75モル係がm−フ二二レンジアミンとイソフタル
酸クロライドの如きイソフタル酸ハライドとからなるポ
リ−m−フェニレンイソフタルアミド系重合体フィルム
の場合には、フィルムの密度d(g/c!りが1.35
乃至1.41であり、かつNa(ナトリウム)のD線(
波長ss9nm)&C対する主屈折高nα、nβ及びn
γ (但し、主屈折率の値の大なる順lCf1α、nβ
、nγとする)が次式を満足し、且つ主屈折率nα及び
nβとの間Knα−nβ≦0.OB なる関係を満足するポリメタフェニレンイソフタルアミ
ド系フィルムである事が4ISF&C好ましい。
Among the aromatic polyamide films, in the case of poly-m-phenylene isophthalamide-based polymer films in which at least 75 molar units of repeating units are composed of m-phenylene diamine and isophthalic acid halide such as isophthalic acid chloride. is the density of the film d(g/c!ri is 1.35
to 1.41, and the D line of Na (sodium) (
Principal refraction height nα, nβ and n for wavelength ss9nm)&C
γ (However, in the order of increasing principal refractive index values lCf1α, nβ
, nγ) satisfy the following formula, and the relationship between the principal refractive indexes nα and nβ is Knα−nβ≦0. 4ISF&C is preferably a polymetaphenylene isophthalamide film that satisfies the relationship: OB.

該条件を満足したポリメタフェニレンイソフタルアミド
系フィルムは機械的物性2寸法安定性9表面特性がすぐ
れ本発明の芳香族ポリアミドフィルムに適している。更
に、本発明者の一人が先に出願した特願昭57−217
691号の明細書に記載した通り55tin吸湿寸法変
化率が0.6係以下で面内異方性も小さく、ヤング率は
450に#/m以上と機械的及び温湿度に対する寸法安
定性に優れているので、かかる寸法安定性が高密化に必
須と云われるフロッピーディスクには特に適している。
A polymetaphenylene isophthalamide film that satisfies the above conditions has excellent mechanical properties, two-dimensional stability, 9 surface properties, and is suitable for the aromatic polyamide film of the present invention. Furthermore, a patent application filed earlier by one of the present inventors in 1982-217
As described in the specification of No. 691, 55tin has a moisture absorption dimensional change rate of 0.6 coefficient or less, small in-plane anisotropy, and a Young's modulus of 450 #/m or more, which has excellent mechanical and dimensional stability against temperature and humidity. Therefore, it is particularly suitable for floppy disks, where such dimensional stability is said to be essential for increasing density.

なお、本発明に用いられる前述の芳香族ポリアミドフィ
ルムを製造する方法としては特開昭56−28242号
公報等の方法が適用出来る。
Incidentally, as a method for manufacturing the above-mentioned aromatic polyamide film used in the present invention, a method such as that disclosed in Japanese Patent Application Laid-Open No. 56-28242 can be applied.

更に前記所定のポリ−m−7ヱニレンイソゝ フタルア
ミドフィルムは本発明者の一人が先に出願した特願昭5
7−60293.57−89848゜−〇 − 57−96265及び特願昭57−217691号の明
細書に記載した方法で得る事が出来る。以下に代表的な
製造方法を示す。すなわちポリメタフェニレンイソフタ
ルアミド(al ヲ、アミド溶剤としてN−メチルピロ
リドン−2(b)、可溶化助剤として塩化カルシウム(
clを使用して下記の組成を持つ組成物を調製する。
Furthermore, the above-described poly-m-7 enylene iso phthalamide film is disclosed in a patent application filed in 1973 by one of the present inventors.
It can be obtained by the method described in the specification of No. 7-60293.57-89848゜-〇-57-96265 and Japanese Patent Application No. 57-217691. Typical manufacturing methods are shown below. Namely, polymetaphenylene isophthalamide (al), N-methylpyrrolidone-2(b) as an amide solvent, calcium chloride (as a solubilization aid),
A composition having the following composition is prepared using cl.

上記、組成物を30m/m押出機を用いて’0.1mm
、幅400 srsのT−ダイより110℃でキャステ
ィングローラー上に押出し、100℃の43チ塩化カル
シウム水溶液中に導入し続いて10℃以下の冷水中で洗
浄することKより、未蔦伸の含水フィルムを得る。この
未延伸含水フィルムを50℃の30%N−メチルピロリ
ドン−2水溶中で2.6倍機械方向(MD)K延伸し、
さらにMDに直交する巾方向(TD)&ct、o倍の延
伸倍高で逐次延伸する。このフィルムを60℃の熱風乾
燥器中10− で乾燥し更に290°Cで熱固定し、ポリメタフェニレ
ンイソフタルアミドフィルムを得る。
The above composition was processed using a 30m/m extruder to give a size of 0.1mm.
, extruded onto a casting roller at 110°C from a T-die with a width of 400 srs, introduced into a 43T calcium chloride aqueous solution at 100°C, and then washed in cold water below 10°C. Get the film. This unstretched water-containing film was stretched 2.6 times in the machine direction (MD) K in a 30% N-methylpyrrolidone-2 aqueous solution at 50°C.
Further, the film is successively stretched in the width direction (TD) &ct perpendicular to the MD at a stretching ratio of o times. This film is dried at 10° C. in a hot air dryer at 60° C. and further heat-set at 290° C. to obtain a polymetaphenylene isophthalamide film.

そして、ここにいう薄膜型磁気記録媒体とは、可撓性基
板上にスパッタ又は反応スパッタ又は反応蒸着で形成さ
れるγ−Felon薄膜、斜め蒸着で形成されるCoN
1合金薄膜、及びスパッタ又は蒸着で形成されるCoC
r合金薄膜等のPVD又はCVDで形成される強磁性薄
膜を磁気記録層と1.て有するものであり、接着性を改
善する為に基板と磁気記録層との間に異種の有機層又は
無機層があってもよく、又磁気記録層上に保護・潤滑層
があってもよい。
The thin film magnetic recording medium referred to here refers to a γ-Felon thin film formed on a flexible substrate by sputtering, reactive sputtering, or reactive vapor deposition, and a CoN thin film formed by oblique vapor deposition.
1 alloy thin film and CoC formed by sputtering or evaporation
1. A ferromagnetic thin film formed by PVD or CVD, such as an r-alloy thin film, is used as a magnetic recording layer. There may be a different organic or inorganic layer between the substrate and the magnetic recording layer to improve adhesion, and there may also be a protective/lubricant layer on the magnetic recording layer. .

ところで、近年超高密度配備の可能性が高く開発が盛ん
な垂直磁気記録媒体の製造においては、良好な特性を得
る為に160℃以上場合により200℃以−Hの高い基
板温度が必要とされている。従って、高温時の寸法安定
性、強度のすぐれた芳香族ポリアミドフィルムを基板と
する本発明が特に大会な効果を発揮する。
By the way, in the production of perpendicular magnetic recording media, which has been actively developed in recent years due to the high possibility of ultra-high density deployment, a high substrate temperature of 160°C or higher, and in some cases 200°C or higher, is required in order to obtain good characteristics. ing. Therefore, the present invention, which uses an aromatic polyamide film as a substrate which has excellent dimensional stability and strength at high temperatures, is particularly effective.

なお、前述の垂直磁気記録媒体とは特公昭58−91号
公報、特公昭58−10764号公報等で公知の通り、
ベースフィルム上の片面又は両面(表裏面)に垂直磁気
異方性膜を形成したものであり、記録再生感度を高める
為に該膜とベースフィルムとの間にNiFe 合金(f
) ヨうな保磁力20エルステツド(Oe)以下程度の
軟磁性膜を約0.5μm程度形成したものが通常用いら
れる。また垂直磁気異方性膜には、通常Crを10〜2
3wt%含有する六方晶系でC軸が膜法線に配向したC
oCr合金の多結晶膜が用いられ、C軸の垂直配向性(
X線回折のロッキング曲線の半値巾Δ050で評価され
る。)が良いこと、及び膜面の垂直方向に磁界を印加し
て測定される垂直保磁力He(v)が適度であることが
必要である。
The above-mentioned perpendicular magnetic recording medium is as known from Japanese Patent Publication No. 58-91, Japanese Patent Publication No. 58-10764, etc.
A perpendicular magnetic anisotropic film is formed on one or both sides (front and back) of the base film, and a NiFe alloy (f
) A soft magnetic film having a coercive force of about 20 Oe or less and a thickness of about 0.5 μm is usually used. In addition, the perpendicular magnetic anisotropy film usually contains 10 to 2 Cr.
C containing 3 wt% in hexagonal system with the C axis oriented to the film normal.
A polycrystalline film of oCr alloy is used, and the vertical orientation of the C axis (
It is evaluated using the half width Δ050 of the rocking curve of X-ray diffraction. ), and the perpendicular coercive force He(v) measured by applying a magnetic field in the direction perpendicular to the film surface must be appropriate.

〔実施例−1〕 50μm厚さの前述のポリメタフェニレンイソフタルア
ミドフィルムを基板として後述のようにして垂直磁気記
録媒体を作製した。又比較のため、基板にポリイミドフ
ィルム具体的には50μm厚のカプトンフィルム(Du
Pont 社商品名)を用い同様に垂直磁気記録媒体を
作製;−た。下の表−1に両基板の代表的な物性を示す
。同表より本発明に係わるポリメタフェニレンイソフタ
ルアミドフィルムの高温時の物性が極めてすぐれている
ことがわかる。
[Example 1] A perpendicular magnetic recording medium was fabricated as described below using the aforementioned polymetaphenylene isophthalamide film having a thickness of 50 μm as a substrate. For comparison, the substrate is a polyimide film, specifically a 50 μm thick Kapton film (Du
A perpendicular magnetic recording medium was produced in the same manner using a magnetic recording medium (trade name, manufactured by Pont Co., Ltd.). Table 1 below shows typical physical properties of both substrates. It can be seen from the same table that the polymetaphenylene isophthalamide film according to the present invention has extremely excellent physical properties at high temperatures.

表−1 垂直磁気記録媒体は、特開昭57−158380号公報
等で公知の対向ターゲット式スパッタ法により、基板の
両面KCoCr合金膜よりなる垂直磁化膜を有する第1
図(al K示す単層両面媒体、13− 及びNiFe合金膜よりなる軟磁性体膜とCoCr合金
膜よりなる垂直磁化膜とを積層1.た第1図(blに示
す二層両面媒体を作製した。
Table 1: A perpendicular magnetic recording medium is manufactured by using a facing target sputtering method known in Japanese Unexamined Patent Publication No. 57-158380, etc., and has a first perpendicular magnetization film made of a KCoCr alloy film on both sides of the substrate.
A single-layer double-sided medium shown in Figure (al K, 13-) and a double-layer double-sided medium shown in Figure 1 (bl) in which a soft magnetic film made of a NiFe alloy film and a perpendicular magnetization film made of a CoCr alloy film were laminated were fabricated. did.

すなわち、NiFe合金膜はNi Fe合金ターゲット
(Ni :81wt9G、 150mmX100mm)
 2枚を120mmの間隔で対向させた対向ターゲット
式スパッタ装置を用い、両ターゲットの側方に配した1
40℃に保った250mm直径の回転ドラム上に基板の
フィルムを送行させながら、アルゴンガス圧1、OPa
、平均堆積速度0.9 pm/ minでスパッタを行
い0.64μmのNiFe合金膜を順に両面圧形成した
That is, the NiFe alloy film is a NiFe alloy target (Ni: 81wt9G, 150mmX100mm)
Using a facing target type sputtering device with two targets facing each other at an interval of 120 mm, one sputtering target was placed on the side of both targets.
While feeding the substrate film onto a rotating drum with a diameter of 250 mm kept at 40°C, the argon gas pressure was 1, OPa.
, sputtering was carried out at an average deposition rate of 0.9 pm/min to form a 0.64 μm NiFe alloy film with double-sided pressure.

そして、CoCr合金膜はCoCr合金ターゲット(C
r:17wt% )2枚を用い、同上の装置により、2
10°Cに保った回転ドラム上にフィルム又はNiFe
合金膜を形成したフィルムを送行させながら、平均堆積
速度1.0μm/minでスパッタを行い0.4μmの
CoCr合金膜を順に両面に形成し、それぞれ単層両面
媒体と2層両面媒体を作製した。
Then, the CoCr alloy film is coated with a CoCr alloy target (C
r: 17 wt%) using the same apparatus as above.
Film or NiFe was placed on a rotating drum kept at 10°C.
While the film with the alloy film formed thereon was fed, sputtering was performed at an average deposition rate of 1.0 μm/min to sequentially form 0.4 μm CoCr alloy films on both sides, producing a single-layer double-sided medium and a two-layer double-sided medium, respectively. .

14− また、比較の為にカブ)・ンフイルムに4同様ノ膜作製
を行った。ポリメタフエニレンイソフタルアミドフイ/
l−ムを用いた実施例では、製造中に片面にのみ合金膜
が形成された場合においては合金膜面な外側にして約1
00mmR程度の曲率半径でカール【5ていたが、両面
に同じ構成の合金膜を形成したものはまったく平担な媒
体となった。1−かじながらカプトンフィルムを用いた
比較例では、製造中に片面にのみNiFe合金膜が形成
さ引た段階においては膜面な外側にして15mmHの曲
率半径でカールが生じ、さらに両面にNiFe合金膜が
形成された構成の片面にのみCoCr合金膜が形成され
た段階では20mmHの曲率半径でカールが生じ取扱い
が極めて不便であった。さらに両面に同じ構成の合金膜
を形成しても60wR程度のカールが残存した。
14- Also, for comparison, a film was prepared in the same way as in 4. Polymetaphenylene isophthalamide filament/
In the example using the l-me, if the alloy film is formed only on one side during manufacturing, the outer side of the alloy film side is about 1
The medium had a curl [5] with a radius of curvature of about 00 mmR, but the medium with the same composition of alloy films formed on both sides became a completely flat medium. 1- In a comparative example using a Kapton film, a NiFe alloy film was formed only on one side during manufacturing, and at the stage when the NiFe alloy film was removed, curling occurred on the outside of the film surface with a radius of curvature of 15 mmH, and further NiFe alloy film was formed on both sides. At the stage where the CoCr alloy film was formed only on one side of the structure on which the film was formed, curling occurred with a radius of curvature of 20 mmH, making handling extremely inconvenient. Furthermore, even when alloy films with the same composition were formed on both sides, curls of about 60 wR remained.

カールの発生原因は1)高温で膜作製がなされ室温に媒
体が取り出された時の金属膜とベースフィルムとの熱収
縮率の差、すなわち可逆的熱膨張率差によるバイメタル
効果と2)スパッタ製膜中にベースフィルムに与えられ
る張力によりベースフィルムが伸びた状態で金属膜が付
着することにより張力が開放された時にベースフィルム
カ収縮する為と考え゛られる。このよウナカールを防止
するには高温時のフィルムの寸法安定性、すなわち熱膨
張率の小さいこと、及び高温でのヤング率の大きいこと
の両者を共に満足する必要がある。表−1に示した様に
実施例のフィルムが比較例のフィルムに比べ格段にすぐ
れた高温寸法安定性を有していることが媒体のカールが
小さかった理由である。以上の効果を有するには好まし
くは熱膨張率が1.0〜2.0×101α/cm/℃の
範囲にあり、200℃程度のヤング率が200に97W
I以上であることが望ましいが、熱膨張率が2.5X1
0−”程度であっても高温ヤング駆が十分に大きな値で
あればよく、また逆の関係であってもよい。さらに要求
されるヤング率の値はスパッタ製膜中のフィルム張力に
よっても異るが、おおよそ熱膨張率が2.5×10−l
lCm/Crn/℃以下で、かり2oo℃の初期ヤング
率が150kg/Inrf以上であれば本発明の効果を
発揮する。
The causes of curl are 1) the bimetal effect due to the difference in thermal contraction rate between the metal film and the base film when the film is prepared at high temperature and the medium is taken out to room temperature, that is, the difference in reversible thermal expansion coefficient, and 2) the bimetallic effect due to the difference in reversible thermal expansion coefficient and 2) sputtering. This is thought to be because the metal film is attached to the base film in a stretched state due to the tension applied to the base film in the film, and when the tension is released, the base film contracts. In order to prevent such una curl, it is necessary to satisfy both the dimensional stability of the film at high temperatures, that is, the low coefficient of thermal expansion, and the high Young's modulus at high temperatures. As shown in Table 1, the film of the example had much better high-temperature dimensional stability than the film of the comparative example, which is why the curl of the medium was small. In order to have the above effects, the coefficient of thermal expansion is preferably in the range of 1.0 to 2.0 x 101α/cm/°C, and the Young's modulus at about 200°C is 200 to 97W.
It is desirable that the coefficient of thermal expansion is 2.5X1.
Even if it is about 0-'', the high-temperature Young's modulus may be a sufficiently large value, or the opposite relationship may be used.Furthermore, the required Young's modulus value may vary depending on the film tension during sputter film formation. However, the coefficient of thermal expansion is approximately 2.5 × 10-l
The effects of the present invention are exhibited if the initial Young's modulus at 200° C. is 150 kg/Inrf or more at 1Cm/Crn/°C or less.

さらにベースフィルムがポリメタフェニレンインフタル
アSド系である時は、密度d(9/cJI)が1.35
〜1.41であり主屈折塞na、nβ。
Furthermore, when the base film is polymetaphenylene inphthalate S, the density d(9/cJI) is 1.35.
~1.41 and the principal refraction na, nβ.

nγが次式 %式% を満足する場合は高温寸法安定性と、後述する表面特性
がすぐれ本発明の効果を格段に発揮する。
When nγ satisfies the following formula %, the high temperature dimensional stability and the surface properties described below are excellent, and the effects of the present invention are significantly exhibited.

さらに基板に750μm厚のPETフィルムを用い前述
と同じ条件で垂直磁気記録媒体を作成した。この場合は
、フィルムの耐熱不足とオリゴマー析出の為に作製され
た合金膜にひび割れやくもりが発生した。又、2N媒体
作製時にはNlce合金膜は作製可能であったがCoC
r合金膜を積層する時にNiFe合金膜にひび割れが生
じ良好な媒体は得らt′1. icかった。ところで、
合金膜の堆積速度を0.3μm/min程度に低下させ
、かつフ17− イルムを送行さす回転ドラムの温度なCoCr合金膜作
製時に110℃程度に低下させたところ、ややカールは
残存するものの外見上は良好な媒体を得ることができた
。このように、PETフィルムを基板に用いることも可
能であるが、大巾に生産性が低下する上、得られた媒体
の後述の再生出力も表裏とも実施例の約5割程I¥と低
いものであった。
Further, a perpendicular magnetic recording medium was prepared using a 750 μm thick PET film as a substrate under the same conditions as described above. In this case, cracks and cloudiness occurred in the produced alloy film due to insufficient heat resistance of the film and oligomer precipitation. Furthermore, although it was possible to fabricate an Nlce alloy film when fabricating a 2N medium, CoC
When laminating the r-alloy film, the NiFe alloy film cracked and a good medium could not be obtained t'1. It was ic. by the way,
When the deposition rate of the alloy film was lowered to about 0.3 μm/min and the temperature of the rotating drum for transporting the film was lowered to about 110°C during the production of the CoCr alloy film, the appearance remained although some curling remained. A good medium could be obtained. As described above, it is possible to use PET film for the substrate, but the productivity is greatly reduced, and the reproduction output (described later) of the obtained medium is about 50% lower than that of the example for both the front and back sides. It was something.

以下の表−2に得られた実施例と比較例の垂直磁気記録
媒体の結晶特性と磁気特性を示す。
Table 2 below shows the crystal properties and magnetic properties of the perpendicular magnetic recording media of Examples and Comparative Examples.

なお、表−2においてHe(h)は膜面に平行な方向の
面内で測定した保磁力、Hkは面内のM−H曲線よりめ
た異方性磁界である。
In Table 2, He(h) is the coercive force measured in the plane parallel to the film surface, and Hk is the anisotropic magnetic field measured from the in-plane MH curve.

表−2 18− 上表より、実施例ではフィルムの表裏共にまったく同一
の特性であるが、比較例では表裏に特性差があることが
わかる。この原因は表面物性、すなわち表面粗度やフィ
ルムの高分子鎖の配向や結晶化度が比較例のカプトンフ
ィルムでは表裏で異る為と考えられる。この点は、基板
のフィルムの表面粗度が実施例では中心線平均粗さで表
が0.006 pm、裏が0.007 pmと略同−で
あるが、比較例では麦がo、o o sμm、裏が0.
04μmと大巾に異なることからも首肯される。
Table 2 18- From the above table, it can be seen that in the Examples, both the front and back sides of the film have exactly the same characteristics, but in the Comparative Example, there is a difference in characteristics between the front and back sides. The reason for this is thought to be that the surface properties, that is, the surface roughness, the orientation of the polymer chains of the film, and the degree of crystallinity are different between the front and back sides of the comparative Kapton film. In this respect, the surface roughness of the substrate film is approximately the same in the example as 0.006 pm on the front side and 0.007 pm on the back side in terms of center line average roughness, but in the comparative example, wheat is o, o o sμm, back side is 0.
This is also supported by the large difference of 0.04 μm.

次に得られた実施例、比較例の媒体を0.5インチ巾に
スリットし、テープ駆動製雪な用い、ディジタル信号の
記録密度特性を調べた。ヘッドは特公昭58−91号公
報等で公知の補助磁極励磁形の垂直ヘッドを用い、主磁
極は実効厚さ1.4μm、トランク巾2 amのパーマ
ロイ膜を用い。
Next, the obtained media of Examples and Comparative Examples were slit into 0.5 inch widths, used in a tape drive snowmaking machine, and the recording density characteristics of digital signals were investigated. The head is an auxiliary pole excitation type vertical head known from Japanese Patent Publication No. 58-91, etc., and the main pole is a permalloy film with an effective thickness of 1.4 μm and a trunk width of 2 am.

補助磁極はSOOμm厚さのフェライト神に記録用30
ターン、再生用500ターンの巻線を施1.7だものを
用いた。テープ速度は記録時4.76σ/ 8ec 、
再生時9 、52 にIH/ secでNRZI−Al
l−1飽和記録を行った。
The auxiliary magnetic pole is made of SOOμm thick ferrite for recording purposes.
A wire with a diameter of 1.7 and a 500-turn winding for playback was used. The tape speed was 4.76σ/8ec during recording.
NRZI-Al at IH/sec at 9,52 when regenerated
l-1 saturation recordings were made.

第2図に、二層膜構成の実施例の表側の記録密度特性を
示す。横軸は記録密度(KBPI )、縦軸は再生出力
(mho −p )で、両軸共対数目盛である。2KB
PIと45KBPI (第2ピーク)と90KBPI 
(第3ピーク)の出力を表−3に示す。
FIG. 2 shows the recording density characteristics on the front side of an example having a two-layer film structure. The horizontal axis is the recording density (KBPI), the vertical axis is the reproduction output (mho-p), and both axes are on a logarithmic scale. 2KB
PI and 45KBPI (second peak) and 90KBPI
(Third peak) output is shown in Table 3.

従来使用されてきた比較例のカプトンフィルムでは表裏
の出力差が大きく両面使用のフレキシブル・ディスクに
はとうてい使用できないが、本発明の実施例では表裏共
に略同じの良好な電磁費換特性を示し、比較例のような
問題はない。
The comparative Kapton film that has been used in the past has a large output difference between the front and back sides and cannot be used for double-sided flexible discs, but the example of the present invention shows good electromagnetic cost conversion characteristics that are almost the same on both the front and back sides. There are no problems like the comparative example.

表−3 〔実施例−2〕 実施例−1と同じ物性を有する厚さ12μmのポリメタ
フェニレンイソフタルアミドフィルムを用い、電子通信
学会技術研究報告MR81−2に開示の通り、半連続真
空蒸着装置を用い斜め蒸着によりCoNi合金膜からな
る磁性薄膜を片面にのみ形成した。すなわち、フィルム
を300m直径の85°CK保った回転円筒キャン上K
n、35m/winで送行させながら最大入射角90°
、最小入射角(臨界入射角)55℃でCoNi合金膜を
蒸着した。蒸着はキャン下方221ff+の所に配した
ルツボ内に入れたCoNi合金ロッド(Ni :20w
t% )を270°偏向型の6kwの電子銃で加熱し、
酸素ガスを208CCM流し真空度I X 1 o−’
 Torrで行った。得られたCoNi合金膜の厚さは
2500A、テープ走行方向に測定した保磁力Heは3
80Qe。
Table 3 [Example 2] Using a 12 μm thick polymetaphenylene isophthalamide film having the same physical properties as Example 1, a semi-continuous vacuum evaporation apparatus was used as disclosed in the Institute of Electronics and Communication Engineers Technical Research Report MR81-2. A magnetic thin film made of a CoNi alloy film was formed on only one side by oblique evaporation. In other words, the film was placed on a rotating cylindrical can with a diameter of 300 m and maintained at 85°.
Maximum incident angle of 90° while traveling at n, 35m/win
A CoNi alloy film was deposited at a minimum incidence angle (critical incidence angle) of 55°C. The vapor deposition was carried out using a CoNi alloy rod (Ni: 20w) placed in a crucible placed at 221ff+ below the can.
t%) with a 270° deflection type 6 kW electron gun,
Flow 208 CCM of oxygen gas and vacuum degree I X 1 o-'
I went with Torr. The thickness of the obtained CoNi alloy film was 2500A, and the coercive force He measured in the tape running direction was 3.
80 Qe.

角形比0.88であった。The squareness ratio was 0.88.

さらに比較の為に実施例1と同じ特性の12μmのカプ
トンフィルムの表側にも同様のCoNi 合金膜の蒸着
を行い、同様の特性の磁性膜を得た。
Furthermore, for comparison, a similar CoNi alloy film was deposited on the front side of a 12 μm Kapton film with the same characteristics as in Example 1, to obtain a magnetic film with similar characteristics.

 21− 以上のような作製した磁気テープなO,Sインチ巾にス
リットし市販の東京電気化学工業■製のTDK−T−6
0カセツトに挿入し、日本ビクター■製HR−6700
VH8機で評価した。評価は再生画像の安定性を視覚判
定し、またドロップアウト(15μsec、20 dB
低下)を計測した。
21- The magnetic tape prepared as above was slit into O, S inch width and commercially available TDK-T-6 manufactured by Tokyo Denki Kagaku Kogyo ■.
Insert it into the 0 cassette, and use the HR-6700 made by Japan Victor
Evaluation was made using 8 VH machines. The evaluation was performed by visually judging the stability of the reproduced image, and also by checking the dropout (15 μsec, 20 dB).
(decrease) was measured.

結果を表−41C示す。The results are shown in Table 41C.

表−4 以上のように比較例では実施例に対し再生画像の安定性
、ドロップアウト共劣るが、この原因は実施例のカプト
ンフィルムの表面物性の不良及びヤング軍の低さによる
と思われる。
Table 4 As described above, the stability and dropout of the reproduced images in the comparative examples are inferior to those in the examples, but this is thought to be due to the poor surface properties of the Kapton film in the examples and the low Young's force.

また、PETフィルムを基板に用い同様にαNi合金膜
を作製した時はしばしばフィルムが22− 熱負けL溶断した。また、製膜可能な場合でも媒体のカ
ールがひどく後熱処理を施さねばならず、歩溜りが極め
てわるかった。
Further, when an αNi alloy film was similarly prepared using a PET film as a substrate, the film often melted due to heat loss. Further, even when film formation was possible, the curling of the medium was severe and post-heat treatment had to be performed, resulting in extremely low yields.

以上に述べたように本発明による芳香族ポリアミドフィ
ルムをベースとする磁気記録媒体はフレキシブル会ディ
スクにおいても、また磁気テープにおいても極めて良好
な特性が安価に手軽に得られた。%に媒体製造時に耐熱
性が要求される時、及び例えばフライトレコーダーに用
いる時のようFC媒体として耐熱性が要求される時は本
発明のベースフィルムが有効である。
As described above, the magnetic recording medium based on the aromatic polyamide film according to the present invention can easily and inexpensively provide extremely good characteristics both in flexible discs and magnetic tapes. The base film of the present invention is effective when heat resistance is required during medium production, and when heat resistance is required as an FC medium, for example when used in a flight recorder.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は実施例−1における媒体構成を示したものであ
り、(a)は単層両面媒体、(blは2層両面媒体であ
る。 第2図は実施4例−1の二層構成の記銖密度特性を示[
、たものである。 1:基板 2 :CoCr合金膜 3 : N5Fe合金膜 23− 回
Figure 1 shows the media configuration in Example-1, where (a) is a single-layer double-sided medium, (bl is a two-layer double-sided medium). Figure 2 shows the two-layer configuration of Example 4-1. Indicates the recording density characteristics of [
, is something. 1: Substrate 2: CoCr alloy film 3: N5Fe alloy film 23 times

Claims (1)

【特許請求の範囲】 1、 可撓性基板上に記録層として強磁性薄膜を形成し
た薄膜型磁気記録媒体において、前記可撓性基板が20
0℃における初期ヤング率か150ゆ/m♂以上で熱線
膨張係数が2.5X10−’cFrL/crrL/℃以
下の芳香族ポリアミドフィルムであることを特徴とする
薄膜型磁気記録媒体。 λ 前記芳香族ポリアミドフィルムが下記の二条性を満
足するポリメタフェニレンイソフタルアミド系フィルム
である特許請求の範囲第1項記載の薄膜型磁気記録媒体
。 a フィルムの密度d (、!i’/c/)カ1.3s
 〜1.41であること b NaのD線(波長ss9nm)Ic対する主屈折率
nα、nβ及びnγ(但し、主屈折率の値の大なる順に
na、nβ+nrとする)が次の両式を満足すること na−nβ、4o、os 3、 前記強磁性薄膜が垂直異方性膜である特許請求の
範囲第1項若しくは第2項記載の薄膜型磁気配録媒体。 4 前記可撓性基板がディスクである特許請求の範囲第
2項記載若しくは第3項記載の薄膜型磁気記録媒体。
[Claims] 1. A thin film magnetic recording medium in which a ferromagnetic thin film is formed as a recording layer on a flexible substrate, wherein the flexible substrate is
1. A thin film type magnetic recording medium characterized in that it is an aromatic polyamide film having an initial Young's modulus at 0°C of 150 Yu/m♂ or more and a linear thermal expansion coefficient of 2.5×10-'cFrL/crrL/°C or less. λ The thin film magnetic recording medium according to claim 1, wherein the aromatic polyamide film is a polymetaphenylene isophthalamide film that satisfies the following two-stripe property. a Film density d (,!i'/c/) 1.3s
~1.41 b The principal refractive indexes nα, nβ, and nγ (however, na, nβ+nr are set in descending order of the principal refractive index values) for the D-line (wavelength ss 9 nm) Ic of Na are expressed by the following two equations. 3. The thin film magnetic recording medium according to claim 1, wherein the ferromagnetic thin film is a perpendicularly anisotropic film. 4. The thin film magnetic recording medium according to claim 2 or 3, wherein the flexible substrate is a disk.
JP58126205A 1983-07-13 1983-07-13 Thin film type magnetic recording medium Pending JPS6018822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58126205A JPS6018822A (en) 1983-07-13 1983-07-13 Thin film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58126205A JPS6018822A (en) 1983-07-13 1983-07-13 Thin film type magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS6018822A true JPS6018822A (en) 1985-01-30

Family

ID=14929311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58126205A Pending JPS6018822A (en) 1983-07-13 1983-07-13 Thin film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS6018822A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739739A (en) * 1986-03-31 1988-04-26 Mitsubishi Denki Kabushiki Kaisha Fuel-injection control system for an internal combustion engine
JPH01232533A (en) * 1987-10-15 1989-09-18 Canon Inc Magnetic recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538613A (en) * 1978-09-05 1980-03-18 Toray Ind Inc Base film for magnetic recording medium
JPS5611624A (en) * 1979-07-10 1981-02-05 Fuji Photo Film Co Ltd Magnetic recording material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538613A (en) * 1978-09-05 1980-03-18 Toray Ind Inc Base film for magnetic recording medium
JPS5611624A (en) * 1979-07-10 1981-02-05 Fuji Photo Film Co Ltd Magnetic recording material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739739A (en) * 1986-03-31 1988-04-26 Mitsubishi Denki Kabushiki Kaisha Fuel-injection control system for an internal combustion engine
JPH01232533A (en) * 1987-10-15 1989-09-18 Canon Inc Magnetic recording medium

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