JPS60187674A - Manufacture of thin metallic film - Google Patents

Abstract

PURPOSE:To form stably a thin metallic film with no crease on a polymer substrate while preventing the thermal deformation of the substrate by preheating the substrate on the inlet side of a cylindrical can and moving it along the outside of the can. CONSTITUTION:A long-sized polymer substrate 5 of polyethylene terephthalate or the like is moved along the outside of a cylindrical can 6, and a thin metallic film is formed on the substrate 5 by vapor deposition with an evaporating source 10 on which an electron beam 9 is incident. At this time, the substrate 5 is preheated with a roll 18 heated to about 70-110 deg.C at a position close to the inlet side of the can 6 to prevent the sudden thermal deformation of the substrate 5 contacting with the heated can 6. By this method a thin metallic film with no crease can be manufactured on the substrate 5 at a high speed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a method of manufacturing a thin metal film on a long polymer substrate.

Conventional Structures and Problems There are vacuum evaporation methods, sputtering methods, plating methods, etc. for manufacturing thin metal films, but there is no method for manufacturing excellent metal thin films on long polymer substrates with high productivity. The vacuum evaporation method is the best. Figure 1 shows a long length j made by vacuum evaporation method.
An example of a method for manufacturing a metal thin film on a single molecule substrate is shown below. The polymer substrate 5 unwound along the rotational direction 41 from the unwinding roll 3 in the vacuum chamber 2 evacuated to high vacuum by the exhaust system 1 is exposed to the opening of the mask 7 while traveling along the can (5). In this process, an electron beam 9 is incident from an electron gun 8, and after the metal thin film is deposited from an evaporation source 10, it is wound up on a winding wheel 11. According to this method, a long polymer film is Although it is possible to fabricate a metal thin film on the substrate 5 with high productivity, the polymer substrate 5 may lose heat due to the heat load received during vapor deposition, and in that case, some countermeasures are required. A particularly effective method is to apply a bias to the polymer substrate. An example of the substrate bias method is shown in Figure 2. In Figure 2, 12 is a bias roller, and applying a voltage to it As a result, the polymer substrate 5 sticks to the grounded can 6 due to electrostatic attraction during the formation period of the stem and crotch.As a result, most of the heat load during vapor deposition can be released to the can (j). , heat loss of the polymer substrate 5 can be prevented.

Further, as an example of forming a metal thin film having a multilayer structure, a case can be considered in which a metal layer as a base layer has already been formed on the polymer substrate 5''. In such a case, the polymer substrate 5 is suddenly moved by the bias voltage at the entrance of the can 6.
When it is attached to the polymer substrate 5, tortoise shell-like wrinkles are formed on the polymer substrate 5, and these wrinkles remain even after vapor deposition. Figure 3 shows the appearance of wrinkles at this time.

5 is a polymer substrate, 13 is a margin portion (a portion that is not vapor deposited), 14 is a vapor deposited portion, and 15 is a tortoise shell-like wrinkle. In order to prevent this wrinkle, a nip roller 24 is provided on the inlet side of the can 6 as shown in FIG. A thin metal film may also be formed. However, a more effective method is to install an earth roller 16 on the can 6 before vapor deposition, as shown in FIG. 5, so that the bias voltage is not applied to the polymer substrate 5 on the can 6 halfway. There is a way to do it.

This makes it possible to apply a bias voltage in a similar way to the case where the underlying gold layer has not been formed in advance.

On the other hand, for several reasons, such as improving film adhesion, preventing curling, or improving film properties, the substrate 6
There are cases where it is necessary to increase the J1 degree.

In such a case, the substrate temperature can be raised by changing the can 6 in which the vapor deposition is performed.

However, to raise the substrate temperature of polymer substrate! (New wrinkles occur due to thermal deformation such as expansion or thermal contraction. In other words, wrinkles like those shown in Figures 3 and 6 tend to appear when the substrate temperature is increased, and the tension in the substrate running direction increases. If the tension is relatively weak, turtle shell-like wrinkles like the one shown in Figure 3 will appear when the tension is relatively strong, and if the tension is relatively strong, vertical wrinkles like the one shown in Figure 6 will appear. The present inventors have discovered that weak wrinkles appear in the polymer substrate 5 on the can 6 due to rapid thermal deformation of the molecular substrate 5, and that the wrinkles are accentuated during the vapor deposition process with the bias applied F. The results of the investigation were clear. It was also found that when the surface properties of the wrinkled can 6 and the polymer substrate 5 are good, a strong force is applied.

OBJECT OF THE INVENTION The object of the present invention is to produce a metal thin film on a heated elongated polymer substrate without wrinkles.

Structure of the Invention This invention provides a method for forming a metal thin film by vacuum evaporation on a long polymer substrate running along the peripheral side of a heated cylindrical can. This is a method for manufacturing a metal BH3 film characterized by heating the substrate in advance, thereby preventing thermal deformation of the polymer substrate during canning [1], and forming a metal thin film on the heated long polymer substrate. can be manufactured stably and at high speed without wrinkles.

DESCRIPTION OF THE EMBODIMENT FIG. 7 shows an example in which a heating roller 1) 3 is used as an example of the preheating method. Width 100 as polymer substrate 5
~150+u, using a polyethylene telesotalate (hereinafter abbreviated as PET) substrate 5 with a thickness of 20 μm,
NH8, -Fe+J! with a can temperature of 90°C! I.J.
(hereinafter abbreviated as '81Pa film) was formed to a thickness of 2000 mm by vacuum evaporation at a substrate speed of 10 m for 7 minutes. Kame:!
10-la 1) (the minimum distance between can 6 is 0.1-10
In order. The bias roller 12 is supplied with DC -1o.

■ was applied. The diameter of the heating roller 18 is 100 mm.
The diameter of the can 6 is 500III11. If the heating roller 18 is set to room temperature 7 and installed, the image shown in Fig. 3 or 6 will be shown.
Although wrinkles as shown in the figure were generated, no wrinkles were generated when the temperature of the heating roller 18 was set to 70 to 110'C. However, when using a PET substrate with a thickness of 12 μm, although this method reduced the brightness, it did not completely eliminate it. At this time, as shown in FIG. By setting the temperature to 80°C, it was possible to prevent wrinkles from forming.The diameters of the first and second joints 19 and 20 were both 100 + u, and the distance between them was 1~ There were 5 questions.

In addition, when using a heat-resistant substrate, the thickness is 10 to 20 p.
Using a polyimide substrate of m, the can temperature is 2oo'c.
When an 81 Pa film is formed to a thickness of 2000 mm by vacuum evaporation at a substrate speed of 10 m/min with the configuration shown in FIG. 7 and the heating roller 18 is at room temperature, wrinkles as shown in FIG. 3 or 6 occur. However, when the temperature of the heating roller 18 was set to 18°C to 220°C, no wrinkles were generated.

Next, as an example of forming a metal thin film by vacuum evaporation on a metal thin film layer already formed on the long polymer substrate 5'2, we will describe the case where 81 Pa thin ribs are formed on the Ti base layer'2. . Note that when a thin Ti layer is used as the 81 Pa underlayer, the crystal orientation of PaFi is improved. thickness 5
On a 0 μm P T', T substrate, a Ti underlayer was formed to a thickness of 500 μm, and then an 8 JPa thin film layer was formed to a thickness of 2000 μm by the method shown in FIG. The substrate speed was 10 m/min, and the can temperature was 90°C. When the heating roller 18 was brought to room temperature, wrinkles appeared as shown in FIG.
The generation of wrinkles was prevented by setting the temperature to -110°C.

Similarly, using a PET substrate with a thickness of J2μ, a Ti base layer was coated with 5.
When 81 Pa was formed on a 0.00 mm thick mold, the method shown in FIG. 9 reduced wrinkles but did not completely eliminate them. Therefore, as shown in FIG.
1) and the second heating roller 20 to first heat 1 cola I
9 and the second heating roller 20 to about 80° C., the wrinkles completely disappeared. Also, as a heat-resistant substrate, the thickness is 20μ.
Using a polyimide substrate with a thickness of 500 mm, a Tt undercoat was formed in advance to a thickness of 500 mm, and the can temperature was set to 200 °C and 81 Pa.
A film was formed to a thickness of 2000 by vacuum evaporation at a substrate speed of 10 m/min. At this time, when heating roller 8 was set at room temperature with the configuration shown in FIG. 9, wrinkles as shown in FIG. 3 or FIG.
No wrinkles occurred when the temperature was between 220°C and 220°C.

Next, FIG. 11 shows an example in which optical heating is used as another example of preheating. In FIG. 11, reference numeral 21 denotes a light heating device, which heats the polymer substrate 5 even before it comes into contact with the can 76, so that the polymer substrate 5 is subjected to rapid thermal deformation when it comes into contact with the can 6. There is no wrinkles, preventing the appearance of wrinkles.

An example of the optical heating device 21 is shown in FIG. In FIG. 12, a halogen lamp 23 is placed in a lamp case 22 whose inside is mirror-finished, and the polymer substrate 5 can be heated by this. When a colorless and transparent polymer substrate on which a base layer was not formed was used, no optical heating effect was obtained. However, if the method shown in FIG. 11 is used to form an 81 Pa film at a substrate speed of 10 m/min at a can temperature of 200° C. using a polyimide substrate with a thickness of 20 μm, for example, the power input to the optical heating device 21 is zero. In this case, wrinkles as shown in FIG. 3 or FIG. 6 were generated, but the generation of wrinkles was prevented by inputting a power of 300 W per 1 cm of substrate width to the optical heating device 21. The distance between the optical heating device 21 and the polymer substrate 5 was 10 mm.

Further, when a polymer substrate 5 on which a base layer has already been formed is used as a substrate, the configuration shown in FIG. 13 is suitable. For example, in the configuration shown in Figure 13, the thickness is 50 μm.
A Ti base layer was formed on a PET substrate with a thickness of 5 f) at a substrate speed of 10 m/min and a scan temperature of 90°C.
A Pa thin film layer was formed to a thickness of 2000 mm. Light heating device 2
When zero power was applied to the substrate 1, wrinkles as shown in FIG. 6 occurred, but by applying 40 W of power per 1 cm of substrate width to the optical heating device 21, wrinkles were prevented from occurring.

Effects of the Invention According to the present invention, a metal thin film can be produced without wrinkles and at high speed on a heated long polymer substrate.

[Brief explanation of the drawing]

Figures 1, 2, 4 and 5 are explanatory diagrams respectively showing conventional examples of the method for producing metal thin films by continuous winding vacuum evaporation, and Figures 3 and 6 are conventional examples with problems. 7 to 13 are explanatory diagrams showing wrinkles, and FIGS. 7 to 13 are explanatory diagrams showing embodiments of the present invention. l... Exhaust system, 2... Vacuum chamber, 3... Unwinding roll, 4... Rotation direction, 5... Polymer substrate, 6...
Can, 7... Mask, 8... Electron gun, 9... Electron beam, 10... Evaporation source, ■l... Winding roll, 12... Bias roller, 13... Margin Part, 14... Vapor deposition part, 15... Turtle seed wrinkles, 1
6...Earth [I-Ra, 17...Vertical wrinkles, 18.
... Heating roller, 19... First heating roller, 20...
- Second heating roller, 21... optical heating device, 22...
Lamp case, 23...Halogen lamp, 24...
Nip roller Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 7 Fig. 8 Fig. 9 Fig. 10 Fig. 11 Fig. 12

Claims (1)

[Scope of Claims] ill A step of preheating a long polymer substrate, which is caused to run along the circumferential surface of a cylindrical can that has been heated to an additional g465f, near the entrance 11 side of the cylindrical can; 2. Forming a metal thin film on the elongated polymer substrate running along the circumferential surface of the long polymer substrate by vacuum evaporation. (2) A method for manufacturing a metal thin film according to claim 11, in which a long polymer substrate on which a base metal layer is previously formed is used. (3) Heating as a means of preheating. A method for producing a metal thin film according to claim f1.1 or claim (2) using a roller. (4) A method of manufacturing a metal thin film according to claim f1.1 or claim (2) using a roller. A method for producing a metal thin film according to claim 3. (5) Any one of claim 3, wherein the distance between the heating roller closest to the cylindrical can and the cylindrical can is 1OL111 or less. The method for manufacturing a metal thin film according to item 1 or item (4). ) The method for manufacturing a metal thin film according to claim 1 or (4). (7) The method of manufacturing a metal thin film according to claim 1 or (4). (8) The method for manufacturing a metal thin film according to claim (7), wherein a halogen lamp is used as a light source for optical heating.