JPS6018288A - レ−ザ加工装置のモニタ−リング方法 - Google Patents

レ−ザ加工装置のモニタ−リング方法

Info

Publication number
JPS6018288A
JPS6018288A JP58124646A JP12464683A JPS6018288A JP S6018288 A JPS6018288 A JP S6018288A JP 58124646 A JP58124646 A JP 58124646A JP 12464683 A JP12464683 A JP 12464683A JP S6018288 A JPS6018288 A JP S6018288A
Authority
JP
Japan
Prior art keywords
laser
mirror
laser light
reflected
transparent plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58124646A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245036B2 (enrdf_load_stackoverflow
Inventor
Takeji Egashira
江頭　武二
Tokuo Haruta
春田　徳男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP58124646A priority Critical patent/JPS6018288A/ja
Publication of JPS6018288A publication Critical patent/JPS6018288A/ja
Publication of JPS6245036B2 publication Critical patent/JPS6245036B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP58124646A 1983-07-11 1983-07-11 レ−ザ加工装置のモニタ−リング方法 Granted JPS6018288A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58124646A JPS6018288A (ja) 1983-07-11 1983-07-11 レ−ザ加工装置のモニタ−リング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58124646A JPS6018288A (ja) 1983-07-11 1983-07-11 レ−ザ加工装置のモニタ−リング方法

Publications (2)

Publication Number Publication Date
JPS6018288A true JPS6018288A (ja) 1985-01-30
JPS6245036B2 JPS6245036B2 (enrdf_load_stackoverflow) 1987-09-24

Family

ID=14890554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58124646A Granted JPS6018288A (ja) 1983-07-11 1983-07-11 レ−ザ加工装置のモニタ−リング方法

Country Status (1)

Country Link
JP (1) JPS6018288A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777341A (en) * 1987-08-18 1988-10-11 Quantum Laser Corporation Back reflection monitor and method
US5938953A (en) * 1996-07-27 1999-08-17 Jurca Optoelektronik Gmbh Laser beam apparatus for machining a workpiece
JP2010240674A (ja) * 2009-04-02 2010-10-28 Ihi Corp レーザ溶接装置及びレーザ溶接方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4253365B2 (ja) * 1997-10-17 2009-04-08 オリンパス株式会社 ウェハ搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4777341A (en) * 1987-08-18 1988-10-11 Quantum Laser Corporation Back reflection monitor and method
US5938953A (en) * 1996-07-27 1999-08-17 Jurca Optoelektronik Gmbh Laser beam apparatus for machining a workpiece
JP2010240674A (ja) * 2009-04-02 2010-10-28 Ihi Corp レーザ溶接装置及びレーザ溶接方法

Also Published As

Publication number Publication date
JPS6245036B2 (enrdf_load_stackoverflow) 1987-09-24

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