JPS60182742A - Integrated circuit - Google Patents

Integrated circuit

Info

Publication number
JPS60182742A
JPS60182742A JP59037843A JP3784384A JPS60182742A JP S60182742 A JPS60182742 A JP S60182742A JP 59037843 A JP59037843 A JP 59037843A JP 3784384 A JP3784384 A JP 3784384A JP S60182742 A JPS60182742 A JP S60182742A
Authority
JP
Japan
Prior art keywords
buses
pads
pad
bus
changeover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59037843A
Other languages
Japanese (ja)
Inventor
Yoshihiro Takemae
義博 竹前
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59037843A priority Critical patent/JPS60182742A/en
Publication of JPS60182742A publication Critical patent/JPS60182742A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0207Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To extract only a bus, and to inspect the bus simply in a short time by connecting another terminal separate from the pad connecting terminal of the bus connecting a functional block and a junction pad for external connection to a pad for inspecting the bus. CONSTITUTION:Buses 3 connecting a memory block 2 and a junction pad group 4 for external connection are formed to a pectinate shape, pad groups 5 for inspection are fitted at the terminals of the buses (signal lines), and the buses are inspected by a probe. According to the constitution, only the buses are extracted without operating the memory block 2, and the buses can be inspected in a short time. Changeover pads 6A-6E are lead out actually from the buses 3A-3E, signals are transmitted over the changeover pads, and a designated inspecting pad 5 is selected through a transfer gate. The changeover pads 6 are kept at grounding potential at all times, and the buses are selected in such a manner that supply voltage is applied to the changeover pads and a transistor is turned ON. Accordingly, stable contacts among the probe and the pads are obtained by the inspecting pads 5 in the same number as the buses.

Description

【発明の詳細な説明】 (a)0発明の技術分野 本発明は基板上に、機能ブロックとして演算機能、記憶
機能等を有する回路を複数個配置し、これらの機能ブロ
ックとボンディング・パッドを信号線、電源線よりなる
母線で接続し、各機能ブロックよりさらに高度のまたは
大規模の機能を持たせた集積回路に関する・ ここで云う母線のうちの信号線とはアドレス信号線、デ
ータ信号線、制御信号線、同期信号線等を意味する。
Detailed Description of the Invention (a) 0 Technical Field of the Invention The present invention involves arranging a plurality of circuits having arithmetic functions, storage functions, etc. as functional blocks on a substrate, and connecting these functional blocks and bonding pads with signals. Regarding integrated circuits that are connected by a bus line consisting of wires, power supply lines, and have more advanced or large-scale functions than each functional block. Refers to control signal lines, synchronization signal lines, etc.

(b)、技術の背景 近年集積回路の大規模化に伴い、20mm角あるいはそ
れ以上の大きなチップに、さらに半導体基板全面にメモ
リ、マイクロ・コンピュータ等を載せた集積回路を形成
することが検討されている。
(b) Background of the technology In recent years, with the increase in the scale of integrated circuits, consideration has been given to forming integrated circuits on large chips of 20 mm square or larger, with memory, microcomputers, etc. mounted on the entire surface of a semiconductor substrate. ing.

この場合、最も重要な問題は生産収率と信頼性の確保で
あり、これらの問題を徹底的に究明して解決しておかな
ければ、製品化はできない。
In this case, the most important issues are ensuring production yield and reliability, and commercialization will not be possible unless these issues are thoroughly investigated and resolved.

例えば、メモリにおいては現状では64kb程度の集積
回路では生産収率もよく、信頼性も確認されている。
For example, in the case of memory, at present, integrated circuits of about 64 kb have a good production yield and have been confirmed to be reliable.

これ以上の大規模メモリ集積回路においては、不良ピン
トの救済に、予備のビットを置き換える等の冗長度技術
を考慮しなければならない場合も生ずる。現状のメモリ
集積回路は、チップ面積の約50%がメモリセル、約3
0%がデコーダとアドレスバッファ、クロック回路、タ
イミング回路、あるいは読み出し信号の増幅器等よりな
る周辺回路、残りの約20%が外部接続用のパッドであ
る。
In larger scale memory integrated circuits, it may be necessary to consider redundancy techniques such as replacing spare bits in order to repair defective pinpoints. In current memory integrated circuits, about 50% of the chip area is made up of memory cells, and about 3
0% is peripheral circuitry consisting of a decoder, address buffer, clock circuit, timing circuit, or read signal amplifier, etc., and the remaining approximately 20% is pads for external connection.

従ってメモリセル部分は前記の冗長度技術により救済で
きても、その他の部分で重大な欠陥があると集積回路自
体が不良になってしまうことになる。
Therefore, even if the memory cell portion can be repaired using the redundancy technique described above, if there is a serious defect in other portions, the integrated circuit itself will become defective.

周知のように生産収率は、確率的にも集積回路の集積化
に伴って激減する。従って集積回路の製造技術のレベル
に合わせた規模の機能ブロックに分け、この機能ブロッ
クを大チップまたは半導体基板上に集積して構成される
集積回路の実現性が大きくなってきた。
As is well known, production yields decrease dramatically as integrated circuits become more integrated. Therefore, it has become increasingly possible to realize integrated circuits that are divided into functional blocks of a scale that matches the level of integrated circuit manufacturing technology and are integrated on large chips or semiconductor substrates.

(C)、従来技術と問題点 第1図に、機能ブロックとして現状の製造技術のレベル
に合わせた規模のメモリ集積回路を多数集積した大規模
メモリ集積回路の平面図を示す。
(C), Prior Art and Problems FIG. 1 shows a plan view of a large-scale memory integrated circuit in which a large number of memory integrated circuits of a scale matching the current level of manufacturing technology are integrated as functional blocks.

図において1は半導体基板、2ば機能ブロックとしての
メモリ集積回路(メモリ・ブロック)、3は母線、4は
ボンディング・パッド群、またはボンディング・パッド
群および制御回路を示す。
In the figure, 1 is a semiconductor substrate, 2 is a memory integrated circuit (memory block) as a functional block, 3 is a bus bar, and 4 is a bonding pad group or a bonding pad group and a control circuit.

制御回路は信号線の駆動回路とデコーダよりなる。The control circuit consists of a signal line drive circuit and a decoder.

母線3内の共通の信号線を通じて、ボンディング・パッ
ド群と各メモリ・ブロック間で、読み出し、書き込み、
およびそれを制御するクロック信号の授受が行われる。
Through a common signal line in the bus 3, read, write,
And a clock signal for controlling it is exchanged.

図中の矢印はそれを示している。The arrow in the figure indicates this.

生産収率と信頼性については、機能ブロックは十分検B
+Jされているが、このような大規模集積回路において
は、新たに追加された信号線等の母線の信転性が問題と
なる。従来は総てのメモリ・ブロックを動作させ、信号
線が全部動作しているがどうかを検査していた。このた
め検査に長時間を要し、また検査自身の信軌性にも問題
が生じる。
Regarding production yield and reliability, functional blocks have been thoroughly tested.
However, in such large-scale integrated circuits, the reliability of newly added bus lines such as signal lines becomes a problem. Conventionally, all memory blocks were operated to check whether all signal lines were operating. For this reason, it takes a long time to perform the test, and there are also problems with the reliability of the test itself.

生産収率を上げるために、信号線に不良があった場合は
予備の信号線に切り替えることも可能であり、そのため
にも信号線だけを取り出して単独に検査できる構造の集
積回路が望まれる。
In order to increase production yield, it is possible to switch to a spare signal line if a signal line is defective, and for this reason, it is desirable to have an integrated circuit with a structure in which only the signal line can be taken out and inspected individually.

(d)8発明の目的 本発明の目的は従来技術の有する上記の欠点を除去し、
基板上に、機能ブロックと、外部接続用のボンディング
・パッドと、両者を接続する母線とを設けてなり、かつ
この母線の検査を、各機能ブロックを動作させることな
く母線だレノを取り出して、簡易に短時間で行えること
を可能とした集積回路を得ることにある。
(d) 8 Objectives of the Invention The objectives of the present invention are to eliminate the above-mentioned drawbacks of the prior art;
A functional block, a bonding pad for external connection, and a bus bar connecting the two are provided on the board, and the bus bar can be inspected by taking out the bus bar without operating each functional block. The object of the present invention is to obtain an integrated circuit that can be easily implemented in a short time.

(e)0発明の構成 上記の目的は本発明によれば、基板上に、機能プロ・7
りと、外部接続用のホンディング・バンドと、該機能ブ
ロックと該ボンディング・パッドを接続する母線とを設
りてなり、かつ該母線のボンディング・パッド接続端と
は異なる他端が、該母線を検査するためのチェツキング
・パッドに接続されていることを特徴とする集積回路を
提供することによって達成される。
(e)0 Structure of the Invention According to the present invention, the above-mentioned object is achieved by installing a functional program 7 on a substrate.
and a bonding band for external connection, and a bus bar connecting the functional block and the bonding pad, and the other end of the bus bar, which is different from the bonding pad connection end, is connected to the bus bar. This is achieved by providing an integrated circuit characterized in that the integrated circuit is connected to a checking pad for testing.

本発明はさらに制御回路、切り換え回路を用いて、上記
大規模集積回路の数100本以上の重大な数にのぼる信
号線等よりなる母線の検査を、プロービング検査が可能
な50個以下のチェツキング・パッドを用いて、総ての
母線の検査を可能にできる。
The present invention further utilizes a control circuit and a switching circuit to inspect busbars consisting of over 100 signal lines, etc., in the large-scale integrated circuit, by checking 50 or less lines that can be inspected by probing. Pads can be used to allow inspection of all busbars.

(f)3発明の実施例 第2図は本発明の実施例を示す集積回路の平面図で、以
下の図において第1図と同一番号は同一対象を示す。図
において5はチェツキング・パッド群を示す。
(f) 3 Embodiments of the Invention FIG. 2 is a plan view of an integrated circuit showing an embodiment of the present invention. In the following figures, the same numbers as in FIG. 1 indicate the same objects. In the figure, 5 indicates a group of checking pads.

図示されるように信号線の終端にチェツキング・パッド
を設けて、これを使ってプロービング検査を行い、それ
ぞれの信号線が正常がどうかを調べる。このようにする
と、メモリ・ブロックを動作さ・けることなく、母線だ
けを取り出して短時間に検査を行うことができる。
As shown in the figure, a checking pad is provided at the end of the signal line, and this is used to perform a probing test to check whether each signal line is normal. In this way, only the bus bar can be taken out and tested in a short time without operating the memory block.

第3図はチェツキング・パッド群の拡大図を示す。図に
おいて5a、5b、5c、・・・等は1本の信号線に対
する各配線のチェツキング・パッドを示す。
FIG. 3 shows an enlarged view of the checking pad group. In the figure, 5a, 5b, 5c, . . . indicate checking pads of each wiring for one signal line.

第2図では5″半導体基板に5本の母線が櫛形に設けら
れ、1本の母線の中には数10本の信号線と電源線が走
っており、従ってチェツキング・パッドの総数は数10
0にもおよぶ。これらのチェツキング・パッドに対して
数100本のプローブを立てて、プロービング検査を行
う場合、総てのパッドがうまく接続されるとは限らず、
同時に母線内の線の全数検査は難しくなる。現状のプロ
ービング検査では、最もピン数の多いランダム・ロジッ
ク集積回路で40〜100本程度で、これ以」二はブロ
ービング機構の構造上プローブとパ・ノドの接触が不安
定となる。
In Figure 2, five busbars are provided in a comb shape on a 5" semiconductor substrate, and several tens of signal lines and power supply lines run within one busbar. Therefore, the total number of checking pads is several dozen.
As many as 0. When performing a probing test by setting up hundreds of probes on these checking pads, not all pads may be connected well.
At the same time, it becomes difficult to inspect all the lines within the busbar. In the current probing test, random logic integrated circuits with the largest number of pins have about 40 to 100 pins, and beyond this, the contact between the probe and the pad node becomes unstable due to the structure of the probing mechanism.

そのため第4図に示される切り換え回路を設ける。図に
おいて3A、3B、3C,3D、3Eは母線、6A、6
B、6’C,6D、6Eは切り換えバンドを示す。
Therefore, a switching circuit shown in FIG. 4 is provided. In the figure, 3A, 3B, 3C, 3D, 3E are bus bars, 6A, 6
B, 6'C, 6D, and 6E indicate switching bands.

図において、切り換えバンドに信号を入れ、トランスフ
ァ・ゲートを通して何処の母線をチェツキング・パ・7
ドに接続するかを選択する。すJり換えパッドば常時接
地電位に保たれており、母線の選択は切り換えバンドに
電源電圧をかけてトランジスタをオンさせることにより
行われる。このように母線の数と同数の切り換えバンド
をもつ切り換え回路を用いることにより、母線を数10
木で構成すれば、同数のチェツキング・パッドでずむこ
とになり、安定したプローブとパッドの接触が得られる
In the figure, a signal is input to the switching band, and the bus line is checked through the transfer gate.
Select whether to connect to the The switching pad is always kept at ground potential, and bus selection is performed by applying a power supply voltage to the switching band and turning on the transistor. In this way, by using a switching circuit with the same number of switching bands as the number of busbars, the number of busbars can be reduced to several 10.
If it is made of wood, it will be supported by the same number of checking pads, and stable contact between the probe and the pads will be obtained.

第5図は母線を、前例のように櫛形でなく1本のライン
で蛇行して半導体基板上に配置した例を示す。この場合
もチェツキング・パッド群5を、母線の終端に設けて母
線群の検査を行うことができる。
FIG. 5 shows an example in which the busbars are arranged in a meandering line on a semiconductor substrate instead of in a comb shape as in the previous example. In this case as well, the checking pad group 5 can be provided at the end of the bus bar to inspect the bus bar group.

検査方法は、ボンディング・パッドより、または制御回
路を動作させて母線に信号を送り、チェツキング・パッ
ド群に伝送されているかどうかを調べる。数cm角の半
導体基板を用いる場合はボンディング・パッドだけでよ
いが、実施例のように大きな半導体基板を用いる場合は
前記の制御回路を用いる。
The test method involves sending a signal to the bus from the bonding pad or by operating a control circuit, and checking whether the signal is being transmitted to the checking pad group. If a semiconductor substrate of several cm square is used, only a bonding pad is required, but if a large semiconductor substrate is used as in the embodiment, the control circuit described above is used.

実施例では基板に半導体基板を用いたが、他の基板、例
えば絶縁体基板等を用いてもよく、また機能ブロックと
してメモリ・ブロックを用いたが、他の機能ブロック、
例えば演算ブロック等を用いても発明の要旨は変わらな
い。
In the embodiment, a semiconductor substrate was used as the substrate, but other substrates such as an insulator substrate may also be used. Also, although a memory block was used as the functional block, other functional blocks,
For example, the gist of the invention does not change even if a calculation block or the like is used.

また実施例のように、母線のボンディング・パッド側に
制御回路、チェツキング・パッド側に切り換え回路を挿
入しても、あるいはこれらの回路の何れかを挿入しても
、あるいはこれらの回路を挿入しなくても発明の要旨は
変わらない。
Furthermore, as in the embodiment, even if a control circuit is inserted on the bonding pad side of the busbar and a switching circuit is inserted on the checking pad side, or even if one of these circuits is inserted, or even if these circuits are inserted. Even without it, the gist of the invention does not change.

(g)0発明の効果 以」二詳細に説明したように本発明によれば、基板」二
に、機能ブロックと、外部接続用のボンディング・パッ
ドと、両者を接続する母線とよりなり、かつこの母線の
検査を、各機能プロ・ツクを動作させることなく母線だ
けを取り出して、簡易に短時間で行えることを可能とし
た集積回路を得ることができる。
(g) 0 Effects of the Invention According to the present invention, as described in detail, the substrate 2 comprises a functional block, a bonding pad for external connection, and a bus bar connecting the two, and It is possible to obtain an integrated circuit in which this bus bar inspection can be easily and quickly carried out by taking out only the bus bar without operating each functional program.

【図面の簡単な説明】 第1図は従来例による集積回路の平面図、第2図は本発
明の実施例を示す集積回路の平面図、第3図はチェツキ
ング・パッド群の拡大図、第4図は切り換え回路、第5
図は本発明の他の実施例を示す集積回路の平面図である
。 図において1は半導体裁板、2は機能プロ・ツク、3.
3A、3B、3C,3D、3Bは母線、4はボンディン
グ・パッド群、5ばチェツキング・パッド群、5 a 
+ 5 b+ J C+ ・・・はチェツキング・バン
ド、6A、6B、6G、6D、6Eは切り換えパッドを
示す。 第2図 #3@ 蓼S吋
[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a plan view of an integrated circuit according to a conventional example, FIG. 2 is a plan view of an integrated circuit showing an embodiment of the present invention, FIG. 3 is an enlarged view of a group of checking pads, and FIG. Figure 4 shows the switching circuit, Figure 5.
The figure is a plan view of an integrated circuit showing another embodiment of the present invention. In the figure, 1 is a semiconductor cutting board, 2 is a functional processor, and 3.
3A, 3B, 3C, 3D, 3B are bus bars, 4 is a bonding pad group, 5 is a checking pad group, 5a
+ 5 b+ J C+ . . . indicates a checking band, and 6A, 6B, 6G, 6D, and 6E indicate switching pads. Figure 2 #3 @ 蓼S吋

Claims (1)

【特許請求の範囲】[Claims] 基板上に、機能ブロックと、外部接続用のボンディング
・バンドと、該機能ブロックと該ボンディング・パッド
を接続する母線とを設けてなり、かつ該母線のボンディ
ング・パッド接続端とは異なる他端が、該母線を検査す
るためのチェツキング・バンドに接続されていることを
特徴とする集積回路。
A functional block, a bonding band for external connection, and a bus bar connecting the functional block and the bonding pad are provided on the board, and the other end of the bus bar is different from the bonding pad connection end. , connected to a checking band for testing the bus bar.
JP59037843A 1984-02-29 1984-02-29 Integrated circuit Pending JPS60182742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59037843A JPS60182742A (en) 1984-02-29 1984-02-29 Integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59037843A JPS60182742A (en) 1984-02-29 1984-02-29 Integrated circuit

Publications (1)

Publication Number Publication Date
JPS60182742A true JPS60182742A (en) 1985-09-18

Family

ID=12508809

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59037843A Pending JPS60182742A (en) 1984-02-29 1984-02-29 Integrated circuit

Country Status (1)

Country Link
JP (1) JPS60182742A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992002043A1 (en) * 1990-07-23 1992-02-06 Seiko Epson Corporation Semiconductor integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992002043A1 (en) * 1990-07-23 1992-02-06 Seiko Epson Corporation Semiconductor integrated circuit device

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