JPS60181366U - 複数の電子ビ−ムにより材料を加熱する装置 - Google Patents

複数の電子ビ−ムにより材料を加熱する装置

Info

Publication number
JPS60181366U
JPS60181366U JP6765284U JP6765284U JPS60181366U JP S60181366 U JPS60181366 U JP S60181366U JP 6765284 U JP6765284 U JP 6765284U JP 6765284 U JP6765284 U JP 6765284U JP S60181366 U JPS60181366 U JP S60181366U
Authority
JP
Japan
Prior art keywords
electron beams
magnetic
magnetic poles
multiple electron
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6765284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0243866Y2 (enrdf_load_stackoverflow
Inventor
渡辺　完治
金田一　要三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP6765284U priority Critical patent/JPS60181366U/ja
Publication of JPS60181366U publication Critical patent/JPS60181366U/ja
Application granted granted Critical
Publication of JPH0243866Y2 publication Critical patent/JPH0243866Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6765284U 1984-05-09 1984-05-09 複数の電子ビ−ムにより材料を加熱する装置 Granted JPS60181366U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6765284U JPS60181366U (ja) 1984-05-09 1984-05-09 複数の電子ビ−ムにより材料を加熱する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6765284U JPS60181366U (ja) 1984-05-09 1984-05-09 複数の電子ビ−ムにより材料を加熱する装置

Publications (2)

Publication Number Publication Date
JPS60181366U true JPS60181366U (ja) 1985-12-02
JPH0243866Y2 JPH0243866Y2 (enrdf_load_stackoverflow) 1990-11-21

Family

ID=30601670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6765284U Granted JPS60181366U (ja) 1984-05-09 1984-05-09 複数の電子ビ−ムにより材料を加熱する装置

Country Status (1)

Country Link
JP (1) JPS60181366U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149955A (ja) * 1987-12-07 1989-06-13 Anelva Corp 薄膜製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149955A (ja) * 1987-12-07 1989-06-13 Anelva Corp 薄膜製造装置

Also Published As

Publication number Publication date
JPH0243866Y2 (enrdf_load_stackoverflow) 1990-11-21

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