JPS60175313A - Method of annealing transparent conductive film - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for manufacturing a transparent conductive film, and particularly to an annealing method thereof.

[Background technology]

When creating a transparent conductive film, annealing may be required in order to obtain predetermined film characteristics such as conductivity and transmittance.

In this case, in the conventional method, annealing was performed by indirect heating using an external device such as a heater or an electric furnace in a vacuum, an 02 atmosphere, or the atmosphere.

The disadvantages of this case are that the reproducibility of the obtained film quality was highly variable because it was heated indirectly, that the entire film was annealed, so local annealing was not possible, and that Requires external equipment such as
For example, it consumes a large amount of electricity.

[Purpose of the invention]

The present invention has been made in view of the drawbacks of the conventional methods, and it is an object of the present invention to provide an annealing method that provides good results in film properties such as conductivity and transmittance.

[Summary of the invention]

Therefore, in the present invention, the object is achieved by passing a current directly through the transparent conductive film and annealing the film itself using the heat generated from the film itself.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. Figure 0 shows a glass substrate 2f on which a transparent conductive film 1 (film thickness: 920 layers) is deposited: the vicinity of both ends are sandwiched between a pair of clip-shaped electrodes 3. FIG.

The transparent conductive film 1 used is black and semi-transparent with a transmittance of 62%.
(wavelength: 550 μm), and sheet resistance was as high as 640 Ω/hole.

A current was passed through the ammeter 5 from the power supply 4 between the electrodes 3 as shown in the figure in a 02 atmosphere of 5 Xi O'torr to this film 1. At the same time, the temperature of the surface of the conductive film 1 was monitored using an infrared thermometer.

When current began to flow, the surface temperature of the transparent conductive film 1 rose, and the resistance began to decrease accordingly (opened by the voltage side 6), but stabilized after 3 minutes. The temperature at that time was 420°C. The current was then turned off and cyanyl was stopped. After that, the sheet resistance and transmittance of the area sandwiched between the pair of electrodes 3 were measured, and the sheet resistance was 145.
Ω/mouth decreased significantly. In other words, the electrical conductivity increased significantly. Moreover, the transmittance increased to 78%, and the desired film quality was obtained.

However, in areas other than the above, almost no changes in characteristics were observed. Therefore, local annealing was achieved during the same process.

As the name suggests, a transparent conductive film is electrically conductive.

Therefore, when current flows through it, it generates heat accordingly.

As the temperature rises, chemical changes occur. Specifically, the transparent conductive film is made of oxides such as In and Sn, and the O2 content changes depending on the temperature and surrounding atmosphere, and the composition changes (stoichiometry changes).

Further, crystallinity also changes from amorphous to crystalline depending on temperature, atmosphere, etc. In this case, due to the rise in temperature, 02
This is thought to be due to an increase in content and crystallinity.

Due to these characteristics, the conductivity and transmittance can be changed as described above.

Although a clip-shaped electrode is used in this embodiment, the shape is not necessarily limited to this, and any shape that can be fixed onto the transparent conductive film 1 may be used. However, by changing the position and size of the electrode, it is still possible to anneal only the desired area.

Incidentally, an electrode is used in order to flow a current, but it must be brought into exact surface contact with the transparent conductive film.

Therefore, it is desirable to sandwich a No. 11 foil between the electrode and the membrane. Furthermore, in this example, a method of forming all regions with locally different film properties was shown, but it is also possible to improve the properties of the entire layer to predetermined film properties using the present invention, not just locally. be.

〔Effect of the invention〕

As explained above, in the present invention, since a current is passed directly through the transparent conductive film, the current and voltage can be directly monitored, and therefore, the reproducibility of the film quality can be improved. In addition, regions with different film characteristics such as conductivity and transmittance can be formed continuously or stepwise on the same crotch, and can also be formed locally. More generally, if you use this 8A,
Since no external equipment such as a heater or electric furnace is required, and direct heating is performed, the device can be simplified and power consumption can be reduced. Depending on the formation conditions of absorption and extraction, it can also become a translucent film. In this case, there is a possibility that the absorption/desorption is performed as a color filter, and the present invention is also effective in selecting the membrane characteristics of the filter.

[Brief explanation of the drawing]

The drawing is a side view showing the entire apparatus for carrying out the method of annealing a transparent conductive film according to the present invention. 1... Transparent conductive film, 3... Electrode.

Claims (1)

[Claims] (1) A method for producing a transparent conductive film, which is characterized in that an electrode is connected to the transparent conductive film and a current is applied directly to it, and predetermined film characteristics are obtained by the heat generated from the transparent conductive film itself. annealing method. (2. In claim (1), the transparent conductive film is characterized in that a current is locally applied to form at least one region having different film characteristics on the same transparent conductive film. Annealing method.