JPS60171456A - Treatment of specimen for ultrasonic microscope - Google Patents

Abstract

PURPOSE:To contrive to simplify the observation of a specimen by avoiding the contact of a sonic wave propagation medium with the specimen, and the taking- out of the specimen after observation, by receiving the specimen in a freely deformable membrane container and evacuating said container to certainly contact the specimen with the container. CONSTITUTION:A specimen 7 is inserted into a container made of a polymer material and the container is evacuated and sealed to be brought to a vacuum pack state. Next, a piezoelectric membrane 2 is placed on one surface of a columnar spherical lens 1 made of quartz so as to be held between upper and lower electrodes 3 and an ultrasonic wave 6 is generated by the pulse 5 from a pulse oscillator 4 and focused onto the surface of the specimen 7 through a medium 8 to irradiate the same. Subsequently, the reflected wave is focused and phased by the spherical lens 1 and an RF signal 9 is taken out through the piezoelectric membrane 3. Then, the specimen 7 is scanned two-dimensionally in an X-Y plane by a specimen drive power source 13 and the intensity of reflection from the specimen surface is displayed by the picture of CRT display 12.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a sample holding method for ultrasonic microscopes and similar devices.

[Background of the invention]

In recent years, it has become possible to generate and detect ultrahigh frequency sound waves up to IGHz, making it possible to realize sound wavelengths of about 1 μm underwater, and as a result, it has become possible to obtain high-resolution sound wave imaging devices. That is, a concave lens is used to create a focused acoustic beam, achieving a high resolution of 1 μm(1).

By placing a sample in the beam and detecting the ultrasonic waves reflected by the sample, we can elucidate the elastic properties of minute regions of the sample.
Alternatively, if the sample is mechanically scanned in two dimensions and the intensity of this signal is displayed as a brightness signal on a cathode ray tube, the fine structure of the sample can be enlarged.

FIG. 1 is a diagram showing the main components of the ultrasound microscope. The focusing, transmission and reception of ultrasonic waves is carried out by a spherical lens l, whose structure consists of optically polishing one side of a material made of cylindrical fused silica, etc., on which a piezoelectric thin film (ZnO) 2 is placed.
A pulse 5 generated from a pulse oscillator 4 is applied to the piezoelectric thin film 2 having a sandwich structure, which is sandwiched between the upper and lower electrodes 3 to generate an ultrasonic wave 6.

In addition, a concave hemispherical hole with a diameter of approximately 0.1 wnφ to 1.0■φ is formed at the other end, and between this hemispherical hole and the sample, an ultrasonic wave 6 is propagated to the sample 7. medium for (
For example, water) 8 is filled.

Ultrasonic waves 6 generated by the piezoelectric thin film 2 propagate in the cylinder (2) as plane waves. When this plane reaches the hemispherical hole, quartz (sound velocity 6000m/s) and water (sound velocity 1
500 m/s), a refraction effect occurs, and a focused ultrasonic wave 6 can be irradiated onto the surface of the sample 7. Conversely, the ultrasonic waves reflected from the sample 7 are collected and phased by a spherical lens, become plane waves, reach the piezoelectric thin film 2, and are converted into R and F signals 9 here. This RF signal 9
is received by a receiver 10, where it is diode-detected and converted into a video signal 11, which is used as an input signal for a CRT display 12.

In the apparatus configured in this way, when the sample 7 is two-dimensionally scanned within the x-y plane by the sample stage drive power supply 13, the intensity of reflection from the sample surface as the sample scans changes two-dimensionally. displayed on surface 12.

Generally speaking, a portion of ultrasonic waves is reflected by the surface of an object, but a large portion of the ultrasound waves enters the object, regardless of whether the object is optically transparent or not. , it returns as an echo reflecting differences in viscosity and deficiencies. Ultrasonic microscopes can utilize this property to detect aspects inside a sample.

In an apparatus configured in this way, when observing a sample, if the sample is a water-soluble substance or a metal that easily rusts, the sample 7 must be placed in a sound wave propagation medium 8 (for example, water).
It is necessary to avoid direct contact with the

The sample processing methods currently used for this purpose include coating the sample surface with a substance made of a polymeric material or performing vapor deposition to cover the sample surface and prevent contact with the sound wave propagation medium 8. There is.

However, the sample processing method in such cases is complicated, and it is extremely difficult to remove the treated material after the sample is inspected, so it may damage the sample. , resulting in contamination of the surface.

[Purpose of the invention]

In view of the above-mentioned problems, the present invention provides a sample processing method that can easily avoid direct contact between the acoustic wave propagation medium and the sample during observation (4) and also allows the sample to be taken out without damage after observation. It is on offer.

[Summary of the invention]

The feature of the present invention is that the sample is housed in a deformable thin film container,
The point is that the inside of the container is evacuated to ensure contact between the sample and the container.

According to this method, the thin film container is crushed against the sample surface under atmospheric pressure, so there is no problem in observing the sample with an ultrasonic microscope, and after observation, the sample can be easily removed from the thin film container without causing any damage to the sample. It can be taken out.

[Embodiments of the invention]

Examples will be shown below using figures.

FIG. 2(a) shows a thin film container 14 for isolating the sample 7 from the sound wave propagation medium 8.

First, sample 7 hairs are inserted into this container 14 as shown in (b).

Next, an exhaust port 15 is attached to the container 14.

An exhaust pump 18 is attached to the tip of this exhaust port 15.

Therefore, when the inside of the container (5) 14 is evacuated by the exhaust pump 18, the sample 8 and the container 14 come into close contact with each other, resulting in a state as shown in (c). If the space between the container 14 and the exhaust port 15 is sealed in this state, the inside of the container is constantly maintained at a reduced pressure state.

This completes sample processing. If the vacuum-packed sample 7 shown in (c) is placed on the sample stage, it can be observed in the same manner as conventional sample observation.

The material used for the container 14 may be a polymeric material, a thin film rubber, or the like, and its thickness may be appropriately selected depending on the ultrasonic frequency used.

The above explanation was about a reflection-type sample-scanning ultrasound microscope, but it can also be used for a sensor-scanning ultrasound microscope in which the sample is fixed and the acoustic lens section scans. Place two facing each other,
It can also be used satisfactorily in a transmission type in which a sample is inserted into the focal region, one acoustic lens transmits sound waves, and another acoustic lens receives the ultrasonic waves that have passed through the sample.

FIG. 3 shows a transmission-type sensor scanning (6) scanning ultrasonic microscope as an example thereof. In the figure, the sensor section is arranged inside a container 19, and the container 19 is filled with a sound wave propagation medium 8. The vacuum-packed sample 7 is held from the sample stage 18 and its arrangement is adjusted so that it is in the focal range of the acoustic lenses 16 and 17. In this state, if the sensor section is scanned in a predetermined manner in the X and Y directions, a transmission image of the sample can be obtained.

Note that the observation may be performed while the container 14 and the exhaust pump 18 are connected and continuously evacuated without being sealed off.

In addition, in FIG. 2, a jelly-like sound wave propagator (registered Aquagonic; ULT
RAS 0UND TRN5Ml5SION Gel,
PAIIKER LABORATORIES, INC.
) etc., the effect will be further enhanced.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to observe the sample without any trouble by avoiding direct contact between the acoustic wave propagation medium and the sample during the III festival, and also when taking out the sample after observation (7). Extremely effective sample processing can be performed in which the sample can be easily taken out without damaging it.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the configuration of an ultrasonic microscope, and FIG. 2 is a diagram showing the configuration of an ultrasound microscope. FIG. 3 is a diagram showing an embodiment of the present invention. 7... Sample, 8... Sound wave propagation medium, 14... Container. (8)

Claims (1)

[Claims] 1. An ultrasonic device consisting of a sound wave propagating body and a sound wave lens formed at the end of this propagating body and having a predetermined focal point, which photographs the sample using the disturbed sound waves emitted from the predetermined sample provided near the focal point. In a sonic microscope, a method for processing a sample such as an ultrasonic microscope characterized by coating the sample with a thin film substance.