JPS60171165A - Manufacture of ink jet recording head - Google Patents

Manufacture of ink jet recording head

Info

Publication number
JPS60171165A
JPS60171165A JP2835784A JP2835784A JPS60171165A JP S60171165 A JPS60171165 A JP S60171165A JP 2835784 A JP2835784 A JP 2835784A JP 2835784 A JP2835784 A JP 2835784A JP S60171165 A JPS60171165 A JP S60171165A
Authority
JP
Japan
Prior art keywords
ink
nozzle
plate
recording head
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2835784A
Other languages
Japanese (ja)
Inventor
Tsuneo Mizuno
恒雄 水野
Kohei Kiyota
航平 清田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2835784A priority Critical patent/JPS60171165A/en
Publication of JPS60171165A publication Critical patent/JPS60171165A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To prevent cuttings created when the interior of a nozzle is polished from causing a clogging by polishing sheets bonded through welding with a flowing of fluid so that the longitudinal size of a nozzle may be cut to a prearranged length. CONSTITUTION:A vibration diaphragm 22 is provided with a through hole 23 for allowing continuity to nozzles 3A, 3B,... and the vibration diaphragm 22 and an ink flow board 21 are bonded together. Then a substrate 24 is bonded by welding. When the exposure surface of the nozzle is polished, sheets 21, 22, 24 are placed on a surface plate for lapping 25 and a high-pressure air or fluid such as trichloroethylene allowed through a filter is caused to flow out toward the through hole 23 from an ink passage formed on the vibration diaphragm 22 through an opposite surface to a surface A while the sheets are caused to shift in the direction of an arrow B, C.

Description

【発明の詳細な説明】 （ａ）　発明の技術分野 本発明はインクジェット記録ヘッドの製造方法の改良に
関する。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to an improvement in a method for manufacturing an inkjet recording head.

（ｂ）　技術の背景 印字記録用インクが収容されている圧力室上に設置され
ている圧電素子に印字情報に基づいて電圧を印加するこ
とによりこの圧電素子を歪ませ、この歪みによる圧力を
圧力室に伝達し、圧力室に連通して圧力室の一端部に設
けられているノズルより圧力室内に収容されて４いる印
字記録用インクを記録紙上に噴射記録するインクジェッ
ト記録方法は周知である。このインクジェット記録方法
はノンインパクト記録方式であり、印字記録する際の騒
音の発生が少なく、かつ印字記録の品位が高いので、電
子計算機の出力情報を記録するのに最近広く用いられる
ようになってきている。(b) Background of the technology A voltage is applied to the piezoelectric element installed above the pressure chamber containing the print recording ink based on the printed information to distort the piezoelectric element, and the pressure caused by this distortion is reduced to pressure. An inkjet recording method is well known in which the printing ink contained in the pressure chamber is ejected onto a recording paper from a nozzle that communicates with the pressure chamber and is provided at one end of the pressure chamber. This inkjet recording method is a non-impact recording method that generates little noise when printing and records high quality prints, so it has recently become widely used to record information output from electronic computers. ing.

（Ｃ）　従来技術と問題点 第１図はこのようなインクジェット記録ヘッドの平面図
で、第２図は第１図をｌ−１１線に沿って切断した断面
図である。(C) Prior Art and Problems FIG. 1 is a plan view of such an inkjet recording head, and FIG. 2 is a sectional view of FIG. 1 taken along line 1-11.

第１図および第２図に示すようにこのようなインクジェ
ット記録ヘッドは、内部に印字記録用インクが収容され
、圧電素子ＩＡ、ＩＢ・・・・・かうの圧力を伝達する
圧力室２Ａ、２Ｂ・・・・・と、この圧力室録。As shown in FIGS. 1 and 2, such an inkjet recording head has pressure chambers 2A, 2B, which contain ink for printing and recording, and which transmit pressure from piezoelectric elements IA, IB. ...and this pressure chamber record.

２Ｂ・・・・・の一端部に連通し、端部にインクを記録
紙（図示せず）上に噴射させるためのノズル３Ａ、３Ｂ
・・・・・と、この圧力室２Ａ、２Ｂ・・・・・にイン
クを供給するためにインクを貯蔵する共通インク室５と
、この共通インク室５にインクタンク（図示せず）より
インクを供給するインク供給管６とからなっている。こ
のようなインクジェット記録ヘッドを製造するには、前
述の第２図と第３図に示すように底板となる平板状のス
テンレス製の薄い基板１１上に前記した圧力室２Ａ、２
Ｂ・・・・・、ノズル３Ａ、３Ｂ・・・・・、インク導
出路４八、４Ｂ・・・・・、共通インク室５等よりなる
インク流路を形成したステンレス製の薄板よりなるイン
ク流路板１２を積層し、次いでその上にステンレス製の
薄板よりなる振動板１３を積層し、これ等の基板１１．
インク流路板１２．振動板１３を溶接によって接合する
。その後、第４図に示すようにノズル３Ａ、３Ｂ・・・
・・が表出している側の基板１１゜インク流路板１２．
振動板１３をラッピング用定盤１４上に設置し、これ等
のステンレス製の薄板ｌＬ１２゜１３を■−■線に至る
までラッピングすることでノズル３Ａ、３Ｂ・・・・・
の長平方向の寸法を所定の長さになるようにしていた。2B... Nozzles 3A, 3B communicate with one end and use the ends to jet ink onto recording paper (not shown)
..., a common ink chamber 5 that stores ink to supply ink to the pressure chambers 2A, 2B, etc., and an ink tank (not shown) into which ink is supplied to the common ink chamber 5. It consists of an ink supply pipe 6 that supplies ink. In order to manufacture such an inkjet recording head, as shown in FIGS. 2 and 3, the pressure chambers 2A and 2 described above are placed on a flat stainless steel thin substrate 11 serving as a bottom plate.
B..., ink made of a thin stainless steel plate forming an ink flow path consisting of nozzles 3A, 3B..., ink outlet channels 48, 4B..., common ink chamber 5, etc. A channel plate 12 is laminated, and then a diaphragm 13 made of a thin plate made of stainless steel is laminated thereon, and these substrates 11.
Ink channel plate 12. The diaphragm 13 is joined by welding. After that, as shown in FIG. 4, the nozzles 3A, 3B...
... substrate 11° on the side where is exposed; ink channel plate 12.
The diaphragm 13 is placed on the lapping surface plate 14, and these thin stainless steel plates lL12゜13 are wrapped until they reach the ■-■ line, thereby forming the nozzles 3A, 3B, etc.
The dimension in the longitudinal direction was set to a predetermined length.

然し、このような従来の方法では形成されたノズル３Ａ
、３Ｂ・・・・・の孔内にラッピングする際の切削屑が
入り込み、ノズル３八、３Ｂ・・・・・が目詰りを起こ
す欠点があり、そのため高信頼度のインクジェット記録
ヘッドが得られないといった欠点がある。However, in such a conventional method, the formed nozzle 3A
, 3B..., cutting debris from lapping gets into the holes, and the nozzles 38, 3B... have the disadvantage of clogging, which makes it difficult to obtain a highly reliable inkjet recording head. There is a drawback that there is no

ｌｄｌ　発明の目的 本発明は上記した欠点を除去し、ノズルの目詰りを起こ
さない状態で形成できるような、新規なインクシエンド
記録ヘッドの製造方法の提供を目的とするものである。ldl OBJECTS OF THE INVENTION The present invention aims to eliminate the above-mentioned drawbacks and provide a novel method for manufacturing an ink side recording head that can be formed without clogging the nozzles.

（Ｑ）　発明の構成 かかる目的を達成するための本発明のインクシエンド記
録ヘッドの製造方法は、底板となる基板上に、インクを
収容し、圧電素子からの圧力を伝達する圧力室、インク
を記録紙上に噴射させるためのノズル、圧力室よりノズ
ルに連なるインク導出路、圧力室にインクを供給する共
通インク室からなるインク流路を形成したインク流路形
成板を積層し、該インク流路形成板上に圧電素子の圧力
で振動する振動板を積層し、前記基板、インク流路形成
板、振動板を接合した後、前記それぞれの板を、ノズル
の表出面側より研磨して、ノズルの長手方向の寸法を所
定の値とするインクシェフ１〜記録ヘツドの製造方法に
於いて、前記振動板にノズルに連通ずる貫通孔を設け、
該貫通孔のインク導出路側に位置する一辺がノズルとイ
ンク導出路との境界線の位置よりノズルの表出面側に所
定の寸法隔たって位置するよう振動板とインク流路板を
接合し、前記それぞれの接合した板を研磨する際、前記
インク流路から貫通孔を経るよう流体を導出させながら
Ｆｉｆ磨することを特徴とするものである。(Q) Structure of the Invention In order to achieve the above object, the method of manufacturing an ink side recording head of the present invention includes a pressure chamber for storing ink and transmitting pressure from a piezoelectric element, and an ink cylinder on a substrate serving as a bottom plate. Ink flow path forming plates are stacked to form an ink flow path consisting of a nozzle for ejecting the ink onto the recording paper, an ink outlet path leading from the pressure chamber to the nozzle, and a common ink chamber that supplies ink to the pressure chamber. After laminating a diaphragm that vibrates with the pressure of the piezoelectric element on the path forming plate and bonding the substrate, the ink flow path forming plate, and the diaphragm, each of the plates is polished from the side where the nozzle is exposed. In the method of manufacturing an ink chef 1 to a recording head in which the longitudinal dimension of the nozzle is set to a predetermined value, a through hole communicating with the nozzle is provided in the diaphragm,
The diaphragm and the ink flow path plate are joined so that one side of the through hole located on the ink flow path side is located at a predetermined distance from the boundary line between the nozzle and the ink flow path toward the surface of the nozzle, and When polishing each bonded plate, FIF polishing is performed while a fluid is led out from the ink flow path through the through hole.

（ｆｌ　発明の実施例 以下図面を用いて本発明の一実施例につき詳細に説明す
る。(fl Embodiment of the Invention An embodiment of the invention will be described in detail below with reference to the drawings.

第５図は本発明のインクジェット記録ヘッドの製造方法
を説明するための斜視図、第６図は本発明のインクジェ
ット記録ヘッドの製造方法を説明するための断面図であ
る。FIG. 5 is a perspective view for explaining the method of manufacturing an inkjet recording head of the present invention, and FIG. 6 is a sectional view for explaining the method of manufacturing an inkjet recording head of the present invention.

第５図に示すように本発明のインクジェット記録ヘッド
の製造方法に於いては、振動板２２にノズル３Ａ、３Ｂ
・・・・・に連通ずるよう貫通孔２３を設け、該貫通孔
２３の一辺りが、ノズル３八、３Ｂ・−・・・とインク
導出路４Ａ、４Ｂ・・−−−との境界線りより所定の寸
法２゜たけ隔たった位置になるよう振動板２２とインク
流路板２１を接合する。この貫通孔２３の長平方向の寸
法ｌはノズル３Ａ、３Ｂ−・・・・が−列に配設されて
いる両側端部より多少はみでる寸法とする。その後、こ
れ等振動板２２．インク流路板２１に基板２４を溶接に
よって接合する。ノズル表出面を研磨する場合は、第５
図に示すように、これ等の溶接したステンレス製の薄板
２１，２２．２４をラッピング用足ＩＨ２ｓ上に載せ、
矢印Ｂ、Ｃの方向にこれ等の薄板を移動させながら、イ
ンク流路板２１のノズル３Ａ、３Ｂ・・・・・が表出し
ている面Ａと反対側の面より、フィルタを通過させた高
圧の空気、あるいはトリクレンのような流体を振動板２
２に形成したインク流路から■通孔２３に向かって流出
させる。このようにすれば、ラッピングによって発生ず
る切削屑は前記した空気、あるいはトリクレンのような
流体によって押し流されることとなり、ノズル３Ａ　、
　３Ｂ・・・・・の内部に切削屑が入り込むような現象
が除去できノズル３Δ、３Ｂ・・・・・の目詰りを発生
させない状態で薄板２１，２２．２４をラッピングでき
るので、ノズル３八、３Ｂ・・・・・の孔内で目詰りを
発生させない状態でインクジェット記録ヘッドが形成で
きる。As shown in FIG.
A through hole 23 is provided so as to communicate with the nozzles 38, 3B, . . . and the ink outlet paths 4A, 4B, . The diaphragm 22 and the ink flow path plate 21 are joined so that they are spaced apart by a predetermined distance of 2 degrees. The dimension 1 of this through hole 23 in the longitudinal direction is such that it protrudes somewhat from both end portions where the nozzles 3A, 3B, etc. are arranged in the - row. After that, these diaphragms 22. The substrate 24 is joined to the ink channel plate 21 by welding. When polishing the nozzle surface, use the fifth
As shown in the figure, these welded stainless steel thin plates 21, 22, and 24 are placed on the wrapping foot IH2s,
While moving these thin plates in the directions of arrows B and C, the ink was passed through the filter from the side opposite to the side A where the nozzles 3A, 3B, etc. of the ink channel plate 21 were exposed. High-pressure air or a fluid such as Triclean is applied to the diaphragm 2
② The ink flows out from the ink flow path formed in 2 toward the through hole 23. In this way, the cutting debris generated by lapping will be swept away by the above-mentioned air or fluid such as Triclean, and the nozzle 3A,
3B... can be removed and the thin plates 21, 22, 24 can be wrapped without clogging the nozzles 3Δ, 3B... , 3B, . . . , an inkjet recording head can be formed without clogging in the holes.

また本発明の方法は、溶接により接合したそれぞれのス
テンレス製の薄板をあらかじめワイヤソウ等を用いて例
えばＶ−Ｖｌ線で切断する場合に於いても、ワイヤソウ
で薄板を切断する際にこの貫通孔２３より流体を導入し
ながら切断するとノズル３Ａ、３Ｂ・・・・・内部で目
詰りが発生しなくなり、高信頼度のインクジェット記録
ヘッドが得られる。Furthermore, in the method of the present invention, even when each stainless steel thin plate joined by welding is cut in advance using a wire saw or the like with a V-Vl line, the through hole 23 is cut when cutting the thin plate with a wire saw. If cutting is performed while introducing more fluid, clogging will not occur inside the nozzles 3A, 3B, etc., and a highly reliable inkjet recording head can be obtained.

（ｇ）　発明の効果 以上述べたように本発明のインクジェット記録ヘッドの
製造方法によれば、ノズルの長手方向の寸法を所定の長
さにするために溶接により接合した薄板を、流体を流し
ながら研磨できるので、形成されるノズルの内部には研
磨の際の切削屑が入らず、ノズルの目詰りが発生しない
ので、高信頼度のインクジェット記録ヘッドが得られる
効果がある。(g) Effects of the Invention As described above, according to the method for manufacturing an inkjet recording head of the present invention, thin plates joined by welding to make the longitudinal dimension of the nozzle a predetermined length are bonded together while flowing a fluid. Since polishing is possible, cutting debris from polishing does not enter the inside of the formed nozzle, and nozzle clogging occurs, resulting in the effect of obtaining a highly reliable inkjet recording head.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はインクジェット記録ヘッドの構造を示す平面図
、第２図は第１図をＩ−ＩＩ線に沿って切断した断面図
、第３図は従来のインクジェット記録ヘッドの製造方法
を説明するための斜視図、第４図は従来のインクジェッ
ト記録ヘッドの製造方法を説明するための断面図、第５
図は本発明のインクジェ・ノド記録ヘッドの製造方法を
説明するための斜視図、第６図は本発明のインクジェッ
ト記録ヘッドの製造方法を説明するための断面図である
。 図に於いて、ＩＡ、１Ｂ・・・・−は圧電素子、２Ａ、
２Ｂ・・・・・は圧力室、３Ａ、３Ｂ・・・・・はノズ
ル、４Ａ、４Ｂ・・・・・はインク導出路、５は共通イ
ンク室、６はインク供給管、１１．２４は基板、１２．
２１はインク流路板、１３゜第１因 第２図 第３図 第４囚 ２ 第５図 第ら図FIG. 1 is a plan view showing the structure of an inkjet recording head, FIG. 2 is a cross-sectional view of FIG. 1 taken along line I-II, and FIG. 3 is for explaining a conventional method of manufacturing an inkjet recording head. FIG. 4 is a sectional view for explaining a conventional method of manufacturing an inkjet recording head, and FIG. 5 is a perspective view of FIG.
FIG. 6 is a perspective view for explaining the method of manufacturing an inkjet recording head of the present invention, and FIG. 6 is a sectional view for explaining the method of manufacturing the inkjet recording head of the present invention. In the figure, IA, 1B...- are piezoelectric elements, 2A,
2B... is a pressure chamber, 3A, 3B... is a nozzle, 4A, 4B... is an ink outlet path, 5 is a common ink chamber, 6 is an ink supply pipe, 11.24 is an ink supply pipe. Substrate, 12.
21 is an ink flow path plate, 13° 1st factor 2nd figure 3rd figure 4th figure 2nd figure 5th figure

Claims (1)

【特許請求の範囲】[Claims] 底板となる基板上に、インクを収容し、圧電素子からの
圧力を伝達する圧力室、インクを記録紙上に噴射させる
ためのノズル、圧力室よりノズルに連なるインク導出路
、圧力室にインクを供給する共通インク室からなるイン
ク流路を形成したインク流路形成板を積層し、該インク
流路形成板−上に圧電素子の圧力で振動する振動板を積
層し、前記基板、インク流路形成板、振動板を接合した
後、前記それぞれの板を、ノズルの表出面側より研旺し
て、ノズルの長手方向の寸法を所定の値とするインクジ
ェット記録ヘッドの製造方法に於いて、前記振動板にノ
ズルに連通ずる貫通孔を設け、該貫通孔のインク導出路
側に位置する一辺がノズルとインク導出路との境界線の
位置よりノズルの表出面側に所定の寸法隔たって位置す
るよう振動板とインク流路板を接合し、前記それぞれの
接合した板を研磨する際、前記インク流路から貫通孔を
経るよう流体を導出させながら研磨することを特徴とす
るインクジェット記録ヘッドの製造方法。On the substrate that serves as the bottom plate, there is a pressure chamber that stores ink and transmits the pressure from the piezoelectric element, a nozzle that jets the ink onto the recording paper, an ink outlet path that connects the pressure chamber to the nozzle, and supplies ink to the pressure chamber. A diaphragm that vibrates under the pressure of a piezoelectric element is laminated on the ink flow path forming plate, and the substrate and the ink flow path are formed on the ink flow path forming plate. In the method of manufacturing an inkjet recording head, after bonding the plate and the vibration plate, each of the plates is ground from the surface side of the nozzle to adjust the longitudinal dimension of the nozzle to a predetermined value. A through hole communicating with the nozzle is provided in the plate, and vibration is applied so that one side of the through hole located on the side of the ink outlet path is located a predetermined distance apart from the boundary line between the nozzle and the ink outlet side toward the surface of the nozzle. A method for manufacturing an inkjet recording head, characterized in that a plate and an ink channel plate are bonded together, and when polishing each of the bonded plates, the polishing is carried out while a fluid is led out from the ink channel through a through hole.
JP2835784A 1984-02-16 1984-02-16 Manufacture of ink jet recording head Pending JPS60171165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2835784A JPS60171165A (en) 1984-02-16 1984-02-16 Manufacture of ink jet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2835784A JPS60171165A (en) 1984-02-16 1984-02-16 Manufacture of ink jet recording head

Publications (1)

Publication Number Publication Date
JPS60171165A true JPS60171165A (en) 1985-09-04

Family

ID=12246357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2835784A Pending JPS60171165A (en) 1984-02-16 1984-02-16 Manufacture of ink jet recording head

Country Status (1)

Country Link
JP (1) JPS60171165A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0538843A2 (en) * 1991-10-22 1993-04-28 Canon Kabushiki Kaisha Method for manufacturing ink jet head, ink jet head and ink jet apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0538843A2 (en) * 1991-10-22 1993-04-28 Canon Kabushiki Kaisha Method for manufacturing ink jet head, ink jet head and ink jet apparatus
US5347713A (en) * 1991-10-22 1994-09-20 Canon Kabushiki Kaisha Method for manufacturing ink jet head

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