JPH0468151B2 - - Google Patents
Info
- Publication number
- JPH0468151B2 JPH0468151B2 JP59023492A JP2349284A JPH0468151B2 JP H0468151 B2 JPH0468151 B2 JP H0468151B2 JP 59023492 A JP59023492 A JP 59023492A JP 2349284 A JP2349284 A JP 2349284A JP H0468151 B2 JPH0468151 B2 JP H0468151B2
- Authority
- JP
- Japan
- Prior art keywords
- ink
- thin plate
- jet head
- chamber
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005530 etching Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000889 atomisation Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
Description
【発明の詳細な説明】
(a) 発明の技術分野
本発明はインクジエツトヘツドの改良に係り、
特に圧力室に連なるインク導出路とノズルとが位
置ずれしないようにしたインクジエツトヘツドに
関する。DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to an improvement in an inkjet head,
In particular, the present invention relates to an ink jet head in which an ink outlet path connected to a pressure chamber and a nozzle are prevented from being misaligned.
(b) 技術の背景
印字記録用インクが収容されている圧力室上に
設置されている圧電素子に印字情報に基づいて電
圧を印加することにより、該圧電素子を歪ませ、
この歪みによる圧力を圧力室に伝達し、圧力室に
連通して圧力室の一端部に設けられているノズル
より圧力室内に収容されている印字記録用インク
を記録紙上に噴射記録するインクジエツト記録方
法は周知である。このインクジエツト記録方法は
ノンインパクト記録方式であり、印字記録する際
の騒音の発生が少なく、印字記録の品位が高いの
で、電子計算機の出力情報を記録するのに最近広
く用いられるようになつてきている。(b) Background of the technology By applying a voltage based on print information to a piezoelectric element installed on a pressure chamber containing print recording ink, the piezoelectric element is distorted,
An inkjet recording method in which the pressure caused by this distortion is transmitted to the pressure chamber, and the print recording ink contained in the pressure chamber is jetted onto recording paper from a nozzle that communicates with the pressure chamber and is provided at one end of the pressure chamber. is well known. This inkjet recording method is a non-impact recording method that generates little noise during print recording and has high quality print recording, so it has recently become widely used to record information output from electronic computers. There is.
(c) 従来技術と問題点
第１図は従来のインクジエツトヘツドの平面図
で、第２図は第１図を−線に沿つて切断した
断面図である。図示するように従来のインクジエ
ツトヘツドは、内部に印字記録用インクが収容さ
れ圧電素子１Ａ，１Ｂ，……からの圧力を伝達す
る圧力室２Ａ，２Ｂ，……と、この圧力室２Ａ，
２Ｂ，……の一端部に連通し端部にインクを記録
紙（図示せず）上に噴射させるためのノズル３
Ａ，３Ｂ，……と、圧力室２Ａ，２Ｂ……よりノ
ズル３Ａ，３Ｂ，……に連通するインク導出路４
Ａ，４Ｂ……と、この圧力室２Ａ，２Ｂ……にイ
ンクを供給するためにインクを貯蔵する共通イン
ク室５と、この共通インク室５にインクタンク
（図示せず）よりインクを供給するインク供給路
６とからなつている。従来、このようなインクジ
エツトヘツドは、第１図、第２図に示すように、
例えばステンレスのような薄板１１に前記した圧
力室２Ａ，２Ｂ……、ノズル３Ａ，３Ｂ……、イ
ンク導出路４Ａ，４Ｂ……、共通インク室５等
を、薄板の厚さ方向に所定の深さまでエツチング
によつて形成したインク流路板となる薄板１１
と、圧電素子１Ａ，１Ｂ……の圧力を伝達する振
動板となるステンレスの薄板１２とが熔接によつ
て接続加工された後、この薄板１２上に電圧素子
１Ａ，１Ｂ……が各圧力室２Ａ，２Ｂ……上に接
着剤等を用いて接着固定され、更にインク供給管
７が接着材等により取りつけられて、図示するよ
うなインクジエツトヘツドを得ていた。(c) Prior Art and Problems FIG. 1 is a plan view of a conventional ink jet head, and FIG. 2 is a cross-sectional view taken along the - line in FIG. 1. As shown in the figure, a conventional inkjet head has pressure chambers 2A, 2B, .
2B, a nozzle 3 communicating with one end and having an end for ejecting ink onto recording paper (not shown)
A, 3B, . . . and an ink outlet path 4 that communicates with the nozzles 3A, 3B, . . . from the pressure chambers 2A, 2B, .
A, 4B..., a common ink chamber 5 that stores ink to supply ink to the pressure chambers 2A, 2B..., and ink is supplied to this common ink chamber 5 from an ink tank (not shown). It consists of an ink supply path 6. Conventionally, such an inkjet head has a structure as shown in FIGS. 1 and 2.
For example, the pressure chambers 2A, 2B . Thin plate 11 that becomes an ink flow path plate formed by etching
and a thin stainless steel plate 12 that serves as a diaphragm for transmitting the pressure of the piezoelectric elements 1A, 1B... are connected by welding, and then the voltage elements 1A, 1B... are placed on this thin plate 12 for each pressure chamber. 2A, 2B . . . were adhesively fixed thereon using an adhesive or the like, and an ink supply pipe 7 was further attached using an adhesive or the like to obtain an ink jet head as shown in the figure.
然し、このような従来のインクジエツトヘツド
は、ノズル３Ａ，３Ｂ……の深さ方向の寸法が
0.04mm〜0.05mmで圧力室２Ａ，２Ｂ……や、イン
ク導出路４Ａ，４Ｂ……の深さ方向の寸法が規制
されて浅くなるため、インクがこのノズルに充分
供給されない欠点があつた。 However, in such a conventional ink jet head, the depth dimension of the nozzles 3A, 3B...
At 0.04 mm to 0.05 mm, the dimensions in the depth direction of the pressure chambers 2A, 2B, . . . and the ink outlet paths 4A, 4B, .
そこで第３図に示すように、各圧力室２Ａ，２
Ｂ……と、インク導出路４Ａ，４Ｂ……と共通イ
ンク室５とが貫通されて形成されたステンレス製
の薄板２１と、この薄板２１の上に各圧力室２
Ａ，２Ｂ……と、インク導出路４Ａ，４Ｂ……
と、共通インク室５とノズル３Ａ，３Ｂ……とを
貫通して形成したステンレス製の薄板２２とを重
ね合わせ、この薄板２２の上にインク供給路を有
するステンレス製の薄板２３を重ね、また薄板２
１の下部に平板状の薄板２４を設置した状態で、
これ等薄板２１，２２，２３，２４を熔接して接
続した後、薄板２３上にインク供給管７および圧
電素子１Ａ，１Ｂ……を樹脂等により接着してイ
ンクジエツトヘツド構造を得ていた。 Therefore, as shown in FIG. 3, each pressure chamber 2A, 2
A stainless steel thin plate 21 is formed by penetrating the ink outlet channels 4A, 4B... and the common ink chamber 5, and each pressure chamber 2 is formed on this thin plate 21.
A, 2B... and ink outlet paths 4A, 4B...
and a thin stainless steel plate 22 formed by penetrating the common ink chamber 5 and the nozzles 3A, 3B..., are stacked on top of each other, and a thin stainless steel plate 23 having an ink supply path is stacked on top of this thin plate 22. thin plate 2
With a flat thin plate 24 installed at the bottom of 1,
After these thin plates 21, 22, 23, 24 are welded and connected, the ink supply tube 7 and the piezoelectric elements 1A, 1B, .
然し、このような構造であるとノズル３Ａ，３
Ｂ……の中心軸と、インク導出路４Ａ，４Ｂ……
との中心軸が合致せず位置ずれを生じ、インク粒
子の噴射が不安定になつたり、粒子化特性がばら
つくといつた問題点があつた。 However, with such a structure, the nozzles 3A, 3
The central axis of B... and the ink outlet paths 4A, 4B...
There were problems such as misalignment of the central axes of the ink particles, resulting in unstable ejection of ink particles and variations in atomization characteristics.
(d) 発明の目的
本発明は上記した問題点を除去するもので、ノ
ズルの中心軸の位置と、圧力室より連なるインク
導出路の中心の位置とが精度良く位置ずれしない
ように合致し、更に圧力室よりノズルに連なるイ
ンク導出路が深く形成でき、インクの流体抵抗を
低くした状態でインクがノズルに充分供給できる
ようにした、高精度で、かつ高信頼度の新規なイ
ンクジエツトヘツドの製造方法の提供を目的とす
るものである
(e) 発明の構成
かかる目的を達成するための本発明のインクジ
エツトヘツドの製造方法は、共通インク室と、当
該共通インク室に個別に連なる複数の圧力室と、
当該圧力室の一方よりインク導出管で連なつて記
録紙にインクを噴射するノズルを前記圧力室と同
数に設けたインクジエツトヘツドの製造方法にお
いて、予め前記共通インク室、圧力室及びインク
導出路を一方の面より他方の面に貫通させて形成
すると共に、前記ノズルを所定寸法の溝状に形成
してなる薄板を設け、該薄板の両面を別の薄板で
挟んで固着して構成する。(d) Purpose of the Invention The present invention eliminates the above-mentioned problems, and includes a method in which the position of the central axis of the nozzle and the position of the center of the ink outlet path connected from the pressure chamber are precisely aligned so as not to be misaligned; Furthermore, the ink outlet path leading from the pressure chamber to the nozzle can be formed deeply, and the ink can be sufficiently supplied to the nozzle while keeping the fluid resistance of the ink low.We have developed a new ink jet head with high precision and high reliability. (e) Structure of the Invention In order to achieve the above object, the method for manufacturing an ink jet head of the present invention comprises a common ink chamber and a plurality of inkjet heads connected individually to the common ink chamber. a pressure chamber;
In a method for manufacturing an ink jet head, the common ink chamber, the pressure chamber, and the ink outlet path are provided in advance, in which the same number of nozzles as the pressure chambers are provided, which are connected by an ink outlet pipe from one side of the pressure chambers and eject ink onto the recording paper. A thin plate is formed by penetrating from one surface to the other, and the nozzle is formed in the shape of a groove of a predetermined size, and both sides of the thin plate are sandwiched and fixed between other thin plates.
(f) 発明の実施例
以下図面を用いて本発明の一実施例につき詳細
に説明する。(f) Embodiment of the Invention An embodiment of the present invention will be described in detail below with reference to the drawings.
第４図は本発明のインクジエツトヘツドの構造
を示す断面図、第５図は本発明のインクジエツト
ヘツド形成用インク流路板の要部平面図、第６図
は第５図を−線に沿つて切断した断面図、第
７図は本発明のインクジエツトヘツドを形成する
のに用いるインク流路板を製造する際の、工程の
一部を示す説明図である。 FIG. 4 is a sectional view showing the structure of the ink jet head of the present invention, FIG. 5 is a plan view of the main part of the ink passage plate for forming the ink jet head of the present invention, and FIG. 6 is a cross-sectional view of FIG. FIG. 7 is an explanatory view showing a part of the process in manufacturing an ink passage plate used to form the ink jet head of the present invention.
第４図、第５図、第６図に示すように本発明の
インクジエツトヘツドは、底板となるステンレス
製の平板状の第１の薄板３１の上に厚さが80〜
200μｍのステンレス製のインク流路板となる第
２の薄板３２を、ノズル３Ａ，３Ｂ……の部分の
み厚みt1の寸法を45〜160μｍ（ノズルの深さ35〜
40μｍ）となるようにして設置する。この第２の
薄板３２は、ノズル３Ａ，３Ｂ……部分のみ、薄
板３２の厚さの寸法に対して約1/2の寸法になる
ようにエツチングし、圧力室２Ａ，２Ｂ……およ
び、インク導出路４Ａ，４Ｂ……および、共通イ
ンク室５の部分は薄板３２の両面エツチングによ
り窓状に抜き出し加工されている。そしてこの上
にはインク供給路６を有するステンレス製の第３
の薄板３３を積層する。そしてこれら第１の薄板
３１、および第２の薄板３２、および第３の薄板
３３を熔接して接続した後、第３の薄板３３上に
インク供給管７、および圧電素子１Ａ，１Ｂ……
を接着剤を用いて固着することにより第４図に示
す本発明のインクジエツトヘツドを得ることがで
きる。このようなインク流路板となる第２の薄板
３２を形成するには、第７図に示すようにステン
レス製の薄板３２の表面側の共通インク室５形成
予定領域、圧力室２Ａ，２Ｂ……成形予定領域、
インク導出路４Ａ，４Ｂ……形成予定領域、ノズ
ル３Ａ，３Ｂ……形成予定領域を除いた箇所にホ
トレジスト膜４４Ａを塗布する。またこのステン
レス製の薄板３２の裏面側の共通インク室５形成
予定領域、圧力室２Ａ，２Ｂ……形成予定領域、
インク導出路４Ａ，４Ｂ……形成予定領域を除い
た箇所、すなわちノズル３Ａ，３Ｂ……形成予定
領域上の含めた箇所にホトレジスト膜４４Ｂを塗
布した状態で、この薄板３２をエツチング液に浸
漬させ、薄板３２の表側と裏側より同時にエツチ
ング加工する。このようにするとインク導出路４
Ａ，４Ｂ……の深さ方向の寸法が薄板３３の厚さ
寸法に等しい寸法まで深く形成されるので、ノズ
ル３Ａ，３Ｂ……に円滑に流体抵抗の少ない状態
でインクが供給できる。またノズル３Ａ，３Ｂ…
…の中心軸とインク導出路４Ａ，４Ｂ……の中心
軸との位置ずれも生じなくなり、高精度に加工さ
れたインクジエツトヘツドが得られるようにな
る。 As shown in FIGS. 4, 5, and 6, the ink jet head of the present invention has a thickness of 80 mm to 80 mm on top of a flat first thin plate 31 made of stainless steel serving as a bottom plate.
The second thin plate 32, which is a 200 μm stainless steel ink channel plate, has a thickness t1 of 45 to 160 μm (nozzle depth 35 to
40μm). This second thin plate 32 is etched so that only the nozzles 3A, 3B...are approximately half the thickness of the thin plate 32, and the pressure chambers 2A, 2B... and the ink The lead-out paths 4A, 4B, . . . and the common ink chamber 5 are cut out into a window shape by etching both sides of the thin plate 32. On top of this is a third stainless steel tube having an ink supply channel 6.
The thin plates 33 of are laminated. After the first thin plate 31, the second thin plate 32, and the third thin plate 33 are welded and connected, the ink supply tube 7 and the piezoelectric elements 1A, 1B, etc. are placed on the third thin plate 33.
By fixing them using an adhesive, the ink jet head of the present invention shown in FIG. 4 can be obtained. In order to form such a second thin plate 32 serving as an ink flow path plate, as shown in FIG. 7, the area where the common ink chamber 5 is to be formed on the surface side of the stainless steel thin plate 32, the pressure chambers 2A, 2B, . . . ... area to be molded,
A photoresist film 44A is applied to the ink outlet channels 4A, 4B, . . ., the areas to be formed, and the nozzles 3A, 3B, . . ., except for the areas to be formed. Also, on the back side of this thin stainless steel plate 32, a common ink chamber 5 formation area, pressure chambers 2A, 2B... formation area,
The thin plate 32 is immersed in an etching solution with a photoresist film 44B applied to the ink outlet channels 4A, 4B, excluding the area to be formed, that is, the areas including the nozzles 3A, 3B, to the area to be formed. , etching is performed simultaneously from the front and back sides of the thin plate 32. In this way, the ink lead-out path 4
Since the nozzles A, 4B, . . . are formed to have a depth equal to the thickness of the thin plate 33, ink can be smoothly supplied to the nozzles 3A, 3B, . . . with little fluid resistance. Also, nozzles 3A, 3B...
... and the center axes of the ink outlet paths 4A, 4B, etc. will not occur, and an ink jet head machined with high precision can be obtained.
(g) 発明の効果
以上述べたように本発明のインクジエツトヘツ
ドによれば、ノズルおよびインクの通路を一枚の
薄板に同時に形成できるので、ノズルとインク導
出路との位置ずれを生じることがなくなり、また
インクの流体抵抗を少なくして、インクが円滑に
ノズルに供給されるようになる。従つて、インク
の粒子化周波数を増大させた場合でもインク粒子
径に変動をきたさない粒子化特性の良好なインク
ジエツトヘツドが得られる効果を生じる。(g) Effects of the Invention As described above, according to the ink jet head of the present invention, the nozzle and the ink passage can be formed at the same time in one thin plate, so there is no possibility of misalignment between the nozzle and the ink outlet path. This also reduces the fluid resistance of the ink, allowing the ink to be smoothly supplied to the nozzle. Therefore, even when the ink atomization frequency is increased, an ink jet head with good atomization characteristics that does not cause fluctuations in the ink particle diameter can be obtained.
第１図は従来のインクジエツトヘツドの平面
図、第２図は第１図を−線に沿つて切断した
断面図、第３図は従来のインクジエツトヘツドの
断面図、第４図は本発明のインクジエツトヘツド
の構造を示す断面図、第５図は本発明のインクジ
エツトヘツドの形成用薄板の要部平面図、第６図
は第５図を−線に沿つて切断した断面図、第
７図は本発明のインクジエツトヘツドの形成用薄
板を製造する際の工程の一部を示す説明図であ
る。
図に於いて１Ａ，１Ｂ，……は圧電素子、２
Ａ，２Ｂ，……は圧力室、３Ａ，３Ｂ，……はノ
ズル、４Ａ，４Ｂ……はインク導出路、５は共通
インク室、６はインク供給路、７はインク供給
管、１１，１２，２１，２２，２３，２４，３
１，３２，３３はステンレス薄板、４４Ａ，４４
Ｂはホトレジスト膜を示す。
FIG. 1 is a plan view of a conventional inkjet head, FIG. 2 is a cross-sectional view of FIG. 1 taken along the - line, FIG. 3 is a cross-sectional view of a conventional inkjet head, and FIG. FIG. 5 is a plan view of essential parts of a thin plate for forming an ink jet head of the present invention; FIG. 6 is a cross-sectional view of FIG. 5 taken along the - line; FIG. 7 is an explanatory view showing a part of the process for manufacturing a thin plate for forming an ink jet head according to the present invention. In the figure, 1A, 1B, ... are piezoelectric elements, 2
A, 2B, . . . are pressure chambers, 3A, 3B, . . . are nozzles, 4A, 4B, . ,21,22,23,24,3
1, 32, 33 are stainless steel thin plates, 44A, 44
B indicates a photoresist film.
Claims (1)
連なる複数の圧力室と、当該圧力室の一方よりイ
ンク導出路で連なつて記録紙にインクを噴射する
ノズルを前記圧力室と同数に設けたインクジエツ
トヘツドの製造方法において、 予め前記共通インク室、圧力室及びインク導出
路を両面よりのエツチング法によつて貫通させて
形成すると同時に、前記ノズルを一方の面よりの
エツチングにより貫通することなく溝状に形成し
てなる薄板を設けた後、該薄板の両面を別の薄板
で挟んで固着したことを特徴とするインクジエツ
トヘツドの製造方法。[Scope of Claims] 1. A common ink chamber, a plurality of pressure chambers individually connected to the common ink chamber, and a nozzle that is connected from one of the pressure chambers through an ink outlet path and ejects ink onto the recording paper under the pressure. In the method of manufacturing an ink jet head provided with the same number of chambers, the common ink chamber, the pressure chamber, and the ink outlet path are formed in advance by etching from both sides, and at the same time, the nozzle is formed by etching from one side. 1. A method of manufacturing an ink jet head, comprising: providing a thin plate formed into a groove shape without penetrating through etching; and then sandwiching and fixing both sides of the thin plate between other thin plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2349284A JPS60166462A (en) | 1984-02-10 | 1984-02-10 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2349284A JPS60166462A (en) | 1984-02-10 | 1984-02-10 | Ink jet head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60166462A JPS60166462A (en) | 1985-08-29 |
| JPH0468151B2 true JPH0468151B2 (en) | 1992-10-30 |
Family
ID=12111999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2349284A Granted JPS60166462A (en) | 1984-02-10 | 1984-02-10 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60166462A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100450532B1 (en) * | 2002-02-26 | 2004-09-30 | 주식회사 바드 | Printing-head unit for color ink-jet printer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50140227A (en) * | 1974-04-26 | 1975-11-10 | ||
| JPS5590371A (en) * | 1978-12-28 | 1980-07-08 | Seiko Epson Corp | Ink jet recording head |
| JPS56133171A (en) * | 1980-03-21 | 1981-10-19 | Seiko Epson Corp | Ink jet printing head |
| JPS5787956A (en) * | 1980-11-21 | 1982-06-01 | Fujitsu Ltd | Ink jet heat and manufacture thereof |
-
1984
- 1984-02-10 JP JP2349284A patent/JPS60166462A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50140227A (en) * | 1974-04-26 | 1975-11-10 | ||
| JPS5590371A (en) * | 1978-12-28 | 1980-07-08 | Seiko Epson Corp | Ink jet recording head |
| JPS56133171A (en) * | 1980-03-21 | 1981-10-19 | Seiko Epson Corp | Ink jet printing head |
| JPS5787956A (en) * | 1980-11-21 | 1982-06-01 | Fujitsu Ltd | Ink jet heat and manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60166462A (en) | 1985-08-29 |
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