JPS60169154A - Package device for semiconductor integrated circuit - Google Patents

Package device for semiconductor integrated circuit

Info

Publication number
JPS60169154A
JPS60169154A JP2644484A JP2644484A JPS60169154A JP S60169154 A JPS60169154 A JP S60169154A JP 2644484 A JP2644484 A JP 2644484A JP 2644484 A JP2644484 A JP 2644484A JP S60169154 A JPS60169154 A JP S60169154A
Authority
JP
Japan
Prior art keywords
chip
resin
integrated circuit
space
surface side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2644484A
Other languages
Japanese (ja)
Inventor
Osamu Ueda
修 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2644484A priority Critical patent/JPS60169154A/en
Publication of JPS60169154A publication Critical patent/JPS60169154A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • H01L23/053Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body
    • H01L23/057Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having an insulating or insulated base as a mounting for the semiconductor body the leads being parallel to the base
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE:To prevent adverse effects on a chip even though a resin sealing form is provided, by covering the upper surface side of a memory type integrated circuit chip part by an insulating cover with a space being provided, and sealing the chip part by a resin with the space being maintained. CONSTITUTION:An ultraviolet-ray erasing type EPROM chip 1 is die-bonded to a lead frame 2 and also wire-bonded by metal thin wire 3. Many lead pins 4 are arranged on the frame 2. The upper surface side is covered by an insulating cover 11 with a space being provided. The back surface side of the chip is contacted with the lower part of the frame 2 so as to close the lower side of the chip 1. An insulating stop plate, which stops the intrusion of an injected resin into the space part, is provided. The entire configuration of this state is sealed by the molding of a resin sealing body 13.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は、記憶形集積回路チップ部を合成樹脂成形に
より封止した、半導体集積回路パッケージ装置に関する
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a semiconductor integrated circuit package device in which a memory type integrated circuit chip portion is sealed by synthetic resin molding.

〔従来技術〕[Prior art]

従来の紫外線消去形]!!FROMの封止け、紫外線消
去形F!FROMチップを、書込まれであるメモリ情報
を消去するために、紫外線透過窓付きパッケージに収納
するようにしている。このパッケージは。
Conventional ultraviolet erasing type]! ! FROM sealing, ultraviolet erase type F! The FROM chip is housed in a package with an ultraviolet-transparent window in order to erase written memory information. This package is.

紫外線透過窓付きのため通常セラミックパッケージにな
っており、チップと透過窓との間は空所にしているっ また。メモリ情報書込みは1回のみで、書込まれた情報
を消去することのない用途では、紫外線透過窓を要しな
いので、安価な合成樹脂成形パッケージが用いられるよ
うになった。
They are usually packaged in ceramic because they have a window that transmits UV rays, and there is a space between the chip and the window. In applications where memory information is written only once and the written information is not erased, inexpensive synthetic resin molded packages have come to be used because ultraviolet light transmission windows are not required.

この樹脂封止による従来の紫外線消去形lPROMの半
導体集積回路パッケージ装置は、第1図及び第2図に平
面図及び一部所面にした正面図で示すようになっていた
。(1)は紫外線消去形]lllPROMチップ(以下
「チップ」と称する)で、リードフレーム(2)にグイ
ボンディングされ、金属細線(3)によりワイヤボンデ
ィングされである。)(4)はリードフレーム(2)か
ら出された多数本のリードビン、(5)はチップ(1)
部を封止し成形された樹脂封止体である。
A conventional semiconductor integrated circuit package device of an ultraviolet erasable IPROM using resin sealing is shown in FIGS. 1 and 2 as a plan view and a partial front view. (1) is an ultraviolet-erasable PROM chip (hereinafter referred to as the "chip"), which is firmly bonded to a lead frame (2) and wire-bonded with a thin metal wire (3). ) (4) is a large number of lead bins taken out from the lead frame (2), (5) is a chip (1)
It is a resin-sealed body that is sealed and molded.

この拵1図及び第2図に示す従来の樹脂封止のパッケー
ジ装置は、透過窓付きのセラミックパッケージに比べ低
価格であり、メモリ情報書込みが1回のみに限る用途に
多用され、樹脂封止成形が容易で、安価になる利点をも
っている。
The conventional resin-sealed packaging device shown in Figures 1 and 2 of this Koshirae is lower in price than a ceramic package with a transparent window, and is often used in applications where memory information can be written only once. It has the advantage of being easy to mold and inexpensive.

一方、紫外線消去形BFROMのメモリ保持特性。On the other hand, the memory retention characteristics of UV erasable BFROM.

耐湿形等の長期信頼性は、チップ(1)表面のパッシベ
ーション膜特uと、そのパッシベーション膜上に接触す
る樹脂封止体(5)の材質、及び樹脂成形時の金型に注
入された封止用樹脂が、チップ(1)上のパッシベーシ
ョン膜へ圧迫する度合いなどにより影響される。
The long-term reliability of moisture-resistant types, etc. depends on the passivation film on the surface of the chip (1), the material of the resin sealant (5) that contacts the passivation film, and the sealant injected into the mold during resin molding. This is influenced by the degree to which the stopper resin presses against the passivation film on the chip (1).

上記従来の紫外線透過窓付きパッケージでチップ上が空
所になっている場合には、実使用上問題にならなかった
ICFROMのメモリ特性、書込み特性が、第1図及び
第2図の従来の樹脂封止体によるパッケージ装置では、
チップ(1)表面に注入樹脂が直接接触して圧迫し1次
のような問題が生じていた。すなわち、チップ(1)表
面は、異物の付着やパッシベーション膜のピンホール又
は欠陥などで凹凸があるが、樹脂注入成形時の圧迫によ
り、チップ(1)のメモリヒル、回路の押しつぶし、あ
るいは。
If the above-mentioned conventional package with an ultraviolet-transmitting window has a vacant space on the chip, the memory characteristics and write characteristics of ICFROM, which did not pose a problem in actual use, are In packaging equipment using sealed bodies,
The injected resin directly contacted and compressed the surface of the chip (1), causing the following problems. That is, the surface of the chip (1) is uneven due to adhesion of foreign matter, pinholes or defects in the passivation film, etc., but the pressure during resin injection molding may cause memory hills on the chip (1), crushing of the circuit, or the like.

パッシベーション膜の欠陥を通して注入樹脂の浸入によ
る汚染などがおこり、品質の低下や不良品の発生となっ
ていた。tた、安価な樹脂封止パッケージではあるが、
樹脂による金属細線(3)の変形や開離などが生じてい
た。
Defects in the passivation film caused contamination due to infiltration of the injected resin, resulting in a decline in quality and the occurrence of defective products. Although it is an inexpensive resin-sealed package,
The thin metal wire (3) was deformed or separated due to the resin.

〔発明の概要〕[Summary of the invention]

この発明は、上記従来装置の欠点をなくしたもので、記
憶形集積回路チップ部の表面側を空間をあけて絶縁囲い
体で覆い、この空間を維持してチップ部を樹脂封止する
ことにより、メモリ記憶保持性や金属細線への悪影響を
なくした、半導体集積回路パッケージ装置を提供するこ
とを目的としている。
This invention eliminates the drawbacks of the conventional device described above, by covering the surface side of the memory type integrated circuit chip part with an insulating enclosure with a space left, and sealing the chip part with resin while maintaining this space. It is an object of the present invention to provide a semiconductor integrated circuit package device that eliminates adverse effects on memory storage retention and thin metal wires.

〔発明の実施例〕[Embodiments of the invention]

第3図はこの発明の一実施例による集積回路パッケージ
装置を示す一部は断面した正面図であり、(1)〜(4
)は上記従来装置と同一のものである。aυはチップ(
11部の表面側を空間をあけて覆った絶縁囲い体で、耐
熱性で機械的強度の比較的大きい合成樹脂材などからな
っている。:l@は絶縁囲い体αDに対応し、リードフ
レーム(2)の下部に当てられチップ(1)部の下方側
をふさぎ、注入樹脂の空間部への浸入を防ぐ絶縁ふさぎ
板で、絶縁囲い休0υと同様な材質からなる。この状態
の全体を樹脂封止体a3の成形により封止する。
FIG. 3 is a partially sectional front view showing an integrated circuit package device according to an embodiment of the present invention;
) is the same as the conventional device described above. aυ is the chip (
It is an insulating enclosure that covers the surface side of part 11 with a space left in it, and is made of a synthetic resin material that is heat resistant and has relatively high mechanical strength. :l@ corresponds to the insulating enclosure αD, and is an insulating closing plate that is applied to the lower part of the lead frame (2) and closes the lower side of the chip (1) part to prevent the injected resin from entering the space. Made of the same material as 0υ. This entire state is sealed by molding a resin sealing body a3.

上記一実施例の装置では、チップ(1)部の表面側は絶
縁囲い体ODにより樹脂封止体@とは空間が形成され、
直接接触していない。これにより、樹脂封止体(2)に
よるチップ(1)表面の圧迫がなくなり、メモリヒル、
回路の押しつぶしがなくなり、浸透した樹脂成分中の汚
染物質による。メモリ記憶保持性に悪影響を及ぼすのが
防止されるっなお、上記実施例では紫外線消去形FiF
ROMの場合を示したが、紫外線消去形でなくてもよく
、記憶形集積回路の樹脂封止に適用できるものである。
In the device of the above embodiment, a space is formed on the surface side of the chip (1) portion from the resin sealing body @ by the insulating enclosure OD,
No direct contact. This eliminates pressure on the surface of the chip (1) by the resin sealing body (2), resulting in a memory hill and
No more squeezing of the circuit due to contaminants in the penetrated resin components. In the above embodiment, ultraviolet erasable FiF
Although the case of ROM is shown, it does not need to be of the ultraviolet erasable type and can be applied to resin sealing of memory type integrated circuits.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、記憶形集積回路チッ
プの表面側を絶縁囲い体で覆い空間を形成し、この空間
部を維持しチップ部を樹脂封止体の成形により封止した
ので、樹脂がチップ表面に直接接触しなく、樹脂封止形
であっても、チップへの悪影響が防止され、メモリ記憶
保持特性の低下がなくなシ、また、安価な樹脂封止体で
あっても、金属細線への影響がなくされる。
As described above, according to the present invention, the surface side of the memory type integrated circuit chip is covered with an insulating enclosure to form a space, and this space is maintained and the chip portion is sealed by molding a resin sealant. , the resin does not come into direct contact with the chip surface, and even if it is a resin-sealed type, it will prevent any adverse effects on the chip, there will be no deterioration in memory retention characteristics, and it will be an inexpensive resin-sealed body. Also, the effect on the thin metal wire is eliminated.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は従来の半導体集積回路パッケージ装
置の平面図及び一部は断面にした正面図、第3図はこの
発明の一実施例による半導体集積回路パッケージ装置の
一部は断面で示す正面図である。 1・・・紫外線消去形EFROMチップ、2・・・リー
ドフレーム、11・・・絶縁囲い体、12・・・絶縁ふ
さぎ板、13・・・樹脂封止体 なお1図中同一符号は同−又は相当部分を示す。 代理人 大岩増雄 テ 第21項 第3図 特許庁長官殿 1、事件の表示 特願昭59−26444号2、発明の
名称 半導体集積回路パッケージ装置3゜補正をする者 代表者片山仁へ部 5、補正の対象 明細書の「発明の詳細な説明」の欄。 6、 補正の内容 (1) 明細書第3ページ第20行の「メモリヒル」を
「メモリセル」K補正する。 (2)明細書第5ページ第12行の「特性に」を「持持
性に」に補正する。 以上
1 and 2 are a plan view and a partially sectional front view of a conventional semiconductor integrated circuit package device, and FIG. 3 is a partially sectional plan view of a semiconductor integrated circuit package device according to an embodiment of the present invention. FIG. DESCRIPTION OF SYMBOLS 1...Ultraviolet erasable EFROM chip, 2...Lead frame, 11...Insulating enclosure, 12...Insulating cover plate, 13...Resin sealing body Note that the same reference numerals in the figure refer to the same - or a corresponding portion. Agent Masuo Oiwa Paragraph 21 Figure 3 To the Commissioner of the Japan Patent Office 1 Indication of the case Japanese Patent Application No. 59-26444 2 Title of the invention Semiconductor integrated circuit package device 3 To the person making the amendment Representative Hitoshi Katayama Part 5 , "Detailed Description of the Invention" column of the specification to be amended. 6. Details of correction (1) Correct "Memory Hill" in the 20th line of page 3 of the specification by "Memory Cell" K. (2) In the 12th line of page 5 of the specification, "in terms of characteristics" is amended to "in terms of durability."that's all

Claims (2)

【特許請求の範囲】[Claims] (1) ダイパッド上に固着された記憶形集積回路チッ
プ部の表面側を空間をあけて覆った絶縁囲い体、及びこ
の絶縁囲い体内の空間を残し上記チップ部を密封し成形
された樹脂封止体を備えた半導体集積回路パッケージ装
置。
(1) An insulating enclosure that covers the surface side of the memory integrated circuit chip fixed on the die pad with a space left in it, and a molded resin seal that seals the chip while leaving a space inside the insulating enclosure. A semiconductor integrated circuit packaging device with a body.
(2)記憶形集積回路チップは紫外線消去形gpROM
チップからなる特許請求の範囲第1項記載の半導体集積
回路パッケージ装置。
(2) The memory type integrated circuit chip is an ultraviolet erasable gpROM.
A semiconductor integrated circuit package device according to claim 1, which comprises a chip.
JP2644484A 1984-02-13 1984-02-13 Package device for semiconductor integrated circuit Pending JPS60169154A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2644484A JPS60169154A (en) 1984-02-13 1984-02-13 Package device for semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2644484A JPS60169154A (en) 1984-02-13 1984-02-13 Package device for semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS60169154A true JPS60169154A (en) 1985-09-02

Family

ID=12193676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2644484A Pending JPS60169154A (en) 1984-02-13 1984-02-13 Package device for semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS60169154A (en)

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