JPS60168118A - Optical apparatus - Google Patents

Abstract

PURPOSE:To execute a fine adjustment with high accuracy by a feeble force, by separating and providing a titled apparatus at a space on each orthogonal coarse surface side of a table and a moving means side corresponding to said side, respectively, and coupling an engaged part of the orthogonal side face and the moving means by magnetic force action. CONSTITUTION:An orthogonal side face 41 and a rotary roller 42 serving as an engaged part of a moving means 46 are coupled to each other by magnetic force action by using a coupling means 53. The orthogonal side face 41 is not pushed against the rotary roller 42 side by an energizing means of a spring, etc., therefore, no large load is applied to the moving means 46 at the time of adjustment, and a fine adjustment can be excuated with high accuracy by a feeble force. A table 32 is a light table whose center part is formed by a one plate-like transparent plate 33 of glass, etc., therefore, the table 32 slides very smoothly so as to be freely movable on a base 31, and from this point, too, a fine adjustment of the table 32 is executed easily. Also, the high accuracy is realized easily with regard to the table 32 wholly made of glass, etc., in terms of its working, too.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to optical instruments such as microscopes and projection inspection machines, and particularly relates to improvements in the stage thereof.

[Background Art] In recent years, where high-precision processing and high-precision measurement are required in various fields, optical instruments such as microscopes and projection inspection machines are being used more and more widely. In such optical devices, although various improvements have been made in terms of accuracy and economy in the optical system including the lens, the mechanical structure does not necessarily have four pieces. In order to further improve the accuracy and economy of the optical device as a whole, it is particularly necessary to improve the mechanical structure.

One of the important mechanical structures for improving accuracy and economy is the structure of the stage on which the test object is placed.

Conventionally, this stage had a so-called three-layer structure using chevron-shaped guide rails, but despite the high precision of component parts machining, it was not possible to sufficiently prevent lateral vibration, etc. The accuracy was not high from a practical standpoint. In addition, the sliding resistance during movement is excessive, resulting in poor operability and difficulty in assembling and disassembling. Moreover, it has various problems, such as being large and heavy, and having low space efficiency.

Therefore, in order to solve the problems of the so-called three-layer structure stage, we developed a so-called two-layer structure structure in which the table is placed on the base and can be moved by rolling means. A stage has already been proposed by the present applicant (Japanese Patent Laid-Open No. 106514/1983). With this proposed device,
Although the various problems mentioned above have been solved, depending on the purpose of use, the following inconveniences may still occur.

That is, (1) while urging a table placed on a base via a rolling means or the like in a predetermined direction by means of urging means such as a spring, force is applied from the X-Y axis direction against this urging means; In addition,
Since the table of the base is positioned at a predetermined position by balancing the forces between the two, a large load must be applied to the moving means. Therefore, when adjusting the movement of the table, it is difficult to perform fine adjustment with high precision using a weak force, and moreover, the load changes with each movement position (stroke) of the table. ■ Space efficiency is insufficiently improved due to the interposition of springs, etc. ■Because the table has a structure in which a biasing means such as a spring crosses the lower end side of the table, it is difficult to provide a light-transmitting part in the center of the table. It was not possible to install an optical path in the center of the table by adopting this in optical equipment.

[5? , object of the present invention] An object of the present invention is to provide an optical system equipped with a stage that can perform fine adjustment with high precision using a weak force, has excellent space efficiency, and can secure an optical path in the center of the table, etc. The aim is to provide a.

[Structure of the Invention] Therefore, the present invention provides a table in which a stage is held movably in all directions on a base and has at least one set of orthogonal sides, and a table that corresponds to the orthogonal sides of the table. ), (having an engaging part provided on the table and abutting the orthogonal side surface of the table, and moving the engaging part in a direction orthogonal to the abutting side surface while regulating the position;
coupling means provided separately with a space between each orthogonal side surface of the table and the corresponding moving means side, and coupling the orthogonal side surface and the retaining part of the moving means to each other by magnetic force; , furthermore, each of the table and the base is provided with a see-through part that allows both to be seen through, so that j) u
It is possible to turn off the coupling of the table and the moving means by the coupling means without pushing the orthogonal side surface to the moving means, and to enable highly accurate fine adjustment with a weak force; , the space efficiency is improved by eliminating the need to place springs, etc. on the lower end of the table, and furthermore, since the springs, etc. do not cross the center of the table, see-through parts are provided in the center of the table, etc. The objective is to achieve the above object by making it possible to secure an optical path by, for example, providing a light path.

[Explanation of Examples] Embodiments of the present invention will be described below based on the drawings.

In FIG. 1 showing the overall configuration, an eyepiece lens barrel 13 is provided at the top of the two-part frame 12A of the main body 12, which has a U-shaped side surface and is fixed on a pedestal 11.
At the bottom of the tip of the upper frame 12A, there is an objective lens barrel 1.
4 is provided.

On the other hand, a light source 15 for transmitted light is provided in the leg h l l, and light 16 from the light source 15 is transmitted through the objective lens barrel 14 and the eyepiece lens barrel 13.

At this time, the light 16 from the light source 15 is adjusted to an appropriate amount of light by an aperture 17.

A descending platform 21 is attached to the tip of the lower frame 12B of the main body 12 so as to be movable up and down, and a stage 22 is fixed on the ascending and descending platform 21.

The elevating table 21 is provided on the lower frame 12B.
The lift table 21 is moved up and down by the I-lowering dial 23, and the test object (not shown) placed on the stage 22 is brought to the focal point of the objective lens barrel 14. It is now possible to adjust the position, so-called focusing.

2 and 3, the document table 22 is shown enlarged.

In these figures, the stage 22 has a base 31 fixed to the lifting stage 21 and a table 32, and the table 32 is placed on the base 31 whose two surfaces are smoothed. is held movable in all directions.

The table 32 is formed as a whole from a transparent plate such as a glass plate having a predetermined width. A thin film 35 of a low-friction material such as a tetrafluoroethylene coating is formed as a low-friction means within the contact range with the table 32, so that the table 32 can slide extremely smoothly on the base 31.

Further, a light-transmitting portion 37 is bored in, for example, the center of the base 31, so that both the base 31 and the table 32 can be seen through the light-transmitting portion 37.

In other words, an optical path passing through the base 31 and table 32 is ensured.

The side end surface of the table 32 is provided with orthogonal side surfaces 41 in which at least two sides are orthogonal to each other. Rotating roller 4 as a joint
2 are in contact.

A set of rotating rollers 42 are rotatably supported by position regulating members 43 provided corresponding to the orthogonal side surfaces 41, and two guide posts 44 are horizontally fixed to the position regulating members 43. These guide bosses 44 are connected to the base 3.
It is slidably supported on a guide block 45 provided at 1. A moving means 46 consisting of a micrometer adjustment mechanism (a so-called micrometer head) is attached to the center of the guide block 45, and the tip of this moving means 46 is fixed to the back surface of the position regulating member 43, The position regulating member 43 moves forward and backward at the same time as the tip moves forward and backward. Each of these moving means 46 has a built-in detection means for detecting the amount of movement on the distal end side using an encoder, and a display section 4 such as a digital display device that displays the amount of movement.
7.

Permanent magnets 51 and 52 as magnetic force acting bodies are respectively disposed on the position regulating member 43 (on the moving means 46 side) and the table 32 (on the orthogonal side surface 41 side). This constitutes a coupling means 53 that couples the orthogonal side surface 41 and the rotating roller 42 as an engaging portion to each other by magnetic force. Note that here, both permanent magnets 51 and 52 are connected to the rotating roller 4.
2, they are spaced apart so that they do not come into direct contact with each other. That is, both magnets 51 and 52 are separated by a space. Furthermore, both permanent magnets 51 and 52 can be replaced with those having other magnetic force, and their positions can also be adjusted. The size of the suction force can be adjusted.

Next, the operation of the tree embodiment will be explained.

Place the object to be inspected (not shown) on the top surface of the table 32, fix it if necessary, focus by moving the object to be inspected upward using the H dial 23, and then move it in any direction. When doing so, the moving means 46 is operated to move its tip forward and backward.

The position regulating member 43 attached to this tip and the orthogonal side surface 4
1 are always inseparably connected to each other by a connecting means 53, and as the tip moves forward and backward, the table 32
It moves forward and backward along the axial direction or the Y-axis direction.

At this time, the other orthogonal side surface 41 has its position regulating member 43
The Y-axis self-control is guided in either of the X-axis directions by the rotating roller 42. Even on the orthogonal side surface 41 on the guide side, it is always inseparably connected to the position regulating member 43 by the connecting means 53.

Although the moving means 46 is operated in this way,
Since the moving means 46 are provided on each of the X and Y axes that are orthogonal to each other, by sizing each moving means 46 by mm, the table 32 can be moved on the base 31 (on the XY coordinates).
Can be moved to any position.

This embodiment has the following effects.

The orthogonal side surface 41 and the rotating roller 42 as an engaging part of the corresponding moving means 46 are connected to each other by a magnetic force using a coupling means 53. Since the side surfaces 4 are not pressed against the rotating roller 42 side, a large load is not applied to the moving means 46 when adjusting the moving means 46. Therefore, highly accurate fine adjustment can be performed using a weak force. In other words, it has excellent operability.

Further, on the guide side, both permanent magnets 51 and 52 are arranged separately on the position regulating member 43 and the table 32 with a space between them, and in other words, both permanent magnets 51 and 52 are in direct contact with each other. Since the configuration is such that the orthogonal side surface 41 on the guide side can be lightly guided, it is possible to perform fine adjustment with high precision using a weak force. If the permanent magnets 51 and 52 are in direct contact with each other, the guide-side orthogonal side surface 41 and the position regulating member 43 will be strongly magnetically bonded with more force than necessary, and smooth guidance will not be achieved. It becomes something you cannot hope for.

Further, the base 31 and the table 32 are in contact with each other via a thin film 35 as a low friction means, and the table 32
2 is a lightweight one whose central part is formed from a single plate-like transparent plate 33 made of glass or the like, so the table 32 can move extremely smoothly on the base 31. Also, fine adjustment of the table 32 is easy.

Further, the table 32 made entirely of glass can be easily processed to have parallel upper and lower surfaces with high precision, and high precision can be easily achieved from the viewpoint of processing.

Furthermore, it is easy to attach and detach the table 32 from the base 31. For example, if a plurality of tables 32 are prepared,
While one table 32 is held on the base 31 and inspected, fine inspection objects such as IC parts are arranged and placed on the other table 32 which has been removed, and the entire table 32 is replaced. can do. Therefore, a large number of tests can be performed efficiently, and the work of placing the test objects on the table becomes easy.

In addition, the magnitude of the magnetic force that acts on both the Mizuku magnets 51 and 52 can be easily adjusted by exchanging the magnets 51 and 52 or adjusting the distance between them, which is extremely convenient in practice. It is.

In addition, the structure is not arranged on the end surface side of the table 32, such as a spring, which takes up a relatively large volume, but because the table 32 is simply placed on the stand 31 It has excellent space efficiency 2 in rlfI.Moreover,
An optical path passing through the table 32 and the base 31 can be secured at the center of the table 32 and the base 31.

Furthermore, since no force such as a spring is applied to the table 32, even if the table 32 is extremely lightweight and thin, the table 32 is not distorted and is reliable in terms of strength.

Furthermore, since the rotating roller 42 is used as the engaging portion, the orthogonal side surface 41 can be smoothly guided by the rotating roller 42. Moreover, since the rotary rollers 42 are arranged at two locations with a predetermined distance from one orthogonal side surface 41, the guidance of the orthogonal side surface 41 by the rotary roller 42 is extremely stable.

Next, embodiments other than those described above will be described, and the same reference numerals will be used for parts that are the same as or similar to those of the embodiments described above, and the explanation will be omitted or simplified.

4.5 shows an embodiment other than the above, and in these figures, a table 61 is composed of a transparent plate 62 such as a transparent glass plate, and a frame 63 that holds the periphery of the transparent plate 62. The inner peripheral edge of the frame 63 is a light-transmitting portion 64, and a thin film 65 as a low-friction means is also formed on the lower end surface of the frame 63. In addition, two orthogonal side surfaces 6 of the table 61 (frame body 63)
Rotating rollers 42 are provided at two locations on one of the side surfaces 66 at a predetermined interval, whereas rotating rollers 42 are provided at only one location on the other orthogonal side surface 66.

Such an embodiment can also provide substantially the same functions and effects as the embodiments shown in Figures @2 and 3 above.

In addition, depending on the implementation, the structure may be further simplified by using a convex portion or the like that makes contact at a certain point as the retaining portion instead of the rotating roller 42.

Further, the low friction means is not limited to the thin 11Si35.65, but may be, for example, a simple polished metal surface, a thin film of lubricating oil, a bearing, etc. Also, low friction means are not necessarily essential.

Further, either one of the permanent magnets 51, 52 may be made of a simple magnetic material, and in this case, if the frame 63 itself made of metal is magnetic, it may constitute a part of the coupling means. . Further, the display section 47 of the moving means 46 may be provided separately from the moving means 46. Further, the moving means 46 may be equipped with a vernier or the like.

[Effects of the Invention] As described above, according to the present invention, there is provided a workpiece table that can perform fine adjustment with high precision using a weak force, is highly space efficient, and can secure an optical path in the center of the table, etc. It is possible to provide an optical device equipped with the following.

[Brief explanation of drawings]

Fig. fiS1 is a side view showing the overall configuration of an embodiment of the optical device according to the present invention, Fig. 2 is a plan view showing the stage of the embodiment, and Fig. 3 follows the m-m line in Fig. 2. 4 is a plan view showing a stage other than the above, and FIG. 5 is a sectional view taken along the line v--v in FIG. 4. 12... Main body, 22... Load stage, 31... Base,
32.61...Table, 35.65...Thin film as low friction means, 37.64...Transparent part, 41.66
... Orthogonal side surface, 42 ... Rotating roller as an engaging part, 43 ... Position regulating member, 46 ... Moving means, 51
．． 52... Permanent magnet as a magnetic force acting body, 53...
Coupling means.

Claims (1)

[Claims] (1) In optical instruments such as microscopes and projection inspection machines that irradiate light onto an object to be inspected on a stage and detect the transmitted light, the stage has a base that can be moved in all directions. a table held and having at least one set of orthogonal sides;
A movement that includes an engaging part that is provided on a base corresponding to the orthogonal side surface of the table and that comes into contact with the orthogonal side surface of the table, and moves this retaining part in a direction perpendicular to the abutting side surface while regulating the position thereof. and a means provided separately with a space between each orthogonal side surface of the table and the corresponding moving means side, and coupling the orthogonal side surface and the retaining part of the moving means to each other by magnetic force. A coupling means, and further comprising a light-transmitting portion on each of the table and the base to transmit light through both.