JPS60161665U - クリ−ンル−ム内の荷搬送設備 - Google Patents

クリ−ンル−ム内の荷搬送設備

Info

Publication number
JPS60161665U
JPS60161665U JP5098084U JP5098084U JPS60161665U JP S60161665 U JPS60161665 U JP S60161665U JP 5098084 U JP5098084 U JP 5098084U JP 5098084 U JP5098084 U JP 5098084U JP S60161665 U JPS60161665 U JP S60161665U
Authority
JP
Japan
Prior art keywords
transport equipment
clean
clean room
load
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5098084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031335Y2 (enrdf_load_stackoverflow
Inventor
武秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP5098084U priority Critical patent/JPS60161665U/ja
Publication of JPS60161665U publication Critical patent/JPS60161665U/ja
Application granted granted Critical
Publication of JPH031335Y2 publication Critical patent/JPH031335Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP5098084U 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備 Granted JPS60161665U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5098084U JPS60161665U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5098084U JPS60161665U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Publications (2)

Publication Number Publication Date
JPS60161665U true JPS60161665U (ja) 1985-10-26
JPH031335Y2 JPH031335Y2 (enrdf_load_stackoverflow) 1991-01-16

Family

ID=30569618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5098084U Granted JPS60161665U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Country Status (1)

Country Link
JP (1) JPS60161665U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03164365A (ja) * 1989-11-22 1991-07-16 Nippon Shiyuutaa:Kk 自走台車走行設備

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03164365A (ja) * 1989-11-22 1991-07-16 Nippon Shiyuutaa:Kk 自走台車走行設備

Also Published As

Publication number Publication date
JPH031335Y2 (enrdf_load_stackoverflow) 1991-01-16

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