JPS60161664U - クリ−ンル−ム内の荷搬送設備 - Google Patents

クリ−ンル−ム内の荷搬送設備

Info

Publication number
JPS60161664U
JPS60161664U JP5097984U JP5097984U JPS60161664U JP S60161664 U JPS60161664 U JP S60161664U JP 5097984 U JP5097984 U JP 5097984U JP 5097984 U JP5097984 U JP 5097984U JP S60161664 U JPS60161664 U JP S60161664U
Authority
JP
Japan
Prior art keywords
air
duct
transport equipment
cargo
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5097984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031334Y2 (enExample
Inventor
武秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP5097984U priority Critical patent/JPS60161664U/ja
Publication of JPS60161664U publication Critical patent/JPS60161664U/ja
Application granted granted Critical
Publication of JPH031334Y2 publication Critical patent/JPH031334Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP5097984U 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備 Granted JPS60161664U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5097984U JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5097984U JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Publications (2)

Publication Number Publication Date
JPS60161664U true JPS60161664U (ja) 1985-10-26
JPH031334Y2 JPH031334Y2 (enExample) 1991-01-16

Family

ID=30569616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5097984U Granted JPS60161664U (ja) 1984-04-06 1984-04-06 クリ−ンル−ム内の荷搬送設備

Country Status (1)

Country Link
JP (1) JPS60161664U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7665403B2 (en) 2006-01-26 2010-02-23 Murata Kikai Kabushiki Kaisha Carrying system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7665403B2 (en) 2006-01-26 2010-02-23 Murata Kikai Kabushiki Kaisha Carrying system

Also Published As

Publication number Publication date
JPH031334Y2 (enExample) 1991-01-16

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