JPS60157993U - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS60157993U
JPS60157993U JP4645084U JP4645084U JPS60157993U JP S60157993 U JPS60157993 U JP S60157993U JP 4645084 U JP4645084 U JP 4645084U JP 4645084 U JP4645084 U JP 4645084U JP S60157993 U JPS60157993 U JP S60157993U
Authority
JP
Japan
Prior art keywords
molecular pump
housing
bearing
turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4645084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH018712Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
川口　重一
潔 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4645084U priority Critical patent/JPS60157993U/ja
Publication of JPS60157993U publication Critical patent/JPS60157993U/ja
Application granted granted Critical
Publication of JPH018712Y2 publication Critical patent/JPH018712Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Support Of The Bearing (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP4645084U 1984-03-29 1984-03-29 タ−ボ分子ポンプ Granted JPS60157993U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4645084U JPS60157993U (ja) 1984-03-29 1984-03-29 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4645084U JPS60157993U (ja) 1984-03-29 1984-03-29 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS60157993U true JPS60157993U (ja) 1985-10-21
JPH018712Y2 JPH018712Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-08

Family

ID=30560852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4645084U Granted JPS60157993U (ja) 1984-03-29 1984-03-29 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS60157993U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569422U (ja) * 1992-02-25 1993-09-21 利和 奥野 軸受の固定構造
JP2010242822A (ja) * 2009-04-03 2010-10-28 Ihi Corp タービン発電機の軸受構造

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0569422U (ja) * 1992-02-25 1993-09-21 利和 奥野 軸受の固定構造
JP2010242822A (ja) * 2009-04-03 2010-10-28 Ihi Corp タービン発電機の軸受構造

Also Published As

Publication number Publication date
JPH018712Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-08

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