JPS60157275A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS60157275A JPS60157275A JP1231884A JP1231884A JPS60157275A JP S60157275 A JPS60157275 A JP S60157275A JP 1231884 A JP1231884 A JP 1231884A JP 1231884 A JP1231884 A JP 1231884A JP S60157275 A JPS60157275 A JP S60157275A
- Authority
- JP
- Japan
- Prior art keywords
- medium gas
- pressure
- blower
- gas circulation
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、ガス循環形のレーザ発振器に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a gas circulation type laser oscillator.
従来例の構成とその問題点
第１図にガス循環形のレーザ発振器の概要を、第２図に
媒質ガスのタイムチャートを示す。Structure of a conventional example and its problems FIG. 1 shows an outline of a gas circulation type laser oscillator, and FIG. 2 shows a time chart of a medium gas.
従来のレーザ発振器はレーザ管１内に存在する媒質ガス
に高圧直流電源２によって前記レーザ管１内にグロー放
電を生じさせ得られたレーザ光を全反射鏡３および部分
透過鏡４により増幅し、前記部分透過鏡４よシレーザ出
力として取出していた。そしてレーザ出力を高めるため
媒質ガスは媒質ガス循環用送風機６により媒質ガス循環
用配管６を通じて媒質ガス流入管７よりレーザ管１を通
シ媒質ガス流出管８から流出し、循環している。A conventional laser oscillator generates a glow discharge in the laser tube 1 by using a high-voltage DC power source 2 in a medium gas existing in the laser tube 1, and amplifies the resulting laser light using a total reflection mirror 3 and a partial transmission mirror 4. The partially transmitting mirror 4 outputs the laser beam as a laser output. In order to increase the laser output, the medium gas is circulated by a medium gas circulation blower 6 through the medium gas circulation pipe 6, through the medium gas inflow pipe 7, through the laser tube 1, and out of the medium gas outflow pipe 8.
またレーザ発振までの媒質ガス圧は第２図に示すように
、最初、真空ポンプ９にて減圧し、レーザ発振時媒質ガ
ス圧力ａに到達すると、媒質ガス循環用送風機６を始動
して行う。As shown in FIG. 2, the medium gas pressure up to the laser oscillation is first reduced by the vacuum pump 9, and when the medium gas pressure reaches the laser oscillation medium gas pressure a, the medium gas circulation blower 6 is started.
しかし、媒質ガス循環用送風機６の始動時には媒質ガス
圧が高いため大起動電流が必要となり、媒質ガス循環用
送風機６にも負荷がかがる欠点を有していた。However, since the medium gas pressure is high when starting the medium gas circulation blower 6, a large starting current is required, and the medium gas circulation blower 6 also has the disadvantage of being loaded.
発明の目的
本発明は媒質ガス循環用送風機を、負荷の少ない低圧状
態で起動させ、かつレーザ発振時媒質ガス圧よりも高く
なった場合には、媒質ガス循環用送風機を停止させるレ
ーザ発振器を提供することを目的とする。Purpose of the Invention The present invention provides a laser oscillator that starts a medium gas circulation blower in a low pressure state with little load and stops the medium gas circulation blower when the medium gas pressure becomes higher than the medium gas pressure during laser oscillation. The purpose is to
発明の構成
そのための構成として、本発明はレーザ管と前記レーザ
管に接続した媒質ガス流入管および媒質ガス流出管と、
前記媒質ガス流入管および媒質ガス流出管に接続した媒
質ガス循環用配管と、前記媒質ガス循環用配管の途中に
設けた媒質ガス循環用送風機を具備し、前記媒質ガス循
環用送風機をレーザ発振時媒質ガス圧力より低い圧力で
始動させたのち、レーザ発振時媒質ガス圧に設定し、レ
ーザ発振時媒質ガス圧が所定圧力以上に上昇した場合に
前記媒質ガス循環用送風機を停止させる制御機構を設け
たものである。Structure of the Invention As a structure for this purpose, the present invention includes a laser tube, a medium gas inflow tube and a medium gas outlet tube connected to the laser tube,
A medium gas circulation pipe connected to the medium gas inflow pipe and the medium gas outflow pipe, and a medium gas circulation blower provided in the middle of the medium gas circulation pipe are provided, and the medium gas circulation blower is used during laser oscillation. A control mechanism is provided that starts the medium gas at a pressure lower than the medium gas pressure, sets the medium gas pressure at the time of laser oscillation, and stops the medium gas circulation blower when the medium gas pressure during laser oscillation rises to a predetermined pressure or higher. It is something that
実施例の説明
以下本発明の一実施例を図面の第１図および第３図に基
づいて説明する。DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 3 of the drawings.
始動時は真空ポンプ９にてガス圧Ｃまで減圧するととも
に媒質ガス循環用送風機６を起動させたのち、媒質ガス
圧力をａｉで上昇させる。また何らかの原因で媒質ガス
圧力がａを超え、所定圧力ｅに上昇した場合には、媒質
ガス循環用送風機６を停止させ、媒質ガス循環用送風機
６を保護すると同時に、レーザ発振器の異常を知ること
が可能となる効果を生じるものである。At the time of starting, the vacuum pump 9 is used to reduce the pressure to gas pressure C, and the medium gas circulation blower 6 is started, and then the medium gas pressure is increased by ai. Furthermore, if the medium gas pressure exceeds a and rises to a predetermined pressure e for some reason, the medium gas circulation blower 6 is stopped to protect the medium gas circulation blower 6, and at the same time, it is possible to detect an abnormality in the laser oscillator. This produces the effect of making it possible.
発明の効果
以上のように本発明のレーザ発振器は、媒質ガス循環用
送風機を負荷の少ない減圧状態で始動し、かつ媒質ガス
圧の異常上昇時には停止させ、媒質ガス循環用送風機を
保護すると同時に、レーザ発振器の異常を知ることが可
能となる優れた効果を奏するものである。Effects of the Invention As described above, the laser oscillator of the present invention starts the medium gas circulation blower in a reduced pressure state with a small load, and stops it when the medium gas pressure increases abnormally, thereby protecting the medium gas circulation blower. This has an excellent effect of making it possible to know abnormalities in the laser oscillator.
第１図は媒質ガス循環形レーザ発振器の概要説明図、第
２図は従来の媒質ガス圧の時間的変化を示す特性図、第
３図は本発明の一実施例におけるレーザ発振器の媒質ガ
ス圧の時間的変化を示す特性図である。
１・・・・・・レーザ管、２・・・・・・高圧直流電源
、３・・・・全反射鏡、４・・・・・部分透過鏡、５・
・・・・媒質ガス循環用送風機、６・・・・・・媒質ガ
ス循環用配管、７・・・・・・媒質ガス流入管、８・・
・・・・媒質ガス流出管、９・・・・・真空ポンプ。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
２
第２図
第３図Fig. 1 is a schematic explanatory diagram of a medium gas circulation type laser oscillator, Fig. 2 is a conventional characteristic diagram showing temporal changes in medium gas pressure, and Fig. 3 is a medium gas pressure of a laser oscillator in an embodiment of the present invention. FIG. 2 is a characteristic diagram showing temporal changes in 1... Laser tube, 2... High voltage DC power supply, 3... Totally reflecting mirror, 4... Partially transmitting mirror, 5...
... Blower for medium gas circulation, 6 ... Piping for medium gas circulation, 7 ... Medium gas inflow pipe, 8 ...
...Medium gas outflow pipe, 9...Vacuum pump. Name of agent: Patent attorney Toshio Nakao and 1 other person 1st
Figure 2 Figure 2 Figure 3
Claims (1)
よび媒質ガス流出管と、前記媒質ガス流入管および媒質
ガス流出管に接続した媒質ガス循環用配管と、前記媒質
ガス循環用配管の途中に設けた媒質ガス循環用送風機を
具備し、前記媒質ガス循環用送風機をレーザ発振時媒質
ガス圧力よシ低い圧力で始動させたのち、゛レーザ発振
時媒質ガス圧に設定し、レーザ発振時媒質ガス圧が所定
圧力以上に上昇した場合に前記媒質ガス循環用送風機を
停止させる制御機構を有するレーザ発振器。A laser tube, a medium gas inflow pipe and a medium gas outflow pipe connected to the laser tube, a medium gas circulation pipe connected to the medium gas inflow pipe and the medium gas outflow pipe, and a medium gas circulation pipe in the middle of the medium gas circulation pipe. After starting the medium gas circulation blower at a pressure lower than the medium gas pressure during laser oscillation, the medium gas pressure is set to the medium gas pressure during laser oscillation. A laser oscillator including a control mechanism that stops the medium gas circulation blower when the pressure rises above a predetermined pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1231884A JPS60157275A (en) | 1984-01-25 | 1984-01-25 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1231884A JPS60157275A (en) | 1984-01-25 | 1984-01-25 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60157275A true JPS60157275A (en) | 1985-08-17 |
Family
ID=11801960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1231884A Pending JPS60157275A (en) | 1984-01-25 | 1984-01-25 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60157275A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007276419A (en) * | 2006-04-12 | 2007-10-25 | Hiroshi Sakai | Page holder |
| JP2011228624A (en) * | 2010-04-02 | 2011-11-10 | Fanuc Ltd | Gas laser apparatus |
| JP2016152280A (en) * | 2015-02-16 | 2016-08-22 | ファナック株式会社 | Laser oscillator equipped with blower |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56142688A (en) * | 1980-04-04 | 1981-11-07 | Matsushita Electric Ind Co Ltd | Driving method of gas laser |
| JPS5969982A (en) * | 1982-10-15 | 1984-04-20 | Asahi Optical Co Ltd | Gas laser device |
-
1984
- 1984-01-25 JP JP1231884A patent/JPS60157275A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56142688A (en) * | 1980-04-04 | 1981-11-07 | Matsushita Electric Ind Co Ltd | Driving method of gas laser |
| JPS5969982A (en) * | 1982-10-15 | 1984-04-20 | Asahi Optical Co Ltd | Gas laser device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007276419A (en) * | 2006-04-12 | 2007-10-25 | Hiroshi Sakai | Page holder |
| JP2011228624A (en) * | 2010-04-02 | 2011-11-10 | Fanuc Ltd | Gas laser apparatus |
| JP2016152280A (en) * | 2015-02-16 | 2016-08-22 | ファナック株式会社 | Laser oscillator equipped with blower |
| CN105896238A (en) * | 2015-02-16 | 2016-08-24 | 发那科株式会社 | Laser oscillator provided with blower |
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