JPS60157264A - 歪センサ - Google Patents

歪センサ

Info

Publication number
JPS60157264A
JPS60157264A JP59013024A JP1302484A JPS60157264A JP S60157264 A JPS60157264 A JP S60157264A JP 59013024 A JP59013024 A JP 59013024A JP 1302484 A JP1302484 A JP 1302484A JP S60157264 A JPS60157264 A JP S60157264A
Authority
JP
Japan
Prior art keywords
strain
electrodes
resistor
sensitive resistor
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59013024A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0586676B2 (OSRAM
Inventor
Nobuhiko Fujita
藤田　順彦
Masahiro Kume
昌宏 粂
Koji Takada
高田　皓司
Hajime Ichiyanagi
一柳　肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP59013024A priority Critical patent/JPS60157264A/ja
Publication of JPS60157264A publication Critical patent/JPS60157264A/ja
Publication of JPH0586676B2 publication Critical patent/JPH0586676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP59013024A 1984-01-26 1984-01-26 歪センサ Granted JPS60157264A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59013024A JPS60157264A (ja) 1984-01-26 1984-01-26 歪センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59013024A JPS60157264A (ja) 1984-01-26 1984-01-26 歪センサ

Publications (2)

Publication Number Publication Date
JPS60157264A true JPS60157264A (ja) 1985-08-17
JPH0586676B2 JPH0586676B2 (OSRAM) 1993-12-13

Family

ID=11821567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59013024A Granted JPS60157264A (ja) 1984-01-26 1984-01-26 歪センサ

Country Status (1)

Country Link
JP (1) JPS60157264A (OSRAM)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164582A (en) * 1980-05-23 1981-12-17 Hitachi Ltd Semiconductor piezo-electric element and manufacture thereof
JPS581548A (ja) * 1981-06-01 1983-01-06 コツパ−ス　コムパニ−　インコ−ポレ−テツド 難燃性複合材料
JPS5930034A (ja) * 1982-08-13 1984-02-17 Tokyo Keiki Co Ltd 圧力計受圧器
JPS6037177A (ja) * 1983-08-09 1985-02-26 Nec Corp 半導体圧力センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164582A (en) * 1980-05-23 1981-12-17 Hitachi Ltd Semiconductor piezo-electric element and manufacture thereof
JPS581548A (ja) * 1981-06-01 1983-01-06 コツパ−ス　コムパニ−　インコ−ポレ−テツド 難燃性複合材料
JPS5930034A (ja) * 1982-08-13 1984-02-17 Tokyo Keiki Co Ltd 圧力計受圧器
JPS6037177A (ja) * 1983-08-09 1985-02-26 Nec Corp 半導体圧力センサ

Also Published As

Publication number Publication date
JPH0586676B2 (OSRAM) 1993-12-13

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