JPS60157027A - マイケルソン原理による干渉計 - Google Patents

マイケルソン原理による干渉計

Info

Publication number
JPS60157027A
JPS60157027A JP27055184A JP27055184A JPS60157027A JP S60157027 A JPS60157027 A JP S60157027A JP 27055184 A JP27055184 A JP 27055184A JP 27055184 A JP27055184 A JP 27055184A JP S60157027 A JPS60157027 A JP S60157027A
Authority
JP
Japan
Prior art keywords
reflector
interferometer
mirror
axis
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27055184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058769B2 (enrdf_load_stackoverflow
Inventor
フオルカー、タンク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOITSUCHIE FUORUSHIYUNGUSU UNTO FUERUZUTSUHISU ANSHIYUTARUTO HIYURU RUFUTO UNTO RAUMU FUAARUTO EE FUAU
FUORUSHIYUNGUSU UNTO FUERUZUTS
Original Assignee
DOITSUCHIE FUORUSHIYUNGUSU UNTO FUERUZUTSUHISU ANSHIYUTARUTO HIYURU RUFUTO UNTO RAUMU FUAARUTO EE FUAU
FUORUSHIYUNGUSU UNTO FUERUZUTS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DOITSUCHIE FUORUSHIYUNGUSU UNTO FUERUZUTSUHISU ANSHIYUTARUTO HIYURU RUFUTO UNTO RAUMU FUAARUTO EE FUAU, FUORUSHIYUNGUSU UNTO FUERUZUTS filed Critical DOITSUCHIE FUORUSHIYUNGUSU UNTO FUERUZUTSUHISU ANSHIYUTARUTO HIYURU RUFUTO UNTO RAUMU FUAARUTO EE FUAU
Publication of JPS60157027A publication Critical patent/JPS60157027A/ja
Publication of JPH058769B2 publication Critical patent/JPH058769B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP27055184A 1983-12-22 1984-12-21 マイケルソン原理による干渉計 Granted JPS60157027A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE3346455.3 1983-12-22
DE19833346455 DE3346455A1 (de) 1983-12-22 1983-12-22 Interferometer
DE3431040.1 1984-08-23

Publications (2)

Publication Number Publication Date
JPS60157027A true JPS60157027A (ja) 1985-08-17
JPH058769B2 JPH058769B2 (enrdf_load_stackoverflow) 1993-02-03

Family

ID=6217734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27055184A Granted JPS60157027A (ja) 1983-12-22 1984-12-21 マイケルソン原理による干渉計

Country Status (3)

Country Link
JP (1) JPS60157027A (enrdf_load_stackoverflow)
DD (1) DD228353A5 (enrdf_load_stackoverflow)
DE (1) DE3346455A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130723A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
JP2009041921A (ja) * 2007-08-06 2009-02-26 Mitsutoyo Corp 微細形状測定装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3826149A1 (de) * 1988-08-01 1990-02-08 Deutsche Forsch Luft Raumfahrt Einrichtung zur messung des drehwinkels oder der winkelstellung eines rotierenden objektes
DE59100331D1 (de) * 1990-02-21 1993-10-07 Deutsche Forsch Luft Raumfahrt Interferometer nach Michelson zur Erzeugung optischer Wegunterschiede.
TW228568B (enrdf_load_stackoverflow) * 1991-08-30 1994-08-21 Forschungsanstalt Fur Luftund Raumfahrt E V Deutsche
DE4136300C1 (en) * 1991-11-04 1993-02-25 Deutsche Forschungsanstalt Fuer Luft- Und Raumfahrt Ev, 5300 Bonn, De Michelson type interferometer using single rotating retroreflector - with aperture receiving split light beam halves deflected against each other by mirrors
DE4215871C2 (de) * 1992-05-14 1995-04-13 Deutsche Forsch Luft Raumfahrt Interferometer nach Michelson
DE19756936C1 (de) * 1997-12-20 1999-03-11 Deutsch Zentr Luft & Raumfahrt Interferometer nach Michelson

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129826A (en) * 1980-02-14 1981-10-12 Kaizaaatoreede Gmbh Two flux interference gauge for fourier spectroscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129826A (en) * 1980-02-14 1981-10-12 Kaizaaatoreede Gmbh Two flux interference gauge for fourier spectroscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6130723A (ja) * 1984-07-24 1986-02-13 Jeol Ltd 干渉計
JP2009041921A (ja) * 2007-08-06 2009-02-26 Mitsutoyo Corp 微細形状測定装置

Also Published As

Publication number Publication date
JPH058769B2 (enrdf_load_stackoverflow) 1993-02-03
DE3346455A1 (de) 1985-07-11
DD228353A5 (de) 1985-10-09

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