JPS60155503A - Decomposition of ozone - Google Patents

Decomposition of ozone

Info

Publication number
JPS60155503A
JPS60155503A JP59008275A JP827584A JPS60155503A JP S60155503 A JPS60155503 A JP S60155503A JP 59008275 A JP59008275 A JP 59008275A JP 827584 A JP827584 A JP 827584A JP S60155503 A JPS60155503 A JP S60155503A
Authority
JP
Japan
Prior art keywords
ozone
air
zone
microwave
microwave irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59008275A
Other languages
Japanese (ja)
Other versions
JPH0373325B2 (en
Inventor
Akira Suzuki
昭 鈴木
Yasumi Shiotani
塩谷 康実
Masato Kadoya
角屋 正人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinryo Air Conditioning Co Ltd
Original Assignee
Shinryo Air Conditioning Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinryo Air Conditioning Co Ltd filed Critical Shinryo Air Conditioning Co Ltd
Priority to JP59008275A priority Critical patent/JPS60155503A/en
Publication of JPS60155503A publication Critical patent/JPS60155503A/en
Publication of JPH0373325B2 publication Critical patent/JPH0373325B2/ja
Granted legal-status Critical Current

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  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To decompose O3 into O2 simply and rapidly, by irradiating an O2- containing gas with microwave. CONSTITUTION:Air extracted from the operation space 4 by the blowe B is fed to the blending zone 2, blended with O3 evolved in the ozone generating zone 1 and sterilized. It is introduced into the microwave irradiating zone 3, irradiated with microwave having a frequency of 800MHz-30GHz for several seconds - several minutes, O3 is decomposed into O2, and the air is circulated through the operation space 4. Consequently, floating microorganism can be destroyed in shorter time of <=1/100 the time required by conventional thermal decomposition method or active carbon adsorption method.

Description

【発明の詳細な説明】 発明の属する技術分野 本発明は、効率的に゛オゾンを分解する方法に関する。[Detailed description of the invention] Technical field to which the invention belongs The present invention relates to a method for efficiently decomposing ozone.

従来技術とその問題点 オゾンは強い酸化作用を有しまた分解して無害6に膿廊
 し ψと t 酬 L 本−1”−L Mしd)A〜
6灯東 11 、ト七腐、しの脱色等に広く使用されて
いる。このようなオゾンの殺菌作用を利用して空気中の
微生物を殺菌し無菌空気を得ることができる。このよう
な無菌空気をバイオクリーンルーム、病院の待合室、食
品工場等に使用して所望の無菌的雰囲気を形成できる。
Conventional technology and its problems Ozone has a strong oxidizing effect and decomposes into harmless 6.
It is widely used for decolorizing 6 lights, Toshichifu, and Shino. Utilizing the sterilizing effect of ozone, microorganisms in the air can be sterilized and sterile air can be obtained. Such sterile air can be used in bioclean rooms, hospital waiting rooms, food factories, etc. to create a desired sterile atmosphere.

しかし、オゾン処理により得られた無菌を気にはオゾン
が残留している。オゾンは低濃度でも人体に有害であり
、通常作業場でのオゾン濃度を0、1 ppm以下にし
なければならないとされている。
However, despite the sterility obtained by ozone treatment, ozone remains. Ozone is harmful to the human body even at low concentrations, and the ozone concentration in normal workplaces must be kept below 0.1 ppm.

このため無菌空気中の残留オゾンを分解しオゾンを含ま
ない無菌空気を目的とする空間に供給する必要がある。
Therefore, it is necessary to decompose residual ozone in the sterile air and supply sterile air that does not contain ozone to the target space.

従来、オゾン分解法として自然分解法、熱分解法、吸着
分解法、紫外線分解法等が知られている。
Conventionally, natural decomposition methods, thermal decomposition methods, adsorption decomposition methods, ultraviolet decomposition methods, and the like are known as ozone decomposition methods.

自然分解法は、オゾンを一定時間放置して分解する方法
である。オゾンはそれ自体化学的に不安定であり、放置
すると分解して酸素となる。しかし常温におけるオゾン
の半減期は16時間とかなり長時間であるため工業上の
利用性は乏しい。熱分解法は、オゾンを加熱して酸素に
する方法である。
The natural decomposition method is a method in which ozone is left to stand for a certain period of time to decompose. Ozone itself is chemically unstable, and if left untreated, it decomposes into oxygen. However, since the half-life of ozone at room temperature is quite long, 16 hours, its industrial applicability is poor. The pyrolysis method is a method of heating ozone to turn it into oxygen.

この方法ではオゾン含有空気を少なくとも2700以上
に加熱する必要があり加熱に要する運転費が嵩むのみな
らず、熱分解後の空気を常温に冷却するため工程が煩雑
になる。吸着分解法は、オゾンを活性炭に吸着させ吸着
したオゾンが活性炭と反応して炭酸ガスと酸素にする方
法である。この方法ではオゾンと活性炭が急激に反応し
て爆発する危険性がある。また、紫外線分解法は分解力
が不十分であるためこの方法を単独で用いても所望の分
解効果を得ることができない。
In this method, it is necessary to heat the ozone-containing air to at least 2,700 ℃, which not only increases the operating cost required for heating, but also complicates the process because the air after thermal decomposition must be cooled to room temperature. The adsorption decomposition method is a method in which ozone is adsorbed onto activated carbon, and the adsorbed ozone reacts with the activated carbon to form carbon dioxide and oxygen. In this method, there is a risk of explosion due to rapid reaction between ozone and activated carbon. Further, since the ultraviolet decomposition method has insufficient decomposition power, the desired decomposition effect cannot be obtained even if this method is used alone.

このように従来のオゾン分解法ではそれぞれ欠点がある
ため、オゾンにより空気を殺菌する方法はほとんど実施
されておらす、フィルターによる雑菌の除去方法が従来
から用いられていた。
As described above, each of the conventional ozone decomposition methods has its own drawbacks, so methods of sterilizing the air with ozone have rarely been implemented, and methods of removing germs using filters have traditionally been used.

発明の目的 本発明は従来技術の欠点を解消するものであり、従来よ
りもはるかに簡便かつ迅速にオゾンを酸素に分解する方
法を提供することを目的とする。
OBJECTS OF THE INVENTION The present invention overcomes the drawbacks of the prior art and aims to provide a method for decomposing ozone into oxygen much more easily and quickly than ever before.

すなわち本発明は、オゾンを含有する気体にマイクロ波
を照射してオゾンを分解する方法である。
That is, the present invention is a method of decomposing ozone by irradiating a gas containing ozone with microwaves.

以下、添付図面を用い本発明の詳細な説明する。Hereinafter, the present invention will be described in detail using the accompanying drawings.

第1図は本発明の好適な態様を示す概略系統図であり、
オゾン発生帯域1、混合帯域2、マイクロ波照射帯域6
、および作業空間4から構成されている。この方法にお
いては、作業空間4内の空気をブロアーBにより引き抜
いて混合帯域2に供給しここでオゾン発生帯域1から発
生したオゾンと空気とを混合する。オゾン混合空気をマ
イクロ波照射帯域に送りここでオシXを分解して酸素に
し、得られた無菌空気を作業空間4に循環することによ
り、作業空間4を無菌的雰囲気とする。
FIG. 1 is a schematic system diagram showing a preferred embodiment of the present invention,
Ozone generation zone 1, mixing zone 2, microwave irradiation zone 6
, and a work space 4. In this method, air in the work space 4 is drawn out by a blower B and supplied to the mixing zone 2, where ozone generated from the ozone generation zone 1 and air are mixed. The ozone-mixed air is sent to the microwave irradiation zone where the ozone X is decomposed into oxygen, and the resulting sterile air is circulated to the work space 4 to create a sterile atmosphere in the work space 4.

作業空間4は、無菌的雰囲気を必要とする空間であれば
何れの空間であってもよく、例えば手術室等のバイオク
リーンルーム、病院の待合室、食品製造工場あるいは製
薬工場の建屋等である。第1図の方法においては作業空
間4にオゾンを含有させることなく作業空間4を無菌的
雰囲気とすることができるので、手術室あるいは病院の
待合室等の人間の存在する空間を好適に無菌的雰囲気と
することができる。
The work space 4 may be any space that requires a sterile atmosphere, such as a bioclean room such as an operating room, a waiting room of a hospital, a building of a food manufacturing factory, or a pharmaceutical factory. In the method shown in FIG. 1, it is possible to create a sterile atmosphere in the work space 4 without containing ozone, so it is possible to create a sterile atmosphere in a space where people are present, such as an operating room or a hospital waiting room. It can be done.

作業空間4かも引き抜かれた空気を混合帯域2に送りこ
こでオゾンと混合する。オゾン発生帯域1は従来のオゾ
ン発生器を用いることができ、例えば無声放電式オゾン
発生器あるいはオゾンボンベであってよい。混合帯域2
内のオゾン濃度は数十ppmないし数千ppmであって
よいが特に制限されない。混合帯域2においてオゾン混
合空気を一定時間滞留させて空気を殺菌してもよいが、
後述するようにマイクロ波照射帯域6にてオゾンとマイ
クロ波による相乗効果により顕著な殺菌効果を奏するこ
とから、混合帯域2の滞留時間を非常に短かくし例えば
配管にオゾンを注入する方式を採用することができる。
The air that is also drawn off from the working space 4 is sent to the mixing zone 2 where it is mixed with ozone. The ozone generation zone 1 can be a conventional ozone generator, for example a silent discharge ozone generator or an ozone cylinder. Mixing band 2
The ozone concentration within may range from several tens of ppm to several thousand ppm, but is not particularly limited. Although the air may be sterilized by allowing the ozone mixed air to remain in the mixing zone 2 for a certain period of time,
As will be described later, in the microwave irradiation zone 6, the synergistic effect of ozone and microwaves produces a remarkable sterilization effect, so a method is adopted in which the residence time in the mixing zone 2 is made very short and, for example, ozone is injected into the piping. be able to.

混合帯域2から流出したオゾン混合空気をマイクロ波照
射帯域乙に導入し、ここでオゾン混合空気にマイクロ波
を照射する。マイクロ波照射帯域6は、マイクロ波発生
源、およびマイクロ波照射空間から主として構成されて
おり、オゾン混合空気はこの照射空間にてマイクロ波照
射を受ける。
The ozone mixed air flowing out from the mixing zone 2 is introduced into the microwave irradiation zone B, where the ozone mixed air is irradiated with microwaves. The microwave irradiation zone 6 mainly consists of a microwave generation source and a microwave irradiation space, and the ozone-mixed air receives microwave irradiation in this irradiation space.

マイクロ波の周波数は800MHzないし30GHzの
範囲が特に好ましい。マイクロ波照射帯域6におけるオ
ゾン混合空気の滞留時間は特に限定されないが数秒間な
いし数分間であることができる。
The microwave frequency is particularly preferably in the range of 800 MHz to 30 GHz. The residence time of the ozone mixture air in the microwave irradiation zone 6 is not particularly limited, but can be from several seconds to several minutes.

驚(べきことに、オゾンにマイクロ波を照射するとオゾ
ンが分解して酸素になるとともに照射された空気中の雑
菌がほぼ完全に死滅することを本発明者は見出した。従
来、オゾン単独で空気殺菌を行う場合十分な殺菌を行う
ためには数時間程度空気とオゾンを混合して保持する必
要があり、さらに得られた無菌空気中の残留オゾンを分
解除去しなければならなかった。本発明の方法によれば
、オゾンの分解と殺菌という一見すれば相反する効果が
同時にかつ非常に短時間で生じることが見出されたので
ある。オゾン単独あるいはマイクロ波照射単独ではほと
んど殺菌効果の期待できな(・はどの短時間の例えば2
分間の滞留時間でもオゾンとマイクロ波を同時使用する
ことにより、完全な空気殺菌を行うことができるのであ
る。この効果はマイクロ波によりオゾンの分解性が飛躍
的に高まったためと考えられる。
Surprisingly, the inventors have discovered that when ozone is irradiated with microwaves, the ozone decomposes into oxygen and almost completely kills germs in the irradiated air. When performing sterilization, it is necessary to mix and hold air and ozone for several hours in order to perform sufficient sterilization, and it is also necessary to decompose and remove residual ozone in the obtained sterile air.The present invention It was discovered that according to this method, the seemingly contradictory effects of ozone decomposition and sterilization occur simultaneously and in a very short time.Ozone alone or microwave irradiation alone can hardly be expected to have a sterilizing effect. (・ is a short period of time, e.g. 2
Even with a residence time of 1 minute, complete air sterilization can be achieved by using ozone and microwaves simultaneously. This effect is thought to be due to the dramatic increase in the decomposition of ozone by microwaves.

第2図は本発明の他の態様を示す概略系統図である。こ
の方法は、作業空間4の壁面に付着した雑菌、作業空間
4内に設置された手術台5あるいはその他の物品表面上
に付着した雑菌に対し効果的に殺・菌できる。オゾン発
生帯域1がらオゾンを作業空間4に導入して数時間程度
放置し表面殺菌が完結した後、作業空間内のオゾン含有
空気をノロアーBにより引き抜いてマイク゛口波照射帯
域乙に送りここでオゾンを酸素に分解した後作業空間4
に循環する。
FIG. 2 is a schematic system diagram showing another embodiment of the present invention. This method can effectively sterilize and disinfect germs adhering to the wall surface of the work space 4, and germs adhering to the surface of the operating table 5 or other articles installed in the work space 4. Ozone is introduced into the work space 4 from the ozone generation zone 1 and left for several hours to complete surface sterilization, and then the ozone-containing air in the work space is extracted by the nozzle B and sent to the microwave irradiation zone B, where the ozone is Work space 4 after decomposing into oxygen
circulates.

従来、この種の表面殺菌においては主としてホルマリン
を使用しているが、ホルマリン殺菌法ではホルマリンが
物品の表面に残留すること等の問題点があった。本発明
の方法ではオゾンが完全に分解されて酸素となりオゾン
が残留しない。
Conventionally, this type of surface sterilization mainly uses formalin, but the formalin sterilization method has problems such as formalin remaining on the surface of the article. In the method of the present invention, ozone is completely decomposed into oxygen and no ozone remains.

本発明の方法における化学反応は次のように考えられる
。オゾンの自己分解反応は次式により示される: 03→0□十(0) ・・・・・(1)03+(0)→
20゜ ・・・・・(2)(1)式により得られる活性
酸素(○)は極めて寿命が短かいが非常に活性であり他
のオゾン03とすみやかに反応して酸素となる。すなわ
ち03が0゜に自己分解するとき、(1)式の反応が律
速段階であると考えられる。オゾンにマイクロ波を照射
するとオゾン分子の運動が活発になり(1)式の反応が
右側に急速に進行すると考えられる。
The chemical reaction in the method of the present invention can be considered as follows. The self-decomposition reaction of ozone is shown by the following formula: 03→0□10(0)...(1)03+(0)→
20°... (2) Active oxygen (◯) obtained by formula (1) has an extremely short lifespan, but is very active and quickly reacts with other ozone 03 to become oxygen. That is, when 03 self-decomposes to 0°, the reaction of equation (1) is considered to be the rate-determining step. It is thought that when ozone is irradiated with microwaves, the movement of ozone molecules becomes active and the reaction of equation (1) rapidly progresses to the right.

また活性酸素(0)は強い酸化作用を示し、有機物の炭
素や水素とより簡単に結びつき、有機物を一酸化炭素、
二酸化炭素および水蒸気に酸化分解する。ここで有機物
を空気中の雑菌と置き換えて考えると、空気中の雑菌は
オゾンの分解によって生じた活性酸素の一部と反応して
酸化分解され死滅すると考えられる。本発明の方法では
マイクロ波の照射により活性酸素が急激に増加して殺菌
速度が飛躍的に促進されたと考えられる。
In addition, active oxygen (0) exhibits a strong oxidizing effect and easily combines with carbon and hydrogen in organic matter, converting organic matter into carbon monoxide,
Oxidatively decomposes to carbon dioxide and water vapor. If we replace the organic matter with bacteria in the air, it is thought that the bacteria in the air will react with some of the active oxygen generated by the decomposition of ozone, be oxidized and decomposed, and die. It is thought that in the method of the present invention, active oxygen rapidly increases due to microwave irradiation, and the sterilization rate is dramatically accelerated.

殺菌すべき流体が空気の場合について今まで説明してき
たが、本発明は空気のみならず窒素等の他の気体に対し
ても適用できる。
Although the case where the fluid to be sterilized is air has been described, the present invention can be applied not only to air but also to other gases such as nitrogen.

実施例 1 無声放電式オゾン発生器によりオゾン濃度5000 P
pm、のオゾン化空気を250 ml/minの流量で
マイクロ波照射装置に導入した。使用したマイクロ波照
射装置は照射空間21、定格出力500Wで2450M
H2のマイクロ波を発生する。
Example 1 Ozone concentration 5000 P by silent discharge ozone generator
pm, ozonized air was introduced into the microwave irradiation device at a flow rate of 250 ml/min. The microwave irradiation device used has an irradiation space of 21, a rated output of 500W, and a capacity of 2450M.
Generate H2 microwave.

オゾン化空気の滞留時間は8分であった。マイクロ波照
射装置から流出する空気中のオゾン濃度を測定した結果
、マイクロ波を照射しないときは4800 pprrL
であるのに対し、マイクロ波照射を行うと0.1 pp
m以下となることがわかった。なお、オゾン濃度の測定
は中性ヨウ化カリウム法により行った。
The residence time of the ozonated air was 8 minutes. As a result of measuring the ozone concentration in the air flowing out from the microwave irradiation device, it was 4800 pprrL when the microwave was not irradiated.
On the other hand, when microwave irradiation is performed, it is 0.1 pp
It was found that it was less than m. Note that the ozone concentration was measured by the neutral potassium iodide method.

実施例 2 本発明における殺菌効果について検討した。酵母数1.
7X107個/罰の酵母培養液(S、formo−se
rLsis)を18 ml/rrbiルの流量で噴霧室
内に噴霧して酵母含有空気を形成した。この酵母含有空
気を31v=nの流量で吸引するとともにこの空気にオ
ゾンを添加して吸引空気中のオゾン濃度を600ppm
とした。得られたオゾン含有空気を実施例1と同じマイ
クロ波照射装置に導入した。マイクロ波照射装置での空
気の滞留時間は2分間である。
Example 2 The bactericidal effect of the present invention was studied. Yeast count 1.
7 x 107 pieces/punishment yeast culture (S, formo-se
rLsis) was sprayed into the spray chamber at a flow rate of 18 ml/rrbil to form yeast-containing air. This yeast-containing air is sucked at a flow rate of 31v=n, and ozone is added to this air to bring the ozone concentration in the sucked air to 600 ppm.
And so. The obtained ozone-containing air was introduced into the same microwave irradiation device as in Example 1. The residence time of air in the microwave irradiation device is 2 minutes.

マイクロ波照射装置入口および出口の空気中のオゾン濃
度および微生物数を測定した。オゾン濃度は中性ヨウ化
カリウム法により測牢した。微生物数については、ピン
ホールサンプラーを用い測定すべき空気501を寒天培
地に吹付け、得られた培地を3ICで48時間培養して
培地表面に出現したコロニー数を計測しこれを微生物数
とした。
The ozone concentration and the number of microorganisms in the air at the inlet and outlet of the microwave irradiation device were measured. Ozone concentration was measured using the neutral potassium iodide method. Regarding the number of microorganisms, air 501 to be measured was blown onto the agar medium using a pinhole sampler, the resulting medium was cultured in 3IC for 48 hours, the number of colonies that appeared on the surface of the medium was counted, and this was taken as the number of microorganisms. .

入口側のオゾン濃度は平均300 ppmであり、出口
側のオゾン濃度はマイクロ波照射を行なわない場合28
0 ppm、マイクロ波照射を行うと0.lppm以下
であった。微生物数を第1表に示す。
The average ozone concentration on the inlet side is 300 ppm, and the ozone concentration on the outlet side is 28 ppm without microwave irradiation.
0 ppm, and 0.0 ppm with microwave irradiation. It was less than lppm. The number of microorganisms is shown in Table 1.

第1表 本実施例から明らかな通り、オゾン含有空気を々マイク
ロ波照射するとオゾンは完全に分解するとともに空気中
の微生物はほぼ完全に死滅することがわかる。
As is clear from this example in Table 1, when ozone-containing air is irradiated with microwaves, ozone is completely decomposed and microorganisms in the air are almost completely killed.

本発、明−り拗果 本発明によれば、マイクロ波照射により極めて短時間で
オゾンをほぼ完全に酸素に分解できる。
According to the present invention, ozone can be almost completely decomposed into oxygen in a very short time by microwave irradiation.

特に従来の熱分解法あるいは活性炭吸着分解法と比較し
て、処理後の冷却工程を必要とせずおよび爆発等の危険
性が全(ない。さらに処理すべき流体が浮遊微生物を含
む場合はオゾンの分解とともに従来よりも”/100以
下と短時間で殺菌を同時に行うこともできる。また、本
発明の方法は操作が簡便でかつ装置を小型化できる。こ
のため病院の待合室等の小空間に設置して所望の無菌的
雰囲気を形成できる。
In particular, compared to conventional pyrolysis methods or activated carbon adsorption decomposition methods, there is no need for a post-treatment cooling step and there is no risk of explosion.Furthermore, if the fluid to be treated contains airborne microorganisms, ozone In addition to disassembly, sterilization can be carried out in a shorter time than conventional methods, at less than 100%.The method of the present invention is also easy to operate, and the device can be made compact.For this reason, it can be installed in small spaces such as hospital waiting rooms. to create the desired sterile atmosphere.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は、本発明の態様を示す概略系統図
である。 1・・・オゾン発生帯域、2・・・混合帯域、6・・・
マイクロ波照射帯域、4・・・作業空間。 特許出願人 新菱冷熱工業株式会社 (外4名)
1 and 2 are schematic system diagrams illustrating aspects of the present invention. 1...Ozone generation band, 2...Mixing band, 6...
Microwave irradiation band, 4... work space. Patent applicant: Shinryo Corporation (4 others)

Claims (1)

【特許請求の範囲】 1)オゾンを含有する気体にマイクロ波を照射してオゾ
ンを分解する方法。 2)気体が空気である、特許請求の範囲第1項に記載の
方法。 3)気体が微生物を特徴する特許請求の範囲第1項に記
載の方法。 4)マイクロ波の周波数が800MH2ないし30GH
2である、特許請求の範囲第1項に記載の方法。
[Claims] 1) A method of decomposing ozone by irradiating a gas containing ozone with microwaves. 2) The method according to claim 1, wherein the gas is air. 3) The method according to claim 1, wherein the gas is characterized by microorganisms. 4) Microwave frequency is 800MH2 to 30GH
2. The method according to claim 1, wherein the method is:
JP59008275A 1984-01-20 1984-01-20 Decomposition of ozone Granted JPS60155503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008275A JPS60155503A (en) 1984-01-20 1984-01-20 Decomposition of ozone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008275A JPS60155503A (en) 1984-01-20 1984-01-20 Decomposition of ozone

Publications (2)

Publication Number Publication Date
JPS60155503A true JPS60155503A (en) 1985-08-15
JPH0373325B2 JPH0373325B2 (en) 1991-11-21

Family

ID=11688621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008275A Granted JPS60155503A (en) 1984-01-20 1984-01-20 Decomposition of ozone

Country Status (1)

Country Link
JP (1) JPS60155503A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197461A (en) * 1987-10-12 1989-04-14 Nippon Shokubai Kagaku Kogyo Co Ltd Sterilizing method
JP2020100521A (en) * 2018-12-20 2020-07-02 東芝三菱電機産業システム株式会社 Ozone gas utilization system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614404A (en) * 1979-07-13 1981-02-12 Toshiba Corp Ozonizer
JPS5614406A (en) * 1979-07-13 1981-02-12 Toshiba Corp Ozonizer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614404A (en) * 1979-07-13 1981-02-12 Toshiba Corp Ozonizer
JPS5614406A (en) * 1979-07-13 1981-02-12 Toshiba Corp Ozonizer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0197461A (en) * 1987-10-12 1989-04-14 Nippon Shokubai Kagaku Kogyo Co Ltd Sterilizing method
JPH0556984B2 (en) * 1987-10-12 1993-08-20 Nippon Catalytic Chem Ind
JP2020100521A (en) * 2018-12-20 2020-07-02 東芝三菱電機産業システム株式会社 Ozone gas utilization system

Also Published As

Publication number Publication date
JPH0373325B2 (en) 1991-11-21

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