JPS60155162U - 走査電子顕微鏡用対物レンズ - Google Patents

走査電子顕微鏡用対物レンズ

Info

Publication number
JPS60155162U
JPS60155162U JP4306684U JP4306684U JPS60155162U JP S60155162 U JPS60155162 U JP S60155162U JP 4306684 U JP4306684 U JP 4306684U JP 4306684 U JP4306684 U JP 4306684U JP S60155162 U JPS60155162 U JP S60155162U
Authority
JP
Japan
Prior art keywords
magnetic pole
lens
pole piece
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4306684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532926Y2 (enrdf_load_stackoverflow
Inventor
大山　純一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP4306684U priority Critical patent/JPS60155162U/ja
Publication of JPS60155162U publication Critical patent/JPS60155162U/ja
Application granted granted Critical
Publication of JPH0532926Y2 publication Critical patent/JPH0532926Y2/ja
Granted legal-status Critical Current

Links

JP4306684U 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ Granted JPS60155162U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4306684U JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4306684U JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Publications (2)

Publication Number Publication Date
JPS60155162U true JPS60155162U (ja) 1985-10-16
JPH0532926Y2 JPH0532926Y2 (enrdf_load_stackoverflow) 1993-08-23

Family

ID=30554390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4306684U Granted JPS60155162U (ja) 1984-03-26 1984-03-26 走査電子顕微鏡用対物レンズ

Country Status (1)

Country Link
JP (1) JPS60155162U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573357A (en) * 1980-06-06 1982-01-08 Jeol Ltd Objective lens for scanning electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573357A (en) * 1980-06-06 1982-01-08 Jeol Ltd Objective lens for scanning electron microscope
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device

Also Published As

Publication number Publication date
JPH0532926Y2 (enrdf_load_stackoverflow) 1993-08-23

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