JPS60153312U - 圧力制御装置 - Google Patents

圧力制御装置

Info

Publication number
JPS60153312U
JPS60153312U JP3956284U JP3956284U JPS60153312U JP S60153312 U JPS60153312 U JP S60153312U JP 3956284 U JP3956284 U JP 3956284U JP 3956284 U JP3956284 U JP 3956284U JP S60153312 U JPS60153312 U JP S60153312U
Authority
JP
Japan
Prior art keywords
pressure
valve
valve opening
pressure control
setting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3956284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517685Y2 (enrdf_load_stackoverflow
Inventor
五一 舟久保
Original Assignee
トキコ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by トキコ株式会社 filed Critical トキコ株式会社
Priority to JP3956284U priority Critical patent/JPS60153312U/ja
Publication of JPS60153312U publication Critical patent/JPS60153312U/ja
Application granted granted Critical
Publication of JPH0517685Y2 publication Critical patent/JPH0517685Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
  • Control Of Fluid Pressure (AREA)
JP3956284U 1984-03-19 1984-03-19 圧力制御装置 Granted JPS60153312U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3956284U JPS60153312U (ja) 1984-03-19 1984-03-19 圧力制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3956284U JPS60153312U (ja) 1984-03-19 1984-03-19 圧力制御装置

Publications (2)

Publication Number Publication Date
JPS60153312U true JPS60153312U (ja) 1985-10-12
JPH0517685Y2 JPH0517685Y2 (enrdf_load_stackoverflow) 1993-05-12

Family

ID=30547621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3956284U Granted JPS60153312U (ja) 1984-03-19 1984-03-19 圧力制御装置

Country Status (1)

Country Link
JP (1) JPS60153312U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
JP2021135094A (ja) * 2020-02-25 2021-09-13 エスペック株式会社 液循環式試験装置及び液循環式試験方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019020781A (ja) * 2017-07-11 2019-02-07 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
US11162176B2 (en) 2017-07-11 2021-11-02 Horiba Stec, Co., Ltd. Fluid control apparatus, fluid control system, fluid control method, and program recording medium
JP2021135094A (ja) * 2020-02-25 2021-09-13 エスペック株式会社 液循環式試験装置及び液循環式試験方法

Also Published As

Publication number Publication date
JPH0517685Y2 (enrdf_load_stackoverflow) 1993-05-12

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