JPS60153098U - piezoelectric vibrator - Google Patents
piezoelectric vibratorInfo
- Publication number
- JPS60153098U JPS60153098U JP1984040694U JP4069484U JPS60153098U JP S60153098 U JPS60153098 U JP S60153098U JP 1984040694 U JP1984040694 U JP 1984040694U JP 4069484 U JP4069484 U JP 4069484U JP S60153098 U JPS60153098 U JP S60153098U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- electrode
- electrodes
- sides
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の圧電振動子の平面図、第2図は同じくそ
の側面図、第3図は同じく更に別の従来例における平面
図、第4図は圧力センサの電気回路図、第5図は本考案
に係る圧電振動子の平面図、第6図は第5図A1−A1
線上における断面図、第7図は本考案に係る圧電振動子
の別の実施例における平面図、第8図は本考案に係る圧
電振動子を組込んだ圧力センサの部分断面、第9図は本
考案に係る圧電振動子による圧力センサ回路、第10図
は本考案に係る圧電振動子による圧力センサの圧力−周
波数変化量特性を、従来の圧電振動子によるそれと比較
して示す特性図である。
1・・・振動板、2・・・圧電振動子、21,24,2
5.26・・・電極。
第5図
口J−一・Fig. 1 is a plan view of a conventional piezoelectric vibrator, Fig. 2 is a side view thereof, Fig. 3 is a plan view of another conventional example, Fig. 4 is an electric circuit diagram of a pressure sensor, and Fig. 5 is a plan view of the piezoelectric vibrator according to the present invention, and FIG. 6 is a plan view of the piezoelectric vibrator according to the present invention, and FIG.
7 is a plan view of another embodiment of the piezoelectric vibrator according to the present invention, FIG. 8 is a partial cross-section of a pressure sensor incorporating the piezoelectric vibrator according to the present invention, and FIG. 9 is a sectional view taken along the line. A pressure sensor circuit using a piezoelectric vibrator according to the present invention. FIG. 10 is a characteristic diagram showing the pressure-frequency variation characteristic of the pressure sensor using a piezoelectric vibrator according to the present invention in comparison with that using a conventional piezoelectric vibrator. . 1... Vibration plate, 2... Piezoelectric vibrator, 21, 24, 2
5.26... Electrode. Figure 5 Exit J-1
Claims (4)
の電極を3分割したことを特徴とする圧電振動子。(1) A piezoelectric vibrator having electrodes on both sides, characterized in that the negative side electrode is divided into three parts.
れた電極と、この電極の両側に配置された電極との3分
割で成ることを特徴とする実用新案登録請求の範囲第1
項に記載の圧電振動子。(2) Utility model registration claim 1, characterized in that the electrode on one side of the piezoelectric vibrator is divided into three parts: an electrode provided in the center and electrodes placed on both sides of this electrode.
The piezoelectric vibrator described in section.
れぞれは、電気的に接続したことを特徴とする実用新案
登録請求の範囲第2項に記載の圧電振動子。(3) The piezoelectric vibrator according to claim 2, wherein the electrodes arranged on both sides of the central electrode are electrically connected.
の面側に振動板を接合したことを特徴とする実用新案登
録請求の範囲第1項、第2項または第3項に記載の圧電
振動子。(4) A diaphragm is bonded to the surface opposite to the one surface on which the three-divided electrodes are provided. The piezoelectric vibrator described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984040694U JPS60153098U (en) | 1984-03-22 | 1984-03-22 | piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984040694U JPS60153098U (en) | 1984-03-22 | 1984-03-22 | piezoelectric vibrator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60153098U true JPS60153098U (en) | 1985-10-12 |
Family
ID=30549824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984040694U Pending JPS60153098U (en) | 1984-03-22 | 1984-03-22 | piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60153098U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010019629A (en) * | 2008-07-09 | 2010-01-28 | Yokogawa Denshikiki Co Ltd | Pressure sensor and pressure sensor unit |
JP2016059872A (en) * | 2014-09-18 | 2016-04-25 | 株式会社村田製作所 | Vibratory equipment and tactile sense presentation device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459923A (en) * | 1977-10-20 | 1979-05-15 | Matsushita Electric Ind Co Ltd | Composite vibrator |
JPS5559498A (en) * | 1978-10-27 | 1980-05-02 | Matsushita Electric Ind Co Ltd | Piezoelectric buzzer |
-
1984
- 1984-03-22 JP JP1984040694U patent/JPS60153098U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459923A (en) * | 1977-10-20 | 1979-05-15 | Matsushita Electric Ind Co Ltd | Composite vibrator |
JPS5559498A (en) * | 1978-10-27 | 1980-05-02 | Matsushita Electric Ind Co Ltd | Piezoelectric buzzer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010019629A (en) * | 2008-07-09 | 2010-01-28 | Yokogawa Denshikiki Co Ltd | Pressure sensor and pressure sensor unit |
JP2016059872A (en) * | 2014-09-18 | 2016-04-25 | 株式会社村田製作所 | Vibratory equipment and tactile sense presentation device |
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