JP2016059872A - Vibratory equipment and tactile sense presentation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide vibratory equipment capable of widening furthermore than hitherto, a band of a drive frequency capable of obtaining highly efficient vibration; and to provide a tactile sense presentation device.SOLUTION: In vibratory equipment 20 including a vibration film 22 thin in the thickness direction and expanding/contracting in the length direction by application of a voltage, and a diaphragm 21 thin in the thickness direction and having the vibration film 22 spread in the length direction in the bent state in the thickness direction, the magnitude of a stress in the length direction generated in the vibration film 22 by pulling by the diaphragm 21 is different according to a position in the width direction.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a vibration device that vibrates a diaphragm by driving a piezoelectric film, and a tactile sense presentation device that transmits vibration of the vibration device to a user as tactile feedback for a touch operation.

  A vibration device that vibrates a diaphragm by driving a piezoelectric film is used in a flat speaker or a haptic device (tactile sense presentation device) (for example, see Patent Document 1).

  FIG. 9A is a side view of the vibration device 101, and FIG. 9B is a rear view of the vibration device 101. The vibration device 101 includes a piezoelectric film 102, a vibration plate 103, and frame members 104 and 105. The diaphragm 103 and the piezoelectric film 102 have a rectangular shape that extends in the length direction and the width direction as viewed from the thickness direction. The piezoelectric film 102 is cut out from a PLLA (L-type polylactic acid) film that has been subjected to a stretching process, with a 45 ° direction relative to the stretching direction as the length direction. The piezoelectric film 102 is cut out in this way, so that elongation or contraction in the length direction occurs with application of voltage. The frame members 104 and 105 are provided at both ends of the piezoelectric film 102 in the length direction. The diaphragm 103 is connected to the piezoelectric film 102 via the frame members 104 and 105 in a state of being bent so that the distance to the piezoelectric film 102 gradually increases from the vicinity of both ends in the length direction to the vicinity of the center when viewed from the width direction. Yes. For this reason, the piezoelectric film 102 is pulled outward in the longitudinal direction from the diaphragm 103 via the frame members 104 and 105. In such a vibration device 101, when an alternating electric field is applied to the piezoelectric film 102, the piezoelectric film 102 expands and contracts in the length direction, and accordingly, the vibration plate 103 causes flexural vibration in the thickness direction.

International Publication No. 2012/157691 Pamphlet

  In the vibration device shown in FIG. 9, the piezoelectric film has a resonance frequency (natural frequency) determined by dimensions and physical properties in the expansion and contraction direction. The vibration device can vibrate the piezoelectric film with high efficiency by vibrating at a driving frequency close to the resonance frequency of the piezoelectric film. However, the conventional vibration device has a narrow driving frequency band in which the vibration of the piezoelectric film can be obtained with high efficiency, and there are changes in the situation such as contact of another object with the diaphragm, and changes in the state such as thermal deformation. The resonance frequency fluctuated, and it was difficult to obtain vibrations with high efficiency.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a vibration device and a tactile sensation presentation device that can broaden the driving frequency band in which vibration can be obtained with high efficiency.

  The vibration device according to the present invention is thin in the thickness direction and expands and contracts in a length direction perpendicular to the thickness direction by application of a voltage, and is thin in the thickness direction and bends in the thickness direction. A vibration plate portion in which the vibration film is stretched in the length direction, and the magnitude of the stress in the length direction generated in the vibration film by pulling by the vibration plate portion is the thickness direction and the thickness direction. It differs depending on the position in the width direction orthogonal to the length direction.

  Alternatively, the vibration device according to the present invention is thin in the thickness direction and expands and contracts in a length direction perpendicular to the thickness direction by applying a voltage, and is thin in the thickness direction and bends in the thickness direction. A vibration plate portion in which the vibration film is stretched in the length direction in a state, the length between the fixed ends fixed to the vibration plate portion in the vibration film is the thickness direction and the It differs depending on the position in the width direction orthogonal to the length direction.

  In these configurations, when the piezoelectric film vibrates in the length direction, the diaphragm vibrates so as to bend in the thickness direction. The resonance frequency of the vibration film that causes such vibration to occur in the vibration device is affected by the stress generated in the vibration film by pulling from the vibration plate portion and the length between the fixed ends of the vibration film. For this reason, it is possible to set a plurality of resonance frequencies in the vibration film by varying the stress and the length depending on the position in the width direction of the vibration device. Therefore, by adjusting the drive frequency of the vibration device to any resonance frequency of the vibration film, a region that effectively resonates and a region that deviates from resonance are generated in the vibration film. Then, if the resonance condition has changed due to the influence of heat or aging, it can be set so that the region different from the initial one can efficiently resonate. It is made.

  Moreover, when the length between the fixed ends in a piezoelectric film changes with the position of the width direction, the said diaphragm part is good to consist of a diaphragm which has a rectangular external shape seeing from the said thickness direction. As a result, it is possible to improve the structural stability of the vibration device, facilitate manufacturing, and the like.

  It is preferable that the diaphragm portion includes a plurality of diaphragms arranged in the width direction, and the plurality of diaphragms have different bending amounts. By doing in this way, it becomes easy to vary the magnitude of the tension depending on the position in the width direction.

  It is preferable that the diaphragm part includes a plurality of diaphragms arranged in the width direction, and the plurality of diaphragms have different bending elastic moduli. This also makes it easy to vary the magnitude of the tension depending on the position in the width direction.

  And since the diaphragm part consists of a plurality of diaphragms, the main surface of the piezoelectric film can be made substantially flat over the entire surface, and failure such as tearing of the piezoelectric film can hardly occur.

  In addition, the tactile sense presentation device according to the present invention is driven by the piezoelectric film when the vibration device, a touch detection unit that is attached to the diaphragm and detects a touch operation, and the touch detection unit detects the touch operation. And a drive unit for applying a voltage.

  The tactile sense presentation device having such a configuration has a wide driving frequency band in which high-efficiency vibration can be obtained in the vibration device, so that it is easy to obtain high-efficiency vibration even when the resonance frequency fluctuates due to touch operation It is.

  According to the present invention, in a vibration device or a tactile sensation presentation device, it is possible to broaden the driving frequency band where high-efficiency vibration can be obtained.

It is a perspective view of the tactile sense presentation device concerning a 1st embodiment. It is the side view and rear view of a vibration apparatus which concern on 1st Embodiment. It is the side view and rear view of a vibration apparatus which concern on 2nd Embodiment. It is the side view and rear view of a vibration apparatus which concern on 3rd Embodiment. It is the side view and rear view of a vibration apparatus which concern on 4th Embodiment. It is the side view and rear view of a vibration apparatus which concern on 5th Embodiment. It is the side view and rear view of a vibration apparatus which concern on 6th Embodiment. It is the side view and rear view of a vibration apparatus which concern on 7th Embodiment. It is a side view and a rear view of a vibration device according to a conventional configuration

  Hereinafter, several specific examples will be given with reference to the drawings to show a plurality of modes for carrying out the present invention. Each embodiment is an exemplification, and needless to say, partial replacement or combination of configurations shown in different embodiments is possible.

  In the following description, the direction in which vibration occurs in the piezoelectric film is defined as the length direction. Moreover, let the direction orthogonal to a length direction be the width direction in the main surface of a piezoelectric film. Moreover, let the direction orthogonal to the main surface of a piezoelectric film be a thickness direction.

  FIG. 1 is a perspective view of a haptic presentation device 10 according to a first embodiment of the present invention. The tactile presentation device 10 constitutes a so-called keyboard. The tactile sense presentation device 10 includes a control unit 11, a drive unit 12, a vibration device 20, and a touch panel 30.

  The vibration device 20 and the touch panel 30 are thin in the thickness direction, and are laminated in the thickness direction. The touch panel 30 is disposed on the front side in the thickness direction with respect to the vibration device 20. The touch panel 30 includes a plurality of touch sensors 31 exposed to the front of the tactile presentation device 10. The plurality of touch sensors 31 are arranged at positions corresponding to the key arrangement of the keyboard. Each touch sensor 31 outputs a detection signal to the control unit 11 when detecting a touch operation by the user. The touch sensor 31 and the control unit 11 constitute a touch detection unit described in the claims.

  When a detection signal is input from any of the touch sensors 31, the control unit 11 outputs a control signal to the drive unit 12. The drive unit 12 outputs a drive voltage to the vibration device 20 when a control signal is input from the control unit 11.

  The vibration device 20 includes a vibration plate 21 and a vibration film 22. The diaphragm 21 is disposed on the front side in the thickness direction with respect to the vibration film 22. The diaphragm 21 is rectangular when viewed from the thickness direction, and has a short side along the length direction and a long side along the width direction. Further, the diaphragm 21 is curved convexly on the front side in the thickness direction and concave on the back side in the thickness direction as viewed from the width direction. The touch panel 30 is bonded to the front surface of the diaphragm 21 via an adhesive or the like. Since the vibration plate 21 has a curved plate shape, the touch panel 30 is curved similarly to the vibration plate 21.

  The vibration film 22 is disposed on the back side in the thickness direction with respect to the vibration plate 21. The vibration film 22 is connected to the back surface of the vibration plate 21 that is curved in a concave shape with the vicinity of both ends in the length direction as fixed ends. It is stretched out. The vibration film 22 vibrates so as to expand and contract in the length direction when a driving voltage is applied from the vibration device 20. Thereby, the diaphragm 21 and the touch panel 30 vibrate so that the amount of bending in the thickness direction changes. In this way, the tactile sense presentation device 10 presents the vibration of the vibration device 20 as tactile feedback to the user who touches the touch sensor 31.

  2A is a side view of the vibration device 20 viewed from the width direction, and FIG. 2B is a rear view of the vibration device 20 viewed from the thickness direction. In FIG. 2A, for the sake of explanation, the curvature of the diaphragm 21 is exaggerated, and it is actually desirable that the diaphragm 21 be flatter.

  The diaphragm 21 corresponds to the diaphragm portion described in the claims. The diaphragm 21 is made of an elastically deformable material, for example, acrylic resin PMMA. The vibration plate 21 may be made of other materials such as a metal plate, PET, polycarbonate (PC), PLLA, and glass.

  The vibration film 22 includes an organic piezoelectric film, an electrostrictive film, an electret film, a composite film in which particles such as piezoelectric ceramics are dispersed in a polymer, an electroactive polymer film, and the like. Here, the vibration film 22 is configured by providing electrodes (not shown) on the entire surfaces of both main surfaces of the organic piezoelectric film. The organic piezoelectric film can be composed of, for example, L-type polylactic acid (PLLA), which is a chiral polymer, or polyvinylidene fluoride (PVDF). When composed of PLLA, from the film that has been stretched in the main stretching direction indicated by the white arrow in FIG. 2 (B), the length direction is approximately 45 ° relative to the main stretching direction. By cutting out the vibration film 22, it is possible to give the vibration film 22 piezoelectricity that expands and contracts in the length direction.

  2B, the vibration film 22 includes a central portion 23 and a plurality of end portions 24 and 25 as viewed from the thickness direction. The central portion 23 is a region that occupies the central portion of the vibration film 22 in the length direction. The central portion 23 is substantially rectangular when viewed from the thickness direction, and has two short sides extending in the length direction and two long sides extending in the width direction. The plurality of end portions 24 and 25 are provided so as to protrude in the length direction from each of the two long sides of the central portion 23. The end portion 24 and the end portion 25 are different in length protruding from the long side of the central portion 23, and the end portion 24 is longer than the end portion 25. Here, the end 24 and the end 25 are set so that the cross-sectional shape and area perpendicular to the length direction are almost the same. Further, the end portions 24 and the end portions 25 are alternately arranged in the width direction. A notch 26 is provided between the end 24 and the end 25 in the width direction. The position in the width direction where the end portion 24 is provided coincides with each of the two long sides of the central portion 23. Further, the position in the width direction where the end portion 25 is provided also coincides with each of the two long sides of the central portion 23.

  Further, as shown in FIG. 2A, the vibration film 22 is fixed at the front end portion in the length direction to the back surface of the vibration plate 21 in a state where the front surface is convex and the back surface is concave as viewed from the width direction. It is stretched by being fixed as the end 27. More specifically, only the central portion 23 of the vibration film 22 is orthogonal to the thickness direction. The end 24 is connected to the diaphragm 21 at a position on the outer side in the longitudinal direction from the position where the end 25 is connected to the diaphragm 21, and the fixed end 27 is the central portion 23 when viewed from the width direction. It is in the state which inclined so that it may be located in the back side rather than. The end 25 is connected to the diaphragm 21 at a position on the inner side in the length direction from the position where the end 24 is connected to the diaphragm 21, and the fixed end 27 is viewed from the width direction as the central portion 23. It is in the state which inclines so that it may be located in the front side.

  In the vibration device 20 having such a configuration, the length between the fixed ends 27 of the vibration film 22 differs depending on the position in the width direction. Therefore, the resonance frequency of the vibration device 20 differs between the position where the end portion 24 is provided and the position where the end portion 25 is provided. Therefore, in the vibration device 20, when these resonance frequencies are set so as to be relatively close to each other, it is possible to widen the driving frequency band in which highly efficient vibration can be obtained. That is, in the tactile sense presentation device 10, even when the resonance frequency fluctuates due to the state of the touch operation on the touch panel 30, deterioration of the member over time, deformation of the member due to temperature change, etc. Vibration can be obtained with high efficiency.

  Further, the vibration device 20 is held by a jig while the vibration plate 21 is bent at the time of manufacture, and the vibration film 22 is attached to the back surface of the vibration plate 21 so that the vibration plate 21 and the vibration film 22 are firmly bonded. Then, it is manufactured by removing the jig. In the vibration device 20 thus manufactured, the tension is transmitted from the vibration plate 21 toward the outer side in the length direction of the vibration film 22 in an attempt to return the curved vibration plate 21 to a flat shape. The magnitude of the tension can be adjusted by applying tension to the vibration film 22 when the vibration film 22 is attached to the vibration plate 21. That is, it occurs after the attachment to the diaphragm 21 by adjusting the tension at the time of attachment to the diaphragm 21 between the position where the end 24 is provided and the position where the end 25 is provided. The tension can be adjusted.

  Further, when the vibration film 22 is attached to the vibration plate 21 without applying tension to the vibration film 22, the position in the length direction where the vibration film 22 is connected to the vibration plate 21 is different in the width direction. The tension transmitted from the plate 21 to the vibration film 22 also varies depending on the position in the width direction.

  As described above, the tension acting in the length direction of the vibration film 22 varies depending on the position in the width direction, and the end 24 and the end 25 have substantially the same cross-sectional shape and area perpendicular to the length direction. Thus, the stress in the length direction generated in the vibration film 22 varies depending on the position in the width direction.

  Thus, in the vibration device 20, the position where the end portion 24 is provided and the position where the end portion 25 is provided also vary depending on the lengthwise stress generated in the vibration film 22 depending on the position in the width direction. The resonance frequency will be different. Therefore, in the vibration device 20, it is possible to widen the driving frequency band in which high-efficiency vibration can be obtained even by adjusting the tension. That is, in the tactile sense presentation device 10, even if the resonance frequency fluctuates due to the state of touch operation on the touch panel 30, deterioration of the member over time, deformation of the member due to temperature change, etc., it becomes easy to obtain highly efficient vibration .

  Further, in this vibration device 20, the vibration plate 21 is configured as a single plate having a rectangular outer shape when viewed from the thickness direction. For this reason, the diaphragm 21 can be easily processed, and a jig or the like that holds the diaphragm 21 in a curved state at the time of manufacture can have a simple configuration. Therefore, the manufacture of the vibration device 20 and the tactile sense presentation device 10 can be facilitated. Further, the number of members of the vibration device 20 and the tactile sense presentation device 10, in particular, the number of movable members can be suppressed, a failure with time can be suppressed, and the structural stability is improved.

  In the present embodiment, only the single vibration film 22 is provided in the vibration device 20, but the vibration film 22 may be divided into a plurality of vibration films arranged in the width direction.

  In the present embodiment, the end portion 24 and the end portion 25 have the same widthwise dimension. However, the end 24 and the end 25 may have different width dimensions. By making the end portion 24 and the end portion 25 have different widthwise dimensions, even if the end portion 24 and the end portion 25 have the same lengthwise dimension, the end portion 24 and the end portion 25 are also the same. Even if the tension acting on the film is the same, the stress in the length direction generated in the vibration film can be varied in the width direction.

  In the present embodiment, the end portion 24 and the end portion 25 have different lengthwise dimensions. However, the end portion 24 and the end portion 25 may have the same lengthwise dimension. Good. In that case, during production, the tension is adjusted and applied to the vibration film, and the vibration film is attached to the vibration plate while the tension is applied. Can vary in direction.

  Moreover, in this embodiment, although the example which makes both the dimension of the length direction of a vibration film and the stress of a length direction differ by the position of the width direction was shown, this invention is the length direction of a vibration film. Only one of the dimension or the stress in the length direction generated in the vibration film may be varied depending on the position in the width direction. In any case, since the vibration film has a different resonance frequency depending on the position in the width direction, it is possible to realize a broader drive frequency band in which vibration is efficiently generated.

  Next, a vibration device according to a second embodiment of the present invention will be described.

  FIG. 3A is a side view of the vibration device 20A according to the second embodiment, and FIG. 3B is a rear view of the vibration device 20A according to the second embodiment.

  The vibration device 20A includes a vibration plate 21 and a vibration film 22A. As shown in FIG. 3B, the vibration film 22A includes a plurality of end portions 24A as viewed from the thickness direction. The plurality of end portions 24A are arranged side by side in the width direction, and are provided so as to protrude in the length direction from the long sides of the vibration film 22A. The plurality of end portions 24A are arranged so as to be located on the outer side in the length direction as they are closer to both ends in the width direction, and to be located on the inner side in the length direction as they are closer to the center in the width direction.

  Then, as shown in FIG. 3A, the vibration film 22A has a length direction of the end 24A on the back surface of the vibration plate 21 in a state where the front surface is convex and the back surface is concavely concave as viewed from the width direction. By connecting the tip as the fixed end 27, the tip is stretched over the diaphragm 21.

  Thus, in the vibration device 20A, the dimension in the length direction of the vibration film 22A is changed stepwise so that it is longer as it is closer to both ends in the width direction and is shorter as it is closer to the center in the width direction. . Further, tension is transmitted from the diaphragm 21 toward the outer side in the length direction to the vibration film 22A, and this tension is also set to change stepwise from near both ends in the width direction to near the center in the width direction. Yes. As a result, the vibration device 20A has a plurality of resonance frequencies having more stepped frequency differences, and can further widen a drive frequency band in which highly efficient vibration can be obtained.

  Next, a vibration device according to a third embodiment of the present invention will be described.

  FIG. 4A is a side view of the vibration device 20B according to the third embodiment, and FIG. 4B is a rear view of the vibration device 20B according to the third embodiment.

  The vibration device 20B includes a vibration plate 21 and a vibration film 22B. As shown in FIG. 4B, the vibration film 22B has a rectangular outer shape when viewed from the thickness direction. The vibration film 22B is fixed to the vibration plate 21 by a fixed end 27B provided at an end portion in the length direction. Then, the dimension in the length direction of the fixed end 27B is continuously changed so as to be shorter near both ends in the width direction and to be longer near the center in the width direction. And as shown to FIG. 4 (A), the vibration film 22B is connected via the fixed end 27B to the back surface of the diaphragm 21 in a state where the front surface is convex and the back surface is concavely concave as viewed from the width direction. Thus, the diaphragm 21 is stretched over.

  In this way, in the vibration device 20B, the length between the fixed ends 27B of the vibration film 22B is continuously changed so as to be longer near both ends in the width direction and shorter near the center in the width direction. Further, tension is transmitted from the diaphragm 21 to the vibration film 22B toward the outside in the length direction, and this tension is also set so as to continuously change from near both ends in the width direction to near the center in the width direction. Yes. As a result, the vibration device 20B has a resonance frequency that extends over a wide band, and can further expand the band of the drive frequency at which highly efficient vibration can be obtained.

  Next, a vibration device according to a fourth embodiment of the present invention will be described.

  FIG. 5A is a side view of a vibration device 20C according to the fourth embodiment, and FIG. 5B is a rear view of the vibration device 20C according to the fourth embodiment.

  The vibration device 20C includes a plurality of vibration plates 21C and 22C and a vibration film 23C. The plurality of diaphragms 21 </ b> C and 22 </ b> C constitutes a diaphragm part described in the claims. As shown in FIG. 5B, the vibration film 23C has a rectangular outer shape as a whole when viewed from the thickness direction. On the other hand, each of the plurality of diaphragms 21C and 22C is made of a material having the same bending elastic modulus, and has different lengthwise dimensions. Specifically, the diaphragm 21C has a longer dimension in the length direction, and the diaphragm 22C has a shorter dimension in the length direction. Accordingly, the diaphragm 21C and the diaphragm 22C are connected to the diaphragm 23C so that the amount of bending in the thickness direction is different, the diaphragm 21C has a larger amount of bending, and the diaphragm 22C has a smaller amount of bending. ing.

  As shown in FIG. 5A, the vibration film 23C is connected to the rear surface of the vibration plate 21C and the vibration plate 22C in a state where the front surface is convex and the back surface is concave as viewed from the width direction. 21C and 22C. Therefore, the tension is transmitted from each of the vibration plates 21C and 22C to the vibration film 23C toward the outside in the length direction. The tension transmitted from the diaphragm 21C is larger and the tension transmitted from the diaphragm 22C is smaller. As a result, the vibration device 20C has a plurality of resonance frequencies, and can further widen the drive frequency band in which highly efficient vibration can be obtained.

  Next, a vibration device according to a fifth embodiment of the present invention will be described.

  FIG. 6A is a side view of a vibration device 20D according to the fifth embodiment, and FIG. 6B is a rear view of the vibration device 20D according to the fifth embodiment.

  The vibration device 20D shown here includes a plurality of vibration plates 21D and 22D and a vibration film 23D. The plurality of diaphragms 21 </ b> D and 22 </ b> D constitute a diaphragm part described in the claims. The plurality of diaphragms 21D and 22D have the same lengthwise dimension, and the same amount of bending in the thickness direction when coupled to the diaphragm 23D. The flexural modulus is different. The flexural modulus of the diaphragm 21D is large, and the flexural modulus of the diaphragm 22D is small. Also in this case, the tension transmitted to the vibration film 23D is larger than the tension transmitted from the diaphragm 21D, and is smaller than the tension transmitted from the diaphragm 22D. Even in this case, the vibration device 20 </ b> D has a plurality of resonance frequencies, and can further widen the band of the driving frequency at which highly efficient vibration can be obtained.

  Next, a vibration device according to a sixth embodiment of the present invention will be described.

  FIG. 7A is a side view of the vibration device 20E according to the sixth embodiment, and FIG. 7B is a rear view of the vibration device 20E according to the sixth embodiment.

  The vibration device 20E shown here includes a plurality of vibration plates 21E and 22E and a vibration film 23E. The plurality of diaphragms 21 </ b> E and 22 </ b> E constitute a diaphragm part described in the claims. The vibration film 23E has a shape with a step on the long side so that a region having a long dimension in the length direction and a region having a short dimension in the length direction are aligned in the width direction. The plurality of diaphragms 21E and 22E are connected to regions having different dimensions in the length direction of the vibration film 23E. The plurality of diaphragms 21E and 22E have the same lengthwise dimension and the same bending elastic modulus, but the lengthwise dimension of the vibration film 23E to be connected is different. The amount of deflection in the thickness direction is different. Also in this case, the tension transmitted to the vibration film 23E is larger than the tension transmitted from the diaphragm 21E, and is smaller than the tension transmitted from the diaphragm 22E. Even in this case, the vibration device 20E has a plurality of resonance frequencies, and the band of the driving frequency at which highly efficient vibration can be obtained can be further expanded.

  In the case where a plurality of diaphragms are provided as shown in the fourth to sixth embodiments, the main surface of the vibration film can be made substantially flat, and it is difficult to cause a failure such that the vibration film is torn. can do.

  Next, a vibration device according to a seventh embodiment of the present invention will be described.

  FIG. 8A is a side view of the vibration device 20F according to the seventh embodiment, and FIG. 8B is a rear view of the vibration device 20F according to the seventh embodiment.

  The vibration device 20F shown here includes a single vibration plate 21F and a plurality of vibration films 22F and 23F. The vibration film 22F is longer in the length direction than the vibration film 23F. In other words, the vibration film 23F is shorter in dimension in the length direction than the vibration film 22F. The vibration film 22F and the vibration film 23F are alternately arranged in the width direction. The vibration film 22F and the vibration film 23F are connected to different positions in the length direction with respect to the vibration plate 21F. Also in this case, the tension transmitted to the vibration film 22F is larger than the tension transmitted to the diaphragm 23F. Even in this case, the vibration device 20E has a plurality of resonance frequencies, and the band of the driving frequency at which highly efficient vibration can be obtained can be further expanded.

  As described above, the present invention can be implemented, but the present invention can be implemented even with the other configurations described above as long as the configurations fall within the scope of the claims. For example, the vibration device of the present invention may be used for another device that is not a tactile sense presentation device, such as a flat speaker. In addition to directly connecting the vibration film to the diaphragm, the diaphragm may be indirectly connected to the diaphragm via another member such as a frame member. Alternatively, a film mainly composed of polyvinylidene fluoride or a chiral polymer may be attached to another film and indirectly connected to the diaphragm via the attached film.

DESCRIPTION OF SYMBOLS 10 ... Tactile sense presentation apparatus 11 ... Control part 12 ... Drive part 20, 20A, 20B, 20C, 20D, 20E ... Vibrating device 21, 21C, 22C, 21D, 22D, 21E, 22E ... Diaphragm 22, 22A, 22B, 23C , 23D, 23E ... vibration film 23 ... central part 24, 25, 24A ... end part 26 ... notch 27, 27B ... fixed end 30 ... touch panel 31 ... touch sensor

Claims (8)

A vibration film that is thin in the thickness direction and expands and contracts in the length direction perpendicular to the thickness direction by application of a voltage;
A vibration plate portion that is thin in the thickness direction and is stretched in the length direction in a state of being bent in the thickness direction,
The vibration device in which the magnitude of the stress in the length direction generated in the vibration film by pulling by the diaphragm portion is different depending on the position in the width direction perpendicular to the thickness direction and the length direction. A vibration film that is thin in the thickness direction and expands and contracts in the length direction perpendicular to the thickness direction by application of a voltage;
A vibration plate portion that is thin in the thickness direction and is stretched in the length direction in a state of being bent in the thickness direction,
The length between the fixed ends fixed to the diaphragm portion in the vibration film differs depending on the position in the thickness direction and the width direction orthogonal to the length direction.   The said diaphragm part is a vibration apparatus of Claim 1 or Claim 2 which consists of a single diaphragm which has a rectangular external shape seeing from the said thickness direction.   3. The vibration device according to claim 1, wherein the diaphragm portion includes a plurality of diaphragms arranged in the width direction, and the plurality of diaphragms have different bending amounts.   The said diaphragm part is provided with the some diaphragm arranged in the said width direction, and the said diaphragm has each bending elastic modulus different, The claim 1 or Claim 2 or Claim 4 characterized by the above-mentioned. Vibration device.   The vibration device according to claim 1, wherein the vibration film is made of polyvinylidene fluoride as a main material.   The vibration device according to claim 1, wherein the piezoelectric film includes a chiral polymer as a main material. A vibration device according to any one of claims 1 to 7,
A touch detection unit for detecting a touch operation attached to the vibration plate unit;
A tactile sense presentation device comprising: a drive unit that applies a drive voltage to the piezoelectric film when the touch detection unit detects a touch operation.

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