JPS60152950U - 金属ダイアフラム圧力センサ - Google Patents

金属ダイアフラム圧力センサ

Info

Publication number
JPS60152950U
JPS60152950U JP4092484U JP4092484U JPS60152950U JP S60152950 U JPS60152950 U JP S60152950U JP 4092484 U JP4092484 U JP 4092484U JP 4092484 U JP4092484 U JP 4092484U JP S60152950 U JPS60152950 U JP S60152950U
Authority
JP
Japan
Prior art keywords
pressure sensor
insulating film
metal diaphragm
diaphragm pressure
diaphragm body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4092484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342344Y2 (enrdf_load_stackoverflow
Inventor
仁 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Priority to JP4092484U priority Critical patent/JPS60152950U/ja
Publication of JPS60152950U publication Critical patent/JPS60152950U/ja
Application granted granted Critical
Publication of JPH0342344Y2 publication Critical patent/JPH0342344Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP4092484U 1984-03-21 1984-03-21 金属ダイアフラム圧力センサ Granted JPS60152950U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4092484U JPS60152950U (ja) 1984-03-21 1984-03-21 金属ダイアフラム圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4092484U JPS60152950U (ja) 1984-03-21 1984-03-21 金属ダイアフラム圧力センサ

Publications (2)

Publication Number Publication Date
JPS60152950U true JPS60152950U (ja) 1985-10-11
JPH0342344Y2 JPH0342344Y2 (enrdf_load_stackoverflow) 1991-09-05

Family

ID=30550272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4092484U Granted JPS60152950U (ja) 1984-03-21 1984-03-21 金属ダイアフラム圧力センサ

Country Status (1)

Country Link
JP (1) JPS60152950U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0342344Y2 (enrdf_load_stackoverflow) 1991-09-05

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