JPS60151946A - 走査型電子線装置 - Google Patents

走査型電子線装置

Info

Publication number
JPS60151946A
JPS60151946A JP59007016A JP701684A JPS60151946A JP S60151946 A JPS60151946 A JP S60151946A JP 59007016 A JP59007016 A JP 59007016A JP 701684 A JP701684 A JP 701684A JP S60151946 A JPS60151946 A JP S60151946A
Authority
JP
Japan
Prior art keywords
scanning
coil
alignment
objective lens
adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59007016A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shigetomo Yamazaki
山崎　茂朋
Takashi Kimura
隆志 木村
Junichi Tsukajima
塚島　順一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP59007016A priority Critical patent/JPS60151946A/ja
Publication of JPS60151946A publication Critical patent/JPS60151946A/ja
Publication of JPH027506B2 publication Critical patent/JPH027506B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59007016A 1984-01-20 1984-01-20 走査型電子線装置 Granted JPS60151946A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59007016A JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59007016A JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Publications (2)

Publication Number Publication Date
JPS60151946A true JPS60151946A (ja) 1985-08-10
JPH027506B2 JPH027506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-19

Family

ID=11654239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59007016A Granted JPS60151946A (ja) 1984-01-20 1984-01-20 走査型電子線装置

Country Status (1)

Country Link
JP (1) JPS60151946A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02216747A (ja) * 1989-02-17 1990-08-29 Jeol Ltd 走査型電子顕微鏡のアライメント装置
US6822233B2 (en) 1998-03-02 2004-11-23 Hitachi, Ltd. Method and apparatus for scanning transmission electron microscopy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02216747A (ja) * 1989-02-17 1990-08-29 Jeol Ltd 走査型電子顕微鏡のアライメント装置
US6822233B2 (en) 1998-03-02 2004-11-23 Hitachi, Ltd. Method and apparatus for scanning transmission electron microscopy

Also Published As

Publication number Publication date
JPH027506B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-02-19

Similar Documents

Publication Publication Date Title
US4983832A (en) Scanning electron microscope
KR100523229B1 (ko) 전자빔장치
JP2005310602A (ja) 荷電粒子線調整方法、及び荷電粒子線装置
JP3101114B2 (ja) 走査電子顕微鏡
US4044254A (en) Scanning corpuscular-beam transmission type microscope including a beam energy analyzer
US5519216A (en) Electron-optical imaging system having controllable elements
JPH0122705B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS60151946A (ja) 走査型電子線装置
US4218621A (en) Electron beam exposure apparatus
JP2964873B2 (ja) 電子線光軸合わせ装置
US4439681A (en) Charged particle beam scanning device
KR102628711B1 (ko) 하전 입자선 장치
JP2726538B2 (ja) 電子顕微鏡
JPH0448627Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2008282826A (ja) 荷電粒子線調整方法、及び荷電粒子線装置
JP2007242366A (ja) 透過電子顕微鏡
JP2001076659A (ja) 荷電粒子ビーム顕微鏡、欠陥検査装置及び半導体デバイスの製造方法
JPS5847825B2 (ja) 電子顕微鏡
JPS5914222B2 (ja) 走査電子顕微鏡等用倍率制御装置
JPH0395841A (ja) 電子顕微鏡
JP3453247B2 (ja) 走査電子顕微鏡およびその制御方法
CN116246924A (zh) 电子束控制装置及方法
JPH035022B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS59165358A (ja) 走査電子顕微鏡
JPS60243951A (ja) 電子線装置における軸合せ方法