JPS60142513A - Assembling type supporting jig - Google Patents

Abstract

PURPOSE:To obtain a supporting jig which can be handled easily even when many semiconductor wafers are placed thereon and is capable of mounting the wafers more than those to be placed on the conventional device by removably providing wheel members to each end supporting member and forming a holding groove to at least the one side of rod with an interval. CONSTITUTION:Three rods 4a, 4b and 4c, for example, having two end supporting members 2a, 2b (for example, consisting of the supporting blocks 8a, 8b and auxiliary supporting materials 10a, 10b) and holding grooves 56, 58 and the wheel members 6a and 6b are assembled as shown in the figure, and thereby a supporting jig for supporting semiconductor wafers or the equivalent can be constituted. Two supporting blocks 8a and 8b are arranged in the front and rear direction with an interval. The wheel member 6a can be combined with the supporting block 8a by combining the auxiliary supporting material 10a to the supporting block 8a as specified by positioning the shaft member 60 of said wheel member 6a to the recessed portion 36 formed for the fixing to the supporting block 8a.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a support for supporting semiconductor wafers or the like.

As is well known to those skilled in the art, in the diffusion process of semiconductor wafers, appropriate supports are used to support and house a plurality of semiconductor wafers in a diffusion furnace. When a relatively large number of semiconductor wafers are placed on such a support, the support is handled by its own weight (for example, when placed in a furnace).

This makes it difficult to move (such as removing it from the furnace).
For example, it is configured to be able to place about 25 to 100 sheets. Therefore, conventionally, when a relatively large number of semiconductor wafers are housed in a diffusion furnace at once,
There is a need for a motherboard that can mount a plurality of the above-mentioned supports.

On the other hand, the support tool (a) prevents foreign matter from landing or diffusing on the semiconductor wafer undergoing the diffusion process.
(b) be formed from a material that does not substantially react with the semiconductor wafer or with the semiconductor wafer; (b) have high heat resistance to withstand high temperatures in the diffusion furnace;
It is important that the product satisfies the following requirements. In view of these requirements, the support is generally made of silicon or quartz glass. However, since silicon is hard and brittle, it is extremely difficult to apply complex machining to it, and it is impossible to fuse parts together.

Therefore, in the case of silicon, a silicon block member has traditionally been subjected to relatively simple machining such as cutting and grooves to produce a single-piece support. on the other hand,
In the case of quartz glass, since it is possible to fuse parts together, a supporting tool is generally manufactured by integrating a plurality of parts by welding them together.

However, in the conventional support device, the following problems still exist to be solved. First, especially when made of silicone, it is a single piece machined from a block.
It requires relatively large amounts of fairly expensive materials and therefore has high manufacturing costs. Second, since the material is exposed to large temperature changes during storage in and removal from the diffusion furnace, it may be locally damaged by thermal stress, and if locally damaged, it may become a single piece or a molten material. Since it is a one-piece piece, the whole is unusable. Thirdly, especially in the case of quartz glass, it is difficult to manufacture with high precision because it is manufactured by fusion, and there is a risk that the fused part may soften and deform when exposed to high temperatures in a diffusion furnace. There is.

The present invention has been made in view of the above facts, and its main purpose is to provide an excellent prefabricated support that eliminates the above-mentioned problems that exist in conventional supports. be.

Another object of the present invention is to provide a prefabricated support that can be easily handled even when a relatively large number of semiconductor wafers or the like are placed thereon, and that can therefore place a larger number than before. The goal is to provide the following.

Other objects of the present invention are that it can be manufactured relatively easily, that the amount of waste used can be minimized, and that it can be used by replacing only one part in the event of local damage. It is an object of the present invention to provide an assembly type support device that can be used continuously.

Still another object of the present invention is to provide an extremely easy assembly and disassembly system.
It is an object of the present invention to provide an assembly type support device that can be used as an assembly type support device.

According to the present invention, there is provided a prefabricated support for supporting a semiconductor wafer or the like, which includes two end support members disposed at a predetermined distance in the horizontal direction, and one end of the support. at least two rods, the other end of which is removably associated with one of the end support members and extending between the end support members; A removably assembled wheel member is provided, and at least one of the rods is formed with a plurality of holding grooves at intervals in the longitudinal direction thereof. be done.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an assembly type support constructed according to the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows an exploded view of an embodiment of a modular support for supporting a semiconductor wafer or the like constructed in accordance with the present invention. The illustrated support includes two end support members 2a and 2b and three rods 4a and 4b.
and 4c, and wheel portions 446a and 6b. Each of the end support members 48 and 4b includes a support block 8a and 8b, and an auxiliary support 1. Oa and 10b
Contains.

Each of the support blocks 8a and 8b may have an appropriate shape, but it is convenient that the support blocks 8a and 8b have a wide and generally rectangular shape so that they can stably stand on their own. The lower edge of each of the support blocks 8a and 8b has a center s12 defined by a flat surface that extends substantially horizontally, and a predetermined widthwise outward direction (direction from the lower left to the upper right in FIG. 1). It includes sides defined by angled planes angled upwardly. Further, the upper edges of each of the support blocks 8a and 8b are defined by a central portion 14 defined by a flat surface extending substantially horizontally, and an inclined plane inclined downward at a predetermined angle outward in the width direction. 16 and 18. Each of the support blocks 8a and 8b has one end of each of the two rods 4b and 4c (as will be described in detail later, the rods 4b and 4c are positioned on both sides). Two side support notches 20 and 22 of the mating chamber are formed. Each of the side support notches 20 and 22 extends downwardly and centrally from the upper edge sides 16 and 18 defined by an inclined plane, preferably substantially perpendicular to the upper edge sides 16 and 18. It slopes and extends relatively shallowly. The side surfaces of the side support cutouts 20 and 22 extend substantially parallel to each other at a predetermined distance t. ξ side support notches 20 and 2
The base of each of 2 is defined by two planes: substantially horizontal planes 24 and 26 and substantially vertical planes 1m 28 and 30. Each of the support blocks 8a and 8b includes
A support notch 32 is formed for combining the auxiliary supports 10a and 10b.

Each of the support notches 32 extends substantially vertically downwardly and shallowly from the upper edge central portion 14 defined by a substantially horizontal flat surface. The bottom of each support notch 32 is defined by a substantially horizontal plane 34 . Further, each of the support blocks 85L and 8b has the wheel member 6
A mounting recess 36 and two cutouts 38 and 40 are formed for assembling a and 6b. Each of the mounting recesses 36 is formed substantially horizontally in the lower outer surface of the support blocks 2a and 2b, measured over substantially its entire width from one lower edge side to the other lower edge side. The cross-sectional shape of each of the mounting recesses 36 may be square. In addition, two notches 38
and 40 extend substantially vertically upward from both sides of the lower edge central portion 12 defined by substantially horizontally extending flat surfaces deep to near the upper edges of the support blocks 8a and 8b. Each of the cutouts 38 and 40 may have a rectangular cross-sectional shape.

The above-mentioned side support notches 20 and 22, support notch 32,
In addition, the cutouts 38 and 40 are formed throughout the thickness of the support blocks 8a and 8b, as is clear from FIG.

Each of the auxiliary supports 10a and 10b may have any suitable shape, but is conveniently approximately rectangular. The width r1 of the auxiliary supports 10a and 10b is substantially upward or slightly smaller than the width W of the support notch 32 formed in the upper edge intermediate portion 14 of the support blocks 8a and 8b. A locking notch 42 and a central support notch 44 are formed in each of the auxiliary supports 10a and 10b. Locking notch 4
Each of the auxiliary supports 10a and 10b has a rectangular cross-sectional shape, and extends substantially vertically upward from approximately the middle of the lower surfaces of the auxiliary supports 10a and 10b to near the upper surfaces thereof. Each of these locking notches 42 is
The width r2 of each of the auxiliary supports 10a and 10b is formed over substantially the entire width of the support block 8.
The actual thickness is the same as or slightly larger than the thickness w2 of a and 8b. Further, each of the central support notches 44 is formed substantially horizontally over the entire width of the lower inner surface of the auxiliary supports 10a and 10b, and has a rectangular cross-sectional shape.

These auxiliary supports 10a and 10. On the inside of each b,
Furthermore, an auxiliary notch 46 is formed for assembling one end of the arad 4a. Each of the auxiliary notches 46 has a rectangular cross-sectional shape, extends substantially vertically at the middle portion of the inner surface in the width direction, and is formed over the entire height of the auxiliary supports 10& and 10b. Therefore, each of the central support notches 44 has an auxiliary notch 46 at its longitudinally intermediate portion.
The underlying surface which intersects and defines a central support notch 44, as can be seen from FIG. 1, defines a support shoulder at its intersection. In order to define the above-mentioned support shoulder, the depth r of the central support notch 44 is the same as that of the auxiliary notch 4.
The depth of 6 is r4 It is heavy armor to make it deeper (r, > r,). A hook s48 is integrally provided on the rear surface of each of the auxiliary supports 10a and 10b. The hook portion 48 has an opening 50 formed therein substantially in the center thereof and passing through the hook portion 48 in the vertical direction. The hook portion 48 does not need to be provided on both sides, and may be provided on either one.

In the illustrated example, as understood from FIG.
When the auxiliary supports 10a and 10b't are combined with the support blocks 8a and 8b, respectively, as described later, the lower surfaces of the auxiliary supports 10a and 10b and the lower surface of the lower edge intermediate portion 12 of the support blocks 8a and 8b. are configured so that they are substantially on the same plane.

The three rods 4a, 4b, and 4C may have any suitable cross-sectional shape, such as circular or polygonal, but from the viewpoint of ease of manufacture, rectangular, particularly square, is preferred. In the illustrated example, the length of the rod 4a in the longitudinal direction is also slightly shorter than that of the other rods 4b and 4c. First, to explain about the rod 4a (as will be explained later, the rod 4a is positioned in the middle of the other rods 4b and 4c), both ends of the rod 4& are provided for combination with the above-mentioned auxiliary supports 10a and 10b. A locking notch is formed. In the illustrated example, two diagonally opposite corners, that is, the two corners located at the upper and lower sides in the vertical direction in FIG. 1, are cut out to form a plane substantially perpendicular to the diagonal. As a result, two locking notches 52 are formed at each end of the rod 4a.

The longitudinal dimension t1 of such a locking notch 52 is the same as that of the central support notch 4 formed in the auxiliary supports 10a and 10b.
The difference (r,
-'rq) and substantially upward - or slightly smaller than this by p.

Further, the residual thickness t2 between the locking notches 52 is the same as that of the central support notches 44 formed in the auxiliary supports 10a and 10b.
The width r is substantially upward or slightly smaller than this. Support blocks 8a are provided at both ends of the rods 4b and 4c.
and 8b are formed with locking notches for combination. In the illustrated example, as shown in FIG. 1 and FIG. Two locking notches 54 are formed at each end of the rods 4b and 4c by cutting out the corners located at the lower ends to form a plane substantially perpendicular to the diagonal line. The longitudinal dimension of such a locking notch 541. (FIG. 1) is substantially upwardly or slightly larger than the thickness W2 (FIG. 1) of the support blocks 8a and 8b. Further, the residual thickness 14 (FIG. 2) between the two locking notches 54 is equal to the width W5 (FIG. 1) of the side support notches 18 and 20 formed in the support blocks 8a and 8b. Fruit/h upwards or even slightly smaller. The three rods 4a mentioned above,
4b and 4c, a plurality of holding grooves are further formed in the main portion, which is the intermediate portion, at predetermined intervals in the longitudinal direction.

As clearly shown in FIG. 1, in the rod 4a,
A plurality of holding fRs 56 are formed at predetermined intervals in the longitudinal direction at the uppermost corner. On the other hand, rod 4
In b and 4c, a plurality of holding grooves 58 are formed at predetermined intervals in the longitudinal direction at the corners located at the inner upper ends. As will be described later, three rods 4a, 4b and 4
When the support tool is assembled by combining the rod 4c with the end support members 2a and 2b, the holding groove 56 formed in the rod 4a and the holding groove 58 formed in the rods 4b and 4c are aligned in the lateral direction. It is important to. Preferably, each of the retaining grooves 56 and 58 is tapered so that the width thereof gradually decreases from the open end to a predetermined depth, and has substantially the same width from the predetermined depth to the bottom. The width from the predetermined depth to the bottom is made substantially above - or slightly greater than the thickness of the semiconductor wafer or the like inserted into the retaining grooves 56 and 58.

Each of the wheel members 6a and 6b has a shaft member 60. and two wheels 62 rotatably mounted on the shaft member 60. In the illustrated embodiment, each of the shaft members 60 has an intermediate portion 64 and small diameter end portions 66 on either side of the intermediate portion 640 . The cross-sectional shape of each intermediate portion 64 corresponds to the mounting recess 3 formed on the outer surface of the support blocks 8a and 8b.
6 is square, and its cross section is substantially upwardly or slightly smaller than the cross section of the mounting recess 36.

Further, the axial dimension 11 of each of the intermediate portions 64 is approximately the same as the width W between the notches 38 and 40 formed in each of the support blocks 8a and 8b. The cross-sectional shape of each of the small diameter end portions 66 is circular, and the intermediate portion 64 is also substantially narrower. The axial dimension of one small-diameter end 66 of each of the shaft members 60 is 7, and one (the first
The dimension in the axial direction of the other small diameter end 66 is slightly shorter than the dimension from the inner surface defining the notch 40 formed in the support blocks 8a and 8b to the lower edge side (on the near side in the figure). It is slightly shorter than the dimension to the lower edge (the opposite side in Figure 1). A hole 68 having an inner diameter corresponding to the outer diameter of the small diameter end portion 66 is formed in the center of each wheel 62 . Each of the wheels 62 is detachably and rotatably assembled to the shaft member 60 by inserting each small-diameter end portion into the hole 68 . In the above specific example, as is easily understood, each of the wheels 62 is rotatably combined with the shaft member 60 combined with the support blocks 8a and 8b, but if desired, the shaft member 60 and the wheel 62 are formed as an integral part, and the shaft member 6 is connected to the support blocks 8a and 8b.
0 and the wheels 62 can also be rotatably combined. In the above support device, when the wheel member 60 is assembled to each of the support blocks 8a and 8b as described later, each of the wheels 62 is attached to the support blocks 8a and 8b, respectively.
is positioned within the notches 38 and 40 of. Therefore, the width of the cutouts 38 and 40 is slightly larger than the thickness of the vehicle 62.

The aforementioned two end support members 2a and 2b (consisting of support blocks 8a and 8b and auxiliary supports IQ'a and 10b), three rods 4a, 4b and 4c, and wheel members 6a and 6b are When assembled as shown in FIG. 3, it constitutes a support for supporting a semiconductor wafer or the like.

Referring to FIG. 3, FIG. 4-A, and FIG. 4-B together with FIG. They are arranged at intervals in the direction of The wheel member 6a is assembled to the support block 8a by positioning the shaft member 60 in the mounting recess 36 formed in the support block 8a and assembling the auxiliary support 10M to the support block 8a as required. . To explain further, the wheel member 6a is assembled by inserting the small diameter end 66 of the shaft member 60 into the hole 68 of the wheel 62.

As shown in FIG. 3, the wheels 62 of the thus assembled wheel members 6a are positioned in the notches 38 and 40 formed in the support block 8a from the outside of the support block 8a, and the shaft member 60 is attached to the support block 8a such that it is positioned in the attachment recess 36 formed in the support block 8a. After that, auxiliary support 1
0a is a locking notch 42 formed in the auxiliary support 10a.
is assembled to the support block 8a by engaging with the support notch 34 formed in the support block 8a. When the locking notch 42 is engaged with the support notch 34,
As can be easily understood, the auxiliary support 10a is prevented from moving forward and backward and laterally with respect to the support block 8a, and thus the auxiliary support 10a is prevented from moving forward and backward relative to the support block 8a.
is stably supported. As described above, the wheel member 6a
As is easily understood, when the support block SaK is assembled, the end support member 2a including the wheel member 6a
2 and the outer lower edge of the auxiliary support 10a are in contact with the ground and can stand on their own in a slightly inclined state. In addition, when assembled in this way, it is easily understood that the outer surface defining the locking notch 42 of the auxiliary support 10a closes the opening of the mounting recess 36, and thus the mounting recess of the shaft member 60. Movement in the direction away from 36 is reliably prevented. Further, since the intermediate portion 64 of the shaft member 60 is substantially thicker than the small diameter end portion 66, the shaft member 60
The lateral movement of the wheel 64 is reliably prevented by the both end surfaces of the intermediate portion 640 coming into contact with the inner surface of the wheel 62. Also,
Lateral movement of each wheel 62 is reliably prevented by its inner and outer surfaces coming into contact with the surfaces defining the notches 38 and 401c.

The wheel member 6b is attached to the auxiliary support io by positioning its shaft member 60 in the recess 36 formed in the support block 8b.
b′+support block 8b as required. To explain further, the wheel member 6b is assembled by inserting the small diameter end 66 of the shaft member 60 into the hole 68 of the wheel 62. Then, in the thus assembled wheel member 6a, each of the wheels 62 is positioned in the notches 38 and 40 formed in the support block 8b from the outside of the support block 8b, and the shaft member 60 is the support block 8b
It is attached to the support block 8b so that it is positioned in the attachment recess 36 formed in the support block 8b. After that, the auxiliary support 10b is inserted into the locking notch 4 formed in the auxiliary support 10b.
2e is assembled to the support block 8b by engaging with the support notch 34 formed in the support block 8b. As can be easily understood, when the locking notch 42 is engaged with the support notch 34, the auxiliary support body 10b is prevented from moving back and forth and in the lateral direction relative to the support block 8b. The body 10b is stably supported by the support block 8b. When the wheel member 6b is assembled to the support block 8b as described above, as is easily understood, the end support member 2b including the wheel member 6b has the outer lower edge of the wheel 62 and the auxiliary support 10b in contact with the ground. It can stand on its own in a slightly inclined position. Moreover, when combined in this way, as is easily understood, the locking notch 4 of the auxiliary support body 10b
2 closes the opening of the mounting recess 36, thus reliably preventing movement of the shaft member 60 in the direction away from the mounting recess 36. Further, since the intermediate portion 64 of the shaft member 60 is substantially thicker than the small diameter end portion 6.6,
Lateral movement of the shaft member 60 is reliably prevented because both end surfaces of the intermediate portion 640 abut against the inner surface of the wheel 62. Further, lateral movement of each wheel 62 is reliably prevented by abutting the inner and outer surfaces thereof against the surfaces defining the notches 38 and 40.

Next, the rod 4a is attached to the end support member 2a as follows.
and 2b between the auxiliary supports 10a and 10b. That is, one end of the rod 4a is positioned at a required angle with respect to the free-standing end support member 2a (the wheel member 6a is assembled to the end support member 2a), and then the rod 4a is placed in the end support member 2a. On the other hand, the rod 43 is relatively advanced in the longitudinal direction and inserted into the central support notch 44 formed in the auxiliary support 10a. Thus, as will be easily understood, the notch ends in which the two locking notches 52 are formed extend beyond the auxiliary notches 46 and into the central support notch, as shown in FIG. 4-A. 44 deep inside. On the other hand, in the non-notched portion that is adjacent to and immediately rearward of the notched end, the corner portions that are present on both sides in the lateral direction are located on the outside of the center support notch 44 in the vertical direction. However, as shown in FIG. 4-B, the corner portions on both sides of the non-notch portion in the vertical direction are accommodated in the auxiliary notch 46, so that the non-notch portion also forms the central support notch 44. will be forced to enter the entrance side. Then, the corner portions present on both sides of the non-notched portion in the lateral direction are positioned on the shoulders defined by the intersection of the central support notch 44 and the auxiliary notch 46.

Thus, one end of the rod 4a is prevented from moving in the lateral direction and falling downward, and is sufficiently stably attached to the end support member 2.
Combined with the auxiliary support 10M of a.

The other end of the rod 4a is also combined with the auxiliary support 10bK of the end support member 2b in the same manner as the one end. When assembled in this manner, the corner in which the retaining groove 56 is formed is located at the uppermost end, as is clear from FIG.

Rods 4b and 4C are then assembled between support blocks 8a and 8b of end support members 2R and 2b as follows. The rod 4b has two locking notches 54 formed at both ends of the rod 4b, which are connected to the support blocks 8a and 8b, respectively.
The support blocks 8a and 8b are assembled by a trap that is formed by K and aligned with the two-side support notch 20 and inserted into this side support notch 20. In this way, the surfaces of the two notches 54 are positioned adjacent to or in contact with both side surfaces of the side support notch 20, and the two adjacent non-notched surfaces located inside and below the rod 4b are brought into contact, respectively, with a substantially horizontal plane 24 and a substantially vertical plane 28 defining the bottom of the side support notch 20, so that the rod 4h is sufficiently stable to support blocks 8a and 8b.
supported between. When supported in this way, the non-notched portions left at both ends of the rod 4b are connected to the support blocks 8a and 8b.
Since the non-notched portions located inside the locking notches 54 at both ends of the support blocks 8a and 8b are located on the inside of the support blocks 8a and 8b in the front and back direction, Thus, the rod 4b is reliably prevented from moving in the front-back direction. In this supported state, as is clear from FIG. 3, the corner where the holding groove 58 is formed is positioned at the inner upper end. Similarly to the rod 4b, the rod 4C5 has two locking notches 54 formed at both ends aligned with the side support notches 22 formed in the support blocks 8a and 8b, respectively.
By inserting it into this side support notch 22, it is assembled between the support blocks 8a and 8b. Thus, 2
The surfaces of the notches 54 are located adjacent to or in contact with both side surfaces of the side support notch 22, and the two adjacent non-notch surfaces located inside and below the rod 4C are located in the side support notch 22. a substantially horizontal plane 2 defining the bottom of the notch 22;
6 and a substantially vertical plane 30, respectively, and the rod 4C is thus supported with sufficient stability between the support blocks 8a and 8b. When supported in this manner, the non-notched portions left at both ends of the rod 4C are positioned on the outer sides of the support blocks 8a and 8b in the front-rear direction, and the non-notched portions present inside the locking notches 54 at both ends thereof are Since the cutout is located inside the support blocks 8a and 8b in the front-rear direction, the rod 4b is
is reliably prevented from moving in the front-back direction. In this supported state, as is clear from FIG.
The corner where is formed is located at the inner upper end.

When assembled in this manner, the rods 4b and 4c are positioned on both sides, and the rod 4a is positioned below between the rods 4b and 4C, as can be easily seen from FIG. In the illustrated embodiment, the three rods 4a, 4b and 4C are connected to the two end support members 2a.
and 2b extending substantially horizontally and parallel to each other. Furthermore, the three rods 4a, 4b and 4c are substantially equally spaced apart. Furthermore, the rods 4b located on both sides
and 4c are located at the same level, and the rod 4a located in the center is at a lower level than the two rods 4b and 4c located on both sides.

Various parts, ie, end support members 2a and 2b, which are disassembleably assembled as described above and constitute an assembly type support.
(Support blocks 8a and 8b and auxiliary supports 10a and 10-1: +), three rods 4a, 4b and 4c
, and wheel members 6a and 6b are preferably made of silicon.

Instead of silicon, all of the above parts are made from quartz glass.
Or it can also form a part. When made of quartz glass, if desired, for example in the rods 4a, 4b and 4c, the quartz glass may be provided with suitable reinforcing material such as heat-resistant fibers extending in the longitudinal direction. When performing a diffusion process on a plurality of semiconductor wafers using the assembly-type support described above, the holding grooves formed in the rods 4a, 4b, and 40, as shown by two-dot chain lines in FIG. Insert one wafer P into each set of three laterally aligned retaining grooves 56 and 58 (i.e., one retaining groove 56 and two retaining grooves 58). In this way, the PIs are supported in parallel on the rods 4a, 4b, and 4c in a plurality of waes at predetermined intervals in the front-rear direction. Each of the substantially circular wafers P is inserted into the set of retaining grooves at three circumferentially spaced positions on its lower periphery and is therefore sufficiently securely supported in the required state. . Using an insertion tool (not shown), which is known per se, the prefabricated support carrying the plurality of wafers -Pf is then pushed forward into a substantially horizontally extending horizontal diffusion furnace (not shown). Just insert it inside. During this insertion, since the end support members 2a and 2b are rotatably provided with wheels 62, their movement becomes extremely easy. To remove from the diffusion furnace,
The auxiliary support 10a (or 10
What is necessary is just to hook it to the opening 50 formed in b) and pull it.

When cleaning or transporting the assembly type support, various parts constituting the assembly type support can be disassembled depending on the safety. Such disassembly is very easily accomplished by reversing the assembly sequence described above.

According to the assembly-type support described above, the following advantages can be obtained. Wheel members 6a and 6 are attached to the end support members 2a and 2b.
b, the support can be easily moved.
As a result, it becomes possible to place more semiconductor wafers or similar materials than before. Since the various parts constituting the assembly type support have relatively simple shapes, they can be manufactured relatively easily and at low cost. It is extremely easy to assemble and disassemble various parts, and even if the parts are locally damaged due to large thermal changes, only those parts can be replaced with new ones and use can be continued, making it extremely economical.

Also, when the diameters of the semiconductor wafers or the like to be supported are different, by using another pair of support blocks with different relative positions of the side support notches, the distance between the rods in the assembled support can be improved. The relative position can be changed as appropriate, and thus it is possible to cope with changes in the diameter simply by preparing various support blocks. Furthermore, it is worth noting that the prefabricated supports described above have been found to be significantly less susceptible to damage due to exposure to large thermal changes than devices constructed in one piece. . The reason for this is not necessarily clear, but in a device configured in one piece, the thermal expansion or contraction of each part interacts and a considerably large stress is applied to each part. assembly type d6vi
It is presumed that in CE, the thermal expansion or contraction of various parts is effectively compensated for by the so-called play that is inevitably generated in the combined parts of various parts due to manufacturing tolerances.

Although specific examples of the assembly-type support configured according to the present invention have been described above, the present invention is not limited to such specific examples, and various modifications and changes can be made without departing from the scope of the present invention. It is.

For example, although the illustrated embodiment uses three rods 4a, 4b and 4C extending between end supports 2a and 2b, if desired a centrally located rod 4a
may be omitted, or four or more rods extending between the end supports 2a and 2b may be used.

Moreover, in the illustrated example, the rod 4a.

The holding grooves 56 and 58 are formed in all of the rods 4b and 4C, but for example, the holding groove 56 is formed only in the rod 4a located in the center, and the holding groove 56 is formed in the rods 4b and 4C located on both sides. Alternatively, it may be provided with a high frictional resistance, for example by knurling, so that the edge of a wafer or the like brought into contact therewith will be held without slipping.

In addition, in the specific example shown, the central support notch 44 is formed in the auxiliary supports 10a and 10b, and the rod 4a is supported on the auxiliary supports 10a and 10bI. Support block 8 with center support notch
A and 8bK may be formed, and the rod 4a may be supported between the support blocks 8a and 8b.

Further, in the specific example shown, mounting recesses 36 are formed in the support blocks 8a and 8b, and the shaft members 60 of the wheel members 6a and 6b are mounted in the mounting recesses 36, but instead of this, By forming through holes extending in the width direction in the support blocks 8a and 8b, and pushing the shaft member through the through holes, the wheel members 6a and 6b'6 are assembled to the support blocks 8a and 8b as required. It can also be configured as follows.

Furthermore, in the illustrated embodiment, the support block 8a
8b and auxiliary supports 10M and 10b, specific support notches 20, 22 and 44 are formed, and specific support notches 52 and 54 are formed at both ends of each of the rods 4a, 4-b and 4C. Then, rods 4a, 4b and 4C
Both ends of the rod 4a are combined with the support blocks 8a and 8b and the auxiliary supports IQa and 10b, respectively.
, 4b and 4C can also be accomplished in a variety of other ways.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view of one embodiment of an assembly type support constructed according to the present invention. FIG. 2 is a sectional view taken along the ]-shoulder line in FIG. 1. FIG. 3 is a perspective view showing the assembly type support of FIG. 1 in an assembled state. 4-A and 4-B are partial cross-sectional views for explaining how to assemble the assembly type support shown in FIG. 1, respectively. 28 and 2b... End support members 4a, 4b and 4C... Rods 6a and 6b... Wheel members 8a and 8b... Support blocks 10a and 10b... Auxiliary support body 60... Shaft member 62...Wheel P...Semiconductor wafer

Claims (1)

[Claims] 1. An assembly-type support for supporting a semiconductor wafer or the like, comprising two end support members disposed at a predetermined interval, and one end of which is the end support member. At least two rods, the other end of which is removably coupled to one of the support members and the other of the end support members, extend between the end support members; 1. A prefabricated support device, comprising: a wheel portion assembled to the rod, and at least one of the rods is formed with a plurality of holding grooves spaced apart from each other in the longitudinal direction thereof. 2. The sectional support according to claim 1, comprising three rods extending substantially parallel between the end support members. 3.-The three rods extend substantially horizontally, and the two rods located on either side are substantially at the same level, but the rod located in the middle is at a lower level than the rods located on both sides. An assembly type support according to claim 2. 4. The assembly type support according to any one of claims 1 to 3, wherein the end support member, the rod, and the wheel member are made of silicone. 5. The assembly type support according to any one of claims 1 to 3, wherein the end support member, the rod, and the wheel member are made of quartz glass. 6. Each of the end p6 support members includes a support block and an auxiliary support removably assembled to the support block,
2. The assembly type support according to claim 1, wherein each of the wheel members is assembled to the support block by assembling the auxiliary support to the support block. 7. A support notch corresponding to the width of the reed auxiliary support is formed in the upper part of each of the support blocks, and a locking notch corresponding to the thickness of the support block is formed in the lower edge of each of the auxiliary supports. The assembly according to claim 6, wherein a notch is formed, and each of the auxiliary supports is assembled to the support block by engaging the support notch and the locking notch. Type support. 8. Each of the wheel members has a shaft portion and a wheel that is removably assembled to the shaft member, and each of the support blocks is formed with a mounting recess, and the mounting recess is formed in each of the support blocks. By positioning the shaft member in the center and assembling the auxiliary support to the support block, the opening of the mounting recess is blocked by a part of the auxiliary support, and thus the wheel part side An assembly type support according to claim 5 or claim 6, each of which is assembled to the support block. 9. Each of the support blocks is formed with two notches extending substantially vertically upward from the lower edge, while the ends of each of the shaft members are substantially tapered from the middle part; When positioning the shaft wing within the mounting recess of the support block,
A prefabricated support according to claim 8', wherein the wheel is positioned within each of the two notches after being assembled to both ends of the shaft member. 10, comprising three rods extending substantially parallel between said end support members, two rods located on opposite sides being substantially at the same level, and a rod located in the middle comprising two rods located on said opposite sides; The main rods are also at a low level, and each end of each of the two rods located on each side is engaged with each of the support blocks, and each end of the rod located in the center is connected to the support block. An assembly-type support according to any one of claims 6 to 9, which is combined with each of the supports. 11. Each of the support blocks is formed with two side support notches that slope downwardly toward the center from both ends of the upper edge over the entire thickness thereof; A locking notch having a longitudinal dimension corresponding to the thickness direction dimension of the side support notch is formed at each end of each of the two rods, leaving a non-notched portion at the end. The claim is that each end of each of the two rods located on both sides is combined with each of the support blocks by locking the locking notch with the side support notch. The assembly type support according to item 10. 12. The auxiliary support is provided with a central support notch extending substantially horizontally, and an auxiliary notch for defining a support shoulder at a longitudinally intermediate portion of the central notch; ,
A locking notch is formed at each end of the rod located at the center so as to generate a residual thickness in a specific direction corresponding to the width of the central support notch. Each of the centrally located rods is locked by locking into the central support notch and by positioning both sides of the non-notched portion adjacent to the locking notch on the support shoulders when viewed in the longitudinal direction. 12. A sectional support according to claim 10 or claim 11, wherein the ends are associated with each of the auxiliary supports.