JPS60141465A - Tubular grinding machine - Google Patents

Abstract

PURPOSE:To perform highly accurate control of grinding amount by correcting the inclination angle corresponding with the parallelness between the grinding work face of magnetic head and the traverse shaft of tubular grinding machine thereby correcting the inclination angle corresponding with the difference of gaps of trucks at the opposite ends. CONSTITUTION:X-axis drive table 1 is driven to traverse a stylus reciprocally within entire width in longitudinal direction of the face 14a of magnetic head to be grinded. The stylus 16 is displaced only in perpendicular direction against traverse direction and when said face 14a is not in parallel with the traverse axis, said stylus 16 is displaced during measuring traverse to indicate the parallelness with the traverse axis thus to correct the parallelness. When it is worked with inclination angle theta between the grinding face 14a prior to working and the grinding face 18a of grinding wheel 18, angular correction is performed through rotary table 5 if there is a difference between the resistances RL', OR' of left and right resistors 32L, 32R thus to work the gap depth uniformly for every truck.

Description

[Detailed description of the invention]

The present invention relates to a cylindrical 1i1r +-40 board for 4-r j cutting of a cylinder ω1 such as a magnetic helix. In general, in the manufacturing process of magnetic heads, curved surface formation of the medium sliding surface of the magnetic head that comes into contact with a magnetic recording medium such as a tape (shallow area machining is I + Il grinding by cylindrical grinding) It is known that lano pink machining is done using lapping tape.Among these machining methods, fill machining using circular grinding by an operator is compared to lano pink machining using lapping tape (fl) absolute machining amount? (2) Wrapping, cracking, or a damaged layer on the machined surface due to grinding is likely to occur (3) tiI+ on the machined surface
There are characteristics such as the tendency to generate heat due to cutting, and the workpiece (
The 1ijr machining conditions for the magnetic head must be strictly controlled. Among them, 1.Drilling requires cutting the cap depth of the magnetic head to a certain dimension, so it is necessary to grind with high precision.In addition, these days,
The multi-track magnetic head, which is used in the main device of digital magnetic recording, which has undergone remarkable technological development, has a higher number of tracks and higher recording density than the magnetic head stabbed in the conventional analog magnetic recording device. Since recording is required, the depth of the cap of each trunk must be made uniformly and with surface accuracy, and the VL deviation does not depend on l. By the way, the rule 1 of the four rules m in the Yen Do Shiroku board is a function that eliminates unstable factors such as dimensional fluctuations due to wear of the four rules grindstone, 11 #jo) addition of liquid due to heat generation, and thermal expansion of objects. ,
Auto"υU>LJ devices added (-) and CNC (several computers;
I Di' (1, Visual inspection using an optical microscope using the dimensional physical force method and 1 to determine the depth of the head according to the foot dimensions (01 cutting - 1〆) or running Yah
9! There is a known method for detecting the resistance value of a resistor formed in the key knob of a gas head. However, since the four laws of IIk + tx qz + have the same degree of compatibility with each other, (011) a bullet in which a resinoid binder is applied to the grindstone is used.4: When using a grindstone , 9 mm finish of the stone, (low right cutting depth and 1
It is necessarily the same as the moon cut q1 (not the one with -, ++
Even if the above-mentioned automatic sizing equipment and CNC equipment were added, it was still difficult to use the four arithmetic quantities for surface accuracy. Also t)
Items visually inspected using a microscope (using the method of detecting the resistance value of a resistor or resistor) can control surface accuracy and cutting amount by 101% compared to the old automatic sizing machine or CNC machine, but each It was difficult to uniformly mill the camp depth of each track with surface accuracy.Also, it was difficult to form the camp depth of each track with uniform surface accuracy.Also, by using the resistance value detection method of the resistor, the I surface of the resistor of the resistor for each lot of the head board of the resistor was used. Due to non-uniformity and variations in the resistance value of the resistor due to heat generation on the machined surface during opening, the cap depth of each track 'b! marked with R'+' is uniformly machined to a 1-accuracy by ζi11. <Purpose of the Invention> The invention is aimed at precisely controlling the deformation of the 1uI cutter when cutting the cylinder rr) f which forms the cap depth of the magnetic head as described above, as well as each track of the magnetic head. The quotient of the cap depth for each cap depth is uniformly ground. In order to measure the parallelism with the traverse axis, an electric micrometer was used to measure the parallelism with the traverse axis. The variation in the cap depth for each track in the magnetic head, that is, the difference in the cap depth between both ends of the track, is totaled by a resistor formed in the gap of the magnetic head, and the difference is calculated in the circular direction. Both gears are equipped with a rotary diffle to change the angle of the IIH angle corresponding to the difference in the depth of the gear, and the rotation is stirred in the normal direction.A total of 6t1'' take comparison nose gear, processing, etc.・Bonmu All J16 (IJi Canada ・
A magnetic head is equipped with a microcomputer in the centrally controlled stripes, and is fully automatic from the start of cutting the front nucleus to the end of the process. 4j cylinder 11] group IJ 'i
The present invention provides a cylindrical 1+jl cutting machine. 〈1 song per month for an example of non-invention of 1 or more ability.''
do. FIG. 1 is a 414-dimensional diagram of the main body of the loading machine. 23 is a bed with ten general machine salaries, and a part of it is equipped with a whetstone stand 21. 1 for -1- of stone platform 21
A static pressure ψ air bearing 17 which pivotally supports a 1-1 cut 8 stone 18 is provided, and the static pressure ψ air bearing 17 is connected to a bearing drive motor 19 and an oil receiver r'i! A'+lJ i11/< Ruto 22, Shichisuke'Cii i, 4p, SaI! , There are seven. 1) 11 marks 1 battle stone 18 is the bearing drive motor 1
By driving 9, it is rotated at a constant rotation speed in the same direction as the rotation direction of the remoter. In addition, a magnetic head 14 (which is a subject to the four rules) is attached to the other end 21a of the stone 21.
In order to make a total of 1'ILII of the parallelism between the four arithmetic curves 148 of the magnetic head (hereinafter referred to as the magnetic head) and the four arithmetic traverse axes (hereinafter referred to as the X axis) of the magnetic head 14, use a micrometer probe. 15 and probe tip stylus 1
6 are arranged. The stylus 16 at the tip of the broach is configured to be able to move within the circumference of the arrow force measured by the arrow in Figure 1A1, and to measure the parallelism. On the other hand, on the bed 23, in addition to the grindstone head 21, there is mounted an X-axis movable chifurel 1 for traverse shafting. The X-axis movable chiffle 1 is supported and guided by a cross roller kite 25, and is freely moved within a lobe movement range in the X-axis direction by a pole screw (not shown) and a DC servo motor 2. The top of the X-axis moving chifur I is guided and supported by a cross roller kite (not shown), and a pole screw (not shown) and a pulse motor 4 are used to move the ωl cutting depth Jli+, I (s, 1・) R-axis toy) Nii! J[Constant+1/J B-*) J 'd+v Old-(g),
? At t (〈The moving Y-axis moving differential 3 is mounted on A1., Y'l'1llt+The sliding plate 2, 1 is shielded by iil, l is shielded by -r'j6, Sliding plate 24
The upper surface C, 1M is covered with a corpus f. Sliding gear 24'-4 has rotating chifur 5 or pihonoto 1

[J] Centered around Tensuke 9, Tou・1 Mr. 21 is in Jiji who can move around in the X-Y・IL song. - of the sliding plate 24 of the rotary turfle 5 Ni, i3
1. It is in contact with the object, and it is freely rotating in the Mujun 4-1 Uramatsuura state. Sliding plate 24
'2 songs 1 (4, 4, 4, 8 or 8 are suffering from the same disease, - rotation of force 5-1, A-l, wheel 8, - 1-1, 4 Ji) (-Mushi Heft 7
Or it is bearing a bearing. (-), / to 71.7 is the rotating chifur 5'-1 solid! 1 is rotationally driven by the 11th motor 6 I],
The rotating chifur 5 appears on the sliding plate 24, and the sliding plate 241- rotates 111 times around the five shafts 9, which are rotated at 4゛u+ /4, with one (-) wheel 8 and one A. - It can be rotated freely within the meshing range of the mushaft 7. The work bolt 12 to which the magnetic shaft y F l 4 is attached is mounted on the rotating shaft 5, with the swing shaft 12af as the center.
It is supported by a rocking bearing stand 10°11 so that it can be rocked together. A work holder 1 is attached to one end of the swing shaft 12a.
The magnetic head 14 attached to the workpiece bolter 12 is oscillated by driving the oscillating shaft drive motor 13 continuously in reverse. It will be done. Therefore, the air head 14 installed in the work porter 12 is rotated by the bearing driving motor I9 through the bearing driving heald 22 and the static pressure air bearing 17, and the ω1 grinding wheel 18 is rotated by the bearing driving motor I9. The X-axis movable table 1 performs traverse drive, the Y-axis movable table 3 groups the cuts for traverse, and the oscillating shaft drive motor 13 provides oscillating interlocking to the 11 centers of the oscillating shaft 12a. Therefore, the cylinder + 1JF machining] is done. In addition, the magnetic head 14 is 1σ (cutting ff1J I 4 a
Regardless of whether frll blueprint, non-bJt tojJ 11 goe, 1j1'' written pivot 111 eyes 1 m fear 1)
1I8IJ stone 11 on the top surface of the sliding plate 24,
, one trick is to rotate the four-wheel 8], and the motor 6 drives the four-wheel A foot 7 to rotate (
7 moves, I rotate by 5 to 1 f ~ 11
1. Adjustment for tilting to the JX axis. ◇. Illm(υ(41 opposing track 1) for I 1, 11 moving support h10 Yφ mountain with 1st history power!! JIA dynamic chifur;
3) By giving each ``Rikomi'', the four rules 6
B, stone 18 true ink and 1-ref n/riwoi.”
7. 14. Figure 2 shows the entire system. In the figure, 26 is 1 river) small (the main body of the river, 27 is) 41. Machine book rice 26] h.
C→Norpo October 2, said bus/L bus 7-ter 1.1
``Motor 6, 1, i'' J-axis drive motor 13
()) Taniko Karikai J-Ra, Tryno\- and 'Tun! Di
□Or reduce the stored control hook? 111]:I
-Nox 27ir is a remote control unit 1 from the 4'i section -External keyboard 2 that can be operated by roll
8 or I'kM has been done. Next, the control box 27 has an I
/CVJ-knit 30 through this system city +1?
ill January's CPU U 29 is connected, and
The I, /'O unino l-30 contains a floppy disk that stores the programs for each god to run this system, or a ha. -υFn The floppy disk trifle 31 is connected to drive the Novi-te (the main body 26 of the machine, the fli
111 box 27, external keyhole 1'28, CP
LJ 29, I10 unit 30, l Conobi disk trino 31 extracted from the 6 elements 1st, machine body 26, control hook 27, external key port
1' The three elements of 28 are the operating system of this system, CPU29
, I 10 Konino I・30, Fushi 1 Nobby Disc・
Trino 31 is called the processing system of this system.
'l jll is I50 uny) through 30
The system %j input from Novy Teisui/Trino 31, the resistance value of the 11th thin resistor placed on the operating block and the machine body 26, and the thin resistor 11 disposed on the air intake 14. The measurement data measured by the nausea micrometer brochure 15 is transferred to the CI'U 29 via the I10 unit 30 and processed.
+1411+・Perform-Data H I/j,') Uni/l
This system loads the magnetic head 14, which is the workpiece, into the work halter 12, and starts up the entire system. After that, the J1 measurement and addition of the four arithmetic rules can be performed fully automatically.
R'r29 a of 1II11...1''- to proceed with the process again at any time? q and δ1゛ at the same time? Rule・ζiJ [Although the motive is to be able to monitor the machining state, the measurement fυFiJ! By recording the data on a floppy disk, it is possible to output measurement and cutting data at any time even after the entire process has been completed. In the system,
First, an outline of the operating order of this system will be explained. FIG. 3 shows an existing flowchart of the operating order of this system. First, as shown in operation 1, after the system is turned on, in order to perform the grinding force of the magnetic head 14, the opening side of the X-axis moving table 1 and the Y-axis moving table 3 of the machine body is Performs processing origin return. It is vaguely shown in operation 2 (υ
11 abrasion 18 true ink and dressing,
Move on to action 3. In operation 3, after placing the magnetic head 14 on the work halter 12, measure the parallelism of the grinding point 14a of the magnetic head 14 with respect to the X axis.
11 If the f-value does not meet the predetermined tolerance, then
Correct the parallelism until the acceptable value is satisfied. Next, as shown in operation 4, 101 machining of the magnetic head river 4 is performed. At this time, the gap depth of the magnetic head 14 is detected and calculated at the same time as the lil+ cutting process, and the parallelism is corrected so that the gap depth in each track becomes uniform for each traverse. And +l set at system startup
When the grinding reaches l+, the 11th cycle ends and the process moves on to the next grinding of the magnetic head.・7:), upper, the operation of the screw stem is 4 as shown in Figure 3.
It can be broadly classified into actions. Next, these four operations will be explained in detail. 0 operation l First, after inserting a small gap between the processing system and the operation system of this system, the opening side of the magnetic head 14 and the four basic machining are controlled by the CPU 29 of the processing system. , motion system]
The X-axis moving table 1 and the Y-axis moving table 3 of the range base 26 are each driven in a predetermined direction, and a switch (not shown) is provided at the stroke end of each of the moving tables. By operating the
Each position is set as the measurement/processing origin of the magnetic head 14, and is recorded in the CPU 29 of the processing system. This action causes C
In the PU 29, until the series of 1jll cutting 111 of this system is completed, the drive side of the machine body 26 of the operation system becomes +14 or 6] function based on the ``W'' point. . This operation, that is, the initialization of the screw stem, is performed by loading the pre-fabricated block diagram for measurement and processing into the CI U 29 using the floppy disk drive 31 of the processing system after the initialization of the screw stem. This is done by tinging. Next, move on to operation 2, fil + true ink and dressing of the grinding wheel. O operation 2 In operation 2, the X-axis drive table 1 and the Y-axis drive table 3 are driven from the measurement/processing origin shown in operation
Grinding wheel 18 for tire mondo dresser 20
Move it to a position a certain distance from the outermost periphery (for grinding the workpiece). Here, the above-mentioned constant interval is defined as +
If the previous time (0) is calculated by the processing system CPU 29 based on the 411qU data at the end of grinding, it indicates the interval at a position several 6 μm away from the outer 4 diameter of the grinding wheel at the end of AiJ grinding. The name of the place where the 01 grinding wheel, which is different from the one used at the end of 5jl cutting, is the corresponding place (lower level is static pressure rough air!
IJ (set the outer circumferential diameter of layer a to Tiremon]・
- After moving the dresser 20, use the external keyboard 28 of the operation system to instruct the start of the true ink and dressing cycle of the grinding wheel 18 (manually). External) Goku, who was manually operated from 11S Gee Board 28, is transferred to J4J-based CI'U 29, starts the program for True Ink and TruenoSync, and starts True Ink and the dressing cycle. Here, move 1' [mij note from thread external keyboard 28 →
The reason for instructing the start of Noikuru is that when changing the 6A grinding wheel, etc., at the mouth of the main body of the operating system, (1) (Grinding wheel E 1 outer diameter + 1 (II This is to prevent malfunctions of the cycle, and if the safety is sufficiently secured, it is possible to make the start of the cycle more difficult than P U 29. Truing and dressing In the cycle, the tire drain noser 20 is moved by the Y-axis drive table 3 from the position of 1/2 the thickness of the ω1 grinding wheel 18 by a fixed cutting amount of f, and when the movement is completed, the A reciprocating traverse is performed by the shaft drive table 1. True ink and dressing are performed by repeating this cycle.The end deviation of true ink and dressing is 1.
1) Move to O/the measurement workpiece and start the next operation 3. 0 Operation 3 In operation 3, the magnetic head 14 is subjected to fill cutting] Is the flatness of the two surfaces 14a relative to the traverse axis, that is, the X axis? r5
t is determined using the electric micrometer blow 15 and the same stylus 16, and the measured value or lJr constant 1 (・
If each point is not added by 1, the parallelism is corrected and remeasured so that the parallel length falls within the allowable thin circle, and the parallelism of the magnetic head surface to be ground 14a is determined. First, at the end stage of operation 2, the magnetic head 14 is +iii
Note 41 Suka': 7J) located at the point on +J), X
Shaft drive differential 1 and Y! l! The i+
, jt II! I machining surface 14a or (+lL right/21
The tip of the nausea micrometer probe 15 attached to the other end 21a touches the stylus 16! i! The magnetic head 14 is moved to a position i+& where +t is reached. (Figure 1 [C
1 of 4iW) Here, the stylus 16 is made of lead 1 and Al76 MK, as shown in FIGS. 1 and 4 (I3).
The stylus tip 16a is in contact with the periphery of the head 1 (gear A/knob portion 141 of the magnetic head I4 located 1g in the center of the curve 14a).
It ``J-ru place is in 11 pieces. Also, this rib, work porter 12, is like I=ki head subject surface 14a or lead I song, ], 11 movements! 1lIi
11 [L position is also determined by the mechanical motor 13. From this state, by driving the Xll1lII drive table l, the stylus I
6 is traversed back and forth. The stylus 16 moves toward the traversal direction and is displaced only in the vertical direction (in the direction of the arrow in Fig. 4-2), and that direction is the measuring direction, or the magnetic head ω1 bending 14a or the traverse axis. If they are not parallel, the stylus 16 will be positioned during the 111 straight traverse, and the absolute amount of displacement at both ends of the traverse and the traverse movement distance will be manually input to the processing system CPU 29, and the calculation will be performed to calculate the relationship between the stylus 16 and the traverse axis. The degree of parallelism is displayed as an angle, and the resulting angle is compared with the allowable value (angle) of the position. Here, MiJ notation I contribution) 11 degrees is +iJ notation each 11θ
When it is within (Zunawachi 1 Riki Moe Angle is Mijki f1:
'2-= (when it is smaller than i!), at that stage, the traverse of the magnetic head 1+Jf reduction 14a is ll! 11
1, the parallelism measurement and the parallelism front claw are completed, and the next movement fl: 4 is carried out.
When I is outside each value, that is, the calculation angle or niJ
When it is larger than the above tolerance, the motor 6 rotates the rotary chifur 5 in the direction of decreasing parallelism i.
4), the magnetic head 14 is rotated in that direction about the snakebot rotation axis 9 by an angle amount that is the parallelism SO with the traverse axis, and the magnetic head is rotated ω1.
Look at row 1L of the cutter 14a and the traverse axis? lli+
How to measure l by the same method as J4 [)? jli'＞. , Make this (wood), [note ゛toobiki degree 1 rule 5jZ and Koi 1' rM Sodeichi 1jij (field 9'I-angle or ni1
Mark 1 until it falls within the record T + Taniue! When this row of cows is finished, it is divided into 4 movements for one person. Here, among the 1 + 1111421 marks of the first air head,
The stylus tip 1 (i a 7)) The contacting magnetic helix knob jil) l 41) The periphery is still precisely tied-sinked, and when performing the 10-degree measurement described in 1.
The degree of trueness of the song played by the stylus tip 16a is as follows:
It is assumed that the influence of i (on the level 1 line electric measurement of the degree of seriousness of the 1. 1 to 9 to 1 sweat 3. Here, moving to the angle correction position of 1-3 means measuring the above-mentioned degree of the magnetic head ω1 bending 14a.] -1 ril (!-) When the line is initially positive, when parallelism extraction 11- is performed at the position of the magnetic head 14 after determining the first law of parallelism, the surface to be ground 14a of the magnetic head and the stylus tip 16 are
When measuring the varus/parallelism due to interference, the measuring range of the magnetic micrometer may be exceeded, so if you wish to perform a heavy initialization correction, please make sure to check the resuscitation head before stopping. 1 cut+ful 4 a or contact with stylus tip +62 1
Move the magnetic head 14 to a good position. Movement by IJ+movement chifur or movement to that position is called movement to the corner anti-drawing position.・Operation 4 The above-mentioned operations 1 to 3 are the pre-processes of the machining process that starts with the machining process. magnetic head 14
The configuration of the gear part 14b of the surface to be ground +4a will be simply explained. The gear part of the magnetic head 14, which is the workpiece used in this embodiment, has a 4-piece configuration as shown in FIG. !-Rank, and on both ends of the tracks, which are arranged at equal intervals, the same (thin film) resistor 32 is arranged. Before the grinding process, this resistor 32 has a predetermined unique resistance. It has a resistance straight line R, and it has been cut 11 in the direction of the force indicated by the arrow in Figure 6. 5ii1j llυ/
If the resistance value of the resistor 32 when removed at e' at the time of J' length ('force) and the addition of the four arithmetic rules is R', then between these (
From 51 to 1, a 4-1 contract with 1 attachment is established. lku ゛・, e −1ku' × I' ■ii II−・
11 (4 enemies 32 resistance 11
+41 ma' is measured by 11'J, and the 1lti + road data is turned into the processing system CPU 29i, and the arm is activated.
．． From the resistance value Ima of resistor 14X (1, 'I 1 comes to the power of knowing the metal length 1 of the toothed resistor 32. Here, the resistance 11h (7111 of R') of the resistor 32 is the control of the two-handed ff system in the second figure, C and the second in the second figure.
In addition, resistor 11 + 41 Sadagawa circuit <+'<:・1
＼Ke1-) by 'hang'j 7i1i i いさい'1te'; ζsu, Day's 7m;
A (-,', P U 29 I will add 1 yen to the input Ak, J J, -1,,,1,,-4,November) L：1111J Matasarenoko 4-＼・Knobjfl) on 1 soil 1-
ζ) Magnetic to de 14 is 6 at the stage of motion 1'13 or end r.
”, the stylus 16 of the magnetic micrometer shown in FIG.
It is directly in front of bL where the surface to be ground +4a is in contact with the grinding wheel 18, and from this position, the Y-axis wheel mechanism 3 and the
A certain distance away from P) (Figure 1 IL;
1<sui n1if). Here, 1ift 141J machining mountain of ω1 cutting stone 18'18a to P) (IiZ fif a certain distance away
i is the magnetic head 1 at the end of the previous 01 cutting
From the position 4, the grinding at that point (the position of the grinding surface 188 of the lower layer 18 (J'l is the outer diameter of the grinding wheel 18) is calculated by the processing system CPU 29, and the processing system flow It has been recorded in the Frosobiraisk stored in Nopitisk Dry Life 31, and the 611 takes have resulted in θ. In the case of different cases (after starting the grindstone, it is necessary to manually set the outer and inner diameters of the ω1 grinding wheel to be used this time in the processing system CPU 29. As shown in 1- below, the magnetic head 14 is moved to a predetermined position t6. After moving, use the external keyboard 28 of the operation system to perform 1iLi< (manual power) on the ω1 machining cycle of y t' I 4 using the external keyboard 28. -JJ, ltj system CPU29
1 is sent, the flow program for 1iJt I'-40 addition is activated, and full machining → Noikle is started. Here, "11", which instructs the start of the cycle from the external keyboard 28 of the operating string, is executed in the operating system machine 4\body 1, such as Kawane, which has changed the grinding wheel.
This is to prevent malfunctions of the cycle due to errors in measuring the outer diameter of the stone, and if the 7-coupling has been properly monitored to ensure safety, the 111 connection CPU 29 should instruct the start of the cycle. It comes.l+Jt 141j When the cycle is instructed to start 131j from the external key fob 28, first the bearing!
9, the 1iJf grinding wheel grindstone) rotates at the same speed, and then the motor 13 for driving the Jjl'i 'Jυ mountain drive rotates.
The Norkporter 12 maintains a swinging degree of about 90' and moves in a fibrillating manner.Then, the XIII drive needle drive needle 1 head 14 is moved to the 1ili machining start position and warp r position shown in Figure 1fDl. In this state, first, the Y-axis movable tip 3 is used to move the grinding wheel 18, which is being rotated, in the direction in which the magnetic head 14 approaches the grinding wheel 18 (the direction in which the magnetic head 14 approaches the grinding wheel 18 (in the Y-axis direction) to a predetermined depth of cut of 12J. When the movement is applied and the operation is completed, the X-axis drive chifur 1 causes the magnetic head 14 to reciprocate traverse in the X oil (traverse spider 1) direction.The stroke of the reciprocating traverse of the magnetic head 14 is equal to ωI The grindstone 18 is set within a range where it does not come into contact with the tire grinder 20 fixed to the same surface 10a of the grinding wheel holder 10 of the swing bearing stand 10.Ij and IY+5 moving bearing stand 10, and Processing system C for both the start and end positions of the grinding process
It is possible to set any stroke weight or position within the above range from the system t of the PU 29 and the keyboard. The magnetic head 14 is driven by one grindstone 18.
In contrast, ``d'' is subjected to rocking drive by the dynamic shaft drive motor 13, cutting by the Y-axis drive teakle 3, and traverse drive by the X-axis drive teakle I, and is subjected to cylindrical grinding. Next, as described above, as the Y-axis driven chifur 3 allows the magnetic head 14 to make a cut with a constant depth of cut for every return traverse, the magnetic head 14 approaches the grinding wheel 18 by 1u [nearly 1η]. Then, tangent 1! III! L, the camp part 141 of the magnetic head 14 shown in the 6th section 7)), which is being polished 32 or 1
iJt In a has been removed, and as a result, the resistance value 1, which is not shown in Fig. 2, is embedded in the control ω1, j, and
11] Resistor 3 which is determined by the constant circuit at 4↓
The resistance value R' of 2 varies. By doing this, it is possible to know the total length e' of the resistor 32 during four-way machining, and in the seventh section I,
: The resistor arranged on the left side at 11', l-) on the 1flL plane is 3211, and its (df total length when cutting is eL, the same (
The resistor arrayed on the right side is 32R1, and the opening time when grinding is ``R''.1 is the total length of the resistor when these groups 1411 eL and aR are removed and reduced with each traverse, and their values are is compared and calculated by the processing system CPU 29 every time the total length fluctuates. Now, as shown in FIG.
The ω1 machined surface 18a had an inclination angle of θ (i.e., the traverse axis and the magnetic held surface 11F before grinding
ωI
When machining is being carried out]-, 4L \lR is given, and the center span of the sub-resistors 32L and 32R is e. Then, θ is constant according to the formula θ=tan'(+gLgR'llo piece, ■Wi
θ calculated by the formula J can be calculated by the processing system CPU 29, and based on the calculation value of θ, the rotating chifur 5 is controlled by the motor 6 shown in FIG. 1L-7? If it is rotated by the amount of θ in the direction of machining (CCW direction in FIG. 7) so that it becomes R, then 1L=1. Grinding can be performed with the angle corrected so that In this way, during ωF machining, the secondary resistor 32L. 32R resistance 4@, R'L I R'I? always
If there is a difference between R'L and R/ by setting I (or a difference in the total length of the sub-resistor),
Once the angle is corrected by multiple 5, the total length of both resistors e, , eR or pl, = lR and j
In such a state (01 machining may be performed 10 times).Therefore, between the 5 sheets of paper 32L and 32R, N It is possible to evenly cut JJ1.1 to 7 stones, and
That rebuke illusion [ii, too, shi(, 槓mni full' 141
J Kajo - I can bow. In this case, as described above (by repeating the manly cycle, the resistance values R', , R' After that, the magnetic head 14 is moved to the starting point 81 by the X-axis drive chifuru 1 and the Y-axis drive chifuru 3, and the rotation tom of the grinding wheel 18 and the work halter I2 are moved. Stop the oscillation interlock, and the movement f
'End l=. At this time, all ω1 grinding data such as the final ID + grinding position and the resistance value of the final piece resistor are recorded on the floppy disk stored in the processing system Frono Beatisf Drive 3I, and some of them are used for the next grinding process. Used as a basic take. FIG. 8 shows a flowchart of the grinding cycle. The flowchart shown here can be easily adapted by modifying the idF i4u program. By the way, when correcting the angle of the magnetic head in operation 4, there are two problems: variation in the resistance value of the resistor due to preheating on the machined surface during grinding, and variation in the absolute position in the cutting direction due to angle correction. The following considerations have been made to address these issues. First of all, for the "ni" person, during the grinding process, the traverse movement is completed and the magnetic head 14 is moved to the l1jF grinding start and end position (1 in Fig. 1 (shown as D+)).
I4 (In this state, normally the magnetic head 14 and the grinding wheel I
8 is not in contact. ), both paper antibody resistance values RJ L'
, Majority measurement method that measures R/R 0 times and then adopts the measurement value with the largest number of measurements in one measurement shift, or continues measurement until the measurement value becomes stable and adopts the measurement value at the point when it becomes stable. By performing the continuous comparison measurement method, it is possible to prevent measurement errors caused by fluctuations in the resistance value of the resistor due to heat generation on the machined surface during the four regular operations. Regarding the latter, for example, as shown in Fig. 9, the traverse at that point is completed in the N state, and the angle correction is made to the (13) state at the (j+) eye 1 pressurization start and end position.
J field r3・, ΔY in the incision direction (Y-axis direction), and magnetic head flIl four regular planes 14. Since the absolute position of a is moved, if the same cutting is made and the next traverse is started, an extra cut of ΔY will be made at one end of the head ground surface 14a. For this, the rotation center at the time of angle correction is Pipono 1-times l.
The center of + 9 and the magnetic head 14 are fixed relative to the work porter 12. The white base 6,1- is placed on the work porter 12 and 1-1L is placed on the sonohantan 7) ξ is identified (),
In addition, the 11
The absolute position 4) is outputted to the peak processing system CPU 29 by a rotary encoder (not shown) installed on the rotating shaft 1 of the rotor 6. air head 14
141 that appears at the center of the Pihonoto rotation axis 9! The opposite position is −
・The processing system CPU 29 calculates ri+ip− by the processing system CPU 29, and therefore the 4:dynamic ΔY of the 11γ plane in the cutting direction due to angle correction is determined by the processing system CPU 29.
You can do 7J' with [ril+arithmetic processing]. Therefore, in consideration of the fluctuation ΔY in the absolute position in the cutting direction due to the angle correction, the processing system CPU 29 determines the ψJ cutting position i at the time of the next traverse.
There is no cutting into Takesobun. Also, the angle mentioned above? At the time of i11, the absolute position 1 in the cutting direction is the same as the fluctuation ΔY at the same time as the traverse (X-axis direction)
Is fi
By appropriate setting of the traverse axis of the magnetic hent 14 with respect to the grinding wheel 18, it can be ignored. <Effects of the Invention> As explained above, the present invention controls the uniformity of the cap depth of each track of the magnetic head based on the resistance value of the thin film resistor disposed on the workpiece, that is, the magnetic head. It is possible to perform cylindrical ω1 machining with a magnetic hand with extremely high cylindrical accuracy without being affected by dimensional changes due to wear of the grinding wheel or thermal expansion of the workpiece due to heat generated during group opening. In addition, in order to centrally control all measurements and machining sequences by a microcomputer, the rotation IJ is repeated from the beginning of the grinding process 1 to 11.
To the mind! 1.'s circle is the same mountain as 1j1'' force u 2n can be created. Also, in the unwritten text, it is described about the supply of 1IJl cuttings.
11” Sud Uke’s 1 copayment bl’=I! I can do it. Also, unwritten text is covered (01 kamono is 1j in number) [ll!
1J) Above JII? J circle i; 1+ II J eye 1! I
a4 Knee) Iteki I small, De Ile 1)', NJR
ftj1 cut! 1 man and multiple 1 fixed 1 1 1 blame t this Yang a, 1 and 1 words 1 ~ 1 ~ 4 - By repeating the movement 4-, the extension eye movement ibi Ota mukai four rules addition 7 -j can do it 1, -1 start full cycle () 7. +13+ is a total of +111
Toka] - origin position, tq is % of the magnetic head: micrometer blow-fry stylus contact a) 1 shift, (1 is fill cutting - [start and end r4Y), 1 purchase. Yes, Figure 2 is system 1;
The figure is a flow diagram of the system's dynamic PIE l1t1 order, Figure 11 is an enlarged view of the main parts related to fd air head f+JF'tlJ plane parallelism measurement and angle correction using a small thermal micrometer, and Figure 5 is an enlarged view of the main parts of the system using a small thermal micrometer. Flowchart 1 for measurement of parallelism of magnetic head ω1 bending using a meter and extraction pressure, FIG. 6 is a diagram of the configuration of the cap of the magnetic head, and FIG. 7 is the angle sleeve tE when the magnetic head is open.
Fig. 8 is an enlarged view of the main parts of the magnetic head ((head grinding flowchart, Fig. 9 is an absolute a) between the cutting direction according to the angle m). 1- X-axis drive chifur, 3・Y kl+ !11 and 1
5.Rotating chifur, 14.Magnetic head, 15. Electric micrometer probe, 18.ω(
Cutting (1 (stone, 29... processing system CPU, 31... floppy tisf trifle. Agent Patent attorney Yoshihiko Fukushi (and 2 others) 1st cause <A' no 1st evil (B) 1st G (C) 1st ε DoD 2nd η 3rd (A/ (B) 7f14 Figure 5 Figure 64 69 So Figure 6 District 7 Figure 8 Figure 8

Claims (1)

[Claims] 1. Four cylindrical rules: Is the degree of parallelism with the traverse axis of the magnetic head of 111 ii? +++1 M1 measurement means and the H1
The angle sleeve 11- of the inclination angle corresponding to the parallelism measured by the measuring means d1 and the valley of the magnetic head when cutting the cylinder 1ijl] - A resistor for measuring the variation in the cap depth of the rack flat, and the circle ffa fill. During carving, the river drawer with an inclination of 1 () corresponding to the difference in depth of the rotation knob is irl: circling wheel drawer,
A cylindrical four-point board equipped with a microcomputer that concentrators 7hl+ for all 81 measurements and additions including comparison and preliminary processing of 81 measurement data accompanying the 11 angle curves.