JPS60141061U - Electron gun stabilization device using a thermionic emission cathode - Google Patents

Electron gun stabilization device using a thermionic emission cathode

Info

Publication number
JPS60141061U
JPS60141061U JP2901684U JP2901684U JPS60141061U JP S60141061 U JPS60141061 U JP S60141061U JP 2901684 U JP2901684 U JP 2901684U JP 2901684 U JP2901684 U JP 2901684U JP S60141061 U JPS60141061 U JP S60141061U
Authority
JP
Japan
Prior art keywords
cathode
power source
electron gun
thermionic emission
beam current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2901684U
Other languages
Japanese (ja)
Inventor
岩槻　正志
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP2901684U priority Critical patent/JPS60141061U/en
Publication of JPS60141061U publication Critical patent/JPS60141061U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は熱電子放出型電子銃におけるバイアス電圧とビ
ーム電流の関係を示す略図、第２図は本考案の一実施例
を示す構成概略図、第３図は第２図の動作を説明するた
めの略図である。 １：陰極、２：制御電極、３：接地電極、４：加熱電源
、５：直流高電圧発生回路、６：バイアス電源、７：電
子ビーム、８．９：集束レンズ、１０：試料、１１：ビ
ーム電流検出器、１２：レンズ絞り、１３：増幅回路、
１４：制御装置、１　　　　。 ５：フィードバック抵抗、１６：基準電源、１７：差動
増幅器、１８：電源制御回路。Fig. 1 is a schematic diagram showing the relationship between bias voltage and beam current in a thermionic emission electron gun, Fig. 2 is a schematic diagram showing the configuration of an embodiment of the present invention, and Fig. 3 explains the operation of Fig. 2. This is a schematic diagram. 1: Cathode, 2: Control electrode, 3: Ground electrode, 4: Heating power supply, 5: DC high voltage generation circuit, 6: Bias power supply, 7: Electron beam, 8.9: Focusing lens, 10: Sample, 11: Beam current detector, 12: lens aperture, 13: amplifier circuit,
14: Control device, 1. 5: Feedback resistor, 16: Reference power supply, 17: Differential amplifier, 18: Power supply control circuit.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 熱電子を放射する陰極と、陰極を加熱するための加熱電
源と、陰極と接地電極との間に配置される制御電極と、
制御電極と陰極間にバイアス電圧を印加するバイアス電
源と、陰極から放出され接地電極を通過する電子ビーム
の変動を検出す乞ビーム電流検出手段とを備え、ビーム
電流検出手段からの検出信号に基づいてバイアス電源を
制御することにより電子ビーム電流を一定に保つように
構成した装置において、バイアス電源の制御に連動させ
て加熱電源を制御するように構成したことを特徴とする
熱電子放射陰極を用いた電子銃の安定化装置。a cathode that emits thermoelectrons, a heating power source for heating the cathode, and a control electrode disposed between the cathode and the ground electrode;
A bias power supply that applies a bias voltage between the control electrode and the cathode, and a beam current detection means that detects fluctuations in the electron beam emitted from the cathode and passing through the ground electrode, and based on a detection signal from the beam current detection means. An apparatus configured to keep an electron beam current constant by controlling a bias power source using a thermionic emission cathode characterized in that the heating power source is controlled in conjunction with control of the bias power source. A stabilizing device for the electron gun.
JP2901684U 1984-02-29 1984-02-29 Electron gun stabilization device using a thermionic emission cathode Pending JPS60141061U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2901684U JPS60141061U (en) 1984-02-29 1984-02-29 Electron gun stabilization device using a thermionic emission cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2901684U JPS60141061U (en) 1984-02-29 1984-02-29 Electron gun stabilization device using a thermionic emission cathode

Publications (1)

Publication Number Publication Date
JPS60141061U true JPS60141061U (en) 1985-09-18

Family

ID=30527440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2901684U Pending JPS60141061U (en) 1984-02-29 1984-02-29 Electron gun stabilization device using a thermionic emission cathode

Country Status (1)

Country Link
JP (1) JPS60141061U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62122038A (en) * 1985-11-22 1987-06-03 Hitachi Ltd Power supply for emitting charged particle beam
JP2018010928A (en) * 2016-07-12 2018-01-18 株式会社ニューフレアテクノロジー Electronic beam plotting device and electronic beam plotting method
JP2019501284A (en) * 2015-11-17 2019-01-17 ア−カム アーベー Electron beam source and method for electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834896A (en) * 1981-08-26 1983-03-01 Nippon Oil & Fats Co Ltd Additive for coal/water slurry

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834896A (en) * 1981-08-26 1983-03-01 Nippon Oil & Fats Co Ltd Additive for coal/water slurry

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62122038A (en) * 1985-11-22 1987-06-03 Hitachi Ltd Power supply for emitting charged particle beam
JP2019501284A (en) * 2015-11-17 2019-01-17 ア−カム アーベー Electron beam source and method for electron beam
JP2018010928A (en) * 2016-07-12 2018-01-18 株式会社ニューフレアテクノロジー Electronic beam plotting device and electronic beam plotting method

Similar Documents

Publication Publication Date Title
ATE152857T1 (en) IMAGE PRODUCING DEVICE
SE7908255L (en) AUTO PRESSURE CONTROL CIRCUIT FOR A PICTURE
JPS60141061U (en) Electron gun stabilization device using a thermionic emission cathode
US2534668A (en) Automatic inverse feedback method and means for correcting response characteristic of phototube circuits
US3936756A (en) Field emission electron gun having automatic current control
EP0434018B1 (en) Electron accelerator
CA1145056A (en) Beam current control circuit
US4322662A (en) Apparatus for controlling the electron beam in an image pick-up tube
US3786305A (en) Field emission electron gun
US2205072A (en) Space discharge apparatus and circuits therefor
JPS5760658A (en) Cathode ray tube for light source
GB2082428A (en) Apparatus for controlling the electron beams of image pick-up tubes
JPS6120664Y2 (en)
JP2599602Y2 (en) Beam current controller for area beam type electron beam irradiation equipment
US4639644A (en) High voltage dynamic focusing system
JPH0666897B2 (en) Video signal processor
JPS60136144A (en) Electron ray analysis device
JPS5878564U (en) High voltage power supply for field emission scanning electron microscope
JPH0451477Y2 (en)
KR100283571B1 (en) Heater voltage generator
JPS5831698B2 (en) Field evaporation type ion beam generator
JPS58144741U (en) Hot cathode heating device for electron gun
JPH02119037A (en) Electron microscope
JPS6348930Y2 (en)
JPS648768A (en) High voltage generating circuit