JPS60140959U - Image aberration correction device for large diameter lenses - Google Patents

Image aberration correction device for large diameter lenses

Info

Publication number
JPS60140959U
JPS60140959U JP2576484U JP2576484U JPS60140959U JP S60140959 U JPS60140959 U JP S60140959U JP 2576484 U JP2576484 U JP 2576484U JP 2576484 U JP2576484 U JP 2576484U JP S60140959 U JPS60140959 U JP S60140959U
Authority
JP
Japan
Prior art keywords
correction device
aberration correction
image aberration
large diameter
diameter lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2576484U
Other languages
Japanese (ja)
Inventor
宏 橋本
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP2576484U priority Critical patent/JPS60140959U/en
Publication of JPS60140959U publication Critical patent/JPS60140959U/en
Pending legal-status Critical Current

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  • Holders For Sensitive Materials And Originals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のウェハーステッパーを説明するための図
、第２図はその像の収差を説明するための図、第３図は
本考案による大口径レンズの像収差補正装置を説明する
ための図、第４図はその作用を説明するための図である
。 図面において、１０は台座、１１は枠状部の四隅部分、
１２は枠状部の四隅以外の部分、１３は（さび、１４は
調整ねじ、１５は固定用ねじ、１６は真空吸引用スリッ
トをそれぞれ示す。 づFig. 1 is a diagram for explaining a conventional wafer stepper, Fig. 2 is a diagram for explaining its image aberration, and Fig. 3 is a diagram for explaining an image aberration correction device for a large aperture lens according to the present invention. FIG. 4 is a diagram for explaining the effect. In the drawing, 10 is the pedestal, 11 is the four corner parts of the frame-shaped part,
12 is a part other than the four corners of the frame-shaped part, 13 is a rust, 14 is an adjustment screw, 15 is a fixing screw, and 16 is a slit for vacuum suction.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] レチクルを水平に支持する矩形枠状部を有するレチクル
プラテンにおいて、該枠状部の四隅部分が他の部分より
分離され、該部分が微調整機構によって上下可動に支持
され、且つ該四隅部分及び他の部分のレチクル支持面に
真空吸引用のスリットが設けられていることを特徴とす
る大口径レンズの像収差補正装置。In a reticle platen having a rectangular frame-shaped part that horizontally supports a reticle, the four corner parts of the frame-shaped part are separated from other parts, and the part is vertically movably supported by a fine adjustment mechanism, and the four corner parts and the other parts are separated from each other. An image aberration correction device for a large-diameter lens, characterized in that a slit for vacuum suction is provided on the reticle support surface in the portion.
JP2576484U 1984-02-27 1984-02-27 Image aberration correction device for large diameter lenses Pending JPS60140959U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2576484U JPS60140959U (en) 1984-02-27 1984-02-27 Image aberration correction device for large diameter lenses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2576484U JPS60140959U (en) 1984-02-27 1984-02-27 Image aberration correction device for large diameter lenses

Publications (1)

Publication Number Publication Date
JPS60140959U true JPS60140959U (en) 1985-09-18

Family

ID=30521135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2576484U Pending JPS60140959U (en) 1984-02-27 1984-02-27 Image aberration correction device for large diameter lenses

Country Status (1)

Country Link
JP (1) JPS60140959U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006178318A (en) * 2004-12-24 2006-07-06 Nsk Ltd Exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006178318A (en) * 2004-12-24 2006-07-06 Nsk Ltd Exposure apparatus

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