JPS60140959U - Image aberration correction device for large diameter lenses - Google Patents
Image aberration correction device for large diameter lensesInfo
- Publication number
- JPS60140959U JPS60140959U JP2576484U JP2576484U JPS60140959U JP S60140959 U JPS60140959 U JP S60140959U JP 2576484 U JP2576484 U JP 2576484U JP 2576484 U JP2576484 U JP 2576484U JP S60140959 U JPS60140959 U JP S60140959U
- Authority
- JP
- Japan
- Prior art keywords
- correction device
- aberration correction
- image aberration
- large diameter
- diameter lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来のウェハーステッパーを説明するための図
、第2図はその像の収差を説明するための図、第3図は
本考案による大口径レンズの像収差補正装置を説明する
ための図、第4図はその作用を説明するための図である
。
図面において、10は台座、11は枠状部の四隅部分、
12は枠状部の四隅以外の部分、13は(さび、14は
調整ねじ、15は固定用ねじ、16は真空吸引用スリッ
トをそれぞれ示す。
づFig. 1 is a diagram for explaining a conventional wafer stepper, Fig. 2 is a diagram for explaining its image aberration, and Fig. 3 is a diagram for explaining an image aberration correction device for a large aperture lens according to the present invention. FIG. 4 is a diagram for explaining the effect. In the drawing, 10 is the pedestal, 11 is the four corner parts of the frame-shaped part,
12 is a part other than the four corners of the frame-shaped part, 13 is a rust, 14 is an adjustment screw, 15 is a fixing screw, and 16 is a slit for vacuum suction.
Claims (1)
プラテンにおいて、該枠状部の四隅部分が他の部分より
分離され、該部分が微調整機構によって上下可動に支持
され、且つ該四隅部分及び他の部分のレチクル支持面に
真空吸引用のスリットが設けられていることを特徴とす
る大口径レンズの像収差補正装置。In a reticle platen having a rectangular frame-shaped part that horizontally supports a reticle, the four corner parts of the frame-shaped part are separated from other parts, and the part is vertically movably supported by a fine adjustment mechanism, and the four corner parts and the other parts are separated from each other. An image aberration correction device for a large-diameter lens, characterized in that a slit for vacuum suction is provided on the reticle support surface in the portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2576484U JPS60140959U (en) | 1984-02-27 | 1984-02-27 | Image aberration correction device for large diameter lenses |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2576484U JPS60140959U (en) | 1984-02-27 | 1984-02-27 | Image aberration correction device for large diameter lenses |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60140959U true JPS60140959U (en) | 1985-09-18 |
Family
ID=30521135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2576484U Pending JPS60140959U (en) | 1984-02-27 | 1984-02-27 | Image aberration correction device for large diameter lenses |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60140959U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006178318A (en) * | 2004-12-24 | 2006-07-06 | Nsk Ltd | Exposure apparatus |
-
1984
- 1984-02-27 JP JP2576484U patent/JPS60140959U/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006178318A (en) * | 2004-12-24 | 2006-07-06 | Nsk Ltd | Exposure apparatus |
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