JPS60137317U - mechanical sensor - Google Patents

mechanical sensor

Info

Publication number
JPS60137317U
JPS60137317U JP2502884U JP2502884U JPS60137317U JP S60137317 U JPS60137317 U JP S60137317U JP 2502884 U JP2502884 U JP 2502884U JP 2502884 U JP2502884 U JP 2502884U JP S60137317 U JPS60137317 U JP S60137317U
Authority
JP
Japan
Prior art keywords
mechanical sensor
abstract
sapphire
silicon
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2502884U
Other languages
Japanese (ja)
Inventor
弘毅 片山
Original Assignee
ティーディーケイ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ティーディーケイ株式会社 filed Critical ティーディーケイ株式会社
Priority to JP2502884U priority Critical patent/JPS60137317U/en
Publication of JPS60137317U publication Critical patent/JPS60137317U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考実に係るメカニカルセンサーの平面図、第
２図は同センサーの側面図である。 １：シリコン、サファイヤ等の単品基板、３：薄膜抵抗
体。FIG. 1 is a plan view of a mechanical sensor according to the present study, and FIG. 2 is a side view of the same sensor. 1: Single substrate such as silicon or sapphire, 3: Thin film resistor.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] シリコン、サファイヤ等の単結晶体を基板にして薄膜抵
抗体を形成したことを特徴とするメカニカルセンサー。A mechanical sensor characterized by forming a thin film resistor using a single crystal material such as silicon or sapphire as a substrate.
JP2502884U 1984-02-23 1984-02-23 mechanical sensor Pending JPS60137317U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2502884U JPS60137317U (en) 1984-02-23 1984-02-23 mechanical sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2502884U JPS60137317U (en) 1984-02-23 1984-02-23 mechanical sensor

Publications (1)

Publication Number Publication Date
JPS60137317U true JPS60137317U (en) 1985-09-11

Family

ID=30519733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2502884U Pending JPS60137317U (en) 1984-02-23 1984-02-23 mechanical sensor

Country Status (1)

Country Link
JP (1) JPS60137317U (en)

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