JPS60135707A - Detecting method of ruggedness defect - Google Patents
Detecting method of ruggedness defectInfo
- Publication number
- JPS60135707A JPS60135707A JP24960583A JP24960583A JPS60135707A JP S60135707 A JPS60135707 A JP S60135707A JP 24960583 A JP24960583 A JP 24960583A JP 24960583 A JP24960583 A JP 24960583A JP S60135707 A JPS60135707 A JP S60135707A
- Authority
- JP
- Japan
- Prior art keywords
- image
- difference
- inspected
- television camera
- image data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野〕
本発明は、被検査物の表面にある凹凸欠陥をテレビカメ
ラによって画像にとり込み、]′Jヒュー夕によって多
値化の数値処理を行なうことによシ臀識すや凹凸欠陥検
出方法131Jするものである。[Detailed Description of the Invention] [Technical Field] The present invention captures uneven defects on the surface of an object to be inspected into an image using a television camera, and performs multivalue numerical processing using a This is a method 131J for detecting irregularities on the buttocks.
従来の凹凸欠陥検出方法では、まず被検査物に正反射光
を当てて得られる正反射像を浮動2値化などの2値化処
理により処理する。ここで、浮動2値化とは、あるしき
い値で入力信号を比較し、大小によって2値(例えば1
、O)に分けるとき、しきい値が入カー夛に順応して変
化するようにしたものをいう。その後、コンピュータに
入れ、画素数カウントやマツチング手法を用いて欠陥を
検出していた。即ち、画像を2値化した後、集画に対し
てマスクを用意し、このマスクによシ原画を判別する。In the conventional unevenness defect detection method, first, a specularly reflected image obtained by applying specularly reflected light to an object to be inspected is processed by a binarization process such as floating binarization. Here, floating binarization involves comparing input signals at a certain threshold value and converting them into binary values (for example,
, O), the threshold value changes according to the number of input cards. The images were then put into a computer and defects were detected using pixel counting and matching techniques. That is, after the image is binarized, a mask is prepared for the collection of images, and the original image is determined using this mask.
いいかえれば、原画にマスクを重ね(マツチング)、マ
スクと原蘂が重なった部分の画素数を数え(画素数カウ
ント)て欠陥を検出していた。しかるりに、被検査物の
表面の凹凸欠陥は発生個所がランタムで、マツチング手
法は使用できない。即ち、マツチンジ手法は、手法を適
用する対象物が判明していないと、いいかえればマ、ス
クが限定できないと使用できない。又、凹凸欠陥は、欠
陥の大きさが均一でないため、画素数カウント手法も不
正確となっていた。In other words, defects were detected by overlapping a mask on the original image (matching) and counting the number of pixels in the area where the mask and the original layer overlapped (pixel count). However, unevenness defects on the surface of the object to be inspected occur at random locations, and the matching method cannot be used. That is, the Matsuchinji method cannot be used unless the object to which the method is applied is known, or in other words, the mask cannot be defined. Furthermore, since the uneven defects are not uniform in size, the method of counting the number of pixels is also inaccurate.
本発明の目的とするところは、欠陥の大きさが均一でな
くても同一判定基準で処理できるようにして従来2値化
処理では検出が困ガLな凹凸欠陥を検出できるようにす
るようにすることにある。An object of the present invention is to enable processing using the same criteria even if the size of defects is not uniform, and to detect uneven defects that are difficult to detect with conventional binarization processing. It's about doing.
〔発明の開示〕 ゛
実施例
第1図において、il)は光源で、被検査物(2)を斜
め上方から照明し、被検査物(2)の表面に正反射光を
与える。(3)はテレビカメラで、被検査物(2)の正
反射像をとり込む。このとき、凸欠陥の正反射像は、第
2図のようにA側では明るい部分(4)となり、B側で
は暗い部分(5)となる。テレビカメラ(3)からの映
像信号は、第3図のように、A/D変換器(6)に入力
されてA/D変換され、順次フレームメモリ(7)に書
き込且れる。(8)はコンピュータで、フレームメtす
(7)に書き込まれた被検査物(2)の画像データを数
値処理する。(9)はメtりで、処理の結果や途中結果
を書き込む0フレ一ムメt1月7)はテレビカメラ(3
)と同期して1画像分の画像データを書き込むことが可
能な高速大容量メモリであり、1画像を256 X 2
!56の画素に分散して記憶しており、1画素は256
階調(8ピツト)の光量データを持っている。[Disclosure of the Invention] Embodiment In FIG. 1, il) is a light source that illuminates the object to be inspected (2) obliquely from above and provides specularly reflected light to the surface of the object to be inspected (2). (3) is a television camera that captures a regular reflection image of the object to be inspected (2). At this time, the regular reflection image of the convex defect becomes a bright part (4) on the A side and a dark part (5) on the B side, as shown in FIG. As shown in FIG. 3, the video signal from the television camera (3) is input to an A/D converter (6), A/D converted, and sequentially written into a frame memory (7). (8) is a computer that numerically processes the image data of the object to be inspected (2) written in the frame (7). (9) is a 0-frame meme that writes processing results and intermediate results (January 7) is a TV camera (3
) is a high-speed, large-capacity memory that can write image data for one image in synchronization with 256 x 2
! The memory is distributed over 56 pixels, and one pixel is 256 pixels.
It has light amount data of gradations (8 pits).
動作
フレームメtす(7)に書き込まれた第4図(a)のよ
うな256×256の画素を第4図(b)のように水平
方向にN分割、垂直方向にへ1分割してN X M個の
領域に分ける。第4図(b)の場合、M=8、N=8で
64の領域に分割されており、1領域内の画素数は32
X’32 = I 024画素となっている。この1領
域中の1024画素について、平均光量をコンピュータ
(8)・で計算し1メ七1月9)に書き込む。これを6
4領域のすべてについて計算し、計算された平均光量を
領域の位置に沿って第5図のようにKn 、KI2と割
り付ける。今後、平均光量けK M’mで位置を示す。The 256 x 256 pixels as shown in Fig. 4(a) written in the operation frame message (7) are divided into N in the horizontal direction and 1 in the vertical direction as shown in Fig. 4(b). Divide into N x M areas. In the case of Fig. 4(b), it is divided into 64 regions with M=8 and N=8, and the number of pixels in one region is 32.
X'32 = I 024 pixels. The average amount of light for the 1024 pixels in this one area is calculated by a computer (8) and written in one page. This is 6
Calculations are made for all four areas, and the calculated average light quantity is assigned as Kn and KI2 along the position of the area as shown in FIG. From now on, the position will be indicated by the average light intensity K M'm.
つぎに1つの@域の平均光量に対して第5図のように8
近傍、例えば、K53に対してに42、K43、K44
、K52、K54 、K112、K63、K64の8
近跡の平均光量と比較し、8近傍中でKMNの光量より
小さい光量の内で、KMNとの光量差を計算し、最も大
きな差を選び出す。これをSMNとする。式で表すと、
SMN=KMN−MIN (KMNの8近傍)ただし、
KMN −MIN (KINの8近傍)〉0とし、MI
N(KMNの8近傍)は8近傍中の最小値を選ぶ。Next, for the average light intensity of one @ area, 8
Nearby, for example, 42, K43, K44 for K53
, K52, K54, K112, K63, K64 8
It compares it with the average light amount of the nearby trace, calculates the difference in light amount from KMN among the eight nearby light amounts that are smaller than the light amount of KMN, and selects the largest difference. This is called SMN. Expressed in the formula,
SMN=KMN-MIN (8 neighbors of KMN) However,
KMN −MIN (8 neighborhood of KIN)〉0, and MI
For N (8 neighbors of KMN), select the minimum value among the 8 neighbors.
このSMNもSoからSBsまでめる。ただし、S。This SMN also ranges from So to SBs. However, S.
はに21N K22 、KI2の3近傍より計算し、5
12は5近傍より計算する。SN+、SNg、51M5
58Mも同様に計算する。MIN (KMIIの8近傍
)が条件を満さない場合はSMN=0とする。このよう
にして計算された64個のSMNの内で最大値を見付i
出して判定基準と比較することにより、凹凸欠陥の有無
が判定できる。Calculated from 3 neighbors of 21N K22 and KI2, 5
12 is calculated from 5 neighbors. SN+, SNg, 51M5
58M is calculated in the same way. If MIN (8 neighbors of KMII) does not satisfy the condition, SMN=0. Find the maximum value among the 64 SMNs calculated in this way.
The presence or absence of an uneven defect can be determined by comparing it with the criteria.
具体的に説明すると、第6図(a)のように、K22と
に32にわたって凸欠陥がある場合、明るい領域に22
の平均光ガ1が100で、暗い領域K の平均光量が2
0とする。又、残りの平均光量はすべて50とすると、
第6図(b)のように、s、、=go、S3λ=0とな
シ、凸欠陥を検出できる。Specifically, as shown in FIG. 6(a), if there is a convex defect extending over 32 K22 and K22, there are 22 convex defects in the bright area.
The average light quantity of the dark area K is 100, and the average light quantity of the dark area K is 2.
Set to 0. Also, assuming that the remaining average light quantities are all 50,
As shown in FIG. 6(b), when s, , = go and S3λ = 0, a convex defect can be detected.
上述のように本発明は、被検査物の表面に正反射光を与
える光源と、前記被検査物の正反射像をとり込むテレビ
カメラと、前記テレビカメラの出力をA/D変換するA
/D変換器と、前記A/D変換器の出力を順次格納する
フレームメ℃りとを備え、前記フレームメモリに格納さ
れた画像データを水平方向にN個、垂直方向にM個に区
切り1画像をM X N個の領域に分ける手段と、前記
1領域の画像データを読み出し各点の明るさの平均値を
計算する手段と、各領域の平均値を比べて差を計算する
手段と、計算された平均値の差を基準値と比較する比較
手段とにより凹凸欠陥を検出するから、欠陥の大きさが
均一でなくても同一判定基準で処理でき、従来2値化処
理では検出が困雑な凹凸欠陥を検出できるという効果を
奏するものである。As described above, the present invention includes a light source that provides specularly reflected light to the surface of an object to be inspected, a television camera that captures a specularly reflected image of the object to be inspected, and an A/D converter that converts the output of the television camera.
A/D converter, and a frame memory for sequentially storing the output of the A/D converter, and divides the image data stored in the frame memory into N pieces in the horizontal direction and M pieces in the vertical direction. means for dividing the image into M x N regions; means for reading the image data of the one region and calculating the average value of brightness of each point; and means for comparing the average values of each region and calculating the difference; Since uneven defects are detected using a comparison means that compares the difference between the calculated average values with a reference value, even if the defects are not uniform in size, they can be processed using the same criteria, making it difficult to detect with conventional binarization processing. This has the effect that rough unevenness defects can be detected.
第1図は本発明検出方法に使用する装置の一実施例の斜
視図、第2図は同上のテレビカメラの正反射像の一例の
正面図、第3図は同上のプ0ツク回路図、vJ4図(a
L (b)はフレームメモリに書き込まれた画像データ
説明図、第5図は同上の平均光量割り付は図、第6図(
a)、(b)は本発明の凹凸欠陥検出方法の真木説明図
である。
(II・・・光源、(2)・・・被検査物、(3)・・
・テしじカメラ、(6)・・・A/D変換器、+7+・
・・フレームメtす、(8)・・・コンピュータ、(9
)・・・メモリ。
代理人 弁理士 石 1)長 上
第1図
と
第2図
第3図
第4v4
(0)(b)
第514
第6因
(o) (b) ゛FIG. 1 is a perspective view of an embodiment of the apparatus used in the detection method of the present invention, FIG. 2 is a front view of an example of a specularly reflected image of the above television camera, and FIG. 3 is a block circuit diagram of the same above. vJ4 diagram (a
L (b) is an explanatory diagram of the image data written in the frame memory, Figure 5 is a diagram showing the average light intensity allocation of the same as above, and Figure 6 (
a) and (b) are Maki explanatory diagrams of the unevenness defect detection method of the present invention. (II...Light source, (2)...Test object, (3)...
・Teshiji camera, (6)...A/D converter, +7+・
...framework, (8) ...computer, (9
)···memory. Agent Patent Attorney Ishi 1) Chief Figure 1 and Figure 2 Figure 3 Figure 4v4 (0) (b) No. 514 6th cause (o) (b) ゛
Claims (1)
肥液検査物の正反射像をとり込むテレビカメラと1、前
記テレビカメラの出力をA/D変換するA/D変換器と
、前記A/D変換器の出力を順次格納するフレームメモ
リとを備え、前記フレームメ七りに格納された画像デー
タを水平方向にN個、垂直方向、にM個に区切り1画像
をMXN個の領域に分ける(1手段と、前記1領域、の
画像アークを読み出し各点(の明るさの平均値を゛計算
する手段と、各領域の平ト均値を比べて差を計算する手
段と、計算された千〇均値の差を基準値と比較する比較
手段とにより【 凹・、凸欠陥を検出することを特徴とする凹凸欠陥検・
1 出、p法。(1) A light source that provides specularly reflected light on the surface of the object to be inspected, and
A television camera that captures a specularly reflected image of a fertilizer liquid test object; 1 an A/D converter that converts the output of the television camera from A/D to digital; and a frame memory that sequentially stores the output of the A/D converter. The image data stored in the frame is divided into N pieces in the horizontal direction and M pieces in the vertical direction, dividing one image into MXN areas (one means and an image arc of the one area). A means for calculating the average value of the brightness of each readout point, a means for calculating the difference by comparing the average values of each area, and a comparison for comparing the difference between the calculated 1,000 average values with a reference value. By means of [uneven defect detection/
1 Out, p method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24960583A JPS60135707A (en) | 1983-12-23 | 1983-12-23 | Detecting method of ruggedness defect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24960583A JPS60135707A (en) | 1983-12-23 | 1983-12-23 | Detecting method of ruggedness defect |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60135707A true JPS60135707A (en) | 1985-07-19 |
JPH0242407B2 JPH0242407B2 (en) | 1990-09-21 |
Family
ID=17195505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24960583A Granted JPS60135707A (en) | 1983-12-23 | 1983-12-23 | Detecting method of ruggedness defect |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60135707A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187637A (en) * | 1985-02-15 | 1986-08-21 | Hitachi Ltd | Apparatus for inspecting appearance |
JPH02242108A (en) * | 1989-03-15 | 1990-09-26 | Matsushita Electric Works Ltd | Appearance inspecting machine |
EP0586795A1 (en) * | 1992-09-09 | 1994-03-16 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Procedure and device for the contactless determination of the roughness of surface of objects |
JP2013185862A (en) * | 2012-03-06 | 2013-09-19 | Toyota Motor Corp | Defect inspection device and defect inspection method |
JP2013205381A (en) * | 2012-03-29 | 2013-10-07 | Nisshin Steel Co Ltd | Method and system for detecting defect of steel tape threaded into cold rolling mill |
-
1983
- 1983-12-23 JP JP24960583A patent/JPS60135707A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61187637A (en) * | 1985-02-15 | 1986-08-21 | Hitachi Ltd | Apparatus for inspecting appearance |
JPH02242108A (en) * | 1989-03-15 | 1990-09-26 | Matsushita Electric Works Ltd | Appearance inspecting machine |
EP0586795A1 (en) * | 1992-09-09 | 1994-03-16 | TZN Forschungs- und Entwicklungszentrum Unterlüss GmbH | Procedure and device for the contactless determination of the roughness of surface of objects |
JP2013185862A (en) * | 2012-03-06 | 2013-09-19 | Toyota Motor Corp | Defect inspection device and defect inspection method |
JP2013205381A (en) * | 2012-03-29 | 2013-10-07 | Nisshin Steel Co Ltd | Method and system for detecting defect of steel tape threaded into cold rolling mill |
Also Published As
Publication number | Publication date |
---|---|
JPH0242407B2 (en) | 1990-09-21 |
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