JPS60133455U - ハ−ドマスク製造装置 - Google Patents

ハ−ドマスク製造装置

Info

Publication number
JPS60133455U
JPS60133455U JP1984020849U JP2084984U JPS60133455U JP S60133455 U JPS60133455 U JP S60133455U JP 1984020849 U JP1984020849 U JP 1984020849U JP 2084984 U JP2084984 U JP 2084984U JP S60133455 U JPS60133455 U JP S60133455U
Authority
JP
Japan
Prior art keywords
hard mask
mask manufacturing
manufacturing equipment
plate
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984020849U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323705Y2 (enrdf_load_stackoverflow
Inventor
森松　高弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1984020849U priority Critical patent/JPS60133455U/ja
Publication of JPS60133455U publication Critical patent/JPS60133455U/ja
Application granted granted Critical
Publication of JPS6323705Y2 publication Critical patent/JPS6323705Y2/ja
Granted legal-status Critical Current

Links

JP1984020849U 1984-02-16 1984-02-16 ハ−ドマスク製造装置 Granted JPS60133455U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984020849U JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984020849U JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Publications (2)

Publication Number Publication Date
JPS60133455U true JPS60133455U (ja) 1985-09-05
JPS6323705Y2 JPS6323705Y2 (enrdf_load_stackoverflow) 1988-06-29

Family

ID=30511715

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984020849U Granted JPS60133455U (ja) 1984-02-16 1984-02-16 ハ−ドマスク製造装置

Country Status (1)

Country Link
JP (1) JPS60133455U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6323705Y2 (enrdf_load_stackoverflow) 1988-06-29

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