JPS60129922A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS60129922A
JPS60129922A JP23816783A JP23816783A JPS60129922A JP S60129922 A JPS60129922 A JP S60129922A JP 23816783 A JP23816783 A JP 23816783A JP 23816783 A JP23816783 A JP 23816783A JP S60129922 A JPS60129922 A JP S60129922A
Authority
JP
Japan
Prior art keywords
film
oxide
magnetic recording
permalloy
iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23816783A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
紘一 篠原
Hideki Yoshida
秀樹 吉田
Toshiaki Kunieda
国枝 敏明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP23816783A priority Critical patent/JPS60129922A/en
Publication of JPS60129922A publication Critical patent/JPS60129922A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To realize the recording characteristic excellent in vertical magnetic recording in the state of having no deterioration with time by using a thin ''Permalloy'' film constituting of the fine particles having the coating layer composed of nonmagnetic iron oxide. CONSTITUTION:The surface of the fine particles constituting a thin ''Permalloy'' film is coated with nonmagnetic oxide of iron, by which the unstability arising at the boundary of the ''Permalloy'' film and Co-M film owing to the mutual diffusion arising between both films is obviated. There is Fe3O4 as a oxide of iron. Said oxide is extremely stable and the stability with time is assured by the dullness with not only the mutual diffusion thereof but also an environmental change. The thickness of the oxide coating layer is set preferably at about 100Angstrom . If the layer is too thin, there is a defect and the effect is unstable. If the layer is too thick, the sensitivity of the recording characteristics decreases.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は垂直記録方式に適した磁気記録媒体に関する。[Detailed description of the invention] Industrial applications The present invention relates to a magnetic recording medium suitable for perpendicular recording.

従来例の構成とその問題′点 近年、磁気記録の高密度化の進歩は者しく、金属薄膜型
磁気記録媒体の実用化が待たれている。
Conventional Structures and Problems There has been rapid progress in increasing the density of magnetic recording in recent years, and the practical application of metal thin film magnetic recording media has been awaited.

特に磁気記録媒体の磁気記録層の厚さ方向、いわゆる垂
直磁化による記録を行う時は、短波長になるにつれて減
磁界が小さくなる性質をもつため高密度記録に有利であ
り、注目されている。
In particular, when recording in the thickness direction of the magnetic recording layer of a magnetic recording medium, so-called perpendicular magnetization, the demagnetizing field decreases as the wavelength becomes shorter, which is advantageous for high-density recording and is attracting attention.

特に第1図に示した2層媒体を用いて、第2図に示した
補助磁極励磁形ヘッドによる記録は、単層膜に比べて起
磁力で約1桁近い改善がなさ扛ることが知られるように
なり垂直記録への期待は更に強1ってきている。
In particular, it is known that when recording with the auxiliary pole excitation type head shown in Fig. 2 using the dual-layer medium shown in Fig. 1, there is no improvement in magnetomotive force by about one order of magnitude compared to a single-layer film. The expectations for perpendicular recording are growing even stronger.

第1図は2層媒体の拡大断面図で、基板′2上に透磁率
の大きいパーマロイ薄膜層3とGo−Cr等のGo−M
(MはOrの他に、W、Mo、Ru、Ti等が垂直磁気
記録用として遇する添加元素を示している。)合金から
成る垂直磁化可能な磁気記録層である、垂直磁化膜4と
が形成される磁気記録媒体1で、第2図の矢印で示した
方向に例えば運動させて磁気記録を行う際に用いられる
FIG. 1 is an enlarged sectional view of a two-layer medium, in which a permalloy thin film layer 3 with high magnetic permeability and a Go-M layer such as Go-Cr are formed on a substrate '2.
(In addition to Or, M indicates an additive element such as W, Mo, Ru, Ti, etc. used for perpendicular magnetic recording.) The magnetic recording medium 1 is used to perform magnetic recording by moving the magnetic recording medium 1 in the direction shown by the arrow in FIG. 2, for example.

磁気へラドは、第2図では、主磁極5と、補助磁極7が
媒体1を挾んで対向配設される構成の場合で、6は励磁
巻線である。主磁極は実際には、セラミック等の支持体
にスパッタリング法などでパーマロイ薄膜を形成して得
ら八るが、第2図では模式的に主磁極部のみを示した。
In FIG. 2, the magnetic helad has a configuration in which a main magnetic pole 5 and an auxiliary magnetic pole 7 are disposed facing each other with the medium 1 in between, and 6 is an excitation winding. Although the main pole is actually obtained by forming a permalloy thin film on a ceramic support by sputtering or the like, only the main pole portion is schematically shown in FIG.

第3図は、厚さ9.5μmのポリエチレンテレフタレー
ト上に0.5μmのパーマロイ薄膜(飽和磁化Ms :
 600 (emu/cc) 、面内保磁力H64(0
6) )、その上に、19%Cr を含有したGo−C
r垂直磁化膜0.221t m (MB : 340 
(emu/cc)、垂直保磁力H6上: 440 (O
s) )を夫/rスパッタリンク法により構成し得られ
た磁気記録媒体の記録特性である。I、は励磁巻線に流
す電流値で、EPは記録レベルである。図中人は、前記
した磁気記録媒体の初期特性であり、Bは、同一の媒体
を60’Cのドライ(湿度6○%RH〜6○%RH)で
1週間保存したあとの記録特性で、者しく記録特性の劣
化がみられ改善が車重れる。
Figure 3 shows a 0.5 μm permalloy thin film (saturation magnetization Ms:
600 (emu/cc), in-plane coercive force H64 (0
6) ), on which Go-C containing 19% Cr
r Perpendicular magnetization film 0.221t m (MB: 340
(emu/cc), vertical coercivity H6: 440 (O
These are the recording characteristics of a magnetic recording medium obtained by constructing s)) by the sputter link method. I is the current value passed through the excitation winding, and EP is the recording level. Figure 1 shows the initial characteristics of the magnetic recording medium described above, and B shows the recording characteristics after the same medium was stored for one week in a dry environment at 60'C (humidity 60% RH to 60% RH). However, there was a noticeable deterioration of the recording characteristics, and improvement was delayed.

発明の目的 本発明は上記事情に鑑みなさ汎たもので、経時安定性の
優れた垂直磁気記録用の磁気記録媒体を提供することを
目的とする。
OBJECTS OF THE INVENTION The present invention was developed in view of the above circumstances, and it is an object of the present invention to provide a magnetic recording medium for perpendicular magnetic recording that has excellent stability over time.

発明の構成 本発明は基板上に鉄の非磁性酸化物で被覆された微粒子
から成るパーマロイ薄膜上に垂直磁化膜を配したことを
特徴とするもので、経時安定性の優れた磁気記録媒体が
得ら柱るものである。
Structure of the Invention The present invention is characterized in that a perpendicularly magnetized film is disposed on a permalloy thin film made of fine particles coated with a non-magnetic oxide of iron on a substrate, and a magnetic recording medium with excellent stability over time is obtained. It is a pillar that can be obtained.

実施例の説明 本発明の磁気記録媒体は第1図に拡大断面図を示した構
成を基本とし、磁気ディスク、磁気テープの形、■に応
じ、必要な場合、表面保護層、バックコート層を配して
成るものである。
DESCRIPTION OF THE EMBODIMENTS The magnetic recording medium of the present invention is based on the structure shown in the enlarged cross-sectional view in FIG. It is made up of

基板2としては、高分子フィルムが主として用いられ、
ポリエチレンテレフタレ−1・、ポリエチレンナフタン
−ト、ポリアミド、ポリアミドイミド、ポリヒタントイ
ン、ボリパラハニノク酸、ボリイミ1−等の中から選ば
ハるもので、パーマロイとしては、Ni−Fe以外に添
加することも可能であるが、80%N1が一般的である
。本発明の要旨とするところは、パーマロイ薄膜を構成
する微粒子の表面を鉄の非磁性酸化物で被覆することで
、と汎のない時にパーマロイ膜とGo−薄膜との間で起
る相互拡散による両者の膜の界面で起る不安定さが、1
11J述した記録特性の不安定さを抜くことがなくなる
ことにある。
As the substrate 2, a polymer film is mainly used,
It is selected from polyethylene terephthalate, polyethylene naphthanate, polyamide, polyamideimide, polyhythantoin, polyparahaninochic acid, polyimide, etc. As permalloy, it can also be added to other than Ni-Fe. However, 80%N1 is common. The gist of the present invention is to coat the surface of the fine particles constituting the permalloy thin film with a non-magnetic oxide of iron, and to prevent the mutual diffusion that occurs between the permalloy film and the Go thin film at random times. The instability that occurs at the interface of both films is 1
The problem is that the instability of recording characteristics mentioned in 11J will not be overcome.

鉄の酸化物としてはFe、O4があるが、これは極めて
安定であり、前記したイ゛目互拡散はもとよシ、環境変
化に対しても鈍感であるので、後で詳述する経時安定性
が確保されるものである。
Iron oxides include Fe and O4, but these are extremely stable and are insensitive to environmental changes, as well as to interdiffusion as described above, so they are not sensitive to changes over time, which will be detailed later. This ensures stability.

酸化物被覆層の厚与は、5O入がら2O○人、好丑しく
け1QO人前後の値に設定さ扛る。余り薄いと、欠陥か
あり、本発明の効果が不安定となり、厚ずきると、記録
特性の感度低下が起るからである。
The thickness of the oxide coating layer is set to a value of about 50 to 20○ people, and preferably about 1QO people. This is because if it is too thin, defects may occur and the effect of the present invention becomes unstable, and if it is too thick, the sensitivity of recording characteristics will decrease.

本発明のパーマロイ薄膜を得る方法は、薄膜形成手段♀
で上記した鉄の非磁性酸化物被覆層が形成さ柱るもので
あれば、スパッタリンク法、真空蒸着法、イオンプレー
テインク法等の公知の薄膜形成手段のいずれても艮い。
The method for obtaining the permalloy thin film of the present invention includes thin film forming means♀
Any of the known thin film forming methods such as sputter link method, vacuum evaporation method, ion plate ink method etc. can be used as long as the non-magnetic oxide coating layer of iron described above is formed.

m記酸化物f&覆層を得るのは、例えば、酸素分圧の制
御と基板温度乗件と膜形成速度により最適な条件を選ひ
制御することでてきる。
The m-th oxide f&coating layer can be obtained, for example, by selecting and controlling optimal conditions depending on the oxygen partial pressure, substrate temperature factor, and film formation rate.

垂直磁化膜の製法は、スパッタリング法、真空蒸着法、
イオンプレーテインク法、無電解めっき法等があり、C
o−Cr 、 Co−Ti 、 Go−Mo 、 Go
 −V 。
The manufacturing method of perpendicular magnetization film is sputtering method, vacuum evaporation method,
There are ion plate ink methods, electroless plating methods, etc.
o-Cr, Co-Ti, Go-Mo, Go
-V.

Co−W、Go−Mn、co−Ru、Go−Or−Rh
、Go−Ni−Cr 等が桐料として適している。以下
に唄に具体的な実施例で詳しく説明する。
Co-W, Go-Mn, co-Ru, Go-Or-Rh
, Go-Ni-Cr, etc. are suitable as paulownia materials. The song will be explained in detail below using specific examples.

〔実施例−1〕 表面温度を6○°Cに制御した直径5○Onの円筒状キ
ャンに沿わぜて9,6 lt mのポリエチレンテレフ
タレートを2○m/minで巻取りながら、入射角が1
O度以内の蒸気流でNi−Fe(Ni80wt%)を電
子ヒーム蒸着した。蒸着速度(は、1μm/s e c
で、真空度は全圧1 X 10−5Torrで、うち岐
素が最大分圧で8 X 10−6TOrrである。膜厚
0,5 μmのパーマロイ薄膜はMS60OCemu/
/cc′3゜Ha 11:4.2 (Os)で、オージ
ェ電子分光とX線電子分光法により調べた結果、約8O
へのFe3O4膜が微粒子表面を被覆しているも〃であ
ることが確言忍されAc1 次に、同じく直径50 OILの円筒状キャン(キャン
の表面温度は40°Cとした。)沿わせて、巻きIy3
 Lながら(速度33 cm / min ) 1’g
%Or のC0−0rターゲツトを用いた高周波マグネ
トロンスパッタ(高周波13,5eMHz、電力2KW
)によりGo−Cr垂直磁化膜を022 μm (Ms
、’340[emu/cc) 、)(o、 440(O
e) ) 形成して磁気記録媒体を得た。
[Example-1] While winding 9.6 lt m of polyethylene terephthalate at 20 m/min along a cylindrical can with a diameter of 50 On whose surface temperature was controlled at 60 °C, the incident angle was 1
Ni--Fe (Ni 80 wt%) was deposited by electron beam evaporation using a vapor flow within 0 degrees. Vapor deposition rate (1 μm/sec
The degree of vacuum is a total pressure of 1 x 10-5 Torr, of which the maximum partial pressure of nitrogen is 8 x 10-6 Torr. The permalloy thin film with a film thickness of 0.5 μm is MS60OCemu/
/cc'3°Ha 11:4.2 (Os), and as a result of investigation by Auger electron spectroscopy and X-ray electron spectroscopy, it is approximately 8O
It was confirmed that the surface of the fine particles was coated with a Fe3O4 film, so Ac1 was then placed along a cylindrical can (the surface temperature of the can was 40°C) with a diameter of 50 OIL. Roll Iy3
While L (speed 33 cm/min) 1'g
High frequency magnetron sputtering using C0-0r target of %Or (high frequency 13.5eMHz, power 2KW)
) to form a Go-Cr perpendicularly magnetized film with a thickness of 022 μm (Ms
,'340[emu/cc) ,)(o, 440(O
e)) A magnetic recording medium was obtained.

この媒体は、初期特性は第3図人の記録特性であった。The initial characteristics of this medium were those recorded by humans in Figure 3.

この媒体を30’C9○%RH,4○°C9○%RH,
60’C5○%RHの3環境に1週間。
This medium was heated at 30'C9○%RH, 4°C9○%RH,
1 week in 3 environments of 60'C5○%RH.

1ケ月保存した後それぞれ記録特性を514価したとこ
ろ、測定rjk”4差の範囲で第3図人の特性と一致し
変化d、全くみら汎なかった。
After storing for one month, the recorded characteristics were evaluated for 514 times, and the measured characteristics were consistent with those of humans within a range of 4 differences, and no changes were observed at all.

〔実施例−2〕 実施(+lj −1と同じ方法で酸素分圧のみ9X10
−6Torrに変えてパーマロイ薄膜を形成した。酸化
物被覆層(Fe304) の厚みが約12○入以外は実
施例−1と同一の磁気特性であった。この上に電子ビー
ム法着法でGo−Or垂直磁化膜0.271 mを形成
した。Cr18wt%で、M8 は390 (emu/
cc〕H,−は5o5〔0e〕であった。
[Example-2] Implementation (same method as +lj -1, only oxygen partial pressure 9X10
A permalloy thin film was formed instead of -6 Torr. The magnetic properties were the same as in Example 1, except that the thickness of the oxide coating layer (Fe304) was about 12 mm. A Go-Or perpendicular magnetization film of 0.271 m was formed thereon by electron beam deposition. At 18wt% Cr, M8 is 390 (emu/
cc]H,- was 5o5[0e].

この媒体の記録特性は、初期禍′性も、実施例=1で倹
約しだ3環境保存特性も、第3図のCに示さ扛た特性で
安定していた。本発明の媒体は、他のへラド構成による
記録再生に於ても同様の効果があるのは勿論である。
The recording characteristics of this medium were stable, both in the initial damage resistance and in Example 1, the environmental preservation characteristics were as shown in C in FIG. It goes without saying that the medium of the present invention has similar effects in recording and reproducing using other helad configurations.

発明の効果 本発明はパーマロイ薄膜として非磁性酸化鉄からなる被
覆層を有する微粒子で構成されたものを用いることで、
垂直磁気記録の優れた記録特性を紅時的変化のない状態
で実現できるものである。
Effects of the Invention The present invention uses a permalloy thin film composed of fine particles having a coating layer made of non-magnetic iron oxide.
The excellent recording characteristics of perpendicular magnetic recording can be realized without any temporal change.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は2層構造の垂直磁気記録用の磁気記録媒体の拡
大断面図、第2図は、垂直磁気記録を説明するだめの図
、第3図は、垂直磁気記録媒体の記録特性を示す図であ
る。 1 ・・・垂直磁気記録媒体、2・・・・・・基板、3
・・・・・パーマロイ層、4・・・・・・垂直磁化膜、
6・・・・・主磁極、7・・・・補助磁極。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図 第3図 1p (ntA)
Figure 1 is an enlarged cross-sectional view of a two-layer structure magnetic recording medium for perpendicular magnetic recording, Figure 2 is a diagram for explaining perpendicular magnetic recording, and Figure 3 shows the recording characteristics of the perpendicular magnetic recording medium. It is a diagram. 1... Perpendicular magnetic recording medium, 2... Substrate, 3
... Permalloy layer, 4 ... Perpendicular magnetization film,
6...Main magnetic pole, 7...Auxiliary magnetic pole. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3 Figure 1p (ntA)

Claims (1)

【特許請求の範囲】[Claims] 基板上にパーマロイ薄膜と垂直磁化膜を積層して成る磁
気記録媒体であって、前記パーマロイ薄膜を構成する微
粒子の表面が鉄の非磁性酸化物で被覆されていることを
特徴とする磁気記録媒体。
A magnetic recording medium comprising a permalloy thin film and a perpendicularly magnetized film laminated on a substrate, the surface of the fine particles constituting the permalloy thin film being coated with a non-magnetic oxide of iron. .
JP23816783A 1983-12-16 1983-12-16 Magnetic recording medium Pending JPS60129922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23816783A JPS60129922A (en) 1983-12-16 1983-12-16 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23816783A JPS60129922A (en) 1983-12-16 1983-12-16 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS60129922A true JPS60129922A (en) 1985-07-11

Family

ID=17026177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23816783A Pending JPS60129922A (en) 1983-12-16 1983-12-16 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS60129922A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030332A (en) * 1990-04-19 1991-07-09 Massachusetts Institute Of Technology Method for making magnetic oxide precipitates
WO2002054390A1 (en) * 2000-12-28 2002-07-11 Hitachi Maxell, Ltd. Magnetic recording medium and its manufacturing method, and magnetic storage device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030332A (en) * 1990-04-19 1991-07-09 Massachusetts Institute Of Technology Method for making magnetic oxide precipitates
WO2002054390A1 (en) * 2000-12-28 2002-07-11 Hitachi Maxell, Ltd. Magnetic recording medium and its manufacturing method, and magnetic storage device
US6602621B2 (en) 2000-12-28 2003-08-05 Hitachi Maxell, Ltd. Magnetic recording medium, method for producing the same, and magnetic storage apparatus
US6815098B2 (en) 2000-12-28 2004-11-09 Hitachi Maxell, Ltd. Magnetic recording medium, method for producing the same, and magnetic storage apparatus

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