JPS60122303A - Strain gauge - Google Patents
Strain gaugeInfo
- Publication number
- JPS60122303A JPS60122303A JP22955683A JP22955683A JPS60122303A JP S60122303 A JPS60122303 A JP S60122303A JP 22955683 A JP22955683 A JP 22955683A JP 22955683 A JP22955683 A JP 22955683A JP S60122303 A JPS60122303 A JP S60122303A
- Authority
- JP
- Japan
- Prior art keywords
- comb
- piezoelectric substrate
- strain
- saw
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、表面音響波素子(以下、SAW素子と略記す
る。)を利用した歪計に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a strain meter using a surface acoustic wave device (hereinafter abbreviated as SAW device).
従来、各種の歪計が知られているが、一般的には数’k
Hz程度の電源を必要とするばかりでなく、出力が微弱
であるためにシールドワイヤを張りめぐらす等の必要が
ある。Conventionally, various strain meters have been known, but generally several
Not only does it require a power source of about Hz, but the output is weak, so it is necessary to run shield wires around it.
本発明は、SAW素子を利用することによってその小型
化をはかると共に、送信用回路系を簡単化できるように
構成し、また内蔵電池によって長時間作動させたり、太
陽電池によりその起電力発生時にのみ作動させる等、使
用に至便とした歪計を提供しようとするものである。The present invention aims to reduce the size of the SAW element by using the SAW element, and is structured so that the transmitting circuit system can be simplified. Also, the built-in battery allows it to operate for a long time, and the solar battery allows it to operate only when the electromotive force is generated. The purpose is to provide a strain meter that is easy to operate and use.
而して、本発明の歪計は、圧電性基板の表面にくし状電
極を設置し、上記電極への入力信号によって圧電性基板
に生じた表面波がくし状電極で順次反射し、それに伴う
高周波の出力が出力端子から得られるようにした表面音
響波素子を備え、この表面音響波素子を、被験体に接着
してその被験体と共に歪が生じる程度に薄い金属膜上に
貼着し、その表面音響波素子にそれを発信要素とする発
信回路を接続したことを特徴とするものである。In the strain meter of the present invention, comb-shaped electrodes are installed on the surface of a piezoelectric substrate, and surface waves generated on the piezoelectric substrate by input signals to the electrodes are sequentially reflected by the comb-shaped electrodes, and the accompanying high frequency waves are generated. This surface acoustic wave element is attached to a metal film thin enough to cause distortion along with the test subject, and This is characterized in that a transmitting circuit using the surface acoustic wave element as a transmitting element is connected to the surface acoustic wave element.
以下、本発明の実施例を図面に基づいて詳述する。Hereinafter, embodiments of the present invention will be described in detail based on the drawings.
第1図に示す歪計において、lは被験体に接着する薄い
金属膜で、一般的には0.O1〜0.1mm程度の厚さ
を有し、それを接着した被験体と共に歪が生じるように
形成される。この金属膜1上に強固に貼着したSAW素
子2は、第2図に示すように、圧電性基板3の表面にく
し状電極4を設置して表面波を発生させるもので、入力
端子5から入力した信号により圧電性基板3の表面に生
じた表面波が左右に進むが、多数のくし状電極によって
順次反射し、それに伴う高周波の出力が出力端子8にあ
られれる。このとき、くし状電極4のピッチが表面波の
半波長λ/2に合致すると、はとんど完全に反射され、
出力端子6にほぼ全出力がでる。このSAW素子は、そ
れをテレメータの搬送周波数の発信要素とすることによ
り、F’M放送波帯に発信周波数を有するものとして構
成される。In the strain meter shown in Figure 1, l is a thin metal film that adheres to the test object, and is generally 0. It has a thickness of about 01 to 0.1 mm, and is formed so as to be strained together with the test object to which it is adhered. As shown in FIG. 2, the SAW element 2 firmly attached to the metal film 1 generates a surface wave by installing a comb-shaped electrode 4 on the surface of a piezoelectric substrate 3, and has an input terminal 5. A surface wave generated on the surface of the piezoelectric substrate 3 due to a signal input from the piezoelectric substrate 3 propagates left and right, but is sequentially reflected by a large number of comb-shaped electrodes, and a corresponding high-frequency output is delivered to the output terminal 8. At this time, when the pitch of the comb-shaped electrodes 4 matches the half wavelength λ/2 of the surface wave, the wave is almost completely reflected,
Almost all output is output to output terminal 6. This SAW element is configured to have a transmitting frequency in the F'M broadcast wave band by using it as a transmitting element for the carrier frequency of the telemeter.
このようなSAW素子2に対して、くし状電極4と直交
する方向(矢印A方向)に外力による歪が加えられると
、それに伴って上記ピッチが変化するため、直列共振周
波数、並列共振周波数、通過特性などが変化して発信周
波数が変化し、従って上記SAW素子2を歪センサとし
て動作させることができる。When a strain due to an external force is applied to such a SAW element 2 in a direction perpendicular to the comb-shaped electrodes 4 (in the direction of arrow A), the pitch changes accordingly, so that the series resonant frequency, parallel resonant frequency, The transmission frequency changes as the transmission characteristics change, so that the SAW element 2 can be operated as a strain sensor.
第1図の歪計においては、上記SAW素子2を、金属膜
1の周囲にシリコンラバー等からなる緩衝材8を介して
被設した金属面1oにより被覆し、その内部に電源とし
ての小型電池11及び−ト記SAW素子2の出力を送信
するための発信回路12を設けると共に、その金属面1
oから」二足送信のためのFMアンテナ端子13を外部
に露出させている。上記金属面1oは、SAW素子2等
をシールドして外部からの影響を少なくする機能をも有
するものである。In the strain meter shown in FIG. 1, the SAW element 2 is covered with a metal surface 1o placed around a metal film 1 with a buffer material 8 made of silicon rubber or the like interposed therebetween, and a small battery is housed inside the metal surface 1o as a power source. A transmitting circuit 12 for transmitting the output of the SAW element 2 described in 11 and -G is provided, and the metal surface 1 thereof is provided.
FM antenna terminal 13 for bipedal transmission is exposed to the outside. The metal surface 1o also has the function of shielding the SAW element 2 and the like to reduce external influences.
上記電源としては、第1図に示したように内蔵の電池1
1を用いることもできるが、外部から給電することも可
能であり、また第3図に示すように適数の太陽電池15
.+5.・・を貼着した電源板18を金属面10上に固
定して、強力光源でそれを照射するようにしたり、金属
内向に巻線を付したフェライトコアーを設けて、外部か
ら与えられる電磁界により電力を発生させるようにする
こともできる。なお、第3図において、17は歪感度方
向を示す方向マークを示している。The above power source includes a built-in battery 1 as shown in Figure 1.
1 can be used, but it is also possible to supply power from outside, and as shown in Figure 3, an appropriate number of solar cells 15 can be used.
.. +5. The power supply board 18 with... pasted thereon may be fixed on the metal surface 10 and irradiated with a strong light source, or a ferrite core with a wire wound inward to the metal may be installed to eliminate the electromagnetic field applied from the outside. It is also possible to generate electric power by In FIG. 3, reference numeral 17 indicates a direction mark indicating the direction of strain sensitivity.
第4図は、上記のような巻線を付したフェライトコアー
21に外部からの電磁界22を作用させるが、それを駆
動用電源としてではなく、歪計における測定のデータの
発信制御に用いるようにした場合の回路構成を例示する
ものである。即ち、外部からの信号用電磁界22により
上記巻線に誘起される信号電流によりMOS形のFET
23を動作させ、それによって内蔵電池24による測
定データの発信をオンオフ制御するよ灸、にしている。In Figure 4, an external electromagnetic field 22 is applied to a ferrite core 21 with a winding as described above, but it is used not as a driving power source but to control the transmission of measurement data in a strain meter. This is an example of the circuit configuration in the case of . That is, the signal current induced in the winding by the external signal electromagnetic field 22 causes the MOS type FET to
23 is operated, thereby controlling on/off transmission of measurement data by the built-in battery 24.
従って、内蔵電池24の使用に無駄がなく、それを長期
にわたって使用することができる。なお、図中、25は
SAW素子、26は発信回路を示している。Therefore, there is no waste in using the built-in battery 24, and it can be used for a long period of time. In the figure, 25 indicates a SAW element, and 26 indicates an oscillation circuit.
また、第5図は上記発信回路26の具体例を示すもので
、1個のトランジスタ27、水銀電池28、及び外部か
ら操作できるスイッチ29等を主体とする極めて簡単な
向路構成により、SAW素子25を搬送周波数の発信要
素とする発信を行わせることができ、而してSAW素子
25に被験体の歪に応じた応力を作用させることにより
、その発信周波数が変化し、従って受信装置において被
験体の歪に関するデータを受信することができる。Further, FIG. 5 shows a specific example of the above-mentioned transmitting circuit 26, in which the SAW element is connected to the SAW element by an extremely simple configuration mainly consisting of one transistor 27, a mercury battery 28, a switch 29 that can be operated from the outside, etc. Transmission can be performed using SAW element 25 as a transmitting element of a carrier frequency, and by applying a stress corresponding to the strain of the subject to the SAW element 25, the transmitting frequency changes, so that the receiving device Data regarding body strain can be received.
第6図及び第7図は、上記歪計の利用例を示すものであ
る。第6図に示すように回転体30上における多数個所
に歪計を設けて不連続的に歪の測定を行う場合には、そ
れぞれの測定個所に取付けた第3図の歪計31またはそ
の歪計における太陽電池32のみを電源板33によって
回転体30の表面に配設固定し、それらの太陽電池に投
光できるように強力な光源34を回転体30の近辺に配
設して、回転体30の回転により光源34の対向位置に
くる太陽電池32に対してその光源34から順次投光で
きるようにすればよい。これにより、光源34から投光
されている太陽電池のみに起電力が生じ、その太陽電池
が接続されている歪計31のみに出力が生じることにな
る。各歪計31を連続的に動作させる場合には、各歪計
の太陽電池32を周囲の照明光によって動作するように
構成すればよい。FIGS. 6 and 7 show examples of how the strain meter is used. When discontinuously measuring strain by installing strain gauges at multiple locations on the rotating body 30 as shown in FIG. 6, the strain gauge 31 shown in FIG. Only the solar cells 32 in the meter are arranged and fixed on the surface of the rotating body 30 by a power supply plate 33, and a powerful light source 34 is arranged near the rotating body 30 so as to emit light to these solar cells. The light source 34 may sequentially emit light to the solar cells 32 that come to a position opposite the light source 34 as the light source 30 rotates. As a result, an electromotive force is generated only in the solar cell emitted from the light source 34, and an output is generated only in the strain meter 31 to which the solar cell is connected. When each strain gauge 31 is operated continuously, the solar cell 32 of each strain gauge may be configured to be operated by surrounding illumination light.
また、第7図に示すような大型構造物40において多数
個所で歪を不連続的に測定する場合には、必要個所にそ
れぞれ上記第3図の歪計41を取付け、それを巡回員が
随時巡回して持参した投光器で投光すると共に、その歪
計41の出力を計測するようにすることもできる。In addition, when measuring the strain discontinuously at multiple locations in a large structure 40 as shown in FIG. 7, the strain gauges 41 shown in FIG. It is also possible to emit light using a projector brought along while traveling and to measure the output of the strain meter 41.
なお、同時に使用する歪計の数が少ない場合には、それ
ぞれ発信周波数を変えてデータを送信させることにより
、各歪計からのデータを識別して受信することができる
。Note that when the number of strain meters used at the same time is small, data from each strain meter can be identified and received by transmitting data with different transmission frequencies.
第1図は本発明に係る歪計の構成を示す斜視図、第2図
はSAW素子の拡大構成図、第3図は本発明の他の実施
例の斜視図、第4図及び第5図は本発明の歪計及び発信
回路についての回路構成図、第6図及び第7図は上記歪
計の利用例を示す説明図である。
1・・金属膜、 2.25・拳SAW素子、3φ・圧電
性基板、 4・−くし状電極、5・・入力端子、6・・
出力端子、
12.2Ei発信回路、31.41 ・・歪計。
第4図FIG. 1 is a perspective view showing the configuration of a strain meter according to the present invention, FIG. 2 is an enlarged configuration diagram of a SAW element, FIG. 3 is a perspective view of another embodiment of the present invention, and FIGS. 4 and 5 6 is a circuit configuration diagram of the strain meter and oscillation circuit of the present invention, and FIGS. 6 and 7 are explanatory diagrams showing usage examples of the strain meter. 1.Metal film, 2.25.Fist SAW element, 3φ.Piezoelectric substrate, 4.-comb-shaped electrode, 5..input terminal, 6..
Output terminal, 12.2Ei oscillation circuit, 31.41...distortion meter. Figure 4
Claims (1)
極への入力信号によって圧電性基板に生じた表面波がく
し状電極で順次反射し、それに伴う高周波の出力が出力
端子から得られるようにした表面音響波素子を備え、こ
の表面音響波素子を、被験体に接着してその被験体と共
に歪が生じる程度に薄い金属膜上に貼着し、その表面音
響波素子にそれを発信要素とする発信回路を接続したこ
とを特徴とする歪計。16 Comb-shaped electrodes are installed on the surface of the piezoelectric substrate, so that the surface waves generated on the piezoelectric substrate by the input signal to the electrodes are sequentially reflected by the comb-shaped electrodes, and the accompanying high-frequency output is obtained from the output terminal. This surface acoustic wave element is attached to a test object and attached to a metal film thin enough to cause distortion along with the test object, and the surface acoustic wave element is used as a transmitting element. A strain meter characterized by having a transmitting circuit connected thereto.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22955683A JPS60122303A (en) | 1983-12-05 | 1983-12-05 | Strain gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22955683A JPS60122303A (en) | 1983-12-05 | 1983-12-05 | Strain gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60122303A true JPS60122303A (en) | 1985-06-29 |
Family
ID=16894015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22955683A Pending JPS60122303A (en) | 1983-12-05 | 1983-12-05 | Strain gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60122303A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2349465A (en) * | 1999-04-27 | 2000-11-01 | Transense Technologies Plc | Thin film SAW strain gauge |
JP2008106603A (en) * | 2006-10-24 | 2008-05-08 | Salient Systems Inc | Stress monitoring system for railway |
CN105352428A (en) * | 2011-04-08 | 2016-02-24 | 株式会社村田制作所 | Operation device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120673A (en) * | 1974-02-25 | 1975-09-22 | ||
JPS5225344A (en) * | 1975-08-15 | 1977-02-25 | Honda Motor Co Ltd | Hood unit for motor cycle |
-
1983
- 1983-12-05 JP JP22955683A patent/JPS60122303A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50120673A (en) * | 1974-02-25 | 1975-09-22 | ||
JPS5225344A (en) * | 1975-08-15 | 1977-02-25 | Honda Motor Co Ltd | Hood unit for motor cycle |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2349465A (en) * | 1999-04-27 | 2000-11-01 | Transense Technologies Plc | Thin film SAW strain gauge |
JP2008106603A (en) * | 2006-10-24 | 2008-05-08 | Salient Systems Inc | Stress monitoring system for railway |
CN105352428A (en) * | 2011-04-08 | 2016-02-24 | 株式会社村田制作所 | Operation device |
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