JPS60121762A - プログラマブル素子 - Google Patents
プログラマブル素子Info
- Publication number
- JPS60121762A JPS60121762A JP59227418A JP22741884A JPS60121762A JP S60121762 A JPS60121762 A JP S60121762A JP 59227418 A JP59227418 A JP 59227418A JP 22741884 A JP22741884 A JP 22741884A JP S60121762 A JPS60121762 A JP S60121762A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- layers
- semiconductor
- layer
- program
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 53
- 239000012535 impurity Substances 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59227418A JPS60121762A (ja) | 1984-10-29 | 1984-10-29 | プログラマブル素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59227418A JPS60121762A (ja) | 1984-10-29 | 1984-10-29 | プログラマブル素子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56186408A Division JPS5887860A (ja) | 1981-11-20 | 1981-11-20 | プログラマブル素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60121762A true JPS60121762A (ja) | 1985-06-29 |
| JPH0365903B2 JPH0365903B2 (enrdf_load_html_response) | 1991-10-15 |
Family
ID=16860528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59227418A Granted JPS60121762A (ja) | 1984-10-29 | 1984-10-29 | プログラマブル素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60121762A (enrdf_load_html_response) |
-
1984
- 1984-10-29 JP JP59227418A patent/JPS60121762A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0365903B2 (enrdf_load_html_response) | 1991-10-15 |
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