JPS60116769A - 蒸着装置 - Google Patents
蒸着装置Info
- Publication number
- JPS60116769A JPS60116769A JP22608583A JP22608583A JPS60116769A JP S60116769 A JPS60116769 A JP S60116769A JP 22608583 A JP22608583 A JP 22608583A JP 22608583 A JP22608583 A JP 22608583A JP S60116769 A JPS60116769 A JP S60116769A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- crucible
- treated
- chip
- evaporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 53
- 238000001704 evaporation Methods 0.000 claims abstract description 50
- 230000008020 evaporation Effects 0.000 claims abstract description 47
- 239000007787 solid Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 abstract description 9
- 238000010894 electron beam technology Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 4
- 230000008021 deposition Effects 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 14
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22608583A JPS60116769A (ja) | 1983-11-30 | 1983-11-30 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22608583A JPS60116769A (ja) | 1983-11-30 | 1983-11-30 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60116769A true JPS60116769A (ja) | 1985-06-24 |
| JPH0369990B2 JPH0369990B2 (en:Method) | 1991-11-06 |
Family
ID=16839585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22608583A Granted JPS60116769A (ja) | 1983-11-30 | 1983-11-30 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60116769A (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139868A (ja) * | 1985-12-13 | 1987-06-23 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸発用ルツボ |
| JPH0222462A (ja) * | 1988-07-12 | 1990-01-25 | Matsushita Electric Ind Co Ltd | 坩堝およびこの坩堝を用いた金属薄膜の製造法 |
| JP2018123389A (ja) * | 2017-02-02 | 2018-08-09 | 株式会社アルバック | 蒸着用金材料、蒸着用金材料製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6075574A (ja) * | 1983-09-30 | 1985-04-27 | Ulvac Corp | 溶融金属蒸発源装置 |
-
1983
- 1983-11-30 JP JP22608583A patent/JPS60116769A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6075574A (ja) * | 1983-09-30 | 1985-04-27 | Ulvac Corp | 溶融金属蒸発源装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62139868A (ja) * | 1985-12-13 | 1987-06-23 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸発用ルツボ |
| JPH0222462A (ja) * | 1988-07-12 | 1990-01-25 | Matsushita Electric Ind Co Ltd | 坩堝およびこの坩堝を用いた金属薄膜の製造法 |
| JP2018123389A (ja) * | 2017-02-02 | 2018-08-09 | 株式会社アルバック | 蒸着用金材料、蒸着用金材料製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0369990B2 (en:Method) | 1991-11-06 |
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