JPS60114572A - Sintered hard alloy member having very hard coating layer - Google Patents

Abstract

PURPOSE:To provide superior wear resistance to a sintered hard alloy member coated with a sintered hard alloy or one or more kinds of compounds selected among the carbides, nitrides and oxides of the IIIa, IVa, Va and VIa group metals by forming a very hard coating layer having diamond structure contg. a specified amount of Al or Ti on the surface of the sintered hard alloy member. CONSTITUTION:A sintered hard alloy member coated with a sintered hard alloy or one or more kinds of compounds selected among the carbides, nitrides and oxides of the IIIa, IVa, Va and VIa group metals is heated to 300-1,100 deg.C, and an activated gaseous mixture consisting of H2, CxHy and AlCl3 or TiCl3 is led to the surface of the member under reduced pressure. A carbon-base thin film of 0.2-10mum thickness having diamond structure contg. 0.02-10wt% Al or Ti is formed on the surface of the sintered hard alloy member.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cemented carbide member coated with an ultrahard carbon-based thin film having a diamond structure.

Attempts have been made to coat diamond on cemented carbide to create a highly wear-resistant film, but on an industrial scale, there is still no product that exhibits excellent productivity and sufficient wear resistance in terms of performance. Not created.

The reason for this is that the range of conditions for low-pressure synthesis of diamond is very narrow, and that high-vacuum synthesis is not productive.

Therefore, we expanded the range of conditions for low-pressure synthesis and researched a method that can be stabilized and industrially produced.
AICIs mixed gas or H, -C7Hy-TiC
It was found that when 14 gas is used, nucleation of the diamond structure material is easily performed, and a dense and uniform diamond film can be synthesized with good reproducibility.

The present invention was made based on the above technology, and
Containing 0.02 to 10 wt% of Al and/or Ti on the outer surface of a cemented carbide member or a cemented carbide member coated with carbides, nitrides, and oxides of group 3a, 4a, 5a, and 6a metals. The thickness of the diamond film or the carbon-based thin film having at least a partially diamond structure is 0.2~
It is a cemented carbide member having a thickness of 10 μm.

a) It is clear what kind of bonding state the AI and butane atoms contained in the diamond structure material have a large content of A, I and/or Ti. It is thought that it is incorporated as the nucleus grows.

Analysis of this A1 revealed that it was 0.02wt% in diamond.
If the amount of AlCl or rlcI4j4 is increased, the diamond structure substance will not be generated, so the present invention a>6
q) Is p 0.02-10wt%? ,=.

1)) Film thickness The thickness of 1 of the present invention is preferably 0.2 to 10 μm (0.2 μm).
If the thickness exceeds 10 μm, the improvement in abrasion resistance will be small, and if the thickness exceeds 10 μm, it will be difficult to maintain the adhesion tension angle tIC by 9 μm due to the difference in thermal expansion from the base, and the abrasion resistance will decrease. 1Opm", yes.

The present invention is carried out by a low-pressure diamond synthesis method, in which an activated reaction gas is sent onto a substrate heated to 300°C to 1100°C, and activation methods include thermionic emission method and high-frequency plasma method. , the microwave method as well as the arc method invented by the present inventor). The present invention is applicable to either method.

It is very difficult to measure the physical properties of a synthesized film of an AI- and/or Ti-containing diamond structure material and compare it with that of diamond. This is because the properties of the film depend on the manufacturing conditions and the resulting film structure, and are therefore significantly different from the properties inherent to commonly known materials. but,
Abrasion resistance can be evaluated through practical tests. The film of the present invention is dense and provides extremely hard properties and high adhesion to the substrate, so its practical wear resistance is free from experimentally synthesized impurities (far superior to diamond films). Met.

Example-1 A tungsten coil was placed in a vertical quartz tube, and electricity was applied so that the surface temperature was 1,800°C or higher.

The quartz tube was heated from the outside using a nichrome wire heater to bring the substrate temperature to 710°C. Gas composition is H;
95%, CTI; 4.9%, T1Cl, ; 0
．． 1% mixed gas flows into the quartz tube from the top,
The pressure was reduced to 10 Torr using a vacuum pump. The gas was activated by thermionic radiation by passing through the tungsten coil portion and introduced onto the substrate. Against.

The waiting period is 4 hours, and a 3 μm diameter is placed on the KIO chip.]
Diamond structure membrane material color.

Aluminum alloy was cut using a forge. The cutting conditions are as follows: Workpiece old '100-6AI-4V (0200 round bar) Cutting speed y = 200m/min Depth of cut 72Imm tt
$d% feed rate = 0.2 ntm/rev Cutting oil None 01 coating - KIO's tip had a lifespan of 10 minutes, but the product of the present invention had a lifespan of 70 minutes. .

Example-2 A 15OKO5 cemented carbide chip coated with 2μ of Tic was placed on the substrate support in a vertical quartz tube, a pair of tungsten electrodes was placed on top, and a high voltage of 2KV was half-wave rectified between the electrodes. voltage is applied to generate electric current between the electrodes.

The substrate was heated to 750° C. from the outside of the quartz tube. Reaction gas: 96%, CH4; 3.9%, T1
Cl was used at 0.1%, was introduced from the top of the quartz tube, and the pressure was reduced to 4 Torr using a vacuum pump.

The reaction time was 4 hours, and TIC14 was not included in the comparison. Comparison of products between the two and cutting tests were carried out.

The comparison is shown in Table 21.

Table-2 Cutting test conditions Work material Al-6% i9i alloy Round bar 0200 Cutting speed V = 350 m/min Feed / =: 0.3 mm
/rev depth of cut t = 2 mm Life standard Flank wear 0.2 im Example-3 Using the same equipment as Example-1, temperature, pressure, and gas composition were varied, and cemented carbide as a base material was used. Inventive products 1 to IO shown in Table 3 were made with various compositions. For comparison, we processed the outer periphery of a sintered cemented carbide plate using 11 to 13 without a diamond coating layer and 14 to 15 with a diamond coating layer that does not contain Ti or AI, and compared their wear resistance. did.

-J-ZokuneyamajJE divination (method) March 22, 1980 [Co-special Relationship with personnel 1'l who handle layer 1 and cemented carbide members 3 and 11-
l Sanya Metal Co., Ltd. Representative Ken Mizuno 5, ? +n Positive Directive 11 Showa 5+1 2 r128 H b,? ＋n
) Title of the invention - (1) There was an error in the title of the invention in the specification, so I will not correct it as indicated.

``Cemented carbide member having 82 layers of cemented carbide'' and ``N hard metal member 1 and 31 having a superhard coating layer''.

Claims (1)

[Claims] 1) Cemented carbide or 3a, 4a, 5a, 6a. The outer surface of a cemented carbide member coated with i or more carbides, nitrides, and oxides of group metals K O, 02 to 10 wt% AI
and "A cemented carbide member having a superhard coating layer, characterized in that it is coated with a carbon-based thin film having a diamond structure containing soil or Ti to a thickness of 02 to 10 μm.