JPS60112247U - Exposure holder - Google Patents
Exposure holderInfo
- Publication number
- JPS60112247U JPS60112247U JP1984000816U JP81684U JPS60112247U JP S60112247 U JPS60112247 U JP S60112247U JP 1984000816 U JP1984000816 U JP 1984000816U JP 81684 U JP81684 U JP 81684U JP S60112247 U JPS60112247 U JP S60112247U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- flat plate
- exposure holder
- frame
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案による露光用ホルダー使用時の正面図
である。第２図は、３本考案の露光用ホルダーの斜視図
、ｂ平面図、Ｃ正面図、ｄ側面図である。
１・・・基板、２・・・ガラス乾板フォトマスク、３・
・・焼付機のステージ、４・・・ガイド枠、５・・・露
光用ホルダー、６・・・マイラーシート、７・・・光源
。FIG. 1 is a front view when the exposure holder according to the present invention is used. FIG. 2 is a perspective view, a plan view (b), a front view (c), and a side view (d) of the exposure holder of the three inventions. 1... Substrate, 2... Glass dry plate photomask, 3...
...Printing machine stage, 4...Guide frame, 5...Exposure holder, 6...Mylar sheet, 7...Light source.
Claims (1)
ターンを基板へ転写する工程において、露光のための開
口を有した平板枠と、かつ、光計平板枠の下面の四隅に
位置決め用のガイド枠を一体として取付けたことを特徴
とする露光用ホルダー。In the process of transferring a pattern to a substrate by vacuum contact exposure using a glass dry plate photomask, a flat plate frame with an opening for exposure is integrated with a guide frame for positioning at the four corners of the bottom of the optical meter flat plate frame. An exposure holder characterized by being attached as a.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984000816U JPS60112247U (en) | 1984-01-06 | 1984-01-06 | Exposure holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984000816U JPS60112247U (en) | 1984-01-06 | 1984-01-06 | Exposure holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60112247U true JPS60112247U (en) | 1985-07-30 |
Family
ID=30472999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984000816U Pending JPS60112247U (en) | 1984-01-06 | 1984-01-06 | Exposure holder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60112247U (en) |
-
1984
- 1984-01-06 JP JP1984000816U patent/JPS60112247U/en active Pending
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