JPS594541U - Retake - Google Patents
RetakeInfo
- Publication number
- JPS594541U JPS594541U JP1982098791U JP9879182U JPS594541U JP S594541 U JPS594541 U JP S594541U JP 1982098791 U JP1982098791 U JP 1982098791U JP 9879182 U JP9879182 U JP 9879182U JP S594541 U JPS594541 U JP S594541U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- sample
- reference mark
- retake
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による一実施例のレティクルを示しａは
平面図ζ−ｂは一部断面を示す正面図、第２図は本考案
による一実施例の基準マークの拡大図を示す。
図において１はレティクル、１１は角形基板、１２は所
望のパターン、１３は基準マーク、Ａは基準マークの線
巾寸法。FIG. 1 shows a reticle according to an embodiment of the present invention, a is a plan view, ζ-b is a partially sectional front view, and FIG. 2 is an enlarged view of a reference mark according to an embodiment of the present invention. In the figure, 1 is a reticle, 11 is a square substrate, 12 is a desired pattern, 13 is a reference mark, and A is the line width dimension of the reference mark.
Claims (1)
れたパターンと、該パターンとは別に設けられた前記パ
ターンの評価用の基準マークを有し、該基準マークは該
パターンを試料上に投影した時に該試料上に結像しない
ような寸法にて形成されてなることを特徴とするレティ
クル。It has a substrate made of a transparent material, a pattern formed with a light-shielding film on the substrate, and a reference mark for evaluating the pattern provided separately from the pattern, and the reference mark marks the pattern on the sample. A reticle characterized in that it is formed with dimensions such that an image is not formed on the sample when projected onto the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982098791U JPS594541U (en) | 1982-06-29 | 1982-06-29 | Retake |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982098791U JPS594541U (en) | 1982-06-29 | 1982-06-29 | Retake |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS594541U true JPS594541U (en) | 1984-01-12 |
Family
ID=30234397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982098791U Pending JPS594541U (en) | 1982-06-29 | 1982-06-29 | Retake |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS594541U (en) |
-
1982
- 1982-06-29 JP JP1982098791U patent/JPS594541U/en active Pending
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