JPS60111035U - ウエハカウンタ - Google Patents

ウエハカウンタ

Info

Publication number
JPS60111035U
JPS60111035U JP20104483U JP20104483U JPS60111035U JP S60111035 U JPS60111035 U JP S60111035U JP 20104483 U JP20104483 U JP 20104483U JP 20104483 U JP20104483 U JP 20104483U JP S60111035 U JPS60111035 U JP S60111035U
Authority
JP
Japan
Prior art keywords
wafer
wafer counter
lifting table
counter
cassette
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20104483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126106Y2 (enExample
Inventor
若旅　易
章三 伊藤
海老原　操
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP20104483U priority Critical patent/JPS60111035U/ja
Publication of JPS60111035U publication Critical patent/JPS60111035U/ja
Application granted granted Critical
Publication of JPH0126106Y2 publication Critical patent/JPH0126106Y2/ja
Granted legal-status Critical Current

Links

JP20104483U 1983-12-29 1983-12-29 ウエハカウンタ Granted JPS60111035U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20104483U JPS60111035U (ja) 1983-12-29 1983-12-29 ウエハカウンタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20104483U JPS60111035U (ja) 1983-12-29 1983-12-29 ウエハカウンタ

Publications (2)

Publication Number Publication Date
JPS60111035U true JPS60111035U (ja) 1985-07-27
JPH0126106Y2 JPH0126106Y2 (enExample) 1989-08-04

Family

ID=30762464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20104483U Granted JPS60111035U (ja) 1983-12-29 1983-12-29 ウエハカウンタ

Country Status (1)

Country Link
JP (1) JPS60111035U (enExample)

Also Published As

Publication number Publication date
JPH0126106Y2 (enExample) 1989-08-04

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