JPS60111035U - wafer counter - Google Patents
wafer counterInfo
- Publication number
- JPS60111035U JPS60111035U JP20104483U JP20104483U JPS60111035U JP S60111035 U JPS60111035 U JP S60111035U JP 20104483 U JP20104483 U JP 20104483U JP 20104483 U JP20104483 U JP 20104483U JP S60111035 U JPS60111035 U JP S60111035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer counter
- lifting table
- counter
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はウェハカウンタの斜視図、第２図はキャリヤカ
セットの斜視図、第３図は第１図の■−■線矢視方向断
面図、第４図はファカセットアライナ斜視図、第５図は
′第３図Ｖ−Ｖ線断面図、第６図は第４１１ＶＩ−ＶＩ
線断面図、第７図はウェハを収容したキャリヤカセット
と押し上げ板との重り合いの状況断面図である。
１・・・押し上げ板、２・・・光センサ受発光部、２ａ
・・・発光部、２ｂ・・・受光部、３・・・キャリヤカ
セット（略称カセット）、４・・・押し上げ台、５・・
・押し上げ板１の溝、６・・・カセット３の溝、７・・
・上下駆動モータ、８・・・水平駆動用モータ、９・・
・ウェハ、９ａ・・・正しくカセットに収容されたウェ
ハ、９ｂ・・・オリフラ１０が傾いてカセット３に収容
されたウェハ、９ｃ・・・隣接ウェハに傾いてカセット
３に収容されたウェハ、１０・・・オリエンテーション
フラット、１１・・・ローラ、１２・・・ウェハストッ
パ、１３・・・ファセットアライナ基板、１４・・・上
下駆動用シリンダ、１５ａ＊ １５ｂ・・・想定上の
キャリヤカセット搬送台、１６・・・想定上のキャリヤ
カセット。Fig. 1 is a perspective view of the wafer counter, Fig. 2 is a perspective view of the carrier cassette, Fig. 3 is a sectional view taken along the line ■-■ in Fig. 1, Fig. 4 is a perspective view of the face cassette aligner, and Fig. 5 is a perspective view of the wafer counter. The figures are 'Fig. 3 V-V cross-sectional view, Fig. 6 is 411 VI-VI
A line sectional view and FIG. 7 are sectional views showing how the carrier cassette containing wafers and the push-up plate overlap. DESCRIPTION OF SYMBOLS 1... Push-up plate, 2... Optical sensor light receiving/emitting part, 2a
... Light emitting part, 2b... Light receiving part, 3... Carrier cassette (cassette for short), 4... Push-up stand, 5...
・Groove of push-up plate 1, 6...Groove of cassette 3, 7...
・Vertical drive motor, 8...Horizontal drive motor, 9...
Wafer, 9a...Wafer correctly accommodated in the cassette, 9b...Wafer accommodated in the cassette 3 with the orientation flat 10 tilted, 9c...Wafer accommodated in the cassette 3 with the orientation flat 10 tilted, 10 ... Orientation flat, 11 ... Roller, 12 ... Wafer stopper, 13 ... Facet aligner substrate, 14 ... Vertical drive cylinder, 15a* 15b ... Hypothetical carrier cassette transport platform, 16... Hypothetical carrier cassette.
Claims (1)
上下動が可能な押し上げ台４と、該押し上げ台４とを連
動して上下し、かつ中央空間部を長手方向に水平に往復
移動できる耐熱性、反射型受光部２を設けたことを特徴
とするウェハカウンタ。 ２ 前記ウェハ押し上げ板１の上面には長手方向と直角
にキャリヤカセット３のウェハ収容溝６と重合する略■
字形の溝５を穿設したことを特徴とする実用新案登録請
求の範囲第１項記載のウェハカウンタ。[Claims for Utility Model Registration] 1. A lifting table 4 with two rectangular wafer lifting plates 1 arranged side by side on the upper part and capable of vertical movement, and a lifting table 4 that moves up and down in conjunction with the lifting table 4, and that lifts up the central space. A wafer counter characterized by being provided with a heat-resistant, reflective light-receiving section 2 that can reciprocate horizontally in the longitudinal direction. 2. On the upper surface of the wafer push-up plate 1, there is an approximately
The wafer counter according to claim 1, characterized in that the wafer counter is provided with a letter-shaped groove 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20104483U JPS60111035U (en) | 1983-12-29 | 1983-12-29 | wafer counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20104483U JPS60111035U (en) | 1983-12-29 | 1983-12-29 | wafer counter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60111035U true JPS60111035U (en) | 1985-07-27 |
| JPH0126106Y2 JPH0126106Y2 (en) | 1989-08-04 |
Family
ID=30762464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20104483U Granted JPS60111035U (en) | 1983-12-29 | 1983-12-29 | wafer counter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60111035U (en) |
-
1983
- 1983-12-29 JP JP20104483U patent/JPS60111035U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0126106Y2 (en) | 1989-08-04 |
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