JPS6011092Y2 - Boat for metal deposition - Google Patents

Description

[Detailed Description of the Invention] This invention relates to a boat for metal deposition used, for example, in a roll-type deposition apparatus (roll coater).

In general, a roll-up type evaporation device is a device that continuously evaporates a film-like sample and winds it up into a roll. In this method, particulate samples (metal) to be evaporated are sequentially introduced into a boat, melted in the boat, and evaporated from the entire port.

However, in conventional metal deposition boats, when granular metal is directly applied to the boat, the temperature of the boat drops instantaneously, causing uneven evaporated film thickness in the length direction of the boat, and Part of the granular metal melts in the metal supply port and blocks the supply port, so the supply port must be separated from the boat.

However, this resulted in some inconveniences, such as the fact that the granular metal was not completely needed in the boat.

This idea solves the above-mentioned problems by interposing a funnel-shaped hopper between the metal supply port and the boat, and installing a baffle plate inside the hopper to preheat the granular metal and guide it into the boat. It was established.

The drawings will be explained below.

In FIG. 1, 1 is a boat for metal deposition, 2 is a funnel-shaped hopper provided on the boat 1, 3 is a jammer plate, and 4 is a granular metal supply port.

The hopper 2 is installed so that its upper end corresponds to the granular metal supply port 4 and its lower end corresponds to the bottom surface of the boat 1.

The jammer plate 3 is attached so as to divide the inside of the hopper 2 into several parts.

Since the upper and lower ends of the hopper 2 are arranged to correspond to the supply port 4 and the boat 1, respectively, even in the case of continuous operation in which deposition is performed while winding the film, the temperature of the supply port 4 increases and the supply port 4 closes. There is no clogging, and there is no need to worry about granular metal coming out of the supply port 4 flying out of the hopper 2 or boat 1.

The jammer plate 3 mainly acts as a conductive plate for the heat of the molten metal, and the granular metal in the hopper 2 on the same horizontal plane is at approximately the same temperature, and in the vertical direction, it is at the same temperature. The highest temperature is the same as that of the molten metal, and at the upper end the temperature is the same as that of the granular metal, that is, almost room temperature.

Therefore, even if the upper end of the hopper 2 is brought close to the supply port 4, the risk of the supply port 4 becoming clogged with deposited material is greatly reduced, and the risk of granular metal flying out of the boat is also reduced.

The contents (granular metal or molten metal) in the hopper 2 are preheated as they slowly descend inside the hopper 2 under their own weight, so regardless of whether they are granular or molten, the hopper 2
There is almost no heat transfer between the metal that reaches the bottom of the boat and the molten metal that was already in the boat.

Therefore, the subtemperature of the boat caused by direct dosing of granular and unpreheated metal mass as in conventional boats is eliminated.

Of course, this hopper is located close to the metal deposition boat, so the sample (film) to be deposited is
Since the hopper is located considerably above, uneven evaporation in the longitudinal direction of the film and the pole due to the presence of this hopper does not occur.

The following table shows examples of the effects based on implementation results.

As described above, according to the present invention, it has become practically possible to continuously supply granular metal, which eliminates changes in the current flowing through the boat, that is, changes in the temperature of the deposited metal, and as a result, changes in the film thickness in the longitudinal direction. This has the practically useful effect of eliminating

[Brief explanation of the drawing]

FIG. 1 shows a top view and a side view of a boat for metal deposition according to the present invention, and FIG. 2 shows a top view and a side view of a conventional metal deposition boat. 1: Boat for metal deposition, 2: Hopper, 3: Jammer plate, 4
: Granular metal supply port.

Claims (1)

[Scope of utility model registration request] A funnel-shaped boat for melting granular metal and depositing it on a sample located above, with its upper end corresponding to the granular metal supply port and its lower end corresponding to the bottom of the boat. 1. A port for metal deposition, comprising: a hopper; and a baffle plate provided in the hopper to receive the granular metal and preheat it while dispensing it into the port.