JPS6010904U - サ−ボバルブ - Google Patents

サ−ボバルブ

Info

Publication number
JPS6010904U
JPS6010904U JP1983103158U JP10315883U JPS6010904U JP S6010904 U JPS6010904 U JP S6010904U JP 1983103158 U JP1983103158 U JP 1983103158U JP 10315883 U JP10315883 U JP 10315883U JP S6010904 U JPS6010904 U JP S6010904U
Authority
JP
Japan
Prior art keywords
servo valve
micro
oscillating member
piezoelectric ceramic
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983103158U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245525Y2 (enrdf_load_stackoverflow
Inventor
中務　栄治
三郎 佐々木
末藤　敏一
英文 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1983103158U priority Critical patent/JPS6010904U/ja
Publication of JPS6010904U publication Critical patent/JPS6010904U/ja
Application granted granted Critical
Publication of JPH0245525Y2 publication Critical patent/JPH0245525Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP1983103158U 1983-06-30 1983-06-30 サ−ボバルブ Granted JPS6010904U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983103158U JPS6010904U (ja) 1983-06-30 1983-06-30 サ−ボバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983103158U JPS6010904U (ja) 1983-06-30 1983-06-30 サ−ボバルブ

Publications (2)

Publication Number Publication Date
JPS6010904U true JPS6010904U (ja) 1985-01-25
JPH0245525Y2 JPH0245525Y2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=30242820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983103158U Granted JPS6010904U (ja) 1983-06-30 1983-06-30 サ−ボバルブ

Country Status (1)

Country Link
JP (1) JPS6010904U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163421U (enrdf_load_stackoverflow) * 1986-04-09 1987-10-17
JPH04362302A (ja) * 1991-06-07 1992-12-15 Res Dev Corp Of Japan サーボ弁の制御機構
JP2008241039A (ja) * 2007-03-21 2008-10-09 Hispano Suiza フェイルフリーズサーボ弁を使用したアクチュエータの位置制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131006A (ja) * 1983-01-12 1984-07-27 Nippon Soken Inc 電気−流体圧力変換素子

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59131006A (ja) * 1983-01-12 1984-07-27 Nippon Soken Inc 電気−流体圧力変換素子

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163421U (enrdf_load_stackoverflow) * 1986-04-09 1987-10-17
JPH04362302A (ja) * 1991-06-07 1992-12-15 Res Dev Corp Of Japan サーボ弁の制御機構
JP2008241039A (ja) * 2007-03-21 2008-10-09 Hispano Suiza フェイルフリーズサーボ弁を使用したアクチュエータの位置制御装置

Also Published As

Publication number Publication date
JPH0245525Y2 (enrdf_load_stackoverflow) 1990-12-03

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