JPS60107508A - 電子線測長装置 - Google Patents

電子線測長装置

Info

Publication number
JPS60107508A
JPS60107508A JP58216468A JP21646883A JPS60107508A JP S60107508 A JPS60107508 A JP S60107508A JP 58216468 A JP58216468 A JP 58216468A JP 21646883 A JP21646883 A JP 21646883A JP S60107508 A JPS60107508 A JP S60107508A
Authority
JP
Japan
Prior art keywords
sample
electron beam
points
scanning
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58216468A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319923B2 (enExample
Inventor
Osamu Yamada
理 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58216468A priority Critical patent/JPS60107508A/ja
Publication of JPS60107508A publication Critical patent/JPS60107508A/ja
Publication of JPH0319923B2 publication Critical patent/JPH0319923B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP58216468A 1983-11-17 1983-11-17 電子線測長装置 Granted JPS60107508A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216468A JPS60107508A (ja) 1983-11-17 1983-11-17 電子線測長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216468A JPS60107508A (ja) 1983-11-17 1983-11-17 電子線測長装置

Publications (2)

Publication Number Publication Date
JPS60107508A true JPS60107508A (ja) 1985-06-13
JPH0319923B2 JPH0319923B2 (enExample) 1991-03-18

Family

ID=16688935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216468A Granted JPS60107508A (ja) 1983-11-17 1983-11-17 電子線測長装置

Country Status (1)

Country Link
JP (1) JPS60107508A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197010U (enExample) * 1986-06-06 1987-12-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62197010U (enExample) * 1986-06-06 1987-12-15

Also Published As

Publication number Publication date
JPH0319923B2 (enExample) 1991-03-18

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