JPS60105665U - ガスの流れを均一にした単結晶引上装置の加熱部 - Google Patents

ガスの流れを均一にした単結晶引上装置の加熱部

Info

Publication number
JPS60105665U
JPS60105665U JP19719683U JP19719683U JPS60105665U JP S60105665 U JPS60105665 U JP S60105665U JP 19719683 U JP19719683 U JP 19719683U JP 19719683 U JP19719683 U JP 19719683U JP S60105665 U JPS60105665 U JP S60105665U
Authority
JP
Japan
Prior art keywords
gas flow
single crystal
heating section
crystal pulling
pulling equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19719683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329332Y2 (enrdf_load_stackoverflow
Inventor
幹雄 田辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP19719683U priority Critical patent/JPS60105665U/ja
Publication of JPS60105665U publication Critical patent/JPS60105665U/ja
Application granted granted Critical
Publication of JPH0329332Y2 publication Critical patent/JPH0329332Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP19719683U 1983-12-23 1983-12-23 ガスの流れを均一にした単結晶引上装置の加熱部 Granted JPS60105665U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19719683U JPS60105665U (ja) 1983-12-23 1983-12-23 ガスの流れを均一にした単結晶引上装置の加熱部

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19719683U JPS60105665U (ja) 1983-12-23 1983-12-23 ガスの流れを均一にした単結晶引上装置の加熱部

Publications (2)

Publication Number Publication Date
JPS60105665U true JPS60105665U (ja) 1985-07-18
JPH0329332Y2 JPH0329332Y2 (enrdf_load_stackoverflow) 1991-06-21

Family

ID=30755320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19719683U Granted JPS60105665U (ja) 1983-12-23 1983-12-23 ガスの流れを均一にした単結晶引上装置の加熱部

Country Status (1)

Country Link
JP (1) JPS60105665U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0329332Y2 (enrdf_load_stackoverflow) 1991-06-21

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